JP4676286B2 - 単板型圧電バイモルフ素子の製造方法 - Google Patents
単板型圧電バイモルフ素子の製造方法 Download PDFInfo
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- JP4676286B2 JP4676286B2 JP2005250488A JP2005250488A JP4676286B2 JP 4676286 B2 JP4676286 B2 JP 4676286B2 JP 2005250488 A JP2005250488 A JP 2005250488A JP 2005250488 A JP2005250488 A JP 2005250488A JP 4676286 B2 JP4676286 B2 JP 4676286B2
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- piezoelectric
- bimorph element
- plate
- piezoelectric bimorph
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Description
2,3:電極
4:中間電極
Claims (3)
- 層状結晶構造を有するSr―Bi―Nb系圧電セラミック基板を備え、該圧電セラミック基板の表裏面にそれぞれ電極が形成された単板型圧電バイモルフ素子の製造方法において、該圧電セラミック基板の厚み方向に交流電圧が印加されて、該圧電セラミック基板が厚み方向の中央部を境に互いに逆方向に分極されることを特徴とする単板型圧電バイモルフ素子の製造方法。
- 圧電セラミック基板の材料の主組成がSrBi2Nb2O9である請求項1記載の単板型圧電バイモルフ素子の製造方法。
- 逆方向分極構造を有する単板型厚み縦振動2次高調波モード共振子となる請求項1又は請求項2に記載の単板型圧電バイモルフ素子の製造方法。
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JP2005250488A JP4676286B2 (ja) | 2005-08-31 | 2005-08-31 | 単板型圧電バイモルフ素子の製造方法 |
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JP2005250488A JP4676286B2 (ja) | 2005-08-31 | 2005-08-31 | 単板型圧電バイモルフ素子の製造方法 |
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JP2007067125A JP2007067125A (ja) | 2007-03-15 |
JP4676286B2 true JP4676286B2 (ja) | 2011-04-27 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US7497133B2 (en) | 2004-05-24 | 2009-03-03 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
US8481335B2 (en) | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
EP2100125A4 (en) | 2006-11-28 | 2012-02-15 | Univ Drexel | PIEZOELECTRIC MICROCANTILEVER SENSORS FOR BIOSENSORS |
WO2009079154A2 (en) * | 2007-11-23 | 2009-06-25 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
WO2009126378A2 (en) | 2008-03-11 | 2009-10-15 | Drexel University | Enhanced detection sensitivity with piezoelectric microcantilever sensors |
WO2009140660A2 (en) | 2008-05-16 | 2009-11-19 | Drexel University | System and method for evaluating tissue |
US8722427B2 (en) | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
US10381546B2 (en) * | 2014-02-26 | 2019-08-13 | Daikin Industries, Ltd. | Bimorph-type piezoelectric film |
CN108140723B (zh) * | 2015-12-02 | 2021-08-06 | 株式会社村田制作所 | 压电元件、压电传声器、压电谐振子以及压电元件的制造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000252786A (ja) * | 1999-03-01 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 圧電振動素子 |
JP2003023321A (ja) * | 2001-07-10 | 2003-01-24 | Murata Mfg Co Ltd | 発振器およびその製造方法 |
JP2004262693A (ja) * | 2003-02-28 | 2004-09-24 | Toko Inc | 圧電セラミックス |
JP2005005698A (ja) * | 2003-05-21 | 2005-01-06 | Jfe Mineral Co Ltd | 圧電単結晶素子とその製造方法 |
JP2005244208A (ja) * | 2004-01-30 | 2005-09-08 | Toko Inc | 圧電セラミックスとその製造方法 |
Family Cites Families (4)
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JP2615019B2 (ja) * | 1986-08-22 | 1997-05-28 | 清水 郁子 | 分極反転領域を有するLiNbO▲下3▼単結晶圧電基板の製造方法 |
JPH0828540B2 (ja) * | 1987-05-20 | 1996-03-21 | 株式会社村田製作所 | 電歪セラミック材料体およびその分極操作方法 |
JPH06224486A (ja) * | 1993-01-26 | 1994-08-12 | Toyota Motor Corp | 圧電セラミックスの分極方法 |
JPH1051262A (ja) * | 1996-04-16 | 1998-02-20 | Matsushita Electric Ind Co Ltd | 圧電振動子とその製造方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000252786A (ja) * | 1999-03-01 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 圧電振動素子 |
JP2003023321A (ja) * | 2001-07-10 | 2003-01-24 | Murata Mfg Co Ltd | 発振器およびその製造方法 |
JP2004262693A (ja) * | 2003-02-28 | 2004-09-24 | Toko Inc | 圧電セラミックス |
JP2005005698A (ja) * | 2003-05-21 | 2005-01-06 | Jfe Mineral Co Ltd | 圧電単結晶素子とその製造方法 |
JP2005244208A (ja) * | 2004-01-30 | 2005-09-08 | Toko Inc | 圧電セラミックスとその製造方法 |
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