JP2007067125A - 単板型圧電バイモルフ素子 - Google Patents
単板型圧電バイモルフ素子 Download PDFInfo
- Publication number
- JP2007067125A JP2007067125A JP2005250488A JP2005250488A JP2007067125A JP 2007067125 A JP2007067125 A JP 2007067125A JP 2005250488 A JP2005250488 A JP 2005250488A JP 2005250488 A JP2005250488 A JP 2005250488A JP 2007067125 A JP2007067125 A JP 2007067125A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- bimorph element
- thickness
- plate
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
【解決手段】 Sr−Bi−Nb系圧電セラミック基板からなり、当該圧電セラミック板は厚み方向に交流電圧が印加されて、厚み方向の中央部を境に分極方向が逆方向となっており、当該基板の表裏面にそれぞれ電極が形成される。これによって、圧電バイモルフ素子や、厚み縦振動の2次高調波モードが励振される振動子等として利用することができる。
【選択図】 図4
Description
2,3:電極
4:中間電極
Claims (4)
- 層状結晶構造を有するSr−Bi−Nb系圧電セラミック基板からなり、
厚み方向の中央部を境に分極方向が逆方向となっており、
当該基板の表裏面にそれぞれ電極が形成された単板型圧電バイモルフ素子。 - 層状結晶構造を有するSr−Bi−Nb系圧電セラミック基板からなり、
当該圧電セラミック板は厚み方向に交流電圧が印加されて、厚み方向の中央部を境に分極方向が逆方向となっており、
当該基板の表裏面にそれぞれ電極が形成された単板型圧電バイモルフ素子。 - 圧電セラミック基板の材料の主組成がSrBi2Nb2O9である請求項1記載の単板型圧電バイモルフ素子。
- 逆方向分極構造を有する単板型厚み縦振動2次高調波モード共振子となる請求項1、請求項2ないし請求項3記載の圧電バイモルフ素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005250488A JP4676286B2 (ja) | 2005-08-31 | 2005-08-31 | 単板型圧電バイモルフ素子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005250488A JP4676286B2 (ja) | 2005-08-31 | 2005-08-31 | 単板型圧電バイモルフ素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007067125A true JP2007067125A (ja) | 2007-03-15 |
JP4676286B2 JP4676286B2 (ja) | 2011-04-27 |
Family
ID=37928974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005250488A Expired - Fee Related JP4676286B2 (ja) | 2005-08-31 | 2005-08-31 | 単板型圧電バイモルフ素子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4676286B2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009079154A2 (en) * | 2007-11-23 | 2009-06-25 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
US8481335B2 (en) | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
US8562546B2 (en) | 2008-05-16 | 2013-10-22 | Drexel University | System and method for evaluating tissue |
US8722427B2 (en) | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
US8927259B2 (en) | 2006-11-28 | 2015-01-06 | Drexel University | Piezoelectric microcantilever sensors for biosensing |
WO2015129829A1 (ja) * | 2014-02-26 | 2015-09-03 | ダイキン工業株式会社 | バイモルフ型圧電フィルム |
US9488622B2 (en) | 2008-03-11 | 2016-11-08 | Drexel University | Enhanced detection sensitivity with piezoelectric microcantilever sensors |
US9618497B2 (en) | 2004-05-24 | 2017-04-11 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
CN108140723A (zh) * | 2015-12-02 | 2018-06-08 | 株式会社村田制作所 | 压电元件、压电传声器、压电谐振子以及压电元件的制造方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63260088A (ja) * | 1986-08-22 | 1988-10-27 | Hiroshi Shimizu | 分極反転領域を有するLiNbO3単結晶圧電基板の製造方法 |
JPS63288077A (ja) * | 1987-05-20 | 1988-11-25 | Murata Mfg Co Ltd | 電歪セラミック材料体およびその分極操作方法 |
JPH06224486A (ja) * | 1993-01-26 | 1994-08-12 | Toyota Motor Corp | 圧電セラミックスの分極方法 |
JPH1051262A (ja) * | 1996-04-16 | 1998-02-20 | Matsushita Electric Ind Co Ltd | 圧電振動子とその製造方法 |
JP2000252786A (ja) * | 1999-03-01 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 圧電振動素子 |
JP2003023321A (ja) * | 2001-07-10 | 2003-01-24 | Murata Mfg Co Ltd | 発振器およびその製造方法 |
JP2004262693A (ja) * | 2003-02-28 | 2004-09-24 | Toko Inc | 圧電セラミックス |
JP2005005698A (ja) * | 2003-05-21 | 2005-01-06 | Jfe Mineral Co Ltd | 圧電単結晶素子とその製造方法 |
JP2005244208A (ja) * | 2004-01-30 | 2005-09-08 | Toko Inc | 圧電セラミックスとその製造方法 |
-
2005
- 2005-08-31 JP JP2005250488A patent/JP4676286B2/ja not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63260088A (ja) * | 1986-08-22 | 1988-10-27 | Hiroshi Shimizu | 分極反転領域を有するLiNbO3単結晶圧電基板の製造方法 |
JPS63288077A (ja) * | 1987-05-20 | 1988-11-25 | Murata Mfg Co Ltd | 電歪セラミック材料体およびその分極操作方法 |
JPH06224486A (ja) * | 1993-01-26 | 1994-08-12 | Toyota Motor Corp | 圧電セラミックスの分極方法 |
JPH1051262A (ja) * | 1996-04-16 | 1998-02-20 | Matsushita Electric Ind Co Ltd | 圧電振動子とその製造方法 |
JP2000252786A (ja) * | 1999-03-01 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 圧電振動素子 |
JP2003023321A (ja) * | 2001-07-10 | 2003-01-24 | Murata Mfg Co Ltd | 発振器およびその製造方法 |
JP2004262693A (ja) * | 2003-02-28 | 2004-09-24 | Toko Inc | 圧電セラミックス |
JP2005005698A (ja) * | 2003-05-21 | 2005-01-06 | Jfe Mineral Co Ltd | 圧電単結晶素子とその製造方法 |
JP2005244208A (ja) * | 2004-01-30 | 2005-09-08 | Toko Inc | 圧電セラミックスとその製造方法 |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9945835B2 (en) | 2004-05-24 | 2018-04-17 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
US9618497B2 (en) | 2004-05-24 | 2017-04-11 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
US8481335B2 (en) | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
US9274087B2 (en) | 2006-11-28 | 2016-03-01 | Drexel University | Piezoelectric microcantilever sensors for biosensing |
US8927259B2 (en) | 2006-11-28 | 2015-01-06 | Drexel University | Piezoelectric microcantilever sensors for biosensing |
WO2009079154A3 (en) * | 2007-11-23 | 2009-10-22 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
US8241569B2 (en) | 2007-11-23 | 2012-08-14 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
US8496870B2 (en) | 2007-11-23 | 2013-07-30 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
WO2009079154A2 (en) * | 2007-11-23 | 2009-06-25 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
US8715575B2 (en) | 2007-11-23 | 2014-05-06 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
US9488622B2 (en) | 2008-03-11 | 2016-11-08 | Drexel University | Enhanced detection sensitivity with piezoelectric microcantilever sensors |
US8562546B2 (en) | 2008-05-16 | 2013-10-22 | Drexel University | System and method for evaluating tissue |
US8845555B2 (en) | 2008-05-16 | 2014-09-30 | Drexel University | System and method for evaluating tissue |
US10076247B2 (en) | 2008-05-16 | 2018-09-18 | Wan Y. Shih | System and method for evaluating tissue |
US8722427B2 (en) | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
WO2015129829A1 (ja) * | 2014-02-26 | 2015-09-03 | ダイキン工業株式会社 | バイモルフ型圧電フィルム |
CN106104825A (zh) * | 2014-02-26 | 2016-11-09 | 大金工业株式会社 | 双压电晶片型压电膜 |
JPWO2015129829A1 (ja) * | 2014-02-26 | 2017-03-30 | ダイキン工業株式会社 | バイモルフ型圧電フィルム |
CN106104825B (zh) * | 2014-02-26 | 2019-04-30 | 大金工业株式会社 | 双压电晶片型压电膜 |
CN108140723A (zh) * | 2015-12-02 | 2018-06-08 | 株式会社村田制作所 | 压电元件、压电传声器、压电谐振子以及压电元件的制造方法 |
US10397708B2 (en) | 2015-12-02 | 2019-08-27 | Murata Manufacturing Co., Ltd. | Piezoelectric element, piezoelectric microphone, piezoelectric resonator and method for manufacturing piezoelectric element |
US11012787B2 (en) | 2015-12-02 | 2021-05-18 | Murata Manufacturing Co., Ltd. | Piezoelectric element, piezoelectric microphone, piezoelectric resonator and method for manufacturing piezoelectric element |
CN108140723B (zh) * | 2015-12-02 | 2021-08-06 | 株式会社村田制作所 | 压电元件、压电传声器、压电谐振子以及压电元件的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4676286B2 (ja) | 2011-04-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4676286B2 (ja) | 単板型圧電バイモルフ素子の製造方法 | |
Wu et al. | High‐temperature BiScO3‐PbTiO3 piezoelectric vibration energy harvester | |
Uchino | Glory of piezoelectric perovskites | |
JP5217997B2 (ja) | 圧電磁器、振動子及び超音波モータ | |
Kwon et al. | Flexoelectric sensing using a multilayered barium strontium titanate structure | |
JP4910390B2 (ja) | 圧電セラミックおよびその製造方法ならびに圧電共振子およびその製造方法 | |
US20060049715A1 (en) | Method and appartus for driving electro-mechanical transducer | |
JPH04245488A (ja) | 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子 | |
JP2007150350A (ja) | 圧電構造素子 | |
JP2006108639A (ja) | 圧電アクチュエータ | |
TW420883B (en) | A piezoelectric transformer | |
Pavlič et al. | Small reduction of the piezoelectric d33 response in potassium sodium niobate thick films | |
Kabra et al. | Review on advanced piezoelectric materials (BaTiO3, PZT) | |
JP2002114570A (ja) | 圧電体磁器組成物、圧電共振子、圧電トランス及び圧電アクチュエータ | |
CN104064670A (zh) | 压电薄膜元件、压电传感器和振动发电机 | |
TW449757B (en) | Piezoelectric device | |
JP2008509566A (ja) | 圧電(ピエゾ)トランス | |
JP2009058378A (ja) | 磁気センサ | |
WO2007112741A1 (en) | A multilayer piezoelectric bender | |
JPWO2008090758A1 (ja) | 共振アクチュエータ | |
JPS6372171A (ja) | 電歪駆動体の製造方法 | |
JP2010093598A (ja) | 圧電振動子およびその製造方法 | |
JP2005244208A (ja) | 圧電セラミックスとその製造方法 | |
US6515401B1 (en) | Piezoelectric resonator | |
JP4863575B2 (ja) | 圧電磁器組成物及び圧電トランス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061221 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100924 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101005 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110118 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110127 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140204 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4676286 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |