JP4678261B2 - 圧電薄膜振動子 - Google Patents

圧電薄膜振動子 Download PDF

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Publication number
JP4678261B2
JP4678261B2 JP2005247278A JP2005247278A JP4678261B2 JP 4678261 B2 JP4678261 B2 JP 4678261B2 JP 2005247278 A JP2005247278 A JP 2005247278A JP 2005247278 A JP2005247278 A JP 2005247278A JP 4678261 B2 JP4678261 B2 JP 4678261B2
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Prior art keywords
layer
acoustic
piezoelectric
thin film
diamond
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Expired - Fee Related
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JP2005247278A
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English (en)
Japanese (ja)
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JP2007067485A (ja
JP2007067485A5 (enrdf_load_stackoverflow
Inventor
誠 古畑
天光 樋口
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2005247278A priority Critical patent/JP4678261B2/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005247278A 2005-08-29 2005-08-29 圧電薄膜振動子 Expired - Fee Related JP4678261B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005247278A JP4678261B2 (ja) 2005-08-29 2005-08-29 圧電薄膜振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005247278A JP4678261B2 (ja) 2005-08-29 2005-08-29 圧電薄膜振動子

Publications (3)

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JP2007067485A JP2007067485A (ja) 2007-03-15
JP2007067485A5 JP2007067485A5 (enrdf_load_stackoverflow) 2008-10-16
JP4678261B2 true JP4678261B2 (ja) 2011-04-27

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JP2005247278A Expired - Fee Related JP4678261B2 (ja) 2005-08-29 2005-08-29 圧電薄膜振動子

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JP (1) JP4678261B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028027A1 (ja) * 2007-08-24 2009-03-05 Fujitsu Limited 圧電薄膜共振子、それを用いたフィルタ、そのフィルタを用いたデュプレクサおよびそのフィルタまたはそのデュプレクサを用いた通信機
CN101785183A (zh) * 2007-11-21 2010-07-21 富士通株式会社 滤波器、使用该滤波器的双工器及使用该双工器的通信机
JP2021136675A (ja) * 2020-02-28 2021-09-13 学校法人早稲田大学 圧電素子

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001156582A (ja) * 1999-11-30 2001-06-08 Kyocera Corp 圧電共振子
JP2001156583A (ja) * 1999-11-30 2001-06-08 Kyocera Corp 圧電共振子
DE10045090A1 (de) * 2000-09-12 2002-03-28 Infineon Technologies Ag Akustischer Resonator
JP4478910B2 (ja) * 2001-05-11 2010-06-09 宇部興産株式会社 圧電薄膜共振子
JP2004221622A (ja) * 2002-01-08 2004-08-05 Murata Mfg Co Ltd 圧電共振子、圧電フィルタ、デュプレクサ、通信装置および圧電共振子の製造方法
JP3953921B2 (ja) * 2002-09-10 2007-08-08 日本プレーテック株式会社 ダイヤモンドｑｃｍの作製方法及びそのダイヤモンドｑｃｍ

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JP2007067485A (ja) 2007-03-15

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