JP4704756B2 - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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Publication number
JP4704756B2
JP4704756B2 JP2005000174A JP2005000174A JP4704756B2 JP 4704756 B2 JP4704756 B2 JP 4704756B2 JP 2005000174 A JP2005000174 A JP 2005000174A JP 2005000174 A JP2005000174 A JP 2005000174A JP 4704756 B2 JP4704756 B2 JP 4704756B2
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Japan
Prior art keywords
suction
substrate
unit
glass substrate
auxiliary
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Expired - Fee Related
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JP2005000174A
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English (en)
Japanese (ja)
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JP2006188313A5 (enExample
JP2006188313A (ja
Inventor
陽輔 片岡
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Olympus Corp
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Olympus Corp
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Priority to JP2005000174A priority Critical patent/JP4704756B2/ja
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Publication of JP2006188313A5 publication Critical patent/JP2006188313A5/ja
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Publication of JP4704756B2 publication Critical patent/JP4704756B2/ja
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JP2005000174A 2005-01-04 2005-01-04 基板搬送装置 Expired - Fee Related JP4704756B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005000174A JP4704756B2 (ja) 2005-01-04 2005-01-04 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005000174A JP4704756B2 (ja) 2005-01-04 2005-01-04 基板搬送装置

Publications (3)

Publication Number Publication Date
JP2006188313A JP2006188313A (ja) 2006-07-20
JP2006188313A5 JP2006188313A5 (enExample) 2008-02-14
JP4704756B2 true JP4704756B2 (ja) 2011-06-22

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ID=36795865

Family Applications (1)

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JP2005000174A Expired - Fee Related JP4704756B2 (ja) 2005-01-04 2005-01-04 基板搬送装置

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JP (1) JP4704756B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200821247A (en) * 2006-09-22 2008-05-16 Olympus Corp Substrate inspecting apparatus
JP5125290B2 (ja) * 2007-07-27 2013-01-23 株式会社Ｉｈｉ 浮上搬送装置及び処理搬送システム
JP2011199218A (ja) * 2010-03-24 2011-10-06 Dainippon Screen Mfg Co Ltd 基板搬送装置およびそれを用いた基板検査システム
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP6804155B2 (ja) * 2017-03-13 2020-12-23 東レエンジニアリング株式会社 基板浮上搬送装置
KR20210109998A (ko) * 2020-02-28 2021-09-07 캐논 톡키 가부시키가이샤 흡착장치, 성막장치, 흡착방법, 성막방법 및 전자 디바이스의 제조방법
JP2025087461A (ja) * 2023-11-29 2025-06-10 キヤノントッキ株式会社 吸着装置、成膜装置、吸着方法、成膜方法及び電子デバイスの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4201564B2 (ja) * 2001-12-03 2008-12-24 日東電工株式会社 半導体ウエハ搬送方法およびこれを用いた半導体ウエハ搬送装置
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device

Also Published As

Publication number Publication date
JP2006188313A (ja) 2006-07-20

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