JP4713078B2 - Semiconductor device manufacturing method and semiconductor device - Google Patents

Description

The present invention relates to a semiconductor device manufacturing method and a semiconductor device , and more particularly to a semiconductor device manufacturing method and a semiconductor device such as a MIS (Metal insulator semiconductor) field effect transistor.

  In recent years, with the high integration of semiconductor integrated circuits, the gate length of MIS field effect transistors has been miniaturized. In a field effect transistor having such a fine gate length, short channel effects such as a large dependency of the threshold voltage on the gate length and a tendency of punch-through between the source and the drain appear.

  As one method for preventing such a short channel effect, an MIS field effect transistor having a second gate electrode on the side wall of the gate electrode has been proposed (see, for example, (Non-Patent Document 1)). A cross-sectional view of this conventional MIS type field effect transistor is shown in FIG.

  According to the MIS field effect transistor, as shown in FIG. 6, the first gate insulating film 114 formed on the silicon substrate 101 and the first gate insulating film 114 formed on the first gate insulating film 114 are formed. Of the surface of the silicon substrate 1, the first gate is formed between the gate electrode 115, the second gate electrode 117 formed so as to cover the first gate electrode 115 via the second gate insulating film 116. The source region 109 and the drain region 110 are formed at positions away from the channel region under the electrode 1115.

  According to the above configuration, an inversion layer is formed on the surface of the silicon substrate 101 immediately below the second gate electrode 117 by applying a voltage to the second gate electrode 117 independently of the first gate electrode 115. Shallow source / drain extensions can be formed. Thereby, the short channel effect can be extremely suppressed.

However, in the MIS field effect transistor, by forming the second gate electrode 117, a parasitic capacitance generated between the first gate electrode 115 and the second gate electrode 117 becomes a load, and for example, an integrated circuit is integrated. When a circuit or the like is formed, there is a problem that the operation speed is reduced. Further, compared to a normal MIS type field effect transistor, it is necessary to form an extra contact and wiring for the second gate electrode 117, which causes an increase in element size and a decrease in the degree of freedom in wiring design. There is.
Hisao Kawamura, Toshisugu Sakamoto, Toshio Baba, Yukinori Ochiai, Jun'ich Fujita, and Jun'ich Sone, "IEEE TRANSACTION ON ELETRON DEVICES", USA (IEEE), Volume 47 (VOL.47), Issue 4 (NO.4), April 2000 (APRIL2000), P.856-860

The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for manufacturing a semiconductor device such as a MIS field effect transistor capable of suppressing the short channel effect without causing an increase in parasitic capacitance or element size. Another object is to provide a semiconductor device .

In order to achieve the above object, a method for manufacturing a semiconductor device according to a first invention comprises:
A P-type or intrinsic semiconductor substrate;
A gate electrode formed on one main surface of the semiconductor substrate via a first insulating film;
An N-type source region and drain region provided in a region not covered by the gate electrode on one main surface side of the semiconductor substrate;
A second insulating film including at least one of cesium, barium, and rubidium as an impurity that becomes a fixed charge on a region sandwiched between the channel region under the gate electrode and the source region and the drain region ; A method of manufacturing a semiconductor device in which an inversion layer is formed near the surface of the P-type or intrinsic semiconductor substrate in contact with the second insulating film ,
Selectively forming the gate electrode on the first insulating film provided on one main surface of the semiconductor substrate;
Forming the second insulating film in a region not covered by the gate electrode on one main surface of the semiconductor substrate;
Implanting the impurity serving as the fixed charge into the second insulating film using the gate electrode as a mask;
An annealing step for promoting redistribution of the impurity as the fixed charge in the second insulating film after the step of injecting the impurity as the fixed charge into the second insulating film;
Including
The first insulating film has a composition different from that of the second insulating film, and a film quality in which impurities serving as fixed charges in the second insulating film are less likely to diffuse than the second insulating film. It is characterized by being.

According to the method for manufacturing a semiconductor device having the above-described configuration, the region sandwiched between the channel region and the N-type source region and the region sandwiched between the channel region and the drain region are formed on the P-type (or intrinsic) semiconductor surface. The fixed charge is realized by including at least one of cesium, barium, and rubidium as an impurity that becomes a fixed charge in the formed second insulating film.

Since the above cesium, barium, and rubidium belong to alkali metals or alkaline earth metals, the first ionization energy is small and they tend to be ions having a positive charge. The cesium, barium, and rubidium have a large atomic number, unlike light elements such as sodium, which easily move even at room temperature, and therefore, charges do not move in the normal device operating temperature region. Therefore, since cesium, barium, and rubidium serve as positive fixed charges, inversion occurs due to band bending occurring near the semiconductor substrate surface under the second insulating film containing at least one of cesium, barium, and rubidium. Layers (carriers are electrons) are formed, and very shallow source / drain extensions are formed. Thereby, the short channel effect can be suppressed very well. Further, since there is no need to add an extra electrode or the like to a normal MIS type field effect transistor, it does not cause an increase in parasitic capacitance or an element area.
An interface is formed between the first insulating film and the second insulating film. For this reason, even if impurities contained in the second insulating film are diffused toward the first insulating film by thermal diffusion or the like, they are trapped at the interface, so that they are diffused into the first insulating film. Can be prevented. Furthermore, it is preferable that the first insulating film has a film quality in which impurities serving as fixed charges in the second insulating film are difficult to diffuse. Therefore, since there is almost no overlap between the gate electrode and the inversion layer induced by the impurities, the parasitic capacitance generated between the gate electrode and the source and drain regions can be reduced, and the circuit operation speed is increased. Can be achieved. In addition, the end of the inversion layer induced by the fixed charges due to the impurities substantially coincides with the end of the gate electrode, so that an ideal source / drain structure is obtained, and good short channel effect characteristics and a large driving current can be obtained simultaneously. it can.

  Therefore, it is possible to provide a semiconductor device such as an N-type channel MIS type field effect transistor that can suppress the short channel effect without causing an increase in parasitic capacitance or element size.

  Furthermore, the cesium, barium, and rubidium can be introduced into the second insulating film using a general ion implantation apparatus as a semiconductor manufacturing apparatus, and can be easily reduced while precisely controlling the implantation amount. It is possible to manufacture a semiconductor device such as an N-type channel MIS field effect transistor having excellent channel effect characteristics.

In one embodiment of the method of manufacturing a semiconductor device , the fixed charge is a positive fixed charge made of the cesium , and the surface density of the cesium is 5. It is characterized by being 3 × 10 ¹² cm ⁻² or more and 3 × 10 ¹⁴ cm ⁻² or less.

According to the method of manufacturing a semiconductor device of the above embodiment, the surface density of the impurity serving as the fixed charge contained in the second insulating film is 5.3 × 10 ¹² cm ⁻² or more and 3 × 10 ¹⁴ cm ⁻² or less. because it is, is the be sufficiently reduced sheet resistance of the inversion layer induced by the positive fixed charge of cesium, it is possible to obtain a very high drive currents.

A method for manufacturing a semiconductor device according to a second aspect of the invention includes
An N-type or intrinsic semiconductor substrate;
A gate electrode formed on one main surface of the semiconductor substrate via a first insulating film;
A P-type source region and drain region provided in a region not covered by the gate electrode on one main surface side of the semiconductor substrate;
A second insulating film containing iodine as an impurity serving as a fixed charge is provided on a region sandwiched between the channel region under the gate electrode and the source region and the drain region, and is in contact with the second insulating film A method of manufacturing a semiconductor device in which an inversion layer is formed near the surface of an N-type or intrinsic semiconductor substrate ,
Selectively forming the gate electrode on the first insulating film provided on one main surface of the semiconductor substrate;
Forming the second insulating film in a region not covered by the gate electrode on one main surface of the semiconductor substrate;
Implanting the impurity serving as the fixed charge into the second insulating film using the gate electrode as a mask;
An annealing step for promoting redistribution of the impurity as the fixed charge in the second insulating film after the step of injecting the impurity as the fixed charge into the second insulating film;
Including
The first insulating film has a composition different from that of the second insulating film, and a film quality in which impurities serving as fixed charges in the second insulating film are less likely to diffuse than the second insulating film. It is characterized by being.

According to the method of manufacturing a semiconductor device having the above configuration, an N-type (or intrinsic) semiconductor in a region sandwiched between the channel region and a P-type source region and a region sandwiched between the channel region and a P-type drain region. The second insulating film formed on the surface contains iodine as an impurity that becomes a fixed charge.

Since iodine is a halogen element belonging to Group VIIB of the periodic table, it has a high electron affinity and tends to be an ion having a negative charge. In addition, since iodine has a large atomic number, unlike light elements such as fluorine and chlorine, which easily move at room temperature, charges do not move in a normal device operating temperature region. Therefore, since iodine acts as a negative fixed charge, inversion layers (carriers are holes) are formed by band bending near the surface of the semiconductor substrate under the second insulating film containing iodine, and extremely shallow source / drain regions are formed. An extension is formed. Thereby, the short channel effect can be suppressed very well. Further, since there is no need to add an extra electrode or the like to a normal MIS type field effect transistor, it does not cause an increase in parasitic capacitance or an element area.
An interface is formed between the first insulating film and the second insulating film. For this reason, even if impurities contained in the second insulating film are diffused toward the first insulating film by thermal diffusion or the like, they are trapped at the interface, so that they are diffused into the first insulating film. Can be prevented. Furthermore, it is preferable that the first insulating film has a film quality in which impurities serving as fixed charges in the second insulating film are difficult to diffuse. Therefore, since there is almost no overlap between the gate electrode and the inversion layer induced by the impurities, the parasitic capacitance generated between the gate electrode and the source and drain regions can be reduced, and the circuit operation speed is increased. Can be achieved. In addition, the end of the inversion layer induced by the fixed charges due to the impurities substantially coincides with the end of the gate electrode, so that an ideal source / drain structure is obtained, and good short channel effect characteristics and a large driving current can be obtained simultaneously. it can.

  Therefore, it is possible to provide a semiconductor device such as a P-type channel MIS type field effect transistor that can suppress the short channel effect without causing an increase in parasitic capacitance or element size.

  Further, the iodine can be introduced into the second insulating film by using a general ion implantation apparatus as a semiconductor manufacturing apparatus, and easily has a short channel effect characteristic while precisely controlling the implantation amount. It is possible to manufacture a semiconductor device such as an excellent P-type channel MIS type field effect transistor.

In one embodiment of the method of manufacturing a semiconductor device, the surface density of iodine is 8 × 10 ¹² cm ⁻² or more in the semiconductor device of the second invention.

According to the method for manufacturing a semiconductor device of the above embodiment, since the surface density of iodine is 8 × 10 ¹² cm ⁻² or more, the sheet resistance of the inversion layer induced by the fixed charge due to iodine can be sufficiently reduced. A very high drive current can be obtained.

A method of manufacturing a semiconductor device of one embodiment provides a method of manufacturing a semiconductor device of the first or second invention, the third formed to cover at least some or all of the above second insulating film Insulating film
The third insulating film is a silicon nitride film formed so as to cover a part or all of the second insulating film, or covers a part of the second insulating film. The silicon oxynitride film is formed.

According to the method of manufacturing the semiconductor device of the above embodiment, the silicon nitride film is provided as the third insulating film so as to cover a part or all of the second insulating film, or the second insulating film is provided. By providing the silicon oxynitride film as the third insulating film so as to cover a part of the film, impurities contained in the second insulating film diffuse outward by a subsequent thermal process or the like. Can be prevented. Therefore, the impurities in the second insulating film can efficiently act as fixed charges.

A method of manufacturing a semiconductor device of one embodiment provides a method of manufacturing a semiconductor device of the first or second aspect of the invention, the thickness of the second insulating film is larger than the thickness of the first insulating film It is characterized by that.

According to the method of manufacturing a semiconductor device of the above embodiment, since the film thickness of the second insulating film is larger than the film thickness of the first insulating film, the fixed charge contained in the second insulating film and When the impurity to be diffused in the direction of the first insulating film, the cross-sectional area viewed from the impurity becomes small in the first insulating film, so that the impurity can be prevented from diffusing into the first insulating film. it can. Therefore, since there is almost no overlap between the gate electrode and the inversion layer induced by the impurities, the parasitic capacitance generated between the gate electrode and the source / drain regions can be reduced, and the circuit operation speed can be increased. Can be planned. In addition, the end of the inversion layer induced by the fixed charges due to the impurities substantially coincides with the end of the gate electrode, so that an ideal source / drain structure is obtained, and good short channel effect characteristics and a large driving current can be obtained simultaneously. it can.
In one embodiment, the semiconductor device manufacturing method is characterized in that a strained silicon substrate is used as the semiconductor substrate in the semiconductor device of the first or second invention.

According to a third aspect of the present invention, there is provided a semiconductor device obtained by any one of the above semiconductor device manufacturing methods.

  In the present specification, an impurity that becomes a fixed charge means an impurity that acts as a fixed charge in the second insulating film, and in the case of an N-type channel element, of the cesium, barium, and rubidium. It means at least one of them, and in the case of a P-type channel element, means iodine.

As is clear from the above, according to the semiconductor device manufacturing method and the semiconductor device of the present invention, a semiconductor device such as a MIS field effect transistor that can suppress the short channel effect without causing an increase in parasitic capacitance or element size. It is to provide.

DESCRIPTION OF THE PREFERRED EMBODIMENTS A semiconductor device manufacturing method and a semiconductor device according to the present invention will be described in detail below with reference to the illustrated embodiments.

  The semiconductor substrate that can be used in the present invention is not particularly limited, but a silicon substrate is preferable. Furthermore, an SOI (Semiconductor On Insulator) substrate or a strained silicon substrate in which carrier mobility is improved by applying strain to the silicon crystal may be used. In each embodiment, the description will focus on an N-type channel element using cesium, but a P-type channel element can be formed by reversing the conductivity type of impurities and replacing cesium with iodine. In the case of an N-type channel element, the same effect can be obtained even when barium or rubidium is used instead of cesium or a mixture containing at least two of these three is used. Of course, both types of elements may be formed on the same substrate, a complementary MIS field effect transistor may be formed, or an integrated circuit may be formed.

(First embodiment)
In the semiconductor device according to the first embodiment of the present invention, an N-type channel MIS field effect transistor having a source / drain extension as an inversion layer induced by a fixed charge of cesium is realized by a simple process. For example, cesium in a silicon oxide film functions as a stable fixed charge in a normal device operating temperature region. Further, for example, cesium in a silicon oxide film is thermally diffused by high-temperature processing (for example, 700 ° C. or more), and piles up near the interface with a silicon substrate, for example, and can form a self-aligned distribution. Have sex. Incidentally, barium and rubidium in the case of the N-type channel element have the same effect, and iodine in the case of the P-type channel element has the same effect.

  1A to 1D are cross-sectional views of an N-type channel MIS field effect transistor as an example of a semiconductor device shown in the order of steps for explaining the method of manufacturing the semiconductor device according to the first embodiment of the present invention. is there.

  First, as shown in FIG. 1A, an STI (Shallow Trench Isolation) region 2 is formed on one main surface of a P-type silicon substrate 1 (single crystal) as an example of a semiconductor substrate by a known method to form an element. Divide the area. Next, a polycrystalline silicon film is deposited and patterned on the gate insulating film 3 made of silicon oxynitride as an example of the first insulating film provided on the surface of the element formation region, and the gate electrode 4 is formed. Note that the gate insulating film 3 in a region not covered with the gate electrode 4 may not necessarily be removed.

  The material of the gate insulating film 3 may be anything as long as it has an insulating property. For example, it may be silicon oxide, silicon nitride, hafnium oxide, aluminum oxide, tantalum oxide, or the like. The material of the gate electrode 4 may be anything as long as it is conductive, and may be a metal such as aluminum, a silicide such as nickel silicide, or the like.

  Next, a silicon oxide film 5 as an example of a second insulating film is deposited by a CVD (Chemical Vapor Deposition) method. The film thickness of the silicon oxide film 5 is preferably about 2 to 50 times the film thickness of the gate insulating film 3, for example. By making the film thickness of the silicon oxide film 5 larger than the film thickness of the gate insulating film 3, impurities which become fixed charges such as cesium implanted into the silicon oxide film 5 in a later process diffuse in the heat process or the like. In this case, since the diffusion rate in the silicon oxide film 5 is larger than the diffusion rate in the gate insulating film 3, it is possible to suppress the diffusion of impurities as fixed charges in the gate insulating film 3. The distribution of impurities that become fixed charges in 5 can be controlled very easily.

  In addition, since the thickness of the silicon oxide film 5 is controlled independently of the thickness of the gate insulating film 3, an impurity that becomes a fixed charge such as cesium is ion-implanted into the silicon oxide film 5 in a later step. In this case, there are few restrictions on the implantation energy, and it can be manufactured easily.

  Instead of the silicon oxide film 5, an insulating film containing an impurity that becomes a fixed charge such as cesium may be deposited. For example, a silicon oxide film or the like may be deposited by a CVD method in an atmosphere containing cesium. In this case, it is not necessary to ion-implant impurities that become fixed charges such as cesium in a later step, so that the thickness of the insulating film can be designed freely.

  Next, as shown in FIG. 1B, after a resist is applied to the surface of the silicon substrate, the STI region 2 is covered and at least a region for forming the source / drain extension is opened in the element formation region. A resist mask 6 is formed by patterning the resist. Thereafter, cesium ions are implanted into the silicon oxide film 5 using the gate electrode 4 and the resist mask 6 as a mask. Since the first ionization energy is very small, the cesium can exist stably as an ion having a positive charge. Therefore, a region 7 containing positive fixed charges made of cesium is formed in the silicon oxide film 5.

  Note that barium or rubidium may be used instead of cesium, or at least two of cesium, barium, and rubidium may be used.

  Band bending occurs on the surface of the silicon substrate 1 under the region 7 containing the positive fixed charge due to the electric field generated from the region 7 containing the positive fixed charge. When the potential of the surface of the silicon substrate 1 reaches about twice the difference between the Fermi potential and the intrinsic Fermi potential of the silicon substrate 1, an inversion layer is formed on the surface of the silicon substrate 1 under the region 7 containing positive fixed charges. Is done. The inversion layer functions as a source / drain extension.

  Next, as shown in FIG. 1C, after removing the resist mask 6 (shown in FIG. 1B), a silicon oxide film is formed by a CVD method (Chemical Vapor Deposition). A desired thickness is deposited and etched back by RIE (Reactive Ion Etch) to form gate sidewalls 8 on both sides of the gate electrode 4. However, the silicon oxide film may be made of any material as long as it has an insulating property, but a material such as a silicon oxynitride film or a silicon nitride film that prevents diffusion of impurities (cesium or the like) that becomes a fixed charge is preferable. Thereafter, arsenic ions are ion-implanted using the gate electrode 4 and the gate sidewall 8 as a mask to form the source region 9 and the drain region 10, and then activation annealing is performed.

  Cesium thermally diffuses in the silicon oxide film 5 by high-temperature treatment (for example, 700 ° C. or more) and piles up near the interface with the silicon substrate 1, for example, so that a self-aligned fixed charge distribution can be formed. . Further, since the material of the gate insulating film 3 is silicon oxynitride in which cesium is difficult to diffuse, the diffusion rate of cesium in the gate insulating film 3 becomes very slow, and the gate insulating film 3 and the silicon oxide film 5 There is an interface that traps cesium between them. Furthermore, since the silicon oxide film 5 is formed thicker than the gate insulating film 3, cesium hardly diffuses into the gate insulating film 3, and the distribution of cesium in the silicon oxide film 5 can be controlled with extremely high accuracy. it can. Accordingly, since there is almost no overlap between the gate electrode 4 and the inversion layer induced by the region 7 containing positive fixed charges made of cesium, the parasitic capacitance generated between the gate electrode 4 and the inversion layer is extremely small. Therefore, the circuit operation comprising the MIS field effect transistor of the present invention can be speeded up. In addition, the end of the inversion layer induced by the fixed charge caused by cesium substantially coincides with the end of the gate electrode 4, so that an ideal source / drain structure is obtained, and good short channel effect characteristics and a large driving current can be obtained simultaneously. Can do.

  The activation annealing is preferably high-temperature short-time annealing such as RTA (Rapid Thermal Annealing), spike annealing, flash lamp annealing, or laser annealing. For example, annealing is performed at 800 ° C. to 1100 ° C. for about 1 second to 180 seconds. In addition to the activation annealing, annealing for promoting redistribution of cesium may be performed before the source region 9 and the drain region 10 are formed and after ion implantation of cesium into the silicon oxide film 5. For example, annealing may be performed at 700 ° C. to 1100 ° C. for about 1 second to 2 hours. Of course, the arsenic ions may be implanted species serving as donors such as phosphorus and antimony. Salicide may be formed after the activation annealing.

  Next, as shown in FIG. 1D, the interlayer insulating film 11, the upper wiring 12, and the like are formed by a known method to complete the semiconductor device.

FIG. 2 shows the electrical characteristics of the semiconductor device (N-type channel element) of the first embodiment prepared with a gate length of 37 nm, a gate oxide equivalent silicon oxide thickness of 1 nm, and a cesium dose of 3 × 10 ¹³ cm ^−2. Indicates. In FIG. 2, the horizontal axis represents the gate voltage [V], and the vertical axis represents the drain terminal current [A / μm]. The drain voltage was 1 V, and the on-current at that time was 974 μA / μm. As can be seen from FIG. 2, very good transistor characteristics could be obtained.

  As can be seen from FIG. 1D, the semiconductor device according to the first embodiment of the present invention is formed in the silicon oxide film 5 between the channel region covered with the gate electrode 4 and the source region 9 and the drain region 10. The region 7 includes a positive fixed charge made of cesium.

  Cesium has a large atomic number 55 and a mass, and has the lowest first ionization energy (3.89 eV) in the periodic table. Therefore, in a normal device operating temperature range, a silicon oxide film or the like is used. It does not move in the insulating film and can exist stably as positively charged ions. Therefore, it can exist very stably as a positive fixed charge in the insulating film. Similar effects can be obtained with barium and rubidium.

  Band bending occurs on the surface of the silicon substrate 1 below the region 7 containing the positive fixed charge due to the electric field generated from the region 7 containing the positive fixed charge, and the surface of the silicon substrate 1 below the region 7 containing the positive fixed charge. An inversion layer is formed.

  Since the inversion layer is formed between the channel region and the source region 9 and between the channel region and the drain region 10, it functions as a very shallow source / drain extension.

κ ： 基板の比誘電率
ε ： 真空の誘電率[Ｆ／ｃｍ]
Ｎ_A ： 空乏層中のアクセプター濃度[ｃｍ^-3]
Ｎ_D ： 空乏層中のドナー濃度[ｃｍ^-3]
ｑ ： 電荷素量[Ｃ]
φ_B ： ２(ｋ_BＴ／ｑ)ln(|Ｎ_A-Ｎ_D|／Ｎ_i)
Ｎ_i ： 真性キャリア濃度[ｃｍ^-3]
ｋ_B ： ボルツマン定数[ｅＶ／Ｋ]
Ｔ ： 温度[Ｋ]
Ｖ_R ： シリコン基板−ソース領域９間にかかる逆バイアス電圧(＞０)[Ｖ]
（チャネル領域−ソース領域９間の反転層の場合）
または、シリコン基板−ドレイン領域間にかかる逆バイアス電圧(＞０)[Ｖ]
（チャネル領域−ドレイン領域１０間の反転層の場合）
よりも大きいことが必要である。例えば、チャネル領域−ソース領域９間に反転層を形成するためには、Ｖ_R=０[Ｖ]、|Ｎ_A-Ｎ_D|＝１×１０¹⁸[ｃｍ^-3]の場合(Ｎ_A＞Ｎ_D)、固定電荷密度は３.５×１０¹²[ｃｍ^-2]以上必要である。 However, in order to form the inversion layer, for example, when the impurity concentration in the depletion layer formed in the silicon substrate 1 by the fixed charge is uniform, the fixed charge density is

κ: dielectric constant of the substrate
ε: dielectric constant of vacuum [F / cm]
N _A : Acceptor concentration in the depletion layer [cm ^-3 ]
N _D : Donor concentration in the depletion layer [cm ^-3 ]
q: Elementary charge [C]
_{φ B: 2 (k B T} / q) ln (| N A -N D | / N i)
_Ni : Intrinsic carrier concentration [cm ^-3 ]
k _B : Boltzmann constant [eV / K]
T: Temperature [K]
V _R : reverse bias voltage (> 0) [V] applied between the silicon substrate and the source region 9
(In the case of an inversion layer between the channel region and the source region 9)
Alternatively, the reverse bias voltage (> 0) [V] applied between the silicon substrate and the drain region
(In the case of an inversion layer between the channel region and the drain region 10)
Must be greater than For example, in order to form an inversion layer between the channel region and the source region 9, V _R = 0 [V], | N _A -N _D | = 1 × 10 ¹⁸ [cm ⁻³ ] (N _A > N _D ) and a fixed charge density of 3.5 × 10 ¹² [cm ⁻² ] or more is required.

  Further, the lower the sheet resistance of the inversion layer induced by the fixed charge, the better the device characteristics. The carrier density induced as the inversion layer increases as the fixed charge density increases, but conversely, the electric field in the direction perpendicular to the substrate surface increases, so that the carrier mobility deteriorates. For this reason, an optimum fixed charge density appears to lower the sheet resistance.

FIG. 3 shows the measurement result of the fixed charge density dependence of the sheet resistance of the inversion layer induced by the positive fixed charge made of cesium. In FIG. 3, the horizontal axis represents positive fixed charge density [cm ⁻² ], and the vertical axis represents sheet resistance [Ω / □] of the inversion layer. The sample used for the measurement was prepared as follows. First, a P-type silicon substrate (substrate concentration: 1 × 10 ¹⁸ cm ⁻³ ) is thermally oxidized to form a silicon oxide film (350 mm), and a silicon nitride film is formed thereon by LP-CVD (low pressure CVD). After forming (100 cm), cesium was ion-implanted at 40 keV and annealed in a nitrogen atmosphere. The amount of cesium activated as a fixed charge substantially coincided with the amount of cesium in the silicon oxide film distributed within about 50 cm from the interface between the silicon oxide film and the silicon substrate. As can be seen from FIG. 3, under a certain substrate concentration condition, the sheet resistance of the inversion layer induced by the fixed charge becomes a minimum value at a certain fixed charge density. For example, when the substrate concentration is 1 × 10 ¹⁸ [cm ⁻² ], the fixed charge density is set to 5.3 × 10 ¹² or more and 3 × 10 ¹⁴ cm ⁻² or less to 10 [kΩ / □] or less. A low sheet resistance value can be obtained. More preferably, a sheet resistance value sufficiently small can be obtained by setting it to 1 × 10 ¹³ cm ⁻² or more and 3 × 10 ¹³ cm ⁻² or less. Therefore, driving of an N-type channel MIS type field effect transistor is possible. The current can be very large.
Similarly, fixed charges with a sheet resistance of the inversion layer of 10 kΩ / □ or less as a result of measurement using a P-type silicon substrate with a substrate concentration of 1.2 × 10 ¹⁶ cm ⁻³ and 1.1 × 10 ¹⁹ cm ^−3. The density is 1.3 × 10 ¹² cm ⁻² or more and 3.0 × 10 ¹⁴ cm ⁻² or less (substrate concentration: 1.2 × 10 ¹⁶ cm ⁻³ ), 2.3 × 10 ¹³ cm ⁻² or more, respectively. In addition, it was 3.0 × 10 ¹⁴ cm ⁻² or less (substrate concentration: 1.1 × 10 ¹⁹ cm ⁻³ ).

κ ： 基板の比誘電率
ε ： 真空の誘電率[Ｆ／ｃｍ]
Ｎ_A ： アクセプター濃度[ｃｍ^-3]
Ｎ_D ： ドナー濃度[ｃｍ^-3]
ｑ ： 電荷素量[Ｃ]
ψ_B ： ２(ｋ_BＴ／ｑ)ln(Ｎ_A／Ｎ_i)
Ｎ_i ： 真性キャリア濃度[ｃｍ^-3]
ｋ_B ： ボルツマン定数[ｅＶ／Ｋ]
Ｔ ： 温度[Ｋ]
Ｖ_R ： シリコン基板−ソース領域間にかかる逆バイアス電圧(＞０)[Ｖ]
(またはシリコン基板−ドレイン領域間にかかる逆バイアス電圧)
よりも大きいことが必要である。例えば、チャネル領域−ソース領域９間に反転層を形成するためには、Ｖ_R＝０[Ｖ]、｜Ｎ_A−Ｎ_D｜＝１×１０¹⁸[ｃｍ^-3]の場合(Ｎ_A＜Ｎ_D)、固定電荷密度は３.５×１０¹²[ｃｍ^-2]以上必要である。 In the case of a P-type channel element, the polarity of the fixed charge becomes negative by replacing the cesium with iodine. In this case, in order to form the inversion layer, when the impurity concentration in the depletion layer formed by the fixed charge is uniform, the fixed charge density is

κ: dielectric constant of the substrate
ε: dielectric constant of vacuum [F / cm]
N _A : Acceptor concentration [cm ^-3 ]
N _D : Donor concentration [cm ^-3 ]
q: Elementary charge [C]
_{ψ B: 2 (k B T} / q) ln (N A / N i)
_Ni : Intrinsic carrier concentration [cm ^-3 ]
k _B : Boltzmann constant [eV / K]
T: Temperature [K]
V _R : Reverse bias voltage (> 0) [V] applied between the silicon substrate and the source region
(Or reverse bias voltage between silicon substrate and drain region)
Must be greater than For example, in order to form an inversion layer between the channel region and the source region 9, in the case of V _R = 0 [V], | N _A −N _D | = 1 × 10 ¹⁸ [cm ⁻³ ] (N _A < N _D ) and a fixed charge density of 3.5 × 10 ¹² [cm ⁻² ] or more is required.

FIG. 4 shows the measurement result of the fixed charge density dependence of the sheet resistance of the inversion layer induced by the negative fixed charge made of iodine. In FIG. 4, the horizontal axis represents the negative fixed charge density [cm ⁻² ], and the vertical axis represents the sheet resistance [Ω / □] of the inversion layer. The sample used for the measurement was prepared as follows. First, an N-type silicon substrate (substrate concentration: 1 × 10 ¹⁸ cm ⁻³ ) is thermally oxidized to form a silicon oxide film (350 mm), and a silicon nitride film is formed thereon by LP-CVD (low pressure CVD). After forming (100 cm), iodine was ion-implanted at 40 keV and annealing was performed in a nitrogen atmosphere. The amount of iodine activated as a fixed charge almost coincided with the amount of iodine in the silicon oxide film distributed within about 50 mm from the interface between the silicon oxide film and the silicon substrate.
As can be seen from FIG. 4, by setting the fixed charge density to 8 × 10 ¹² cm ⁻² or more, a low sheet resistance value of 20 [kΩ / □] or less can be obtained. More preferably, by setting it to 1 × 10 ¹⁴ cm ⁻² or more, a substantially minimum sheet resistance can be obtained. Therefore, the drive current of the P-type channel MIS type field effect transistor can be increased.
Similarly, fixed charges with a sheet resistance of the inversion layer of 20 kΩ / □ or less as a result of measurement using an N-type silicon substrate with a substrate concentration of 1.2 × 10 ¹⁶ cm ⁻³ and 1.1 × 10 ¹⁹ cm ^−3. The densities were 3.0 × 10 ¹² cm ⁻² or more and 2.2 × 10 ¹³ cm ⁻² or more, respectively.

  When a strained silicon substrate is used instead of the silicon substrate 1, the sheet resistance is further reduced due to the effect of increasing carrier mobility, and a larger driving current can be obtained.

(Second Embodiment)
FIGS. 5A to 5C are cross-sectional views of an N-type channel MIS field effect transistor as an example of a semiconductor device shown in the order of steps for explaining the method of manufacturing the semiconductor device according to the second embodiment of the present invention. is there.

  As shown in FIG. 5A, an STI (Shallow Trench Isolation) region 2 is formed on one main surface of a P-type silicon substrate 1 as an example of a semiconductor substrate by a known method, and an element formation region is divided. Next, a polycrystalline silicon film is deposited and patterned on the gate insulating film 3 as an example of the first insulating film made of silicon oxynitride provided on the surface of the element formation region, and the gate electrode 4 is formed. Further, the material of the gate insulating film 3 may be silicon oxide, but by using silicon oxynitride, impurities that become fixed charges such as cesium or the like in the gate insulating film 3 due to heat treatment in a later process or the like. Can be prevented from diffusing. Note that the gate insulating film 3 in a region not covered with the gate electrode 4 may be removed.

Next, as shown in FIG. 5B, a silicon oxide film 5 as an example of a second insulating film is formed on the entire surface of the silicon substrate 1 by using, for example, a CVD method. The silicon oxide film 5 may be a silicon oxynitride film. The silicon oxide film 5 may be oxynitrided by heat treatment in an atmosphere containing at least one of NO, N ₂ O, NH ₃ , and nitrogen radicals. The film thickness of the silicon oxide film 5 is preferably larger than the film thickness of the gate insulating film 3. By making the film thickness of the silicon oxide film 5 larger than the film thickness of the gate insulating film 3, fixed charges such as cesium to be injected into the silicon oxide film 10 in a later process are transferred to the gate electrode 4 by a thermal process or the like. When diffusing in the direction, the cross-sectional area viewed from a fixed charge such as cesium diffusing in the silicon oxide film 5 becomes small in the gate insulating film 3, so that it can be prevented from diffusing into the gate insulating film 3. Therefore, it is possible to control the distribution of fixed charges with high accuracy. Further, although the thickness of the gate insulating film 3 is usually extremely thin, about several nanometers or less, since the thickness of the silicon oxide film 5 can be controlled independently of the gate insulating film 3, a silicon oxide film is formed in a later step. When cesium or the like is ion-implanted into 5, for example, the implantation energy can be made relatively high, so that the production conditions are limited and the production can be easily performed.

  Next, a silicon nitride film 13 as an example of a third insulating film is deposited on the entire surface of the silicon substrate 1 by, eg, LP-CVD (low pressure CVD). In the silicon nitride film, impurities that become fixed charges such as cesium implanted into the silicon oxide film 5 in a later step hardly diffuse even at a high temperature. Therefore, the impurities that become the fixed charges in the silicon oxide film 5 are Diffusion in the opposite direction with respect to the silicon substrate 1 can be prevented. Therefore, it becomes easy to control the fixed charge distribution in the silicon oxide film 5.

  Next, as shown in FIG. 5B, after a resist is applied to the surface of the silicon substrate, the STI region 2 is covered, and at least the region for forming the source / drain extension in the element formation region is opened. A resist mask 6 is formed by patterning the resist. Thereafter, cesium ions are ion-implanted into the silicon oxide film 5 using the gate electrode 4 and the resist mask 6 as a mask. Thus, a region 7 containing positive fixed charges made of cesium is formed in the silicon oxide film 5.

  Next, as shown in FIG. 5C, after removing the resist mask 6 (shown in FIG. 5B), a silicon oxide film is deposited to a desired thickness by the CVD method and etched back by RIE. Gate sidewalls 8 are formed. However, the silicon oxide film may be made of any material as long as it has an insulating property, but a material such as a silicon oxynitride film or a silicon nitride film that prevents diffusion of cesium or the like is preferable. Thereafter, arsenic ions are ion-implanted using the gate electrode 4 and the gate sidewall 8 as a mask to form the source region 9 and the drain region 10, and then activation annealing is performed. As a result, cesium in the silicon oxide film 5 piles up near the interface between the silicon oxide film 5 and the semiconductor substrate 1, near the interface between the silicon oxide film 5 and the gate insulating film 3, etc., and is fixed in a self-aligned manner. A charge distribution can be formed.

  The activation annealing is preferably high-temperature short-time annealing such as RTA (Rapid Thermal Annealing), spike annealing, flash lamp annealing, or laser annealing. For example, annealing is performed at 800 ° C. to 1100 ° C. for about 1 second to 180 seconds. In addition to the activation annealing, annealing for promoting redistribution of cesium may be performed before the source region 9 and the drain region 10 are formed and after ion implantation of cesium into the silicon oxide film 5. For example, annealing may be performed at 700 ° C. to 1100 ° C. for about 1 second to 2 hours. Salicide may be formed after the activation annealing.

  Next, as shown in FIG. 5D, the interlayer insulating film 11, the upper wiring 12 and the like are formed to complete the semiconductor device.

  The semiconductor device according to the second embodiment of the present invention includes a region containing positive fixed charges made of cesium in a silicon oxide film 5 between a channel region covered with a gate electrode 4 and a source region 9 and a drain region 10. 7. Band bending occurs on the surface of the silicon substrate 1 below the region 7 containing the positive fixed charge due to the electric field generated from the region 7 containing the positive fixed charge, and the surface of the silicon substrate 1 below the region 7 containing the positive fixed charge. An inversion layer is formed. Since the inversion layer is formed between the channel region and the source region 9 and the drain region 10, it functions as a very shallow source / drain extension.

  In the second embodiment, after the silicon oxide film 13 is formed on the silicon oxide film 5, cesium ions are implanted into the silicon oxide film 5 and annealed. In the silicon nitride film 13, impurities that become fixed charges such as cesium do not diffuse, so that cesium in the silicon oxide film 5 can be prevented from diffusing in the opposite direction with respect to the silicon substrate 1.

  In addition, since silicon oxynitride is used as the gate insulating film 3, impurities that become fixed charges such as cesium are difficult to diffuse in the silicon oxynitride, and in addition, between the gate insulating film 3 and the silicon oxide film 5. Since there is an interface due to the difference in material, it is possible to prevent impurities such as cesium thermally diffusing in the direction of the gate insulating film 3 from piled up on the interface and diffusing into the gate insulating film 3.

  Furthermore, since the thickness of the silicon oxide film 5 is made larger than that of the gate insulating film 3, diffusion of cesium into the gate insulating film 3 can be more effectively suppressed.

  Accordingly, since the fixed charge distribution in the silicon oxide film 5 can be controlled in a self-aligned manner, the offset or overlap between the gate electrode 4 and the source / drain extension is extremely suppressed, and the MIS has excellent short channel effect characteristics. Type field effect transistor can be easily provided.

(Third embodiment)
6A to 6D are cross-sectional views of an N-type channel MIS field effect transistor as an example of a semiconductor device shown in the order of steps for explaining the method of manufacturing the semiconductor device according to the third embodiment of the present invention. is there.

  As shown in FIG. 6A, an STI (Shallow Trench Isolation) region 2 is formed on one main surface of a P-type silicon substrate 1 as an example of a semiconductor substrate by a known method, and an element formation region is divided. Next, a polycrystalline silicon film is deposited and patterned on the gate insulating film 3 as an example of the first insulating film made of silicon oxynitride provided on the surface of the element formation region, and the gate electrode 4 is formed. The gate insulating film 3 in a region not covered with the gate electrode 4 may not necessarily be removed.

  Next, as shown in FIG. 6A, a silicon oxide film 5 as an example of a second insulating film is formed on the entire surface of the silicon substrate 1 by using, for example, a CVD method. Next, a silicon nitride film 13 as an example of a third insulating film is formed by, for example, LP-CVD. Next, a silicon oxide film is deposited to a desired thickness by CVD, and then etched back by RIE to form gate sidewalls 8.

  Next, as shown in FIG. 6B, arsenic ions are ion-implanted using the gate electrode 4 and the gate sidewall 8 as a mask to form the source region 9 and the drain region 10, and activation annealing is performed.

  Next, as shown in FIG. 6C, the gate sidewall 8 made of silicon oxide is removed by RIE or hydrofluoric acid solution or the like. Since the silicon nitride film 13 covers the entire surface of the silicon substrate, the gate sidewall 14 can be easily removed. Next, a resist is applied to the entire surface of the silicon substrate, and the resist mask 6 is formed by patterning the resist so as to cover the STI region 2 and open at least the region for forming the source / drain extension in the element formation region. Form. Thereafter, cesium ions are ion-implanted into the silicon oxide film 5 using the gate electrode 4 and the resist mask 6 as a mask.

  Next, as shown in FIG. 6D, after removing the resist, annealing for redistribution of cesium is performed.

  After the source region 9 and the drain region 10 are formed and activation annealing is performed, annealing for cesium ion implantation and cesium redistribution can be performed, so that the distribution of cesium can be precisely controlled. it can. Annealing for cesium redistribution is preferably a high temperature and short time annealing such as RTA.

  Next, the interlayer insulating film 11, the upper wiring 12 and the like are formed by a known method to complete the semiconductor device.

  The semiconductor device according to the third embodiment of the present invention includes a region containing positive fixed charges made of cesium in a silicon oxide film 5 between a channel region covered with a gate electrode 4 and a source region 9 and a drain region 10. 7. Band bending occurs on the surface of the silicon substrate 1 below the region 7 containing the positive fixed charge due to the electric field generated from the region 7 containing the positive fixed charge, and the surface of the silicon substrate 1 below the region 7 containing the positive fixed charge. An inversion layer is formed. Since the inversion layer is formed between the channel region and the source region 9 and the drain region 10, it functions as a very shallow source / drain extension.

  In the third embodiment, after forming the source region 9 and the drain region 10 and performing activation annealing, cesium is ion-implanted into the silicon oxide film 5 and annealing for rearrangement of cesium is performed. . Therefore, the annealing for rearrangement of cesium can be controlled independently without being affected by the activation annealing conditions for activating the impurities such as the source region 9 and the drain region 10, so that the silicon oxide It becomes possible to control the fixed charge distribution in the film 5 with extremely high accuracy. Therefore, it is possible to provide a MIS field effect transistor that is extremely excellent in short channel effect characteristics.

FIG. 1 is a diagram for explaining the procedure of a method of manufacturing an N-type channel MIS field effect transistor as an example of the semiconductor device according to the first embodiment of the invention. FIG. 2 is a diagram showing the electrical characteristics of the semiconductor device (N-type channel element). FIG. 3 is a diagram showing the fixed charge density dependence of the inversion layer sheet resistance induced by the positive fixed charge generated using cesium. FIG. 4 is a diagram showing the fixed charge density dependence of the inversion layer sheet resistance induced by the negative fixed charge generated using iodine. FIG. 5 is a diagram for explaining the procedure of a method for manufacturing an N-type channel MIS field effect transistor as an example of the semiconductor device according to the second embodiment of the invention. FIG. 6 is a diagram for explaining the procedure of a method for manufacturing an N-type channel MIS field effect transistor as an example of the semiconductor device according to the third embodiment of the invention. FIG. 7 is a cross-sectional view of a conventional MIS field effect transistor having a second gate electrode on the side wall of the gate electrode.

DESCRIPTION OF SYMBOLS 1 ... Silicon substrate 2 ... STI area | region 3 ... Gate insulating film 4 ... Gate electrode 5 ... Silicon oxide film 6 ... Resist mask 7 ... Area | region containing positive fixed electric charge 8 ... Gate side wall 9 ... Source region 10 ... Drain area | region 11 ... Interlayer Insulating film 12 ... Upper wiring 13 ... Silicon nitride film 101 ... Silicon substrate 109 ... Source region 110 ... Drain region 114 ... First gate insulating film 115 ... First gate electrode 116 ... Second gate insulating film 117 ... Second The gate electrode

Claims (8)

A P-type or intrinsic semiconductor substrate;
A gate electrode formed on one main surface of the semiconductor substrate via a first insulating film;
An N-type source region and drain region provided in a region not covered by the gate electrode on one main surface side of the semiconductor substrate;
A second insulating film including at least one of cesium, barium, and rubidium as an impurity that becomes a fixed charge on a region sandwiched between the channel region under the gate electrode and the source region and the drain region ; A method of manufacturing a semiconductor device in which an inversion layer is formed near the surface of the P-type or intrinsic semiconductor substrate in contact with the second insulating film ,
Selectively forming the gate electrode on the first insulating film provided on one main surface of the semiconductor substrate;
Forming the second insulating film in a region not covered by the gate electrode on one main surface of the semiconductor substrate;
Implanting the impurity serving as the fixed charge into the second insulating film using the gate electrode as a mask;
An annealing step for promoting redistribution of the impurity as the fixed charge in the second insulating film after the step of injecting the impurity as the fixed charge into the second insulating film;
Including
The first insulating film has a composition different from that of the second insulating film, and a film quality in which impurities serving as fixed charges in the second insulating film are less likely to diffuse than the second insulating film. the method of manufacturing a semiconductor device, characterized in that it. In the manufacturing method of the semiconductor device according to claim 1,
The fixed charge is a positive fixed charge made of the cesium,
A method of manufacturing a semiconductor device , wherein the surface density of the cesium is 5.3 × 10 ¹² cm ⁻² or more and 3 × 10 ¹⁴ cm ⁻² or less. An N-type or intrinsic semiconductor substrate;
A gate electrode formed on one main surface of the semiconductor substrate via a first insulating film;
A P-type source region and drain region provided in a region not covered by the gate electrode on one main surface side of the semiconductor substrate;
A second insulating film containing iodine as an impurity serving as a fixed charge is provided on a region sandwiched between the channel region under the gate electrode and the source region and the drain region, and is in contact with the second insulating film A method of manufacturing a semiconductor device in which an inversion layer is formed near the surface of an N-type or intrinsic semiconductor substrate ,
Selectively forming the gate electrode on the first insulating film provided on one main surface of the semiconductor substrate;
Forming the second insulating film in a region not covered by the gate electrode on one main surface of the semiconductor substrate;
Implanting the impurity serving as the fixed charge into the second insulating film using the gate electrode as a mask;
An annealing step for promoting redistribution of the impurity as the fixed charge in the second insulating film after the step of injecting the impurity as the fixed charge into the second insulating film;
Including
The first insulating film has a composition different from that of the second insulating film, and a film quality in which impurities serving as fixed charges in the second insulating film are less likely to diffuse than the second insulating film. the method of manufacturing a semiconductor device, characterized in that it. In the manufacturing method of the semiconductor device according to claim 3,
A method for manufacturing a semiconductor device , wherein the iodine has an areal density of 8 × 10 ¹² cm ⁻² or more. In the manufacturing method of the semiconductor device according to any one of claims 1 to 4,
A third insulating film formed so as to cover part or all of the second insulating film;
The third insulating film is a silicon nitride film formed so as to cover a part or all of the second insulating film, or covers a part of the second insulating film. A method for manufacturing a semiconductor device , which is a silicon oxynitride film formed. In the manufacturing method of the semiconductor device according to any one of claims 1 to 5,
A method for manufacturing a semiconductor device , wherein the thickness of the second insulating film is larger than the thickness of the first insulating film. In the manufacturing method of the semiconductor device according to any one of claims 1 to 6,
A method for manufacturing a semiconductor device , wherein a strained silicon substrate is used as the semiconductor substrate. A semiconductor device obtained by the method for manufacturing a semiconductor device according to claim 1.

Images