JP4625376B2 - 電子ビームによる検査方法 - Google Patents

電子ビームによる検査方法 Download PDF

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Publication number
JP4625376B2
JP4625376B2 JP2005176063A JP2005176063A JP4625376B2 JP 4625376 B2 JP4625376 B2 JP 4625376B2 JP 2005176063 A JP2005176063 A JP 2005176063A JP 2005176063 A JP2005176063 A JP 2005176063A JP 4625376 B2 JP4625376 B2 JP 4625376B2
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Japan
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electron beam
inspection
image
resistance
voltage
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JP2005176063A
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Japanese (ja)
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JP2005354085A (ja
JP2005354085A5 (https=
Inventor
英利 西山
真理 野副
博之 品田
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Hitachi Ltd
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Hitachi Ltd
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  • Analysing Materials By The Use Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2005176063A 2000-02-22 2005-06-16 電子ビームによる検査方法 Expired - Fee Related JP4625376B2 (ja)

Priority Applications (1)

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JP2005176063A JP4625376B2 (ja) 2000-02-22 2005-06-16 電子ビームによる検査方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000050501 2000-02-22
JP2005176063A JP4625376B2 (ja) 2000-02-22 2005-06-16 電子ビームによる検査方法

Related Parent Applications (1)

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JP2000276640A Division JP4015352B2 (ja) 2000-02-22 2000-09-07 荷電粒子ビームを用いた検査方法

Publications (3)

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JP2005354085A JP2005354085A (ja) 2005-12-22
JP2005354085A5 JP2005354085A5 (https=) 2006-11-24
JP4625376B2 true JP4625376B2 (ja) 2011-02-02

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JP2005176063A Expired - Fee Related JP4625376B2 (ja) 2000-02-22 2005-06-16 電子ビームによる検査方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12306241B2 (en) 2022-02-14 2025-05-20 Innovatum Instruments Inc. Automated probe landing

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4891036B2 (ja) * 2006-11-16 2012-03-07 ルネサスエレクトロニクス株式会社 半導体装置の製造方法および半導体検査装置
JP5103050B2 (ja) * 2007-04-06 2012-12-19 株式会社日立ハイテクノロジーズ 電子線応用装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743433A (ja) * 1993-07-30 1995-02-14 Advantest Corp 電子ビームテスタ及びそれを使ったｉｃ試験装置
US6504393B1 (en) * 1997-07-15 2003-01-07 Applied Materials, Inc. Methods and apparatus for testing semiconductor and integrated circuit structures
JP3724949B2 (ja) * 1998-05-15 2005-12-07 株式会社東芝 基板検査装置およびこれを備えた基板検査システム並びに基板検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12306241B2 (en) 2022-02-14 2025-05-20 Innovatum Instruments Inc. Automated probe landing

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JP2005354085A (ja) 2005-12-22

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