JP4632689B2 - 熱式の質量流量計 - Google Patents
熱式の質量流量計 Download PDFInfo
- Publication number
- JP4632689B2 JP4632689B2 JP2004140852A JP2004140852A JP4632689B2 JP 4632689 B2 JP4632689 B2 JP 4632689B2 JP 2004140852 A JP2004140852 A JP 2004140852A JP 2004140852 A JP2004140852 A JP 2004140852A JP 4632689 B2 JP4632689 B2 JP 4632689B2
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- JP
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- Prior art keywords
- temperature
- measurement
- heater
- flow
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005259 measurement Methods 0.000 claims description 58
- 238000004804 winding Methods 0.000 claims description 26
- 238000011144 upstream manufacturing Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 238000009529 body temperature measurement Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 18
- 238000000691 measurement method Methods 0.000 description 13
- 239000007788 liquid Substances 0.000 description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
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- 230000007704 transition Effects 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 238000012804 iterative process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 101100477837 Arabidopsis thaliana SMU2 gene Proteins 0.000 description 1
- 101100115778 Caenorhabditis elegans dac-1 gene Proteins 0.000 description 1
- 101100477838 Caenorhabditis elegans smu-2 gene Proteins 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000005514 two-phase flow Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Description
−与えられた低い最大範囲にわたって真のゼロ値から流量を測定するTB(熱平衡)法
−与えられた比較的低い最大範囲にわたってほぼゼロから流量を測定するCP(定電力)法
−与えられた閾値(検出すべき最小流量の下限)から非常に高い流量値まで流量を測定するCT(定温度)法
3 ヒーター(ヒーターH1)
4 ヒーター(ヒーターH2)
SMU1 制御手段及び温度測定手段(ソース測定ユニット)
SMU2 制御手段及び温度測定手段(ソース測定ユニット)
Claims (6)
- 熱式の質量流量計であって、瞬時の流量に対応して、複数の測定モードの間での切換えによって測定するように、単一の流量センサーが制御手段および温度測定手段に接続されている熱式の質量流量計において、流量センサーは、上流位置AにヒーターH 1 そして下流位置BにヒーターH 2 が、さらに、位置AとBとの間の温度差を求めるための手段が設けられているキャリヤーを有し、
制御手段および温度測定手段は、互いに隣接しあるいは重複範囲をもつ三つの測定範囲で測定可能であり、測定範囲に応じて、次の三つのモードのいずれかに切換え可能となっていることを特徴とする熱式の質量流量計。
−流量がゼロから始まる範囲で、温度測定手段にもとづき制御手段が、ヒーターH 1 とH 2 とに交互に電力を供給し、位置AとBとの間の温度差がゼロとなるように反復して調整される熱平衡モード。
−温度測定手段にもとづき制御手段が、一定電力でヒーターH 1 とH 2 を作動させ、位置AとBの間の温度を測定するように調整される定電力モード。
−流量が閾値より多い範囲で、温度測定手段にもとづき制御手段が、位置AとBとの間の温度差を一定値に保つようにヒーターH 1 とH 2 を作動させるように調整される定温度モード。 - ヒーターH1およびH2は、キャリヤーとしての流管によって抵抗線の電気巻線をなして支持されていることとする請求項1に記載の熱式の質量流量計。
- 両ヒーターの電気巻線は感温抵抗材料で作られていて、加熱抵抗としてそして温度センサーとして機能していることとする請求項2に記載の熱式の質量流量計。
- ヒーターH1およびH2は、キャリヤーとしての平面状の基板上の導体トラックの形態で設けられていることとする請求項1に記載の熱式の質量流量計。
- 位置AとBとの間の温度差を求めるための手段は、ヒーターH1とヒーターH2との間に設けられ、かつ、一方で位置Aに、他方で位置Bに、熱的に結合された熱電対列を有することとする請求項1に記載の熱式の質量流量計。
- 用いられる測定範囲は、起動時の低い測定範囲値から順にオンに切り換えられることとする請求項1に記載の熱式の質量流量計。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1023405A NL1023405C2 (nl) | 2003-05-13 | 2003-05-13 | Massadebietmeter. |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004340961A JP2004340961A (ja) | 2004-12-02 |
JP4632689B2 true JP4632689B2 (ja) | 2011-02-16 |
Family
ID=33029104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004140852A Expired - Lifetime JP4632689B2 (ja) | 2003-05-13 | 2004-05-11 | 熱式の質量流量計 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6988400B2 (ja) |
EP (1) | EP1477779B1 (ja) |
JP (1) | JP4632689B2 (ja) |
NL (1) | NL1023405C2 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7243538B1 (en) * | 2005-12-22 | 2007-07-17 | Honeywell International Inc. | Gas flow sensor system and method of self-calibration |
NL1032007C2 (nl) | 2006-06-14 | 2007-12-17 | Berkin Bv | Stromingssensor van het thermische type. |
US20080028848A1 (en) * | 2006-08-07 | 2008-02-07 | David Allan Christensen | Method and system for dynamic compensation of bi-directional flow sensor during respiratory therapy |
US7874208B2 (en) * | 2007-10-10 | 2011-01-25 | Brooks Instrument, Llc | System for and method of providing a wide-range flow controller |
US7971480B2 (en) * | 2008-10-13 | 2011-07-05 | Hitachi Metals, Ltd. | Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements |
EP2535510B1 (en) * | 2008-12-05 | 2016-11-16 | Cameron International Corporation | Sub-sea chemical injection metering valve |
US9187980B2 (en) | 2009-05-04 | 2015-11-17 | Onesubsea Ip Uk Limited | System and method of providing high pressure fluid injection with metering using low pressure supply lines |
US10330513B2 (en) * | 2009-05-27 | 2019-06-25 | Honeywell International Inc. | Multi-dynamic-range sensor |
CN102141564A (zh) * | 2010-12-14 | 2011-08-03 | 河南理工大学 | 煤体瓦斯解析速度自动检测仪 |
JPWO2012090914A1 (ja) * | 2010-12-27 | 2014-06-05 | 株式会社 資生堂 | 質量分析方法、質量分析計及び質量分析システム |
US8927926B2 (en) * | 2010-12-27 | 2015-01-06 | Shiseido Company, Ltd. | Mass spectrometry method, ion production device, and mass spectrometry system |
US8522624B2 (en) | 2011-03-02 | 2013-09-03 | Cameron International Corporation | System and method for pressure balancing a flow meter |
JP5969760B2 (ja) * | 2011-12-27 | 2016-08-17 | 株式会社堀場エステック | 熱式流量センサ |
US8820175B1 (en) | 2013-09-10 | 2014-09-02 | King Fahd University Of Petroleum And Minerals | Sensor for two-phase flow measurements |
US9365271B2 (en) | 2013-09-10 | 2016-06-14 | Cameron International Corporation | Fluid injection system |
DE102013114486A1 (de) * | 2013-12-19 | 2015-06-25 | Innovative Sensor Technology Ist Ag | Vorrichtung und Verfahren zum Bestimmen des Durchflusses eines Mediums |
WO2016044866A1 (en) * | 2014-09-18 | 2016-03-24 | Csir | Electronically deriving a conclusion of the condition of slurry flow in a non-vertical conduit |
US11377949B2 (en) * | 2017-06-05 | 2022-07-05 | Schlumberger Technology Corporation | Multiphase flow metering |
CN108051610B (zh) * | 2017-10-16 | 2022-04-12 | 东南大学 | 一种智能双检测模式的风速风向传感器及测量方法 |
DE102018105046B4 (de) | 2018-03-06 | 2023-05-04 | Endress+Hauser Flowtec Ag | Thermisches Durchflussmessgerät |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59174719A (ja) * | 1983-03-16 | 1984-10-03 | ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 流体の流量測定方法及び装置 |
JPH04505211A (ja) * | 1989-02-18 | 1992-09-10 | エンドレス アンド ハウザー リミテッド | 流速計 |
JPH11326003A (ja) * | 1998-03-20 | 1999-11-26 | Berkin Bv | 媒体流量計 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4461173A (en) * | 1982-05-17 | 1984-07-24 | Sierra Instruments, Inc. | Multirange flowmeter |
US4800754A (en) * | 1987-10-07 | 1989-01-31 | Sierra Instruments, Inc. | Wide-range, adjustable flowmeter |
EP1041367A4 (en) * | 1997-12-15 | 2005-08-17 | Tokyo Gas Co Ltd | FLOW METER |
NL1014797C2 (nl) * | 2000-03-30 | 2001-10-02 | Berkin Bv | Massadebietmeter. |
-
2003
- 2003-05-13 NL NL1023405A patent/NL1023405C2/nl not_active IP Right Cessation
-
2004
- 2004-04-28 EP EP04076257.7A patent/EP1477779B1/en not_active Expired - Lifetime
- 2004-05-11 JP JP2004140852A patent/JP4632689B2/ja not_active Expired - Lifetime
- 2004-05-12 US US10/843,412 patent/US6988400B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59174719A (ja) * | 1983-03-16 | 1984-10-03 | ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 流体の流量測定方法及び装置 |
JPH04505211A (ja) * | 1989-02-18 | 1992-09-10 | エンドレス アンド ハウザー リミテッド | 流速計 |
JPH11326003A (ja) * | 1998-03-20 | 1999-11-26 | Berkin Bv | 媒体流量計 |
Also Published As
Publication number | Publication date |
---|---|
US6988400B2 (en) | 2006-01-24 |
JP2004340961A (ja) | 2004-12-02 |
EP1477779A1 (en) | 2004-11-17 |
NL1023405C2 (nl) | 2004-11-18 |
EP1477779B1 (en) | 2016-10-19 |
US20040226360A1 (en) | 2004-11-18 |
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