JP4628935B2 - 不揮発性半導体記憶装置 - Google Patents
不揮発性半導体記憶装置 Download PDFInfo
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- JP4628935B2 JP4628935B2 JP2005335069A JP2005335069A JP4628935B2 JP 4628935 B2 JP4628935 B2 JP 4628935B2 JP 2005335069 A JP2005335069 A JP 2005335069A JP 2005335069 A JP2005335069 A JP 2005335069A JP 4628935 B2 JP4628935 B2 JP 4628935B2
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- lower electrode
- recording layer
- semiconductor memory
- memory device
- nonvolatile semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims description 46
- 239000010410 layer Substances 0.000 claims description 86
- 239000011229 interlayer Substances 0.000 claims description 39
- 239000012782 phase change material Substances 0.000 claims description 27
- 239000011159 matrix material Substances 0.000 claims description 4
- 230000015654 memory Effects 0.000 description 31
- 239000000463 material Substances 0.000 description 28
- 239000011810 insulating material Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 230000020169 heat generation Effects 0.000 description 10
- 150000004770 chalcogenides Chemical class 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910021332 silicide Inorganic materials 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910000763 AgInSbTe Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910005537 GaSeTe Inorganic materials 0.000 description 1
- 229910005872 GeSb Inorganic materials 0.000 description 1
- 229910005898 GeSn Inorganic materials 0.000 description 1
- 229910005900 GeTe Inorganic materials 0.000 description 1
- 229910018321 SbTe Inorganic materials 0.000 description 1
- 229910018219 SeTe Inorganic materials 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910006913 SnSb Inorganic materials 0.000 description 1
- 229910004284 Te81Ge15Sb2S2 Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910008482 TiSiN Inorganic materials 0.000 description 1
- 229910008807 WSiN Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- FESBVLZDDCQLFY-UHFFFAOYSA-N sete Chemical compound [Te]=[Se] FESBVLZDDCQLFY-UHFFFAOYSA-N 0.000 description 1
- -1 silicide nitride Chemical class 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/82—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays the switching components having a common active material layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8825—Selenides, e.g. GeSe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8413—Electrodes adapted for resistive heating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/884—Switching materials based on at least one element of group IIIA, IVA or VA, e.g. elemental or compound semiconductors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Description
11 下部電極
11a 下部電極の上面
11b 下部電極の底面
11x X方向に延在する帯状領域
11y Y方向に延在する帯状領域
12,16,111〜113 層間絶縁膜
12a 開口部
13 記録層
14 上部電極
15a 下部電極と記録層が接触する露出領域
15b 下部電極と記録層が接触しない露出領域
17,108,121,122 コンタクトプラグ
18 ビット線
101 ロウデコーダ
102 カラムデコーダ
103 トランジスタ
104 素子分離領域
105 活性領域
106 拡散領域
107 ゲート電極
109 グランド配線
113a スルーホール
113b 層間絶縁膜の上面
114 絶縁材
W1〜Wn ワード線
B1〜Bm ビット線
MC メモリセル
P 相変化領域
Claims (7)
- マトリクス状に配置され、上面がリング状である複数の下部電極と、前記下部電極上に設けられ、相変化材料を含む複数の記録層パターンと、前記下部電極と前記記録層パターンとの間に設けられ、前記下部電極の一部を露出させる複数の開口部を有する層間絶縁膜とを備え、前記下部電極と前記記録層パターンとが前記開口部にて接触して接続されている不揮発性半導体記録装置であって、
前記複数の開口部は第1の方向へ互いに平行に連続的に延在し、前記記録層パターンは前記第1の方向と交差する第2の方向へ互いに平行に連続的に延在していることを特徴とする不揮発性半導体記録装置。 - 前記第1の方向と前記第2の方向は、互いにほぼ90°の角度を成していることを特徴とする請求項1に記載の不揮発性半導体記憶装置。
- 前記下部電極の前記上面は、前記第2の方向に延在する帯状領域を含んでおり、前記開口部は、前記帯状領域の少なくとも一部を露出させる位置に形成されていることを特徴とする請求項1又は2に記載の不揮発性半導体記憶装置。
- 前記開口部は、前記下部電極の前記上面を2箇所ずつ露出させる位置に形成されていることを特徴とする請求項3に記載の不揮発性半導体記憶装置。
- 前記記録層パターンは、前記下部電極の露出した2箇所のうち、片方のみと接触する位置に形成されていることを特徴とする請求項4に記載の不揮発性半導体記憶装置。
- 前記開口部は、前記下部電極の前記上面を1箇所ずつ露出させる位置に形成されていることを特徴とする請求項3に記載の不揮発性半導体記憶装置。
- 前記記録層パターンは、前記下部電極の露出した箇所のうち、一部分のみと接触する位置に形成されていることを特徴とする請求項6に記載の不揮発性半導体記憶装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005335069A JP4628935B2 (ja) | 2005-11-19 | 2005-11-19 | 不揮発性半導体記憶装置 |
US11/594,879 US7528402B2 (en) | 2005-11-19 | 2006-11-09 | Electrically rewritable non-volatile memory element |
TW095141693A TWI335663B (en) | 2005-11-19 | 2006-11-10 | Electrically rewritable non-volatile memory element |
CN200610149326A CN100595930C (zh) | 2005-11-19 | 2006-11-20 | 电可重写非易失存储元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005335069A JP4628935B2 (ja) | 2005-11-19 | 2005-11-19 | 不揮発性半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007142224A JP2007142224A (ja) | 2007-06-07 |
JP4628935B2 true JP4628935B2 (ja) | 2011-02-09 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005335069A Active JP4628935B2 (ja) | 2005-11-19 | 2005-11-19 | 不揮発性半導体記憶装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7528402B2 (ja) |
JP (1) | JP4628935B2 (ja) |
CN (1) | CN100595930C (ja) |
TW (1) | TWI335663B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI336128B (en) * | 2007-05-31 | 2011-01-11 | Ind Tech Res Inst | Phase change memory devices and fabrication methods thereof |
KR100911473B1 (ko) * | 2007-06-18 | 2009-08-11 | 삼성전자주식회사 | 상변화 메모리 유닛, 이의 제조 방법, 이를 포함하는상변화 메모리 장치 및 그 제조 방법 |
DE102008032067A1 (de) * | 2007-07-12 | 2009-01-15 | Samsung Electronics Co., Ltd., Suwon | Verfahren zum Bilden von Phasenänderungsspeichern mit unteren Elektroden |
US7981755B2 (en) * | 2007-10-25 | 2011-07-19 | International Business Machines Corporation | Self aligned ring electrodes |
US20090230375A1 (en) * | 2008-03-17 | 2009-09-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Phase Change Memory Device |
US7990761B2 (en) * | 2008-03-31 | 2011-08-02 | Ovonyx, Inc. | Immunity of phase change material to disturb in the amorphous phase |
KR101574746B1 (ko) | 2009-03-04 | 2015-12-07 | 삼성전자주식회사 | 가변저항 메모리 소자 및 그 형성 방법 |
CN103222005B (zh) | 2009-12-31 | 2016-08-24 | 美光科技公司 | 用于相变存储器阵列的方法 |
JP5831687B2 (ja) * | 2011-07-22 | 2015-12-09 | ソニー株式会社 | 記憶装置およびその製造方法 |
CN110783454B (zh) * | 2019-09-24 | 2021-03-09 | 华中科技大学 | 纳米级相变存储器单元电极配置结构的加工方法 |
CN110767802B (zh) * | 2019-09-24 | 2021-03-09 | 华中科技大学 | 用于纳米级相变存储器单元的电极配置结构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003174144A (ja) * | 2001-12-05 | 2003-06-20 | Stmicroelectronics Srl | 半導体装置における微小コンタクト領域、高性能相変化メモリセル及びその製造方法 |
JP2003229537A (ja) * | 2002-02-01 | 2003-08-15 | Hitachi Ltd | 半導体記憶装置及びその製造方法 |
JP2003332530A (ja) * | 2002-05-10 | 2003-11-21 | Hewlett Packard Co <Hp> | 相変化材料の電子メモリ構造 |
WO2004032256A1 (en) * | 2002-08-21 | 2004-04-15 | Ovonyx, Inc. | Utilizing atomic layer deposition for programmable device |
JP2004158854A (ja) * | 2002-11-01 | 2004-06-03 | Samsung Electronics Co Ltd | 相変換記憶素子及びその製造方法 |
Family Cites Families (1)
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US6972430B2 (en) | 2002-02-20 | 2005-12-06 | Stmicroelectronics S.R.L. | Sublithographic contact structure, phase change memory cell with optimized heater shape, and manufacturing method thereof |
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2005
- 2005-11-19 JP JP2005335069A patent/JP4628935B2/ja active Active
-
2006
- 2006-11-09 US US11/594,879 patent/US7528402B2/en active Active
- 2006-11-10 TW TW095141693A patent/TWI335663B/zh active
- 2006-11-20 CN CN200610149326A patent/CN100595930C/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003174144A (ja) * | 2001-12-05 | 2003-06-20 | Stmicroelectronics Srl | 半導体装置における微小コンタクト領域、高性能相変化メモリセル及びその製造方法 |
JP2003229537A (ja) * | 2002-02-01 | 2003-08-15 | Hitachi Ltd | 半導体記憶装置及びその製造方法 |
JP2003332530A (ja) * | 2002-05-10 | 2003-11-21 | Hewlett Packard Co <Hp> | 相変化材料の電子メモリ構造 |
WO2004032256A1 (en) * | 2002-08-21 | 2004-04-15 | Ovonyx, Inc. | Utilizing atomic layer deposition for programmable device |
JP2004158854A (ja) * | 2002-11-01 | 2004-06-03 | Samsung Electronics Co Ltd | 相変換記憶素子及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20070114510A1 (en) | 2007-05-24 |
US7528402B2 (en) | 2009-05-05 |
CN1967861A (zh) | 2007-05-23 |
JP2007142224A (ja) | 2007-06-07 |
TWI335663B (en) | 2011-01-01 |
CN100595930C (zh) | 2010-03-24 |
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