JP4634035B2 - 超小型流体素子及びその作製 - Google Patents

超小型流体素子及びその作製 Download PDF

Info

Publication number
JP4634035B2
JP4634035B2 JP2003532965A JP2003532965A JP4634035B2 JP 4634035 B2 JP4634035 B2 JP 4634035B2 JP 2003532965 A JP2003532965 A JP 2003532965A JP 2003532965 A JP2003532965 A JP 2003532965A JP 4634035 B2 JP4634035 B2 JP 4634035B2
Authority
JP
Japan
Prior art keywords
substrate
mixture
assembly
glass
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003532965A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005503923A (ja
JP2005503923A5 (https=
Inventor
ギュズマン，ギローム
テモン，ジャン−ピエール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of JP2005503923A publication Critical patent/JP2005503923A/ja
Publication of JP2005503923A5 publication Critical patent/JP2005503923A5/ja
Application granted granted Critical
Publication of JP4634035B2 publication Critical patent/JP4634035B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C03B19/063—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction by hot-pressing powders
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/20—Uniting glass pieces by fusing without substantial reshaping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/036—Hot embossing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2003532965A 2001-09-28 2002-09-13 超小型流体素子及びその作製 Expired - Fee Related JP4634035B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0112500A FR2830206B1 (fr) 2001-09-28 2001-09-28 Dispositif microfluidique et sa fabrication
PCT/US2002/029179 WO2003029803A1 (en) 2001-09-28 2002-09-13 A microfluidic device and manufacture thereof

Publications (3)

Publication Number Publication Date
JP2005503923A JP2005503923A (ja) 2005-02-10
JP2005503923A5 JP2005503923A5 (https=) 2008-09-25
JP4634035B2 true JP4634035B2 (ja) 2011-02-16

Family

ID=8867711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003532965A Expired - Fee Related JP4634035B2 (ja) 2001-09-28 2002-09-13 超小型流体素子及びその作製

Country Status (5)

Country Link
US (3) US6595232B2 (https=)
EP (1) EP1440308B1 (https=)
JP (1) JP4634035B2 (https=)
FR (1) FR2830206B1 (https=)
WO (1) WO2003029803A1 (https=)

Families Citing this family (114)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5885470A (en) * 1997-04-14 1999-03-23 Caliper Technologies Corporation Controlled fluid transport in microfabricated polymeric substrates
FR2830206B1 (fr) * 2001-09-28 2004-07-23 Corning Inc Dispositif microfluidique et sa fabrication
US20030091647A1 (en) * 2001-11-15 2003-05-15 Lewis Jennifer A. Controlled dispersion of colloidal suspensions via nanoparticle additions
WO2003050035A2 (en) * 2001-12-06 2003-06-19 Nanostream, Inc. Adhesiveless microfluidic device fabrication
US6969505B2 (en) 2002-08-15 2005-11-29 Velocys, Inc. Process for conducting an equilibrium limited chemical reaction in a single stage process channel
US6622519B1 (en) * 2002-08-15 2003-09-23 Velocys, Inc. Process for cooling a product in a heat exchanger employing microchannels for the flow of refrigerant and product
US7014835B2 (en) * 2002-08-15 2006-03-21 Velocys, Inc. Multi-stream microchannel device
US20040226620A1 (en) * 2002-09-26 2004-11-18 Daniel Therriault Microcapillary networks
EP1415706B1 (en) * 2002-10-29 2017-07-12 Corning Incorporated Coated microstructure and method of manufacture
US20070053812A1 (en) * 2003-03-07 2007-03-08 Tosoh Corporation Minute flow path structure body and die
US7294734B2 (en) * 2003-05-02 2007-11-13 Velocys, Inc. Process for converting a hydrocarbon to an oxygenate or a nitrile
US7220390B2 (en) * 2003-05-16 2007-05-22 Velocys, Inc. Microchannel with internal fin support for catalyst or sorption medium
DE602004009681T2 (de) * 2003-05-16 2008-08-14 Velocys, Inc., Plain City Verfahren zur erzeugung einer emulsion durch verwendung einer mikrokanalverfahrentechnologie
US7485671B2 (en) * 2003-05-16 2009-02-03 Velocys, Inc. Process for forming an emulsion using microchannel process technology
US8580211B2 (en) * 2003-05-16 2013-11-12 Velocys, Inc. Microchannel with internal fin support for catalyst or sorption medium
US7141617B2 (en) * 2003-06-17 2006-11-28 The Board Of Trustees Of The University Of Illinois Directed assembly of three-dimensional structures with micron-scale features
US20060225463A1 (en) * 2003-07-31 2006-10-12 Takaki Sugimoto Master mold for duplicating fine structure and production method thereof
CA2535842C (en) * 2003-08-29 2012-07-10 Velocys Inc. Process for separating nitrogen from methane using microchannel process technology
EP1547676A1 (en) * 2003-12-24 2005-06-29 Corning Incorporated Porous membrane microstructure devices and methods of manufacture
EP1547675A1 (en) * 2003-12-24 2005-06-29 Corning Incorporated Coated microstructures and methods of coating same
US7029647B2 (en) * 2004-01-27 2006-04-18 Velocys, Inc. Process for producing hydrogen peroxide using microchannel technology
US7084180B2 (en) 2004-01-28 2006-08-01 Velocys, Inc. Fischer-tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor
US9023900B2 (en) 2004-01-28 2015-05-05 Velocys, Inc. Fischer-Tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor
US8747805B2 (en) 2004-02-11 2014-06-10 Velocys, Inc. Process for conducting an equilibrium limited chemical reaction using microchannel technology
US7744830B2 (en) * 2004-04-29 2010-06-29 Lawrence Livermore National Security, Llc Catalyst for microelectromechanical systems microreactors
JP2005349391A (ja) * 2004-06-10 2005-12-22 Corning Inc 気密ポートアセンブリおよびその製造方法
CA2574113C (en) * 2004-07-23 2014-02-18 Anna Lee Tonkovich Distillation process using microchannel technology
US7305850B2 (en) * 2004-07-23 2007-12-11 Velocys, Inc. Distillation process using microchannel technology
CN101023068B (zh) * 2004-08-12 2013-02-13 万罗赛斯公司 使用微通道工艺技术将乙烯转化成环氧乙烷的方法
EP1804964A1 (en) * 2004-10-01 2007-07-11 Velocys Inc. Multiphase mixing process using microchannel process technology
EP1817102A1 (en) * 2004-11-12 2007-08-15 Velocys, Inc. Process using microchannel technology for conducting alkylation or acylation reaction
CA2587546C (en) 2004-11-16 2013-07-09 Velocys Inc. Multiphase reaction process using microchannel technology
US20060120213A1 (en) * 2004-11-17 2006-06-08 Tonkovich Anna L Emulsion process using microchannel process technology
EP1679115A1 (en) * 2005-01-07 2006-07-12 Corning Incorporated High performance microreactor
DE102005003966A1 (de) * 2005-01-27 2006-08-10 Ehrfeld Mikrotechnik Bts Gmbh Vorrichtung zur kontinuierlichen Durchführung photochemischer Prozesse mit geringen optischen Schichtdicken, enger Verweilzeitverteilung und hohen Durchsätzen
US7507274B2 (en) * 2005-03-02 2009-03-24 Velocys, Inc. Separation process using microchannel technology
EP1890802A2 (en) * 2005-05-25 2008-02-27 Velocys, Inc. Support for use in microchannel processing
US20070004810A1 (en) * 2005-06-30 2007-01-04 Yong Wang Novel catalyst and fischer-tropsch synthesis process using same
EP1904223A2 (en) * 2005-07-08 2008-04-02 Velocys Inc. Catalytic reaction process using microchannel technology
US20070040501A1 (en) 2005-08-18 2007-02-22 Aitken Bruce G Method for inhibiting oxygen and moisture degradation of a device and the resulting device
US7829147B2 (en) 2005-08-18 2010-11-09 Corning Incorporated Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device
US7722929B2 (en) 2005-08-18 2010-05-25 Corning Incorporated Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device
JP4699140B2 (ja) * 2005-08-29 2011-06-08 東京応化工業株式会社 パターン形成方法
US20070123410A1 (en) 2005-11-30 2007-05-31 Morena Robert M Crystallization-free glass frit compositions and frits made therefrom for microreactor devices
KR100763907B1 (ko) * 2005-12-26 2007-10-05 삼성전자주식회사 미세유동 장치의 제조방법 및 그에 의하여 제조되는미세유동 장치
EP2275198A1 (en) 2006-05-11 2011-01-19 Corning Incorporated Microfluidic manifold devices
ES2329713T3 (es) * 2006-05-15 2009-11-30 Corning Incorporated Estructuras de vitroceramica y de vidrio sinterizadas y procedimientos de produccion.
WO2007131988A1 (en) * 2006-05-15 2007-11-22 Corning Incorporated Sintered glass and glass-ceramic structures and methods for producing
FR2903679B1 (fr) * 2006-07-17 2014-07-04 Centre Nat Rech Scient Fabrication de dispositifs microfluidiques polymeriques par impression photo-assistee.
FR2905690B1 (fr) * 2006-09-12 2008-10-17 Saint Gobain Procede de fabrication d'un dispositif microfluidique.
ATE494260T1 (de) * 2006-11-30 2011-01-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen
EP1939136A3 (en) * 2006-12-29 2013-03-27 Corning Incorporated High throughput pressure resistant microfluidic devices
WO2008085429A2 (en) * 2006-12-29 2008-07-17 Corning Incorporated Microfluidic structures with integrated devices
US20100104486A1 (en) * 2006-12-29 2010-04-29 Hoysan Steven F High Throughput Pressure Resistant Microfluidic Devices
FR2913109B1 (fr) * 2007-02-27 2009-05-01 Boostec Sa Procede de fabrication d'un dispositif de type echangeur de chaleur en ceramique et dispositifs obtenus par le procede.
EP1964816B1 (en) * 2007-02-28 2015-06-03 Corning Incorporated Methods for forming compositions containing glass
EP1964818A3 (en) * 2007-02-28 2008-09-10 Corning Incorporated Method for making microfluidic devices
ATE477220T1 (de) * 2007-02-28 2010-08-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen
EP2065347A1 (en) 2007-11-30 2009-06-03 Corning Incorporated Durable frit composition and composites and devices comprised thereof
US7956102B2 (en) 2007-04-09 2011-06-07 The Board Of Trustees Of The University Of Illinois Sol-gel inks
EP1992404B1 (en) 2007-05-15 2011-03-23 Corning Incorporated Microfluidic device and method for immiscible liquid - liquid reactions
EP1992403B1 (en) 2007-05-15 2011-03-09 Corning Incorporated Microfluidic self-sustaining oscillating mixers and devices and methods utilizing same
JP2010530294A (ja) * 2007-05-18 2010-09-09 コーニング インコーポレイテッド ガラスのマイクロ流体装置およびその製造方法
US7850861B1 (en) 2007-06-18 2010-12-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Microfluidic device, and related methods
US8206025B2 (en) * 2007-08-07 2012-06-26 International Business Machines Corporation Microfluid mixer, methods of use and methods of manufacture thereof
US7767135B2 (en) * 2007-10-19 2010-08-03 Corning Incorporated Method of forming a sintered microfluidic device
CN102105280B (zh) * 2008-09-12 2013-04-10 日本碍子株式会社 立体形成部制造方法
EP2172260A1 (en) 2008-09-29 2010-04-07 Corning Incorporated Multiple flow path microfluidic devices
US7922939B2 (en) * 2008-10-03 2011-04-12 The Board Of Trustees Of The University Of Illinois Metal nanoparticle inks
US8187500B2 (en) * 2008-10-17 2012-05-29 The Board Of Trustees Of The University Of Illinois Biphasic inks
EP2193844B1 (en) 2008-11-26 2012-03-14 Corning Incorporated Heat exchanger for microstructures
EP2193839B1 (en) 2008-11-28 2019-03-13 Corning Incorporated Devices for microreactor fluid distribution
JP2010210118A (ja) * 2009-03-09 2010-09-24 Jamco Corp 漏水防止用安全弁を備えた旅客機搭載用スチームオーブン
EP2233925A1 (en) 2009-03-26 2010-09-29 Corning Inc. Immobilization method for protein having low isoelectric point
TW201103626A (en) * 2009-04-28 2011-02-01 Corning Inc Microreactors with connectors sealed thereon; their manufacture
US8695639B2 (en) * 2009-05-07 2014-04-15 International Business Machines Corporation Multilayer microfluidic probe head and method of fabrication thereof
TW201114481A (en) 2009-05-11 2011-05-01 Corning Inc Modular reactor and system
US8214917B2 (en) * 2009-05-29 2012-07-03 Georgia Tech Research Corporation Molded microfluidic fluid cell for atomic force microscopy
US8356714B2 (en) * 2009-06-02 2013-01-22 Georgia Tech Research Corporation Microfluidic device for separation of particles
EP2287610A1 (en) 2009-08-20 2011-02-23 Corning Incorporated Thiol-modified surface immobilization article and method
KR101092379B1 (ko) 2009-09-03 2011-12-09 충남대학교산학협력단 고분자 필름을 이용한 마이크로 리액터 및 이의 제조방법
FR2951153A1 (fr) 2009-10-09 2011-04-15 Corning Inc Dispositif microfluidique
FR2953211B1 (fr) 2009-12-01 2013-08-30 Corning Inc Dispositif microfluidique comportant une membrane poreuse
FR2955508B1 (fr) * 2010-01-25 2012-03-30 Corning Inc Microreacteurs avec dispositif microfluidique plan et systeme d'application d'ultrasons ; mise en oeuvre de reactions chimiques en leur sein
WO2011102981A1 (en) 2010-02-22 2011-08-25 Corning Incorporated High resolution label free imaging
EP2409982A3 (en) 2010-02-25 2012-02-08 Corning Incorporated Chemical processes generating solid(s) carried out continuously within microreactors
EP2377607B1 (en) 2010-04-19 2018-05-30 Corning Incorporated Fluid connectors for microreactor modules
WO2011153047A1 (en) 2010-05-31 2011-12-08 Corning Incorporated Honeycomb-body-based fluidic interconnectors and methods
WO2011152393A1 (ja) * 2010-06-04 2011-12-08 日本碍子株式会社 液滴吐出ヘッドの製造方法
WO2012004423A1 (es) * 2010-07-07 2012-01-12 Ikerlan, S.Coop Método de fabricación de dispositivos microfluidicos.
EP2422874A1 (en) * 2010-08-31 2012-02-29 Corning Incorporated Fluidic modules with enhanced thermal characteristics
EP2457886B1 (en) 2010-11-29 2014-04-02 Corning Incorporated Sulfonation in continuous-flow microreactors
FR2967923A1 (fr) 2010-11-30 2012-06-01 Corning Inc Structure organo-metallique utilisable notamment comme catalyseur, ainsi que son procede de fabrication
EP2457658B1 (en) * 2010-11-30 2013-07-10 Corning Incorporated Direct sealing of glass microstructures
CN102749443B (zh) * 2011-04-22 2014-10-01 国家纳米科学中心 双层微流控芯片器件及其在免疫检测中的用途
US9291802B2 (en) 2011-04-29 2016-03-22 Corning Incorporated Compact label free imaging system
WO2012162286A1 (en) 2011-05-26 2012-11-29 Corning Incorporated High resolution label-free sensor
WO2012166756A1 (en) 2011-05-31 2012-12-06 Corning Incorporated Twist flow microfluidic mixer and module
WO2013039738A1 (en) 2011-09-12 2013-03-21 Corning Incorporated Apparatus for temperature controlled label free assays
WO2013082347A1 (en) 2011-11-30 2013-06-06 Corning Incorporated Fluidic module permanent stack assemblies and methods
EP2617703B1 (en) 2012-01-17 2014-07-30 Corning Incorporated Improved catalyzed hypohalous oxidation of alcohol groups
US9108196B1 (en) 2012-01-24 2015-08-18 Stratedigm, Inc. Method and apparatus for control of fluid flow or fluid suspended particle flow in a microfluidic channel
WO2013123213A1 (en) 2012-02-16 2013-08-22 Dow Corning Corporation Method of reducing a halosilane compound in a microreactor
CN104204289A (zh) 2012-02-16 2014-12-10 道康宁公司 形成含准金属材料的沉积系统和方法
GB201214122D0 (en) 2012-08-07 2012-09-19 Oxford Catalysts Ltd Treating of catalyst support
EP2719460B1 (en) * 2012-10-12 2016-12-14 Sony DADC Austria AG Microfluidic devices
US20170166690A1 (en) 2013-11-27 2017-06-15 Corning Incorporated Advanced flow reactor synthesis of semiconducting polymers
WO2016201218A2 (en) 2015-06-12 2016-12-15 Velocys, Inc. Synthesis gas conversion process
US10821707B2 (en) * 2018-05-17 2020-11-03 Vaon, Llc Multi-layer, flat glass structures
RU2658495C1 (ru) * 2017-08-16 2018-06-21 Общество с ограниченной ответственностью Научно-технический центр "БиоКлиникум" Оснастка для изготовления заготовки микрофлюидного чипа, заготовка микрофлюидного чипа и способ ее получения, микрофлюидный чип и способ его получения
US11150215B2 (en) * 2017-09-28 2021-10-19 International Business Machines Corporation Microfluidic device with laterally insertable electrodes
EP4288289A1 (en) * 2021-02-04 2023-12-13 Universiteit Maastricht A method for manufacturing a structure with at least one microchannel for fluid
NL2029995B1 (nl) * 2021-12-02 2023-06-20 Louwershanique B V Werkwijze voor het vervaardigen van ten minste een verbindingsglas-preform om een glasmetaalverbinding, glas-glasverbinding of glaskeramiekverbinding te verschaffen
CN115178199B (zh) * 2022-05-31 2024-04-30 清华大学 无源微流控微反应器以及微流控芯片

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3587607A (en) * 1969-01-02 1971-06-28 Reglerwerk Dresden Veb Fluidic block assembly
GB1566558A (en) * 1976-09-03 1980-05-08 Standard Telephones Cables Ltd Large liquid crystal cells
US4110140A (en) * 1976-12-15 1978-08-29 Johnson Controls, Inc. Method of making fluid system circuit board
KR960008015B1 (ko) * 1986-10-17 1996-06-19 보드 오브 리젼츠, 디 유니버시티 오브 텍사스 시스템 선택적 소결에 의한 부품의 제조 방법 및 장치
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
SE470347B (sv) * 1990-05-10 1994-01-31 Pharmacia Lkb Biotech Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system
JPH08187718A (ja) * 1995-01-11 1996-07-23 Sumitomo Kinzoku Electro Device:Kk 薄グリーンシートの製造方法
DE19511603A1 (de) * 1995-03-30 1996-10-02 Norbert Dr Ing Schwesinger Vorrichtung zum Mischen kleiner Flüssigkeitsmengen
US5853446A (en) * 1996-04-16 1998-12-29 Corning Incorporated Method for forming glass rib structures
US5964239A (en) * 1996-05-23 1999-10-12 Hewlett-Packard Company Housing assembly for micromachined fluid handling structure
JPH1076156A (ja) * 1996-09-04 1998-03-24 Hosokawa Micron Corp 粉粒体の加工装置および加工方法
US5993750A (en) * 1997-04-11 1999-11-30 Eastman Kodak Company Integrated ceramic micro-chemical plant
JP3618511B2 (ja) * 1997-04-14 2005-02-09 オリンパス株式会社 微小流路素子
JP3657448B2 (ja) 1998-12-22 2005-06-08 株式会社資生堂 液体クロマトグラフィー用ポリマー充填剤およびその製造方法
US6572830B1 (en) * 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6210986B1 (en) * 1999-09-23 2001-04-03 Sandia Corporation Microfluidic channel fabrication method
FR2830206B1 (fr) * 2001-09-28 2004-07-23 Corning Inc Dispositif microfluidique et sa fabrication

Also Published As

Publication number Publication date
US20040206391A1 (en) 2004-10-21
JP2005503923A (ja) 2005-02-10
US20030062089A1 (en) 2003-04-03
US6595232B2 (en) 2003-07-22
FR2830206B1 (fr) 2004-07-23
EP1440308A4 (en) 2007-10-31
US6769444B2 (en) 2004-08-03
FR2830206A1 (fr) 2003-04-04
US7007709B2 (en) 2006-03-07
EP1440308B1 (en) 2016-04-13
EP1440308A1 (en) 2004-07-28
WO2003029803A1 (en) 2003-04-10
US20030192587A1 (en) 2003-10-16

Similar Documents

Publication Publication Date Title
JP4634035B2 (ja) 超小型流体素子及びその作製
JP2005503923A5 (https=)
CN1708351B (zh) 涂覆的微结构及其制造方法
US6425972B1 (en) Methods of manufacturing microfabricated substrates
US5882465A (en) Method of manufacturing microfluidic devices
CN110621953B (zh) 热管理平面
EP1708806B1 (en) Porous membrane microstructure device
JP2005336049A (ja) 高熱効率ガラスマイクロチャンネル及びその形成方法
US8534307B2 (en) Methods and devices for fluid handling
CN102482075A (zh) 在烧结过程中具有受控的压缩的层状烧结微流体装置以及相关方法
EP2099708A1 (en) Method for making microfluidic devices and devices resulting
KR20050098229A (ko) 다중 채널 및 다중층 제약장치
CN103460336A (zh) 玻璃上的微器件
WO2003022571A1 (en) Process for the production of patterned ceramic green-sheets and multilayered ceramic devices
CN119365970A (zh) 半导体制造装置用部件
US20050077657A1 (en) A Method of Making a Multichannel and Multilayer Pharmaceutical Device
CN1939837B (zh) 显微结构
JP2003170411A (ja) セラミックス成形体およびその製造方法
JP4262975B2 (ja) ガラス基板マイクロチップの製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050913

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050913

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080125

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080129

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080430

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080509

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080529

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080605

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080630

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080707

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20080729

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20091215

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100415

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20100526

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20101019

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20101118

R150 Certificate of patent or registration of utility model

Ref document number: 4634035

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131126

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees