JP4594073B2 - Connection terminal and electronic component storage package and electronic device using the same - Google Patents

Description

  The present invention relates to a connection terminal used in a signal input or signal output unit of an electronic component storage package for storing an electronic component that operates by an electric signal, and an electronic component storage package and an electronic apparatus using the connection terminal. is there.

  A conventional connection terminal for transmitting a high frequency signal such as a microwave band or a millimeter wave band, and an electronic component storage package (hereinafter also referred to as a package) for accommodating electronic components in an airtight manner are shown in FIGS. 4 and 5, respectively.

In FIG. 4, 104a is a rectangular substrate made of a dielectric material such as alumina (Al ₂ O ₃ ) ceramic, aluminum nitride (AlN) ceramic, mullite (3Al ₂ O ₃ · 2SiO ₂ ) ceramic, The upper surface has a line conductor 104c formed from one side to the opposite opposite side and made of a metallized layer such as tungsten (W), molybdenum (Mo), etc., and the lower surface has a metallized layer similar to the line conductor 104c on the entire surface. A lower ground conductor 104d is formed. Al ₂ O ₃ ceramics, AlN ceramics, 3Al ₂ O ₃ .2SiO ₂ having the upper ground conductor 104e on the upper surface and joined to the upper surface of the substrate 104a across the line conductor 104c. A wall body 104b made of a dielectric material such as ceramics is attached. Side ground conductors 104f made of a metallized layer similar to the line conductor 104c are formed on the side surfaces of the base body 104a and the wall body 104b (see, for example, Patent Document 1 below). In FIG. 4, the hatched portion indicates that metallization is performed.

  The distance between the line conductor 104c and the lower ground conductor 104d is adjusted by appropriately adjusting the thickness of the base body 104a in accordance with the frequency of the high-frequency signal transmitted through the line conductor 104c. Match the characteristic impedance. Thus, by matching the line conductor 104c to the characteristic impedance, the transmission efficiency of the high-frequency signal transmitted through the line conductor 104c can be improved.

  As described above, the connection terminal 104 includes the base body 104a and the wall body 104b, and is airtightly sealed inside and outside the package by being joined to the attachment portion 102a of the frame body 102 so that the wall body 104b is fitted. The inside is sealed.

  Further, as shown in FIG. 5, an optical semiconductor element storage package (hereinafter also referred to as an optical communication package), which is a kind of electronic component storage package, has an LD (semiconductor laser), PD (photodiode), etc. on its upper surface. Iron (Fe) -nickel having a mounting portion 101a on which the electronic component 109 of the optical semiconductor element is mounted and a screwing hole 101b to be screwed to an external electric circuit board (not shown) A substantially rectangular support 101 made of a metal such as (Ni) -cobalt (Co) alloy or copper (Cu) -tungsten (W) alloy is provided. Further, it is joined to the upper surface of the support 101 via a brazing material such as silver (Ag) brazing so as to surround the mounting portion 101a, and the electronic component 109 and an external electric circuit ( A fitting portion 102a for fitting a connection terminal 104 is formed for electrical connection to a not-shown), and a through hole 102b is an optical transmission path for optically coupling the electronic component 109 to one side of the short side. And a substantially rectangular frame 102 made of a metal such as an Fe—Ni—Co alloy. A cylindrical optical fiber fixing member (hereinafter also referred to as a fixing member) 103 made of a metal such as an Fe—Ni—Co alloy for fixing the optical fiber 108 is joined to the through hole 102b by a brazing material such as Ag brazing. .

  Then, the connection terminal 104 shown in FIG. 4 is joined to the mounting portion 102a via a brazing material such as Ag brazing, and the lead terminal 105 is joined to the end of the line conductor 104c outside the frame body 102 using a brazing material such as Ag brazing. Join. In addition, the electronic component 109 such as an optical semiconductor element is mounted and fixed on the mounting portion 101a, and the vicinity of the tip portion inside the frame body 102 of the line conductor 104c and the optical semiconductor element are electrically connected by a bonding wire (not shown). After the optical axis of the optical fiber 108 and the optical semiconductor element is adjusted, a metal holder 107 in which the optical fiber 108 is attached with an adhesive such as a resin is seamed to the end surface of the fixing member 103 on the outer side of the frame 102. Join by welding. Further, a seal ring 106 made of a metal such as an Fe—Ni—Co alloy is joined to the upper surfaces of the frame body 102 and the connection terminal 104 using a brazing material such as Ag brazing, and a lid (not shown) is attached to the upper surfaces thereof. By joining by seam welding or the like, an optical semiconductor device which is a kind of electronic device as a product is obtained (for example, see Patent Document 1 below).

  In such an optical semiconductor device, after being screwed to an external electric circuit board, an optical semiconductor element which is the electronic component 109 is optically excited by a drive signal supplied from the external electric circuit, and excited laser light or the like is emitted. By transmitting / receiving to / from the fiber 108 and transmitting through the optical fiber 108, it functions as a photoelectric conversion device capable of transmitting a large amount of information at high speed, and is often used in the field of optical communication and the like.

As a method for manufacturing the package, each member to be a package such as the connection terminal 104, the lead terminal 105, the support body 101, and the frame body 102 is placed in a carbon jig provided with a recess, The members were brazed and joined in a state where the members were accurately aligned at predetermined positions (see, for example, Patent Documents 2 and 3 below).
JP 2003-31280 JP 2004-186202 A Japanese Unexamined Patent Publication No. 2000-10101

  However, when the conventional connection terminal 104 and the lead terminal 105 as shown in Patent Document 1 are placed in a carbon jig and brazed, or the conventional connection terminal 104 is made of carbon. When brazing to a package using a tool, the connecting terminal 104 and the carbon jig are rubbed, and powdery carbon adheres to the area where the connecting terminal 104 contacts the carbon jig was there. In particular, if powdered carbon adheres to the base 104a in the vicinity of the line conductor 104c, a plurality of line conductors 104c formed on the connection terminal 104 may be electrically short-circuited, or the line conductor 104c In some cases, the side ground conductor 104f is electrically short-circuited, and an electric signal cannot be transmitted to the line conductor 104c. As a result, there has been a problem that the electronic component 109 housed in the package cannot be operated normally.

  Recently, the electric signal transmitted through the line conductor 104c has become a high frequency signal, and in order to match the impedance of the electric signal, the distance between the line conductor 104c and the lower ground conductor 104d is short. It has become necessary to. For this reason, the base body 104a tends to be thin, and an electrical short circuit between the line conductor 104c and the lower ground conductor 104d is particularly likely to occur.

  Accordingly, the present invention has been completed in view of the above problems, and an object thereof is to improve the operability of electronic components by preventing an electrical short circuit of a line conductor of a connection terminal.

The connection terminal according to the present invention has a rectangular shape and a base having a groove-like notch formed between upper and lower surfaces on the side surface, and is attached to the upper surface of the base, and an end portion of the notch A connection terminal comprising: a line conductor extending to an edge; a wall attached to the upper surface of the base so as to cross the line conductor; and a lower ground conductor formed on the lower surface of the base. The notch is located between the line conductor and the lower ground conductor, and the line conductor and the lower ground conductor are electrically insulated .

In the connection terminal according to the present invention, it is preferable that the width of the notch is wider than the width of the line conductor.

  The electronic component storage package of the present invention is attached so as to surround the mounting portion on the upper surface of the metal support having a mounting portion on which the electronic component is mounted on the upper surface. A metal frame, a mounting portion having a through hole or a notch in a side portion of the frame, and the connection terminal of the present invention in which the wall body is fitted in the through hole or the notch of the mounting portion It is characterized by comprising.

  The electronic device according to the present invention includes the electronic component storage package according to the present invention, the electronic component that is mounted on the mounting portion and is electrically connected to the line conductor, and the upper surface of the frame. And a lid joined so as to cover the mounting portion.

The connection terminal of the present invention has a rectangular shape, a base having a groove-like notch formed between upper and lower surfaces on the side surface, and is attached to the upper surface of the base, with the end extending to the edge of the notch An extending line conductor, a wall body attached to the upper surface of the base so as to cross the line conductor, and a lower ground conductor formed on the lower surface of the base are provided. Therefore, when the connection terminal and the lead terminal are brazed and bonded using a carbon jig, or when the connection terminal is brazed and bonded to the package using a carbon jig, the connection terminal and the carbon Even if the jig is rubbed, it is possible to suppress the powdery carbon from adhering to the upper surface or side surface of the base near the end of the line conductor. Furthermore, since the notch is located between the line conductor and the lower ground conductor, and the line conductor and the lower ground conductor are electrically insulated, an electrical short circuit between the line conductor and the lower ground conductor is prevented. Can be suppressed.

  As a result, while preventing an electrical short circuit between the line conductors formed in a plurality of connection terminals and an electrical short circuit between the line conductor and the side ground conductor, preventing an electrical short circuit between the line conductor and the lower ground conductor, An electric signal transmitted through the line conductor can be satisfactorily transmitted without being short-circuited, and an electronic component housed in the package can be normally operated.

  As a result, an electric signal can be normally transmitted through the line conductor, and the connection terminal can be operated normally and stably in an electronic component housed in the package.

  An electronic component storage package according to the present invention includes a metal support having a placement portion on which an electronic component is placed on an upper surface, and a metal attached to surround the placement portion on the upper surface of the support. A frame, a mounting portion having a through hole or a notch in a side portion of the frame, and a connection terminal of the present invention in which a wall body is fitted in the through hole or the notch of the mounting portion. As a result, an accurate electrical signal that is not short-circuited at the connection terminal can be transmitted, so that the package can operate the electronic component normally and stably.

  The electronic device of the present invention includes the electronic component storage package of the present invention, an electronic component that is mounted on the mounting portion and electrically connected to the line conductor, and covers the mounting portion on the upper surface of the frame. By providing the lid body joined in this manner, a highly reliable operation is achieved by using the electronic component storage package of the present invention.

An example of an embodiment of the connection terminal and the electronic component storage package of the present invention is shown in FIGS. 1 (a) is a perspective view showing a reference example of connecting terminals, (b) a perspective view showing another reference example of connection terminals, perspective Fig. 2 showing an example of an embodiment of a connection terminal FIGS. 3 and 3 are perspective views of a package using the connection terminal of FIG. 2, and show an example of an optical communication package that houses therein an optical semiconductor element such as an LD or PD as an electronic component. In these drawings, 1 is a support, 2 is a frame, 3 is a cylindrical fixing member for fixing a metal holder 7 to which an optical fiber 8 is attached, 4 is a connection terminal, and 6 is a seal ring. The support body 1, the frame body 2, the fixing member 3, the connection terminals 4, and the seal ring 6 constitute an optical communication package, in which an optical semiconductor element such as an LD or PD as an electronic component 9 is housed and sealed. An electronic device is configured by attaching a lid (not shown) to the upper surface of the ring 6. 1 to 3, the hatched portion indicates that metallization has been performed.

  The support body 1 has a mounting portion 1a for mounting the electronic component 9 on its upper surface, functions as a support member for supporting the electronic component 9, and efficiently generates heat generated when the electronic component 9 operates. It has a function to diffuse well. Further, the support 1 has a screwing hole 1b at the end, and is screwed to an external electric circuit board (not shown) through the screwing hole 1b.

  The support 1 has a rectangular shape such as a rectangle, and is made of a metal such as an Fe—Ni—Co alloy or a Cu—W alloy. The support 1 is formed by subjecting an ingot such as an Fe—Ni—Co alloy to metal processing such as rolling or pressing and cutting it into a predetermined shape.

  The support 1 has a metal surface having excellent corrosion resistance and wettability with the brazing material, specifically, a Ni layer having a thickness of 0.5 to 9 μm and an Au layer having a thickness of 0.5 to 5 μm in order. It is preferable to deposit by the plating method, and it is possible to effectively prevent the support 1 from being oxidatively corroded and to firmly adhere and fix the electronic component 9 to the upper surface of the support 1.

  Further, the upper surface of the support 1 is joined via a brazing material such as Ag brazing so as to surround the mounting portion 1a, and the electronic component 9 and the external electric circuit board are disposed on both side portions on the long side. In the case where the mounting portion 2a is formed of a through hole or a notch for fitting the connection terminal 4 to be electrically connected to the electric circuit, and the package is an optical communication package, it is provided on one side of the short side. It has a rectangular frame 2 such as a rectangle made of a metal such as an Fe-Ni-Co alloy in which a through hole 2b serving as an optical transmission path for optical coupling with an optical semiconductor element that is an electronic component 9 is formed.

  The frame 2 is formed into a predetermined shape by subjecting an ingot of the same alloy as that of the support 1 to metal processing such as rolling, pressing, and cutting.

  Note that the frame 2 is joined to the support 1 by joining the upper surface of the support 1 and the lower surface of the frame 2 via a brazing material such as preformed Ag brazing laid on the upper surface of the support 1. Furthermore, a metal layer such as a Ni layer having a thickness of 0.5 to 9 μm or an Au layer having a thickness of 0.5 to 5 μm may be deposited on the surface of the frame 2 by a plating method, as with the support 1.

  In addition, the attachment terminal 2a of the frame 2 inputs or outputs a high-frequency signal between the electronic component 9 and the electric circuit of the external electric circuit board, and has a function of hermetically blocking the inside and outside of the optical communication package. 4 is joined by a brazing material such as Ag brazing.

This connection terminal 4 is extended to the edge of the notch 4g near the two sides where both ends are parallel so as to cross two parallel sides of the top surface of the base 4a on the top surface of a rectangular base 4a such as a rectangle. The line conductor 4c is attached, and a rectangular columnar wall body 4b that is laid down so as to cross the line conductor 4c is laminated and attached, and both ends of the line conductor 4c are parallel to the base 4a. A notch 4g is formed on the upper surface of the base body 4a located between the side surfaces forming the sides. Then, in the connection terminal of the present embodiment, the cutout portion 4g reaches to the lower surface of the substrate 4a, that are formed in a groove shape over between the upper and lower surfaces of the substrate 4a on the side surface of the base 4a.

  Further, the line conductor 4c may be formed in the cutout portion 4g so as to extend from the upper surface to the side surface of the base body 4a. With this configuration, when the lead terminal 5 is brazed and joined to the line conductor 4 c, the brazing material also flows through the line conductor 4 c provided to extend to the side surface of the notch 4 g, Thus, a good meniscus of the brazing material can be formed, and the lead terminal 5 can be bonded to the line conductor 4c very firmly. When the notch 4g reaches the lower surface of the base 4a, the extension of the line conductor 4c may be formed only on the upper surface of the base 4a of the notch 4g.

Base 4a is _Al 2 _{O 3} quality ceramic, AlN ceramics _consists 3Al _{2 O} 3 · 2Si O ₂ quality dielectric material such as ceramic, on the upper surface of the substrate 4a, the other side facing the one side of the two parallel sides A line conductor 4c made of a metallized layer such as W or Mo is formed in the vicinity, and a lower ground conductor 4d made of a metallized layer similar to the line conductor 4c is formed on the entire lower surface.

Al ₂ O ₃ ceramics, AlN ceramics, 3Al ₂ O ₃ ··· are bonded to the upper surface of the base 4a so as to sandwich and cross a part of the line conductor 4c and have the upper ground conductor 4e on the upper surface. A wall 4b made of a dielectric such as 2SiO ₂ ceramics is attached.

  Further, side surface grounding conductors 4f made of a metallized layer similar to the line conductors 4c are formed on the side surfaces of the base body 4a and the wall body 4b. And the notch part 4g is formed in the upper surface of the base | substrate 4a in the both ends of the line conductor 4c of the upper surface of the base | substrate 4a.

If the connection terminal 4 is made of, for example, Al ₂ O ₃ ceramics, it is suitable for a raw material powder such as Al ₂ O ₃ , silicon oxide (SiO ₂ ), magnesium oxide (MgO), calcium oxide (CaO), etc. An organic binder, solvent, plasticizer, dispersant, etc. are mixed and added to form a slurry, and a ceramic green sheet (ceramic green sheet) is formed by adopting a doctor blade method or a calender roll method. The ceramic green sheet is appropriately stamped along the cutout 4g and the outer shape of the substrate 4a, and a conductive paste formed by mixing an appropriate organic binder and solvent with a metal material powder such as W and Mo is green. This green is printed on the sheet by applying a predetermined pattern of the line conductor 104c by screen printing or the like. The over preparative laminating a plurality, is produced by firing at a temperature of about 1600 ° C..

The notch 4g is formed by laminating a green sheet, which is the uppermost layer of the base 4a, with a width narrower than the lower part, or by performing removal processing such as grinding or polishing after firing. As shown in FIG. 1A, the notch 4g according to the reference example has a full length at two corners between the upper surface in the longitudinal direction of the base 4a and two parallel side surfaces intersecting the line direction of the line conductor 4c. that have been formed over the. Moreover, as shown in FIG.1 (b), you may form in the edge part of the line conductor 4c of the said corner | angular part of the base | substrate 4a in the width | variety substantially the same as the width | variety of a line conductor. Or it may be set as the notch part 4g notched by the groove | channel shape at the edge of the upper surface of the base | substrate 4a along two parallel side surfaces. It is sufficient that at least the top end of the base 4a on which the line conductor 4c is formed has a notch 4g in which the top or corner of the base 4a is cut out. The tip of the line conductor 4c is normally formed to the edge of the notch 4g between the notch 4g and the upper surface of the base 4a, but is not necessarily formed to the edge and is formed to a little before that. There is no problem.

  With this configuration, when the connection terminal 4 and the lead terminal 5 are brazed and bonded using a carbon jig, or when the connection terminal 4 is brazed and bonded to a package using a carbon jig, Even if the connection terminal 4 and the carbon jig are rubbed, the notched portions 4g are formed at both ends of the line conductor 4c on the upper surface of the base 4a, so that the powdery carbon has an upper surface without the notched portion 4g. It only adheres to the vicinity of the corner between the side surfaces, and powdery carbon does not adhere to the upper surface of the substrate 4a near both ends of the line conductor 4c.

Notches 4g according to the connection terminal of the present embodiment, that have reached the lower surface of the substrate 4a. In this case, the width of the notch 4g may be narrower than the line conductor 4c as shown in FIG. 2 (a), or may be wider than the line conductor 4c as shown in FIG. 2 (b). Although not shown, the width may be the same as that of the line conductor 4c. Preferably, the width of the notch 4g is wider than the line conductor 4c as shown in FIG. With this configuration, the upper surface of the base body 4a on the extension line of the line conductor 4c becomes a notch 4g, and it is possible to reliably prevent powdery carbon from adhering to the upper surface of the base body 4a near the line conductor 4c.

Further, the cutout portion 4g since reached the lower surface of the substrate 4a, thereby preventing reliably the electrical short circuit between the line conductor 4c and the lower ground conductor 4d. Therefore, even if the base 4a is made thin in order to transmit the high-frequency signal to the line conductor 4c, it is preferable in that the high-frequency signal transmitted through the line conductor 4c can be efficiently transmitted without being short-circuited.

  As a result, an electrical short circuit between a plurality of line conductors 4c formed on the connection terminal 4 and an electrical short circuit between the line conductor 4c and the side ground conductor 4f are prevented, and an electrical signal transmitted through the line conductor 4c is short-circuited. Thus, the connection terminal can be transmitted satisfactorily and the electronic component 9 housed in the package can be operated normally.

  Preferably, the depth of the notch 4g from the side surface of the base body 4a is 0.1 to 0.3 mm, and the height from the top surface of the base body 4a is about 0.05 to 1 mm. With this configuration, it is possible to effectively prevent powdered carbon from adhering to the upper surface of the base body 4a near both ends of the line conductor 4c and to electrically short-circuit the plurality of line conductors 4c formed on the connection terminal 4. In addition, an electrical short circuit between the line conductor 4c and the side ground conductor 4f can be prevented, and an electric signal transmitted through the line conductor 4c can be satisfactorily transmitted without being short-circuited.

  If the width of the notch 4g is less than 0.1 mm, the end of the line conductor 4c approaches the side surface that intersects the line direction of the line conductor 4c of the base 4a, and the powdery carbon is in the vicinity of both ends of the line conductor 4c. In some cases, it may adhere to the upper surface of the substrate 4a. Further, when the width of the cutout portion 4g exceeds 0.3 mm, the end of the line conductor 4c is separated from the side surface intersecting the line direction of the line conductor 4c of the base 4a, and the line conductor 4c and the electronic component 9 are separated. Since the bonding wire for connection becomes long and the transmission loss of the electric signal in this bonding wire becomes large and the electric signal cannot be transmitted efficiently, it is not preferable.

  Further, if the height of the cutout portion 4g is less than 0.05 mm, the height of the cutout portion 4g is too low, so that powdery carbon protrudes from the cutout portion 4g and the substrate near both ends of the line conductor 4c. It may adhere to the upper surface of 4a. If the height of the cutout portion 4g exceeds 1 mm, the cutout portion 4g becomes too high and the cutout portion 4g becomes high, so that it is necessary to increase the thickness of the base 4a.

  Further, the notch 4g is formed at the end of the line conductor 4c of the base 4a so as to be substantially the same width as the line conductor as shown in FIG. 1B, or reaches the lower surface of the base 4a as shown in FIG. When it does, the width | variety of the notch part 4g is good to be 0.1 mm-about 1 mm wide on one side with respect to the width | variety of the line conductor 4c. If the width of the cutout 4g is wider than the width of the line conductor 4c by less than 0.1 mm on one side, the width of the cutout 4g is not sufficiently wide with respect to the width of the line conductor 4c. Carbon may also adhere to the line conductor 4c. If the width of the notch 4g is wider than 1 mm on one side with respect to the width of the line conductor 4c, the notch 4g is too wide and the notches 4g are close to each other. The base 4a located on both sides of the notch 4g is easily damaged.

  The line conductor 4c, the lower ground conductor 4d, the upper ground conductor 4e, and the side ground conductor 4f are excellent in corrosion resistance such as Ni and Au on the exposed surfaces, and are brazing materials for joining to the frame body 2 and the seal ring 6. If a metal having excellent wettability with the bonding wire and a bonding wire having a thickness of 1 to 20 μm is deposited by plating, oxidation corrosion can be effectively prevented and the lower grounding conductor 4d, the upper grounding conductor 4e, The joint between the side ground conductor 4f and the frame 2 or the seal ring 6 can be made strong and airtight, and the connection of the bonding wire 12 to the line conductor 4c can be made strong. Therefore, the line conductor 4c, the lower ground conductor 4d, the upper ground conductor 4e, and the side ground conductor 4f are coated with a metal having excellent corrosion resistance such as Ni and Au on the exposed surface and a thickness of 1 to 20 μm. It is desirable to keep it on.

  When depositing a metal such as Ni or Au on the line conductor 4c, powdery carbon is not attached to the upper surface of the base 4a near both ends of the line conductor 4c. It is possible to prevent the metal from being deposited.

  As a result, the inside of the package can be satisfactorily hermetically sealed, the high-frequency signal can be efficiently transmitted without being short-circuited via the line conductor 4c, and the electronic component 9 housed in the package can be normally and correctly The connection terminal 4 can be operated stably.

  Further, when the package is an optical communication package, a through hole 2b is formed on one side of the short side of the frame 2, and a cylindrical fixing is provided around the outer opening of the frame 2 of the through hole 2b. One end of the member 3 is joined with a brazing material such as Ag brazing. A metal holder 7 having an optical fiber 8 attached with an adhesive such as a resin is bonded to the other end surface of the fixing member 3 with a low melting point brazing material such as Au—Sn. The fixing member 3 is manufactured by processing the same metal as the support 1 and the frame 2 into a desired shape by the same processing method, and has a Ni layer having a thickness of 0.5 to 9 μm and a thickness of 0.5 on the surface. A metal layer such as an Au layer of ˜5 μm is preferably deposited by plating.

  Thus, the seal ring 6 is joined to the upper surface of the frame 2 to which the connection terminal 4 and the fixing member 3 are attached by a brazing material such as Ag brazing. The seal ring 6 is joined to the upper surface of the frame body 2 and the upper surface of the connection terminal 4 with a brazing material such as Ag brazing to sandwich the connection terminal 4, and a lid body for sealing the electronic component 9 on the upper surface thereof. It functions as a joining medium for joining by seam welding or the like.

As described above, the connection terminal 4 of the present embodiment includes the base 4a made of ceramics having the line conductor 4c formed from one side of two parallel sides of the upper surface to the vicinity of the opposite side, and the upper surface of the base 4a. A wall 4b made of ceramics joined so as to cross a part of the line conductor 4c, and a notch 4g is located between the line conductor 4c and the lower ground conductor 4d. Thus, the line conductor 4c and the lower ground conductor 4d are electrically insulated .

  In addition, an optical communication package as an example of the package of the present invention includes a metal support 1 having a mounting portion 1a on which an optical semiconductor element, which is an electronic component 9, is mounted, and an upper surface of the support 1. A metal frame 2 having a mounting portion 2a and a through hole 2b on the side, and a side wall of the central wall 4b and the base 4a. A connection terminal 4 is provided by being partially brazed to the bottom surface.

  With the above configuration, when an electric signal is transmitted to the line conductor 4c, an electrical short circuit between a plurality of line conductors 4c formed on the connection terminal 4 is prevented, and electrical connection between the line conductor 4c and the side ground conductor 4f is prevented. It is possible to prevent an electrical short circuit and transmit an electric signal transmitted through the line conductor 4c satisfactorily without causing a short circuit. Therefore, an optical communication package with good operability of the optical semiconductor element as the electronic component 9 is obtained.

  In such an optical communication package, the electronic component 9 (optical semiconductor element) is placed and fixed on the placement portion 1a with a low melting point solder such as Sn-Pb solder, and the end of the line conductor 4c inside the frame body 2 is fixed. The metal holder 7 is electrically connected to the electrodes of the electronic component 9 (optical semiconductor element) with a bonding wire and the like, and the optical fiber 8 is attached to the fixing member 3 with an adhesive such as resin. After joining with a low melting point brazing material such as, a lid is joined to the upper surface of the seal ring 6 by seam welding or the like, so that an electronic device (optical semiconductor device) as a product is obtained.

  In this optical semiconductor device, after being screwed to the external electric circuit board, the optical semiconductor element is optically excited by a drive signal supplied from the external electric circuit via the connection terminal 4, and the excited light such as a laser beam is optical fiber. 8 functions as a photoelectric conversion device capable of transmitting a large amount of information at a high speed by being transmitted through the optical fiber 8 and is often used in the field of optical communication and the like.

  Thus, the optical semiconductor element can be operated normally and stably over a long period of time by a high-frequency signal or an optical signal.

  It should be noted that the present invention is not limited to the above embodiment, and various modifications may be made without departing from the scope of the present invention. For example, although the planar view shape of the support body 1 and the frame body 2 has been described with respect to a rectangular shape such as a rectangle, it may be a shape including a circle or a curve at a side or a corner. Moreover, although the planar view shape of the connection terminal 4 demonstrated the rectangle, the shape containing a polygon and a curve may be sufficient. In the above description, an optical semiconductor element such as LD or PD has been described as an example of the electronic component 9. However, the present invention is not limited to this, and the electronic component 9 such as an LED, FET, IC, or capacitor is also suitable for the package of the present invention. Can be accommodated.

(A) is a perspective view showing a reference example of connection terminals is a perspective view showing another reference example of (b) is connected terminals. (A), (b) is a perspective view which shows an example of embodiment of the connection terminal of this invention. It is a perspective view of the electronic component storage package of the present invention. It is a perspective view which shows the example of the conventional connection terminal. It is a perspective view of the conventional electronic component storage package using the connection terminal of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1: Support body 1a: Mounting part 2: Frame body 2a: Mounting part 4: Connection terminal 4a: Base | substrate 4b: Wall body 4c: Line conductor 4g: Notch part 9: Electronic component

Claims (4)

A base having a groove-shaped notch formed between the upper and lower surfaces on the side surface, and a line conductor attached to the upper surface of the base and having an end extending to the edge of the notch And a wall terminal attached to the upper surface of the base body so as to cross the line conductor, and a lower ground conductor formed on the lower surface of the base body,
The connection terminal , wherein the notch is positioned between the line conductor and the lower ground conductor, and the line conductor and the lower ground conductor are electrically insulated.   The connection terminal according to claim 1, wherein a width of the notch is wider than a width of the line conductor.   A metal support having a placement portion on which an electronic component is placed on an upper surface, a metal frame attached to surround the placement portion on the upper surface of the support, and the frame The mounting part which has a through-hole or a notch in the side part, and the connection terminal of Claim 1 or Claim 2 by which the said wall body was fitted by the through-hole or notch of this mounting part. A package for storing electronic components.   The electronic component storage package according to claim 3, an electronic component placed on the placement portion and electrically connected to the line conductor, and the placement portion covered on the upper surface of the frame body An electronic device comprising: a bonded lid.

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