JP4636928B2 - 測定部支持機構およびそれを備えた薄板の表面形状測定装置 - Google Patents

測定部支持機構およびそれを備えた薄板の表面形状測定装置 Download PDF

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Publication number
JP4636928B2
JP4636928B2 JP2005127574A JP2005127574A JP4636928B2 JP 4636928 B2 JP4636928 B2 JP 4636928B2 JP 2005127574 A JP2005127574 A JP 2005127574A JP 2005127574 A JP2005127574 A JP 2005127574A JP 4636928 B2 JP4636928 B2 JP 4636928B2
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moving means
horizontal
horizontal moving
vertical
receiving plate
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Japanese (ja)
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JP2006308296A5 (enExample
JP2006308296A (ja
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善一 高村
淑光 松橋
健一 進藤
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Kuroda Precision Industries Ltd
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Kuroda Precision Industries Ltd
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JP2005127574A 2005-04-26 2005-04-26 測定部支持機構およびそれを備えた薄板の表面形状測定装置 Expired - Fee Related JP4636928B2 (ja)

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JP2005127574A JP4636928B2 (ja) 2005-04-26 2005-04-26 測定部支持機構およびそれを備えた薄板の表面形状測定装置

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JP2005127574A JP4636928B2 (ja) 2005-04-26 2005-04-26 測定部支持機構およびそれを備えた薄板の表面形状測定装置

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JP2006308296A JP2006308296A (ja) 2006-11-09
JP2006308296A5 JP2006308296A5 (enExample) 2008-05-29
JP4636928B2 true JP4636928B2 (ja) 2011-02-23

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JP2005127574A Expired - Fee Related JP4636928B2 (ja) 2005-04-26 2005-04-26 測定部支持機構およびそれを備えた薄板の表面形状測定装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5252777B2 (ja) * 2005-12-22 2013-07-31 東芝機械株式会社 垂直２次元面の走査機構および走査方法
JP2009109436A (ja) * 2007-10-31 2009-05-21 Sekigahara Seisakusho:Kk 平面度測定装置
KR101368938B1 (ko) 2011-09-29 2014-02-27 현대제철 주식회사 후판용 평탄도 측정장치
CN113587887B (zh) * 2021-07-29 2024-02-20 深圳聚德机械有限公司 一种涂布机用产品表面光滑度检测设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6443711A (en) * 1987-08-11 1989-02-16 Fujitec Kk Surface strain measuring instrument
JPH01152306A (ja) * 1987-12-09 1989-06-14 Sumitomo Rubber Ind Ltd 形状測定方法およびその装置
JPH0743259B2 (ja) * 1989-03-20 1995-05-15 株式会社ミツトヨ 三次元測定機
JPH04369409A (ja) * 1991-05-21 1992-12-22 Mitsubishi Electric Corp 光学式厚さ測定装置
JPH11351857A (ja) * 1998-06-08 1999-12-24 Kuroda Precision Ind Ltd 薄板の表面形状測定方法および薄板の表面形状測定装置
JP3633788B2 (ja) * 1998-07-13 2005-03-30 株式会社ミツトヨ 測定装置
JP3468352B2 (ja) * 1998-08-10 2003-11-17 東芝セラミックス株式会社 石英ガラス製基板表面の平坦度測定装置
JP3404318B2 (ja) * 1999-04-02 2003-05-06 黒田精工株式会社 表面形状測定方法
JP3778757B2 (ja) * 2000-01-28 2006-05-24 東芝機械株式会社 直動装置およびその駆動制御方法
JP4417130B2 (ja) * 2004-02-17 2010-02-17 黒田精工株式会社 ガラス基板の垂直保持装置
JP2006105878A (ja) * 2004-10-07 2006-04-20 Toshiba Ceramics Co Ltd 基板の平坦度測定装置および形状寸法測定装置
JP4592445B2 (ja) * 2005-02-25 2010-12-01 黒田精工株式会社 薄板の表面形状測定装置

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