JP4680235B2 - 圧電式共振子構造および電気フィルタ - Google Patents
圧電式共振子構造および電気フィルタ Download PDFInfo
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- 239000000463 material Substances 0.000 claims description 32
- 238000010276 construction Methods 0.000 claims 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
- H03H9/585—Stacked Crystal Filters [SCF]
Description
fn=CRL・n/(2・L)
[式中、n=1、2、3、4…であり、CRLは、特定のレイレイ−ラムモードの音速であり、Lは電極によって画定される2辺間の距離である]で表される。係数「2」は、横モードのエネルギーが、一方の辺から対向するもう一方の辺へと移動しなくてはならないので全伝達長さ(往復)が2・Lとなることによる。
500 フィルタ構造
102、203、505、508 第1の電極
103、204、506、510 第2の電極
205 第3の電極
101、201、202 圧電材料の層
301、302、605、606、607 曲線辺
304、305、402、603、604 直線辺
501、502 共振子
Claims (17)
- 電気共振子であって、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第1の電極と、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第2の電極と、
前記第1の電極と前記第2の電極との間に設けられた圧電材料の層と
を備えており、
前記第1の電極および前記第2の電極のそれぞれが、別の少なくとも1つの実質的な直線辺をさらに有し、
前記第1の電極の2つの直線辺または前記第2の電極の2つの直線辺が、pπ/qの角度をなさず、ここでpおよびqは整数であり、
厚み縦振動モード(TEモード)が、前記層の厚みに沿って伝搬する、電気共振子。 - 前記曲線辺が凹状でない、請求項1に記載の電気共振子。
- 前記第1の電極の直線辺または前記第2の電極の直線辺が平行でない、請求項1に記載の電気共振子。
- 少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第3の電極と、
前記第2の電極と前記第3の電極との間に設けられた別の圧電材料の層と
をさらに備えており、
前記第3の電極が、少なくとも1つの別の実質的な直線辺をさらに有し、
前記第3の電極の2つの直線辺が、pπ/qの角度をなさず、ここでpおよびqは整数であり、
厚み縦振動モード(TEモード)が、前記別の圧電材料の層の厚みに沿って伝搬する、請求項1に記載の電気共振子。 - 前記曲線辺が凹状でない、請求項4に記載の電気共振子。
- 前記第3の電極の直線辺が平行でない、請求項4に記載の電気共振子。
- 複数の電気共振子を備えている電気共振子構造であって、前記共振子が、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第1の電極と、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第2の電極と、
前記第1の電極と前記第2の電極との間に設けられている圧電材料の層と
を備えており、
前記各電極が、少なくとも1つの別の実質的な直線辺をさらに有し、
前記第1の電極の2つの直線辺または前記第2の電極の2つの直線辺が、pπ/qの角度をなさず、ここでpおよびqが整数であり、
厚み縦振動モード(TEモード)が、前記層の厚みに沿って伝搬する、電気共振子構造。 - 前記曲線辺が凹状でない、請求項7に記載の電気共振子構造。
- 前記第1の電極の直線辺および前記第2の電極の直線辺が平行でない、請求項7に記載の電気共振子構造。
- 前記第1の電極の直線辺が、前記第2の電極の直線辺に隣接している、請求項7に記載の電気共振子構造。
- 前記複数の電気共振子のそれぞれが、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第3の電極と、
前記第2の電極と前記第3の電極との間に設けられているさらなる圧電材料の層と
をさらに備えており、
前記第3の電極が、別の少なくとも1つの実質的な直線辺を有し、
前記第3の電極の2つの直線辺が、pπ/qの角度をなさず、ここでpおよびqは整数であり、
厚み縦振動モード(TEモード)が、前記さらなる圧電材料の層の厚みに沿って伝搬する、請求項7に記載の電気共振子構造。 - 前記曲線辺が凹状でない、請求項11に記載の電気共振子構造。
- 前記第3の電極の直線辺が平行でない、請求項11に記載の電気共振子構造。
- 前記第3の電極の直線辺の1つが、前記第1の電極の直線辺に隣接しているか、または前記第2の電極の直線辺に隣接している、請求項11に記載の電気共振子構造。
- 1つ以上の共振子を備えている電気フィルタであって、前記共振子のそれぞれが、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第1の電極と、
少なくとも2つの曲線辺および少なくとも1つの実質的な直線辺を有する第2の電極と、
前記第1の電極と前記第2の電極との間に設けられている圧電材料の層と
を備えており、
各電極が、別の少なくとも1つの実質的な直線辺を有し、
前記第1の電極の2つの直線辺または前記第2の電極の2つの直線辺が、平行でなくかつ90°の角度をなさず、
厚み縦振動モード(TEモード)が、前記層の厚みに沿って伝搬する、電気フィルタ。 - 前記曲線辺が凹状でない、請求項15に記載の電気フィルタ。
- 前記第1の電極の直線辺または前記第2の電極の直線辺が平行でない、請求項15に記載の電気フィルタ。
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US11/443,954 US7629865B2 (en) | 2006-05-31 | 2006-05-31 | Piezoelectric resonator structures and electrical filters |
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JP2007325269A JP2007325269A (ja) | 2007-12-13 |
JP4680235B2 true JP4680235B2 (ja) | 2011-05-11 |
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US (1) | US7629865B2 (ja) |
JP (1) | JP4680235B2 (ja) |
KR (1) | KR100863876B1 (ja) |
DE (1) | DE102007024462B4 (ja) |
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DE102007024462A1 (de) | 2007-12-06 |
US20070279153A1 (en) | 2007-12-06 |
US7629865B2 (en) | 2009-12-08 |
JP2007325269A (ja) | 2007-12-13 |
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KR20070115758A (ko) | 2007-12-06 |
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