JP4668244B2 - 電子ビーム加工で使用するためのチャンバ構造 - Google Patents

電子ビーム加工で使用するためのチャンバ構造 Download PDF

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Publication number
JP4668244B2
JP4668244B2 JP2007158006A JP2007158006A JP4668244B2 JP 4668244 B2 JP4668244 B2 JP 4668244B2 JP 2007158006 A JP2007158006 A JP 2007158006A JP 2007158006 A JP2007158006 A JP 2007158006A JP 4668244 B2 JP4668244 B2 JP 4668244B2
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Japan
Prior art keywords
chamber
ring
shaft
opening
chamber structure
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JP2007158006A
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English (en)
Japanese (ja)
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JP2008004547A5 (https=
JP2008004547A (ja
Inventor
ボクーカ フランツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALL WELDING TECHNOLOGIES AG
Global Beam Technologies AG
Original Assignee
ALL WELDING TECHNOLOGIES AG
Global Beam Technologies AG
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Publication of JP2008004547A publication Critical patent/JP2008004547A/ja
Publication of JP2008004547A5 publication Critical patent/JP2008004547A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/06—Electron-beam welding or cutting within a vacuum chamber

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Transmission Devices (AREA)
  • Particle Accelerators (AREA)
  • Manufacture And Refinement Of Metals (AREA)
JP2007158006A 2006-06-16 2007-06-14 電子ビーム加工で使用するためのチャンバ構造 Active JP4668244B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006027820A DE102006027820B4 (de) 2006-06-16 2006-06-16 Kammeranordnung zur Verwendung bei der Elektronenstrahlbearbeitung

Publications (3)

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JP2008004547A JP2008004547A (ja) 2008-01-10
JP2008004547A5 JP2008004547A5 (https=) 2010-06-24
JP4668244B2 true JP4668244B2 (ja) 2011-04-13

Family

ID=38523464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007158006A Active JP4668244B2 (ja) 2006-06-16 2007-06-14 電子ビーム加工で使用するためのチャンバ構造

Country Status (5)

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EP (1) EP1867426B1 (https=)
JP (1) JP4668244B2 (https=)
CN (1) CN101096062A (https=)
AT (1) ATE449659T1 (https=)
DE (2) DE102006027820B4 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8234049B2 (en) 2008-03-14 2012-07-31 GM Global Technology Operations LLC ECM security strategy for rationalizing and controlling increasing transmission torque requests above driver command
CN102066976A (zh) 2008-06-16 2011-05-18 皇家飞利浦电子股份有限公司 辐射探测器和制造辐射探测器的方法
DE102008059741B4 (de) * 2008-12-01 2017-06-01 Global Beam Technologies Ag Vorrichtung zur Bearbeitung von Werkstücken unter Vakuum
CN104858542B (zh) * 2015-06-05 2017-04-05 北京星航机电装备有限公司 针对多舱段薄壁钛合金箱体结构的真空电子束焊接方法
CN106425309A (zh) * 2016-11-14 2017-02-22 北京星航机电装备有限公司 一种钛合金折叠翼面的加工制造方法
CN111347145B (zh) * 2018-12-20 2025-09-05 中核建中核燃料元件有限公司 一种电子束波纹管
CN113632244B (zh) * 2019-03-29 2024-04-09 松下知识产权经营株式会社 光检测器
CN110315189B (zh) * 2019-07-17 2021-09-14 陕西千山航空电子有限责任公司 一种电子束焊接辅助件及焊接方法
CN111702317A (zh) * 2020-06-30 2020-09-25 中国航发动力股份有限公司 一种双面行星焊缝结构电子束焊方法
CN112620912B (zh) * 2020-11-27 2022-05-10 广州诺星智能科技有限公司 一种带有放置台的电子束切割设备
CN112719770B (zh) * 2020-12-28 2023-04-28 中国二十冶集团有限公司 一种调整烘干机托圈与筒体间隙尺寸的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3424891A (en) * 1967-03-16 1969-01-28 North American Rockwell Portable welding chamber
JPS59104282A (ja) * 1982-12-07 1984-06-16 Mitsubishi Electric Corp 電子ビ−ム溶接装置
JPH03226386A (ja) * 1990-01-31 1991-10-07 Mitsubishi Electric Corp 電子ビーム加工機
DE4425090C1 (de) * 1994-07-15 1996-03-07 Saechsische Elektronenstrahl G Schwenkbare Elektronenkanone
JPH08132256A (ja) * 1994-11-11 1996-05-28 Mitsubishi Electric Corp 電子ビーム加工装置
US6710360B2 (en) * 2002-07-10 2004-03-23 Axcelis Technologies, Inc. Adjustable implantation angle workpiece support structure for an ion beam implanter
US7030395B2 (en) * 2004-08-06 2006-04-18 Axcelis Technologies, Inc. Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough
JP2006095553A (ja) * 2004-09-29 2006-04-13 F C C:Kk 電子ビーム溶接装置

Also Published As

Publication number Publication date
DE502007002092D1 (de) 2010-01-07
CN101096062A (zh) 2008-01-02
DE102006027820B4 (de) 2008-04-03
DE102006027820A1 (de) 2007-12-27
EP1867426A1 (de) 2007-12-19
JP2008004547A (ja) 2008-01-10
ATE449659T1 (de) 2009-12-15
EP1867426B1 (de) 2009-11-25

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