JP4139165B2

JP4139165B2 - Input / output terminal for semiconductor element storage package, semiconductor element storage package, and semiconductor device

Info

Publication number: JP4139165B2
Application number: JP2002245329A
Authority: JP
Inventors: 宏信藤原
Original assignee: Kyocera Corp
Current assignee: Kyocera Corp
Priority date: 2002-08-26
Filing date: 2002-08-26
Publication date: 2008-08-27
Anticipated expiration: 2022-08-26
Also published as: JP2004087683A

Description

【０００１】
【発明の属する技術分野】
本発明は、高周波信号で作動する半導体素子を収納するための半導体素子収納用パッケージの信号入出力部に使用される入出力端子およびそれを用いた半導体素子収納用パッケージならびに半導体装置に関する。
【０００２】
【従来の技術】
従来のマイクロ波帯やミリ波帯等の高周波信号を伝送する入出力端子および半導体素子を気密に収容する半導体素子収納用パッケージ（以下、半導体パッケージともいう）をそれぞれ図３，図４に示す。
【０００３】
図３において、104ａはアルミナ（Ａｌ₂Ｏ₃）質焼結体（セラミックス），窒化アルミニウム（ＡｌＮ）質焼結体，ムライト（３Ａｌ₂Ｏ₃・２ＳｉＯ₂）質焼結体等の誘電体から成る平板部であり、平板部104ａは、その上面に一辺から対向する他辺にかけて形成され、タングステン（Ｗ），モリブデン（Ｍｏ）等のメタライズ層から成る線路導体104ｃを有するとともに、下面の略全面に線路導体104ｃと同様のメタライズ層から成る下部接地導体104ｄを有する。この平板部104ａの上面には、線路導体104ｃの一部を間に挟んで接合され、上面に上部接地導体104ｅを有するＡｌ₂Ｏ₃質焼結体，ＡｌＮ質焼結体，３Ａｌ₂Ｏ₃・２ＳｉＯ₂質焼結体等の誘電体から成る立壁部104ｂが設置される。平板部104ａおよび立壁部104ｂの両側面には、線路導体104ｃと同様のメタライズ層から成る側部接地導体104ｆが形成されている。
【０００４】
このように、入出力端子104は平板部104ａと立壁部104ｂとから構成され、半導体パッケージ内外を気密に遮断し、その内部を封止している。
【０００５】
また、半導体パッケージの１種である光半導体パッケージは、図４に示すように、上面に半導体レーザ（ＬＤ），フォトダイオード（ＰＤ）等の光半導体素子109が載置される載置部101ａを有するとともに、外部電気回路基板（図示せず）にトルクをかけてネジ止めされるネジ止め孔101ｂが一対の両端に形成された、鉄（Ｆｅ）−ニッケル（Ｎｉ）−コバルト（Ｃｏ）合金や銅（Ｃｕ）−タングステン（Ｗ）合金等の金属から成る略長方形の基体101を有する。また、載置部101ａを囲繞するようにして基体101の上面に銀（Ａｇ）ロウ等のロウ材を介して接合され、長辺側の両側部に光半導体素子109と外部電気回路とを電気的に接続する入出力端子104を嵌着するための取付部102ａが形成され、また短辺側の一側部に光半導体素子109と光結合するための光伝送路である貫通孔102ｂが形成された、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成る略長方形の枠体102を有する。貫通孔102ｂには、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成る円筒状の光ファイバ固定部材（以下、固定部材ともいう）103がＡｇロウ等のロウ材により接合される。
【０００６】
枠体102の取付部102ａに、入出力端子104を嵌着してＡｇロウ等のロウ材を介して接合し、線路導体104ｃの枠体102外側の部位にリード端子105をＡｇロウ等のロウ材で接合する。また、光半導体素子109を載置部101ａに載置固定するとともに、線路導体104ｃの枠体102内側の部位と光半導体素子109とをボンディングワイヤ（図示せず）で電気的に接続し、光ファイバ108と光半導体素子109との光軸を調整した後、固定部材103の枠体102外側の端面に、光ファイバ108を樹脂等の接着剤で取着した金属ホルダ107をシーム溶接等により接合する。さらに、枠体102および入出力端子104の上面にＦｅ−Ｎｉ−Ｃｏ合金等の金属から成るシールリング106をＡｇロウ等のロウ材を用いて接合し、その上面に蓋体（図示せず）をシーム溶接等により接合することにより、製品としての光半導体装置となる。
【０００７】
このような光半導体装置は、外部電気回路基板にトルクをかけてネジ止めされた後、外部電気回路から供給される駆動信号によって光半導体素子109を光励起させ、励起したレーザ光等の光を光ファイバ108に授受させるとともに、光ファイバ108内を伝送させることにより、大容量の情報を高速に伝送できる光電変換装置として機能し、光通信分野等に多く用いられる。
【０００８】
【発明が解決しようとする課題】
しかしながら、上記従来の入出力端子104において、線路導体104ｃを伝送する高周波信号が10ＧＨｚ以上の高周波帯域のものになると、線路導体104ｃの枠体102外側の先端部にリード端子105をＡｇロウ等のロウ材で接合し、線路導体104ｃの枠体102内側の先端部付近と光半導体素子109とをボンディングワイヤで接続すると、リード端子105とボンディングワイヤ部において、反射損失や透過損失等の高周波信号の伝送損失が大きくなり、入出力端子104において高周波信号を効率良く入出力できなくなるという問題点があった。
【０００９】
即ち、リード端子105およびボンディングワイヤは、線路導体104ｃと光半導体素子109との間の高さの差、および線路導体104ｃと外部電気回路との間の高さの差があるため、それらの長さが長くなってしまう。その結果、リード端子105およびボンディングワイヤにおいて高周波信号のインピーダンスを整合することが困難となり、リード端子105およびボンディングワイヤで高周波信号の反射損失や透過損失等の伝送損失が発生し、光半導体素子109に誤動作が生じるという問題点があった。
【００１０】
また、線路導体104ｃを伝送する高周波信号が10ＧＨｚ以上の高周波帯域となる場合、誘電体損失を低減させるために入出力端子104を小型化する必要があるが、その場合立壁部104ｂが薄肉となって、入出力端子104を枠体102の取付部102ａに取着すると、枠体102との熱膨張差によって入出力端子104にクラック等の破損が生じるという問題点もあった。
【００１１】
従って、本発明は上記問題点に鑑み完成されたもので、その目的は、入出力端子における高周波信号の伝送損失を有効に防止することにより、半導体素子の高周波信号の作動性を良好なものとすることにある。また、小型化しても、枠体との熱膨張差によってクラック等の破損が生じない入出力端子とすることである。
【００１２】
【課題を解決するための手段】
本発明の半導体素子収納用パッケージ用入出力端子は、略直方体の誘電体から成り、上面と一側面との間に両端面間にわたって第一の段差が形成されているとともに下面と他側面との間に両端面間にわたって第二の段差が形成されている端子本体部に、前記第一の段差の底面および前記第二の段差の天井面に内部配線を介して互いに電気的に接続された線路導体が前記誘電体の長手方向に略直交するようにしてそれぞれ形成されていることを特徴とする。
【００１３】
本発明の入出力端子は、第一の段差の底面および第二の段差の天井面に内部配線を介して互いに電気的に接続された線路導体が誘電体の長手方向に略直交するようにしてそれぞれ形成されていることから、第一の段差の底面と第二の段差の天井面の高さが互いに異なっており、そして、第一の段差を枠体内側に位置させて半導体素子収納用パッケージの枠体に設けて枠体内側の線路導体をボンディングワイヤを介して半導体素子に電気的に接続する際に、半導体素子は半導体素子収納用パッケージの基体の上面に載置されており半導体素子の上面の電極と入出力端子の枠体内側の線路導体とを略同じ高さとすることができるため、ボンディングワイヤの長さを短くすることができる。
【００１４】
また、枠体外側の線路導体をリード端子を介して外部電気回路に接続する際に、外部電気回路は、一般に、半導体素子収納用パッケージが設置された基板上に形成されているか、または半導体素子収納用パッケージが設置された基板上に別個に設けられた他の基板上に形成されているため、外部電気回路は、半導体素子収納用パッケージの基体の下面と略同じ高さかまたは基体の上面付近に位置することとなる。その結果、リード端子と外部電気回路とを近づけることができ、リード端子の長さを極力短くすることができる。
【００１５】
従って、高周波信号のインピーダンス整合が困難なボンディングワイヤの長さとリード端子の長さをきわめて短くすることができ、入出力端子の線路導体で伝送される高周波信号の伝送損失の発生を抑えることができ、入出力端子において高周波信号を効率良く入出力し得る。その結果、半導体素子を正常に作動させることができる。また、製品によって半導体素子収納用パッケージ内部の半導体素子の高さおよびリード端子の高さが変化したとしても、本発明の入出力端子の第一の段差と第二の段差の高さを調整することにより、ボンディングワイヤおよびリード端子の長さを最短とすることができ、高周波信号の伝送効率を良好にすることができる。
【００１６】
また、入出力端子を小型化しても、従来の立壁部のように薄肉となる部位がなくなり、入出力端子にクラック等の破損が生ずることを防止でき、半導体素子収納用パッケージにおける気密信頼性が向上する。
【００１７】
本発明の半導体素子収納用パッケージは、上面に半導体素子が載置される載置部を有する金属製の基体と、該基体の上面に前記載置部を囲繞するように取着され、側部に貫通孔または切欠きから成る入出力端子の取付部が形成されている金属製の枠体と、前記取付部に前記第一の段差が前記枠体の内側に位置するようにして嵌着された本発明の入出力端子とを具備したことを特徴とする。
【００１８】
本発明の半導体素子収納用パッケージは、上記の構成により、入出力端子における高周波信号の伝送特性に優れまた気密性に優れた、高性能および高信頼性のものとなる。
【００１９】
本発明の半導体装置は、上記本発明の半導体素子収納用パッケージと、前記載置部に載置固定されるとともに前記入出力端子に電気的に接続された半導体素子と、前記枠体の上面に接合された蓋体とを具備したことを特徴とする。
【００２０】
本発明の半導体装置は、上記の構成により、上記本発明の半導体素子収納用パッケージを用いた、高性能および信頼性の高いものとなる。
【００２１】
【発明の実施の形態】
本発明の入出力端子および半導体素子収納用パッケージならびに半導体装置について以下に詳細に説明する。本発明の入出力端子および半導体パッケージとしての光半導体パッケージを図１，図２に示す。図１（ａ）は入出力端子の斜視図、（ｂ）は入出力端子の断面図、（ｃ）は入出力端子について実施の形態の他の例を示す線路導体の上面図、（ｄ）は（ｃ）のＡ−Ａ’線における断面図、（ｅ）は（ｄ）のＢ−Ｂ’線における断面図、（ｆ）は内部配線について実施の形態の他の例を示す（ｄ）のＢ−Ｂ’線における断面図である。また、図２（ａ）は光半導体パッケージの上面図、（ｂ）は光半導体パッケージの半導体素子部における正面断面図である。
【００２２】
これらの図において、１は基体、２は枠体、３は光ファイバ８が取着された金属ホルダ７を固定する筒状の固定部材、４は入出力端子、６はシールリングである。これら基体１と枠体２と固定部材３と入出力端子４とシールリング６とで、内部に半導体素子としてのＬＤ，ＰＤ等の光半導体素子９を収容する容器が構成され、シールリング６上面に蓋体15を取着することにより半導体装置が構成される。
【００２３】
本発明の光半導体パッケージは、上面に光半導体素子９が載置される載置部１ａを有する金属製の基体１と、基体１の上面に載置部１ａを囲繞するように取着され、側部に貫通孔または切欠きから成る入出力端子４の取付部２ａが形成されている金属製の枠体２と、取付部２ａに第一の段差４ａが枠体２の内側に位置するようにして嵌着された入出力端子４とを具備している。
【００２４】
本発明の基体１は、その上面に光半導体素子９を載置する載置部１ａを有しており、光半導体素子９を支持する支持部材として機能するとともに、光半導体素子９の作動時に発する熱を外部に効率良く放散する機能を有する。この基体１は、略長方形であり、Ｆｅ−Ｎｉ−Ｃｏ合金やＣｕ−Ｗ合金等の金属から成る。また基体１は、Ｆｅ−Ｎｉ−Ｃｏ合金等のインゴットに圧延加工やプレス加工等の金属加工を施すことにより所定形状に成形される。さらに、基体１は、表面に耐蝕性に優れかつロウ材との濡れ性に優れる金属、具体的には厚さ0.5〜９μｍのＮｉ層と厚さ0.5〜５μｍのＡｕ層とをメッキ法により順次被着させておくのがよく、基体１が酸化腐食するのを有効に防止できるとともに基体１上面に光半導体素子９を強固に接合固定できる。
【００２５】
また、基体１の上面には、載置部１ａを囲繞するようにしてＡｇロウ等のロウ材を介して接合され、長辺側の両側部に光半導体素子９と外部電気回路とを電気的に接続する入出力端子４嵌着用の貫通孔または切欠きから成る取付部２ａが形成され、さらに短辺側の一側部に光半導体素子９と光結合するための光伝送路である貫通孔２ｂが形成された、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成る略長方形の枠体２を有する。この枠体２は、基体１と同様の金属のインゴットに圧延加工やプレス加工等の金属加工を施すことにより所定形状に成形される。枠体２の基体１への接合は、基体１上面と枠体２下面とを、基体１上面に敷設したプリフォーム状のＡｇロウ等のロウ材を介して接合される。さらに、枠体２表面には、基体１と同様に厚さ0.5〜９μｍのＮｉ層や厚さ0.5〜５μｍのＡｕ層等の金属層をメッキ法により被着させておくと良い。
【００２６】
また、枠体２の取付部２ａには、光半導体素子９と外部電気回路との高周波信号の入出力を行う機能を有し光半導体パッケージの内外を遮断する機能を有する入出力端子４がＡｇロウ等のロウ材で接合される。
【００２７】
本発明の入出力端子４は、図１（ａ）に示すように、略直方体の誘電体から成り、上面と一側面との間に両端面間にわたって第一の段差４ａが形成されているとともに下面と他側面との間に両端面間にわたって第二の段差４ｂが形成されている端子本体部14に、第一の段差４ａの底面および第二の段差４ｂの天井面に内部配線を介して互いに電気的に接続された線路導体４ｃが誘電体の長手方向に略直交するようにしてそれぞれ形成されている。
【００２８】
即ち、入出力端子４は、第一の段差４ａの底面には第一の線路導体４ｃ−１が形成され、第二の段差４ｂの天井面には第二の線路導体４ｃ−２が形成されている。第一の線路導体４ｃ−１と第二の線路導体４ｃ−２とは、内部配線を介して電気的に接続されている。
【００２９】
入出力端子４は、Ａｌ₂Ｏ₃質焼結体（Ａｌ₂Ｏ₃セラミックス），ＡｌＮ質焼結体，３Ａｌ₂Ｏ₃・２ＳｉＯ₂質焼結体等の誘電体から成り、Ｗ，Ｍｏ等のメタライズ層から成る線路導体４ｃが形成されている。入出力端子４の下面には略全面に線路導体４ｃと同様のメタライズ層から成る下部接地導体４ｄが形成され、上面には略全面に線路導体４ｃと同様のメタライズ層から成る上部接地導体４ｅが形成され、側面には線路導体４ｃと同様のメタライズ層から成る側部接地導体４ｆが形成されている。
【００３０】
本発明において、好ましくは、図２（ｂ）に示すように入出力端子４の上面の幅Ａ１と下面の幅Ａ２は枠体２の厚さの1.5〜３倍であるのが良い。枠体２の厚さの1.5倍未満である場合、幅Ａ１，Ａ２が小さくなりすぎて、入出力端子４の上面と下面に枠体２と入出力端子４とを接合するロウ材のメニスカスが良好に形成できなくなり、入出力端子４を枠体２に強固に接合するのが困難になる。枠体２の厚さの３倍を超える場合、入出力端子４が大型化して枠体２の内外に突出する長さが長くなりすぎて、枠体２の内側に半導体素子９を載置したり、枠体２の外側に外部電気回路基板を設置する際に障害となり易い。
【００３１】
また好ましくは、第一の段差４ａの段差Ｂ１と第二の段差４ｂの段差Ｂ２は0.3〜３ｍｍであるのが良い。0.3ｍｍ未満の場合、段差Ｂ１，Ｂ２が小さくなりすぎて、枠体２と入出力端子４とを接合するためのロウ材が入出力端子４の上面から第一の段差４ａに、または入出力端子４の下面から第二の段差４ｂに流れ込んでしまい、上部接地導体４ｅと線路導体４ｃ、および下部接地導体４ｄと線路導体４ｃとが電気的短絡を起こし、半導体素子９が正常に作動できなくなる。３ｍｍを超える場合、入出力端子４の高さが必要以上に高くなり、それに伴って枠体２の高さも高くなって、半導体パッケージが大型化し、近時の半導体パッケージの小型化傾向に反することとなる。
【００３２】
この入出力端子４は、第一の段差４ａが枠体２の内側に、第二の段差４ｂが枠体２の外側に位置するようにして、枠体２の取付部２ａに嵌着接合され、第一の段差４ａの底面の高さが光半導体素子９の実装される高さ（光半導体素子９の上面の高さ）と略同じとなるように調整することができる。また、第二の段差４ｂの底面の高さは、リード端子５が外部電気回路基板の電極等に直接的に電気的に接続できる高さに調整することができる。
【００３３】
従って、入出力端子４を光半導体パッケージの枠体２に設けて、枠体２内側に位置する第一の線路導体４ｃ−１と光半導体素子９とをボンディングワイヤにより接続すると、ボンディングワイヤの長さがきわめて短くなり、高周波信号の伝送損失の発生が大幅に抑制され、光半導体素子９の作動性が高周波信号の伝送損失によって損なわれることを防止できる。また、枠体２外側に位置する第二の線路導体４ｃ−２をリード端子５を介して外部電気回路に接続したときに、リード端子５の長さを短くすることができ、リード端子５における高周波信号の伝送損失を抑制できる。
【００３４】
また、入出力端子４に薄肉部が生じないことから、枠体２との熱膨張差によって入出力端子４に破損が発生せず、入出力端子４部における光半導体パッケージの気密信頼性が向上する。
【００３５】
このような入出力端子４においては、図１（ｂ）に示すように、第一の段差４ａの底面に形成された第一の線路導体４ｃ−１と、第二の段差４ｂの天井面に形成された第二の線路導体４ｃ−２とは、第二の線路導体４ｃ−２を延出して成る内層線路導体４ｃ−３と、内層線路導体４ｃ−３の端部と第一の線路導体４ｃ−１とを電気的に接続する貫通導体４ｃ−４とによって、電気的に接続されている。即ち、内層線路導体４ｃ−３および貫通導体４ｃ−４は、第一および第二の線路導体４ｃ−１，４ｃ−２を接続する内部配線である。
【００３６】
第一および第二の線路導体４ｃ−１，４ｃ−２から成る線路導体４ｃは、例えばＷ，Ｍｏ等の粉末に有機溶剤、溶媒を添加混合して得た金属ペーストを、入出力端子４となるセラミックグリーンシートに、予め従来周知のスクリーン印刷法により所定パターンに印刷塗布しておき、焼成することにより形成される。
【００３７】
線路導体４ｃで10ＧＨｚ以上の高周波信号を伝送させる場合、第一および第二の線路導体４ｃ−１，４ｃ−２、内層線路導体４ｃ−３のそれぞれの両側に、同一面接地導体を設けてコプレーナ線路とするのがよく、また貫通導体４ｃ−４の周りには貫通導体４ｃ−４を中心とする同心円上に接地貫通導体を複数本設けて疑似同軸線路とするのが良い。この場合、高周波信号の伝送特性を大幅に改善することができる。例えば、入出力端子４の第一の段差４ａにおいて、図１（ｃ）に示すように、第一の線路導体４ｃ−１の周りに所定の間隔をもって第一の同一面接地導体４ｃ−５を設け、貫通導体４ｃ−４の周りには貫通導体４ｃ−４を中心とする同心円上に複数本の接地貫通導体４ｃ−６を設ける。また、第二の線路導体４ｃ−２および内層線路導体４ｃ−３の周りに所定間隔をもって第二の同一面接地導体４ｃ−９｛図１（ｄ）｝を設ける。
【００３８】
また、第一の段差４ａの底面と第二の段差４ｂの天井面との間の誘電体が複数の誘電体層からなる場合、図１（ｄ）に示すように、第一の線路導体４ｃ−１から内層線路導体４ｃ−３にかけて誘電体層間を貫通する貫通導体４ｃ−４の周囲に内層導体層４ｃ−７を設け、接地貫通導体４ｃ−６の周囲に内層接地導体層４ｃ−８を設けるのがよい。その場合、貫通導体４ｃ−４は、平面視形状が略円形の内層導体層４ｃ−７の略中心部を貫通して形成されている。
【００３９】
また、複数の接地貫通導体４ｃ−６が、内層導体層４ｃ−７の周囲に略一定間隔で内層導体層４ｃ−７を中心とした円周Ｄ｛図１（ｅ）｝上に形成された複数の内層接地導体層４ｃ−８の略中心部を、第一の同一面接地導体層４ｃ−５から第二の同一面接地導体層４ｃ−９にかけてそれぞれ貫通するように形成されることが好ましい。内層接地導体層４ｃ−８同士の間隔は、図１（ｅ）の場合、貫通導体４ｃ−４の中心Ｃ１に対する接地貫通導体４ｃ−６の中心Ｃ２間の角度は60°以上がよく、接地貫通導体４ｃ−６の中心Ｃ２間の円周Ｄ上の間隔は0.53ｍｍ程度（接地貫通導体４ｃ−６の直径が0.2ｍｍ程度）以上がよく、内層接地導体層４ｃ−８同士の間の円周Ｄ上の間隔は0.25ｍｍ程度以上がよい。この場合、線路導体４ｃを伝送する高周波信号のインピーダンスを特性インピーダンスに略整合させることができ、高周波信号が10ＧＨｚ以上の高周波帯域のものとなっても、高周波信号に反射損失や透過損失等が発生するのを抑制し、高周波信号を効率よく伝送させることができる。
【００４０】
より好ましくは、図１（ｆ）に示すように、内層接地導体層４ｃ−８は、接地貫通導体４ｃ−６の周囲に環状の導体層が貫通導体４ｃ−４側の一部を円周Ｄ上の半径Ｒに沿って切り取った形状となるように形成されており、貫通導体４ｃ−４の中心Ｃ１および接地貫通導体４ｃ−６の中心Ｃ２を通る直線Ｌと半径Ｒとのなす導体層側の角度が90〜120°であることがよい。なお、図１（ｆ）でＬ１は直線Ｌのうち導体層側の線分であり、換言すると線分Ｌ１と半径Ｒとの角度が90〜120°である。これにより、貫通導体４ｃ−４と接地貫通導体４ｃ−６との距離を非常に短くし得るとともに、内層導体層４ｃ−７と内層接地導体層４ｃ−８との短絡を防止し得るため、より高い周波数帯域の高周波信号を伝送できる。
【００４１】
第二の線路導体４ｃ−２には、外部電気回路に接続される、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成るリード端子５がＡｇロウ等のロウ材で接合される。
【００４２】
本発明の入出力端子４において、第一の段差４ａの底面と第二の段差４ｂの天井面との高さの差は0.1〜15ｍｍであることが好ましい。0.1ｍｍ未満では、ボンディングワイヤの長さおよびリード端子５の長さを短くすることができず、線路導体４ｃを伝送する高周波信号の伝送特性を改善できない。15ｍｍを超えると、入出力端子４を製造する際に、第一の段差４ａの下方および第二の段差４ｂの上方で、入出力端子４となる複数のセラミックグリーンシートを積層する際に均一に圧力を加えるのが困難となり、セラミックグリーンシート同士を完全に密着させることができない箇所が生じてしまい、入出力端子４の製造が困難となる。
【００４３】
また、第二の段差４ｂの天井面の線路方向の幅は、第一の段差４ａの底面の線路方向の幅よりも大きいことが好ましい。即ち、第一の段差４ａは枠体２内側に位置するため、半導体パッケージの大型化を防ぐために、その底面の線路方向の幅には制約がある。また、第一の線路導体４ｃ−１はボンディングワイヤが接続できる領域が確保できればよい。一方、第二の段差４ｂは枠体２外側に位置するとともに、リード端子５を強固にロウ付けするための領域を確保する必要があることから、その天井面の線路方向の幅は第一の段差４ａの底面の幅よりも大きいことがよい。
【００４４】
また、枠体２の短辺側の一側部には貫通孔２ｂが形成されており、貫通孔２ｂの枠体２外側開口の周囲に筒状の固定部材３の一端がＡｇロウ等のロウ材で接合される。固定部材３の他方の端面には、光ファイバ８を樹脂等の接着剤で取着した金属ホルダ７がＡｕ−Ｓｎ等の低融点ロウ材で接合される。この固定部材３は、基体１や枠体２と同様の金属を同様の加工法で所望の形状に加工することによって作製され、その表面には厚さ0.5〜９μｍのＮｉ層や厚さ0.5〜５μｍのＡｕ層等の金属層をメッキ法により被着させておくと良い。
【００４５】
入出力端子４および固定部材３が取着される枠体２の上面には、シールリング６がＡｇロウ等のロウ材で接合される。シールリング６は、枠体２の上面にＡｇロウ等のロウ材で接合されて入出力端子４を枠体２とともに挟持し、その上面に光半導体素子９を封止するためのＦｅ−Ｎｉ−Ｃｏ合金等から成る蓋体15をシーム溶接等により接合するための接合媒体として機能する。
【００４６】
かくして、本発明の入出力端子４は、線路導体４ｃに高周波信号を伝送させた際、その伝送損失を小さくできる。そのため、光半導体素子９の高周波信号や光信号の作動性が良好となる。
【００４７】
本発明の光半導体パッケージは、光半導体素子９を基体１の載置部１ａにＳｎ−Ｐｂ半田等の低融点ロウ材で載置固定するとともに、線路導体４ｃと光半導体素子９とをボンディングワイヤで電気的に接続し、さらに固定部材３に光ファイバ８を樹脂等の接着剤で取着した金属ホルダ７をＡｕ−Ｓｎ等の低融点ロウ材で接合した後、シールリング６上面に蓋体15をシーム溶接等により接合することにより、製品としての光半導体装置となる。この光半導体装置は、基体１のネジ止め孔１ｂにトルクをかけて外部電気回路基板にネジ止めされた後、外部電気回路から供給される駆動信号によって光半導体素子９を光励起させ、励起したレーザ光等の光を光ファイバ８に授受させるとともに光ファイバ８内を伝送させることにより、大容量の情報を高速に伝送できる光電変換装置として機能するものであり、光通信分野等に多く用いられる。
【００４８】
なお、本発明は上記実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何等差し支えない。例えば、上記実施の形態においては、貫通導体４ｃ−４は第一の線路導体４ｃ−１の下側に設けられているが、貫通導体４ｃ−４を第二の線路導体４ｃ−２の上側に設けて、第一の線路導体４ｃ−１を延出させた内層線路導体に貫通導体４ｃ−４を接続してもよい。また、貫通導体４ｃ−４を第一の線路導体４ｃ−１または第二の線路導体４ｃ−２に直接接続せずに、第一の線路導体４ｃ−１および第二の線路導体４ｃ−２をそれぞれ延出させた内層線路導体に接続するようにしてもよい。
【００４９】
【発明の効果】
本発明の入出力端子は、略直方体の誘電体から成り、上面と一側面との間に両端面間にわたって第一の段差が形成されているとともに下面と他側面との間に両端面間にわたって第二の段差が形成されている端子本体部に、第一の段差の底面および第二の段差の天井面に内部配線を介して互いに電気的に接続された線路導体が誘電体の長手方向に略直交するようにしてそれぞれ形成されていることにより、第一の段差の底面と第二の段差の天井面の高さが互いに異なっており、そして、第一の段差を枠体内側に位置させて半導体素子収納用パッケージの枠体に設けて枠体内側の線路導体をボンディングワイヤを介して半導体素子に電気的に接続する際に、半導体素子は半導体素子収納用パッケージの基体の上面に載置されており半導体素子の上面の電極と入出力端子の枠体内側の線路導体とを略同じ高さとすることができるため、ボンディングワイヤの長さを短くすることができる。
【００５０】
また、枠体外側の線路導体をリード端子を介して外部電気回路に接続する際に、外部電気回路は、一般に、半導体素子収納用パッケージが設置された基板上に形成されているか、または半導体素子収納用パッケージが設置された基板上に別個に設けられた他の基板上に形成されているため、外部電気回路は、半導体素子収納用パッケージの基体の下面と略同じ高さかまたは基体の上面付近に位置することとなる。その結果、リード端子と外部電気回路とを近づけることができ、リード端子の長さを極力短くすることができる。
【００５１】
従って、高周波信号のインピーダンス整合が困難なボンディングワイヤの長さとリード端子の長さをきわめて短くすることができ、入出力端子の線路導体で伝送される高周波信号の伝送損失の発生を抑えることができ、入出力端子において高周波信号を効率良く入出力し得る。その結果、半導体素子を正常に作動させることができる。また、製品によって半導体素子収納用パッケージ内部の半導体素子の高さおよびリード端子の高さが変化したとしても、本発明の入出力端子の第一の段差と第二の段差の高さを調整することにより、ボンディングワイヤおよびリード端子の長さを最短とすることができ、高周波信号の伝送効率を良好にすることができる。
【００５２】
また、入出力端子を小型化しても、従来の立壁部のように薄肉となる部位がなくなり、入出力端子にクラック等の破損が生ずることを防止でき、半導体素子収納用パッケージにおける気密信頼性が向上する。
【００５３】
本発明の半導体素子収納用パッケージは、上面に半導体素子が載置される載置部を有する金属製の基体と、基体の上面に載置部を囲繞するように取着され、側部に貫通孔または切欠きから成る入出力端子の取付部が形成されている金属製の枠体と、取付部に第一の段差が枠体の内側に位置するようにして嵌着された本発明の入出力端子とを具備したことにより、入出力端子における高周波信号の伝送特性に優れまた気密性に優れた、高性能および高信頼性のものとなる。
【００５４】
本発明の半導体装置は、上記本発明の半導体素子収納用パッケージと、載置部に載置固定されるとともに入出力端子に電気的に接続された半導体素子と、枠体の上面に接合された蓋体とを具備したことにより、上記本発明の半導体素子収納用パッケージを用いた、高性能および信頼性の高いものとなる。
【図面の簡単な説明】
【図１】本発明の入出力端子を示し、（ａ）は入出力端子の斜視図、（ｂ）は入出力端子の断面図、（ｃ）は入出力端子について実施の形態の他の例を示す線路導体の上面図、（ｄ）は（ｃ）のＡ−Ａ’線における断面図、（ｅ）は（ｄ）のＢ−Ｂ’線における断面図、（ｆ）は内部配線について実施の形態の他の例を示す（ｄ）のＢ−Ｂ’線における断面図である。
【図２】本発明の半導体素子収納用パッケージについて実施の形態の例を示し、（ａ）は半導体素子収納用パッケージの平面図、（ｂ）は半導体素子収納用パッケージの半導体素子部における正面断面図である。
【図３】従来の入出力端子の斜視図である。
【図４】図３の入出力端子を用いた従来の半導体素子収納用パッケージの斜視図である。
【符号の説明】
１：基体
１ａ：載置部
２：枠体
２ａ：入出力端子の取付部
４：入出力端子
４ａ：第一の段差
４ｂ：第二の段差
４ｃ：線路導体
９：半導体素子[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an input / output terminal used for a signal input / output portion of a package for housing a semiconductor element for housing a semiconductor element that operates with a high-frequency signal, a package for housing a semiconductor element using the input / output terminal, and a semiconductor device.
[0002]
[Prior art]
A conventional input / output terminal for transmitting a high-frequency signal such as a microwave band and a millimeter wave band and a semiconductor element housing package (hereinafter also referred to as a semiconductor package) for hermetically housing a semiconductor element are shown in FIGS. 3 and 4, respectively.
[0003]
In FIG. 3, 104a is alumina (Al ₂ O _Three ) Quality sintered body (ceramics), aluminum nitride (AlN) type sintered body, mullite (3Al ₂ O _Three ・ 2SiO ₂ ) A flat plate portion made of a dielectric such as a sintered material, and the flat plate portion 104a is formed on the upper surface from one side to the opposite side and is made of a metallized layer such as tungsten (W) or molybdenum (Mo). In addition to the conductor 104c, a lower ground conductor 104d made of a metallized layer similar to the line conductor 104c is provided on substantially the entire bottom surface. The upper surface of the flat plate portion 104a is joined with a part of the line conductor 104c interposed therebetween, and an Al ground conductor 104e is provided on the upper surface. ₂ O _Three Sintered body, AlN sintered body, 3Al ₂ O _Three ・ 2SiO ₂ A standing wall portion 104b made of a dielectric material such as a sintered material is installed. Side ground conductors 104f made of a metallized layer similar to the line conductor 104c are formed on both side surfaces of the flat plate portion 104a and the standing wall portion 104b.
[0004]
As described above, the input / output terminal 104 is composed of the flat plate portion 104a and the standing wall portion 104b, which hermetically blocks the inside and outside of the semiconductor package and seals the inside thereof.
[0005]
Further, as shown in FIG. 4, an optical semiconductor package, which is a kind of semiconductor package, has a mounting portion 101a on which an optical semiconductor element 109 such as a semiconductor laser (LD) or a photodiode (PD) is mounted. And an iron (Fe) -nickel (Ni) -cobalt (Co) alloy having screw holes 101b formed on both ends of the external electric circuit board (not shown). It has a substantially rectangular base 101 made of a metal such as a copper (Cu) -tungsten (W) alloy. Further, it is joined to the upper surface of the base 101 through a brazing material such as silver (Ag) brazing so as to surround the mounting portion 101a, and the optical semiconductor element 109 and the external electric circuit are electrically connected to both long side portions. A mounting portion 102a for fitting the input / output terminal 104 to be connected is formed, and a through hole 102b, which is an optical transmission path for optically coupling with the optical semiconductor element 109, is formed on one side of the short side. And a substantially rectangular frame 102 made of a metal such as an Fe—Ni—Co alloy. A cylindrical optical fiber fixing member (hereinafter also referred to as a fixing member) 103 made of a metal such as an Fe—Ni—Co alloy is joined to the through hole 102b by a brazing material such as Ag brazing.
[0006]
The input / output terminal 104 is fitted to the mounting portion 102a of the frame body 102 and joined via a brazing material such as Ag brazing, and the lead terminal 105 is connected to the outer side of the frame body 102 of the line conductor 104c. Join with materials. In addition, the optical semiconductor element 109 is mounted and fixed on the mounting portion 101a, and the portion of the line conductor 104c inside the frame 102 and the optical semiconductor element 109 are electrically connected by a bonding wire (not shown). After adjusting the optical axis of the fiber 108 and the optical semiconductor element 109, a metal holder 107, in which the optical fiber 108 is attached with an adhesive such as resin, is joined to the end face of the fixing member 103 on the outer side of the frame 102 by seam welding or the like. To do. Further, a seal ring 106 made of a metal such as an Fe-Ni-Co alloy is joined to the upper surfaces of the frame body 102 and the input / output terminal 104 using a brazing material such as Ag brazing, and a lid (not shown) is attached to the upper surfaces thereof. Are joined by seam welding or the like to provide an optical semiconductor device as a product.
[0007]
In such an optical semiconductor device, the external electric circuit board is screwed with torque, and then the optical semiconductor element 109 is optically excited by a drive signal supplied from the external electric circuit, and the excited laser light or the like is emitted. By transmitting / receiving to / from the fiber 108 and transmitting through the optical fiber 108, it functions as a photoelectric conversion device capable of transmitting a large amount of information at high speed, and is often used in the field of optical communication and the like.
[0008]
[Problems to be solved by the invention]
However, in the conventional input / output terminal 104, when the high-frequency signal transmitted through the line conductor 104c is in a high-frequency band of 10 GHz or more, the lead terminal 105 is attached to the distal end portion of the line conductor 104c on the outer side of the frame 102. Joining with brazing material, and connecting the vicinity of the tip of the line conductor 104c inside the frame body 102 and the optical semiconductor element 109 with a bonding wire, the lead terminal 105 and the bonding wire portion receive high-frequency signals such as reflection loss and transmission loss. There is a problem in that transmission loss increases and high-frequency signals cannot be input / output efficiently at the input / output terminals 104.
[0009]
That is, the lead terminal 105 and the bonding wire have a height difference between the line conductor 104c and the optical semiconductor element 109 and a height difference between the line conductor 104c and the external electric circuit. Will become longer. As a result, it is difficult to match the impedance of the high-frequency signal at the lead terminal 105 and the bonding wire, and transmission loss such as reflection loss and transmission loss of the high-frequency signal occurs at the lead terminal 105 and the bonding wire. There was a problem that malfunction occurred.
[0010]
When the high-frequency signal transmitted through the line conductor 104c is in a high-frequency band of 10 GHz or more, it is necessary to reduce the size of the input / output terminal 104 in order to reduce dielectric loss. In this case, the standing wall portion 104b is thin. When the input / output terminal 104 is attached to the mounting portion 102a of the frame body 102, there is a problem that the input / output terminal 104 is damaged due to a difference in thermal expansion from the frame body 102.
[0011]
Accordingly, the present invention has been completed in view of the above problems, and its purpose is to improve the operability of the high frequency signal of the semiconductor element by effectively preventing the transmission loss of the high frequency signal at the input / output terminals. There is to do. Moreover, even if it reduces in size, it is setting it as the input-output terminal which does not produce damages, such as a crack, by the thermal expansion difference with a frame.
[0012]
[Means for Solving the Problems]
Of the present invention For semiconductor device storage package The input / output terminal is made of a substantially rectangular parallelepiped dielectric, and a first step is formed between both end surfaces between the upper surface and one side surface, and a second step is formed between the both end surfaces between the lower surface and the other side surface. Line conductors that are electrically connected to the bottom surface of the first step and the ceiling surface of the second step via an internal wiring in the longitudinal direction of the dielectric body They are formed so as to be substantially orthogonal to each other.
[0013]
The input / output terminal of the present invention is such that the line conductors electrically connected to the bottom surface of the first step and the ceiling surface of the second step through the internal wiring are substantially orthogonal to the longitudinal direction of the dielectric. Since each is formed, the height of the bottom surface of the first step and the ceiling surface of the second step are different from each other, and the first step is positioned inside the frame body, and the semiconductor element storage package When the line conductor inside the frame is electrically connected to the semiconductor element via the bonding wire, the semiconductor element is placed on the upper surface of the base of the package for housing the semiconductor element. Since the upper electrode and the line conductor inside the frame of the input / output terminal can be set to substantially the same height, the length of the bonding wire can be shortened.
[0014]
Further, when the line conductor outside the frame is connected to the external electric circuit via the lead terminal, the external electric circuit is generally formed on a substrate on which a semiconductor element storage package is installed, or the semiconductor element Since the external electrical circuit is formed on another substrate separately provided on the substrate on which the storage package is installed, the external electric circuit is substantially the same height as the lower surface of the base of the semiconductor element storage package or near the upper surface of the base Will be located. As a result, the lead terminal and the external electric circuit can be brought close to each other, and the length of the lead terminal can be shortened as much as possible.
[0015]
Therefore, the length of the bonding wire and the length of the lead terminal, which are difficult to match the impedance of the high-frequency signal, can be extremely shortened, and transmission loss of the high-frequency signal transmitted through the line conductor of the input / output terminal can be suppressed. High-frequency signals can be input / output efficiently at the input / output terminals. As a result, the semiconductor element can be operated normally. Further, even if the height of the semiconductor element and the lead terminal in the semiconductor element storage package vary depending on the product, the height of the first step and the second step of the input / output terminal of the present invention is adjusted. As a result, the lengths of the bonding wire and the lead terminal can be minimized, and the transmission efficiency of the high-frequency signal can be improved.
[0016]
Moreover, even if the input / output terminal is downsized, there is no thinned portion like the conventional standing wall part, and it is possible to prevent the input / output terminal from being damaged such as a crack, and the airtight reliability in the package for housing the semiconductor element is improved. improves.
[0017]
The semiconductor element storage package according to the present invention includes a metal base having a mounting portion on which a semiconductor element is mounted on the upper surface, and a side portion attached to the upper surface of the base so as to surround the mounting portion. And a metal frame having an input / output terminal mounting portion formed of a through hole or a notch, and the mounting portion is fitted so that the first step is located inside the frame. And an input / output terminal of the present invention.
[0018]
The semiconductor element storage package of the present invention has high performance and high reliability with the high frequency signal transmission characteristics at the input / output terminals and excellent airtightness due to the above configuration.
[0019]
A semiconductor device according to the present invention includes a package for housing a semiconductor element according to the present invention, a semiconductor element mounted and fixed on the mounting portion and electrically connected to the input / output terminal, and an upper surface of the frame body. And a joined lid.
[0020]
The semiconductor device of the present invention has a high performance and high reliability using the semiconductor element storage package of the present invention due to the above configuration.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
The input / output terminals, semiconductor element storage package, and semiconductor device of the present invention will be described in detail below. An input / output terminal of the present invention and an optical semiconductor package as a semiconductor package are shown in FIGS. 1A is a perspective view of an input / output terminal, FIG. 1B is a cross-sectional view of the input / output terminal, FIG. 1C is a top view of a line conductor showing another example of the embodiment of the input / output terminal, and FIG. (C) is a cross-sectional view taken along the line AA ′, (e) is a cross-sectional view taken along the line BB ′ of (d), and (f) is another example of the embodiment of the internal wiring (d). It is sectional drawing in the BB 'line | wire. 2A is a top view of the optical semiconductor package, and FIG. 2B is a front sectional view of the semiconductor element portion of the optical semiconductor package.
[0022]
In these drawings, 1 is a base, 2 is a frame, 3 is a cylindrical fixing member for fixing a metal holder 7 to which an optical fiber 8 is attached, 4 is an input / output terminal, and 6 is a seal ring. The base body 1, the frame body 2, the fixing member 3, the input / output terminal 4, and the seal ring 6 constitute a container that accommodates an optical semiconductor element 9 such as an LD or PD as a semiconductor element. The lid 15 is attached to the semiconductor device.
[0023]
The optical semiconductor package of the present invention is attached so as to surround the mounting portion 1a on the upper surface of the base 1 and the metal base 1 having the mounting portion 1a on which the optical semiconductor element 9 is mounted. A metal frame 2 in which a mounting portion 2a of the input / output terminal 4 formed of a through hole or a notch is formed in a side portion, and a first step 4a is positioned inside the frame 2 in the mounting portion 2a. And an input / output terminal 4 fitted thereto.
[0024]
The base body 1 of the present invention has a mounting portion 1a for mounting the optical semiconductor element 9 on its upper surface, functions as a support member for supporting the optical semiconductor element 9, and emits when the optical semiconductor element 9 operates. It has a function of efficiently dissipating heat to the outside. The substrate 1 has a substantially rectangular shape and is made of a metal such as an Fe—Ni—Co alloy or a Cu—W alloy. The substrate 1 is formed into a predetermined shape by subjecting an ingot such as an Fe—Ni—Co alloy to metal processing such as rolling or pressing. Further, the substrate 1 has a metal surface having excellent corrosion resistance and wettability with the brazing material, specifically, a Ni layer having a thickness of 0.5 to 9 μm and an Au layer having a thickness of 0.5 to 5 μm are sequentially formed by a plating method. It is preferable that the substrate 1 be deposited, so that the base 1 can be effectively prevented from being oxidatively corroded, and the optical semiconductor element 9 can be firmly bonded and fixed to the upper surface of the base 1.
[0025]
Further, the upper surface of the substrate 1 is joined via a brazing material such as Ag brazing so as to surround the mounting portion 1a, and the optical semiconductor element 9 and the external electric circuit are electrically connected to both side portions on the long side. A through-hole that is an optical transmission path for optically coupling to the optical semiconductor element 9 on one side of the short side is formed. It has a substantially rectangular frame 2 made of a metal such as an Fe—Ni—Co alloy in which 2b is formed. The frame 2 is formed into a predetermined shape by subjecting a metal ingot similar to the base 1 to metal processing such as rolling or pressing. The frame body 2 is bonded to the base body 1 by bonding the upper surface of the base body 1 and the lower surface of the frame body 2 through a brazing material such as preformed Ag brazing laid on the upper surface of the base body 1. Furthermore, a metal layer such as a Ni layer having a thickness of 0.5 to 9 μm or an Au layer having a thickness of 0.5 to 5 μm may be deposited on the surface of the frame body 2 by a plating method in the same manner as the substrate 1.
[0026]
An input / output terminal 4 having a function of inputting / outputting a high-frequency signal between the optical semiconductor element 9 and an external electric circuit and a function of blocking the inside / outside of the optical semiconductor package is provided on the mounting portion 2a of the frame 2. Joined with brazing material such as brazing.
[0027]
As shown in FIG. 1 (a), the input / output terminal 4 of the present invention is made of a substantially rectangular parallelepiped dielectric, and a first step 4a is formed between both end surfaces between an upper surface and one side surface. A terminal main body portion 14 in which a second step 4b is formed between both end surfaces between the lower surface and the other side surface, and the bottom surface of the first step 4a and the ceiling surface of the second step 4b are connected via internal wiring. Line conductors 4c that are electrically connected to each other are formed so as to be substantially orthogonal to the longitudinal direction of the dielectric.
[0028]
That is, in the input / output terminal 4, the first line conductor 4c-1 is formed on the bottom surface of the first step 4a, and the second line conductor 4c-2 is formed on the ceiling surface of the second step 4b. ing. The first line conductor 4c-1 and the second line conductor 4c-2 are electrically connected via an internal wiring.
[0029]
Input / output terminal 4 is Al ₂ O _Three Sintered body (Al ₂ O _Three Ceramics), AlN sintered body, 3Al ₂ O _Three ・ 2SiO ₂ A line conductor 4c made of a dielectric material such as a sintered material and made of a metallized layer such as W or Mo is formed. A lower ground conductor 4d made of a metallized layer similar to the line conductor 4c is formed on the entire lower surface of the input / output terminal 4, and an upper ground conductor 4e made of a metallized layer similar to the line conductor 4c is formed on the entire upper surface. A side ground conductor 4f made of a metallized layer similar to the line conductor 4c is formed on the side surface.
[0030]
In the present invention, preferably, the width A1 of the upper surface and the width A2 of the lower surface of the input / output terminal 4 are 1.5 to 3 times the thickness of the frame 2 as shown in FIG. When the thickness is less than 1.5 times the thickness of the frame body 2, the widths A 1 and A 2 become too small, and the brazing material meniscus that joins the frame body 2 and the input / output terminal 4 to the upper and lower surfaces of the input / output terminal 4 is formed. It becomes impossible to form well, and it becomes difficult to firmly join the input / output terminal 4 to the frame 2. When the thickness of the frame body 2 exceeds 3 times, the input / output terminal 4 becomes large and the length protruding into and out of the frame body 2 becomes too long, and the semiconductor element 9 is placed inside the frame body 2. Or when installing an external electric circuit board on the outside of the frame body 2 is likely to be an obstacle.
[0031]
Preferably, the step B1 of the first step 4a and the step B2 of the second step 4b are 0.3 to 3 mm. If it is less than 0.3 mm, the steps B1 and B2 are too small, and the brazing material for joining the frame 2 and the input / output terminal 4 is from the upper surface of the input / output terminal 4 to the first step 4a or the input / output. It flows into the second step 4b from the lower surface of the terminal 4, and the upper ground conductor 4e and the line conductor 4c, and the lower ground conductor 4d and the line conductor 4c cause an electrical short circuit, so that the semiconductor element 9 cannot operate normally. . When it exceeds 3 mm, the height of the input / output terminal 4 becomes higher than necessary, and the height of the frame body 2 also increases accordingly, and the size of the semiconductor package becomes large, which is contrary to the recent trend of downsizing of the semiconductor package. It becomes.
[0032]
The input / output terminal 4 is fitted and joined to the mounting portion 2a of the frame 2 so that the first step 4a is located inside the frame 2 and the second step 4b is located outside the frame 2. The height of the bottom surface of the first step 4a can be adjusted to be substantially the same as the height at which the optical semiconductor element 9 is mounted (the height of the upper surface of the optical semiconductor element 9). Further, the height of the bottom surface of the second step 4b can be adjusted to a height at which the lead terminal 5 can be directly electrically connected to an electrode or the like of the external electric circuit board.
[0033]
Therefore, when the input / output terminal 4 is provided on the frame 2 of the optical semiconductor package and the first line conductor 4c-1 located inside the frame 2 and the optical semiconductor element 9 are connected by the bonding wire, the length of the bonding wire Therefore, the occurrence of transmission loss of the high-frequency signal is greatly suppressed, and the operability of the optical semiconductor element 9 can be prevented from being damaged by the transmission loss of the high-frequency signal. Further, when the second line conductor 4c-2 located outside the frame body 2 is connected to the external electric circuit via the lead terminal 5, the length of the lead terminal 5 can be shortened. Transmission loss of high frequency signals can be suppressed.
[0034]
In addition, since no thin portion is generated in the input / output terminal 4, the input / output terminal 4 is not damaged due to a difference in thermal expansion with the frame 2, and the airtight reliability of the optical semiconductor package at the input / output terminal 4 is improved. To do.
[0035]
In such an input / output terminal 4, as shown in FIG. 1B, the first line conductor 4c-1 formed on the bottom surface of the first step 4a and the ceiling surface of the second step 4b. The formed second line conductor 4c-2 includes an inner layer line conductor 4c-3 formed by extending the second line conductor 4c-2, an end of the inner layer line conductor 4c-3, and the first line conductor. It is electrically connected by a through conductor 4c-4 that electrically connects 4c-1. That is, the inner layer line conductor 4c-3 and the through conductor 4c-4 are internal wirings that connect the first and second line conductors 4c-1 and 4c-2.
[0036]
The line conductor 4c composed of the first and second line conductors 4c-1 and 4c-2 is made of, for example, a metal paste obtained by adding and mixing an organic solvent and a solvent to a powder of W, Mo, etc. The ceramic green sheet is formed by printing in a predetermined pattern in advance by a well-known screen printing method and firing.
[0037]
When a high-frequency signal of 10 GHz or more is transmitted by the line conductor 4c, a coplanar is provided by providing the same plane ground conductor on both sides of each of the first and second line conductors 4c-1, 4c-2 and the inner layer line conductor 4c-3. It is preferable to use a line, and a plurality of grounding through conductors may be provided around the through conductor 4c-4 on a concentric circle centering on the through conductor 4c-4 to form a pseudo coaxial line. In this case, the transmission characteristics of the high frequency signal can be greatly improved. For example, in the first step 4a of the input / output terminal 4, as shown in FIG. 1C, the first coplanar ground conductor 4c-5 is placed around the first line conductor 4c-1 with a predetermined interval. A plurality of ground through conductors 4c-6 are provided around the through conductor 4c-4 on a concentric circle with the through conductor 4c-4 as the center. Further, a second coplanar ground conductor 4c-9 {FIG. 1 (d)} is provided around the second line conductor 4c-2 and the inner layer line conductor 4c-3 with a predetermined interval.
[0038]
Further, when the dielectric between the bottom surface of the first step 4a and the ceiling surface of the second step 4b is composed of a plurality of dielectric layers, as shown in FIG. 1 (d), the first line conductor 4c -1 to the inner layer line conductor 4c-3, the inner layer conductor layer 4c-7 is provided around the through conductor 4c-4 penetrating the dielectric layer, and the inner layer ground conductor layer 4c-8 is provided around the ground through conductor 4c-6. It is good to provide. In this case, the through conductor 4c-4 is formed so as to penetrate through substantially the center of the inner conductor layer 4c-7 having a substantially circular shape in plan view.
[0039]
Further, a plurality of ground through conductors 4c-6 are formed on the circumference D {FIG. 1 (e)} around the inner layer conductor layer 4c-7 at a substantially constant interval around the inner layer conductor layer 4c-7. It is preferable that the plurality of inner ground conductor layers 4c-8 are formed so as to penetrate through substantially the center portion from the first same-surface ground conductor layer 4c-5 to the second same-surface ground conductor layer 4c-9. . In the case of FIG. 1E, the interval between the inner ground conductor layers 4c-8 is preferably 60 ° or more with respect to the center C1 of the through conductor 4c-4 with respect to the center C1 of the through conductor 4c-4. The distance on the circumference D between the centers C2 of the conductor 4c-6 is preferably about 0.53 mm (the diameter of the grounding through conductor 4c-6 is about 0.2 mm) or more, and the circumference between the inner ground conductor layers 4c-8 is between The interval on D is preferably about 0.25 mm or more. In this case, the impedance of the high-frequency signal transmitted through the line conductor 4c can be substantially matched to the characteristic impedance, and even if the high-frequency signal is in a high-frequency band of 10 GHz or higher, reflection loss or transmission loss occurs in the high-frequency signal. It is possible to suppress the transmission and transmit a high-frequency signal efficiently.
[0040]
More preferably, as shown in FIG. 1 (f), the inner ground conductor layer 4 c-8 has a circular conductor layer around the ground through conductor 4 c-6, and a part of the through conductor 4 c-4 side has a circumference D. The conductor layer is formed so as to have a shape cut along the upper radius R, and is formed by a straight line L passing through the center C1 of the through conductor 4c-4 and the center C2 of the ground through conductor 4c-6 and the radius R. The angle is preferably 90 to 120 °. In FIG. 1 (f), L1 is a line segment on the conductor layer side of the straight line L, in other words, the angle between the line segment L1 and the radius R is 90 to 120 °. As a result, the distance between the through conductor 4c-4 and the ground through conductor 4c-6 can be made very short, and a short circuit between the inner conductor layer 4c-7 and the inner ground conductor layer 4c-8 can be prevented. A high frequency signal in a high frequency band can be transmitted.
[0041]
A lead terminal 5 made of a metal such as an Fe-Ni-Co alloy and connected to an external electric circuit is joined to the second line conductor 4c-2 with a brazing material such as Ag brazing.
[0042]
In the input / output terminal 4 of the present invention, the height difference between the bottom surface of the first step 4a and the ceiling surface of the second step 4b is preferably 0.1 to 15 mm. If it is less than 0.1 mm, the length of the bonding wire and the length of the lead terminal 5 cannot be shortened, and the transmission characteristics of the high-frequency signal transmitted through the line conductor 4c cannot be improved. When the thickness exceeds 15 mm, when the input / output terminal 4 is manufactured, the ceramic green sheets to be the input / output terminal 4 are uniformly laminated below the first step 4a and above the second step 4b. It becomes difficult to apply pressure, and a portion where the ceramic green sheets cannot be brought into close contact with each other is generated, making it difficult to manufacture the input / output terminal 4.
[0043]
Moreover, it is preferable that the width | variety of the ceiling direction of the 2nd level | step difference 4b is larger than the width | variety of the line direction of the bottom face of the 1st level | step difference 4a. That is, since the first step 4a is located inside the frame 2, the width of the bottom surface in the line direction is restricted in order to prevent the semiconductor package from becoming large. Moreover, the 1st line conductor 4c-1 should just ensure the area | region which can connect a bonding wire. On the other hand, since the second step 4b is located outside the frame body 2 and it is necessary to secure an area for brazing the lead terminal 5 firmly, the width of the ceiling surface in the line direction is the first width. It is preferable that it is larger than the width of the bottom surface of the step 4a.
[0044]
Further, a through hole 2b is formed on one side of the short side of the frame 2, and one end of the cylindrical fixing member 3 is disposed around the outer opening of the frame 2 in the through hole 2b. Bonded with materials. A metal holder 7 having an optical fiber 8 attached with an adhesive such as a resin is bonded to the other end surface of the fixing member 3 with a low melting point brazing material such as Au—Sn. The fixing member 3 is manufactured by processing the same metal as the base body 1 and the frame body 2 into a desired shape by the same processing method, and has a Ni layer having a thickness of 0.5 to 9 μm and a thickness of 0.5 to 5 on the surface thereof. A metal layer such as a 5 μm Au layer may be deposited by plating.
[0045]
A seal ring 6 is joined to the upper surface of the frame 2 to which the input / output terminals 4 and the fixing member 3 are attached with a brazing material such as Ag brazing. The seal ring 6 is joined to the upper surface of the frame body 2 with a brazing material such as Ag brazing, and the input / output terminals 4 are sandwiched together with the frame body 2, and Fe—Ni— for sealing the optical semiconductor element 9 on the upper surface thereof. The lid 15 made of a Co alloy or the like functions as a joining medium for joining by seam welding or the like.
[0046]
Thus, the input / output terminal 4 of the present invention can reduce the transmission loss when a high-frequency signal is transmitted to the line conductor 4c. Therefore, the operability of the high-frequency signal and the optical signal of the optical semiconductor element 9 is improved.
[0047]
In the optical semiconductor package of the present invention, the optical semiconductor element 9 is mounted and fixed to the mounting portion 1a of the base 1 with a low melting point solder such as Sn-Pb solder, and the line conductor 4c and the optical semiconductor element 9 are bonded to the bonding wire. Then, the metal holder 7 having the optical fiber 8 attached to the fixing member 3 with an adhesive such as a resin is joined with a low melting point brazing material such as Au-Sn, and then the lid on the upper surface of the seal ring 6 By joining 15 by seam welding or the like, an optical semiconductor device as a product is obtained. In this optical semiconductor device, a torque is applied to the screwing hole 1b of the base 1 and screwed to the external electric circuit board, and then the optical semiconductor element 9 is optically excited by a drive signal supplied from the external electric circuit, thereby exciting the laser. It functions as a photoelectric conversion device capable of transmitting a large amount of information at a high speed by transmitting and receiving light such as light to and from the optical fiber 8 and is often used in the field of optical communication and the like.
[0048]
Note that the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention. For example, in the above embodiment, the through conductor 4c-4 is provided below the first line conductor 4c-1, but the through conductor 4c-4 is disposed above the second line conductor 4c-2. The through conductor 4c-4 may be connected to the inner layer line conductor that is provided and extended from the first line conductor 4c-1. Further, the first line conductor 4c-1 and the second line conductor 4c-2 are not directly connected to the first line conductor 4c-1 or the second line conductor 4c-2. You may make it connect to the extended inner-layer line conductor, respectively.
[0049]
【The invention's effect】
The input / output terminal of the present invention is made of a substantially rectangular parallelepiped dielectric, and a first step is formed between both end surfaces between the upper surface and one side surface, and between both end surfaces between the lower surface and the other side surface. Line conductors that are electrically connected to the bottom surface of the first step and the ceiling surface of the second step through the internal wiring in the longitudinal direction of the dielectric By being formed so as to be substantially orthogonal, the bottom surface of the first step and the ceiling surface of the second step are different from each other, and the first step is positioned inside the frame. The semiconductor element is placed on the upper surface of the substrate of the semiconductor element storage package when the line conductor inside the frame body is electrically connected to the semiconductor element via the bonding wire. On the semiconductor element It is possible to electrodes substantially the same height and the frame body side of the line conductor of the input and output terminals, it is possible to shorten the length of the bonding wire.
[0050]
Further, when the line conductor outside the frame is connected to the external electric circuit via the lead terminal, the external electric circuit is generally formed on a substrate on which a semiconductor element storage package is installed, or the semiconductor element Since the external electrical circuit is formed on another substrate separately provided on the substrate on which the storage package is installed, the external electric circuit is substantially the same height as the lower surface of the base of the semiconductor element storage package or near the upper surface of the base Will be located. As a result, the lead terminal and the external electric circuit can be brought close to each other, and the length of the lead terminal can be shortened as much as possible.
[0051]
Therefore, the length of the bonding wire and the length of the lead terminal, which are difficult to match the impedance of the high-frequency signal, can be extremely shortened, and transmission loss of the high-frequency signal transmitted through the line conductor of the input / output terminal can be suppressed. High-frequency signals can be input / output efficiently at the input / output terminals. As a result, the semiconductor element can be operated normally. Further, even if the height of the semiconductor element and the lead terminal in the semiconductor element storage package vary depending on the product, the height of the first step and the second step of the input / output terminal of the present invention is adjusted. As a result, the lengths of the bonding wire and the lead terminal can be minimized, and the transmission efficiency of the high-frequency signal can be improved.
[0052]
Moreover, even if the input / output terminal is downsized, there is no thinned portion like the conventional standing wall part, and it is possible to prevent the input / output terminal from being damaged such as a crack, and the airtight reliability in the package for housing the semiconductor element is improved. improves.
[0053]
The semiconductor element storage package of the present invention has a metal base having a mounting portion on which the semiconductor element is mounted on the upper surface, and is attached to the upper surface of the base so as to surround the mounting portion, and penetrates to the side portion. A metal frame having an input / output terminal mounting portion formed of a hole or a notch, and the fitting of the present invention fitted to the mounting portion so that the first step is located inside the frame. By providing the output terminal, it is excellent in high-frequency signal transmission characteristics at the input / output terminal, and has excellent airtightness, high performance and high reliability.
[0054]
The semiconductor device of the present invention is bonded to the upper surface of the frame body, the semiconductor element housing package of the present invention, the semiconductor element mounted and fixed on the mounting portion and electrically connected to the input / output terminals. By including the lid, the semiconductor element storage package of the present invention is used, which provides high performance and high reliability.
[Brief description of the drawings]
1A and 1B show an input / output terminal of the present invention, in which FIG. 1A is a perspective view of the input / output terminal, FIG. 1B is a cross-sectional view of the input / output terminal, and FIG. (D) is a cross-sectional view taken along the line AA ′ in (c), (e) is a cross-sectional view taken along the line BB ′ in (d), and (f) is performed for the internal wiring. It is sectional drawing in the BB 'line of (d) which shows the other example of the form of this.
2A and 2B show an example of an embodiment of a package for housing a semiconductor element of the present invention, in which FIG. 2A is a plan view of the package for housing a semiconductor element, and FIG. FIG.
FIG. 3 is a perspective view of a conventional input / output terminal.
4 is a perspective view of a conventional package for housing a semiconductor element using the input / output terminals of FIG. 3. FIG.
[Explanation of symbols]
1: Substrate
1a: Placement part
2: Frame
2a: I / O terminal mounting part
4: Input / output terminal
4a: First step
4b: Second step
4c: Line conductor
9: Semiconductor element

Claims

It consists of a substantially rectangular parallelepiped, and a first step is formed between both end surfaces between the upper surface and one side surface, and a second step is formed between both end surfaces between the lower surface and the other side surface. A line conductor electrically connected to the bottom surface of the first step and the ceiling surface of the second step via an internal wiring so as to be substantially orthogonal to the longitudinal direction of the dielectric. Each of the input / output terminals for a package for housing a semiconductor element is characterized in that each is formed.

A metal base having a mounting portion on which a semiconductor element is mounted on the upper surface, and an input / output composed of a through hole or a notch on the side mounted on the upper surface of the base so as to surround the mounting portion. The input / output terminal according to claim 1, wherein a metal frame having a terminal mounting portion formed thereon, and the input / output terminal fitted to the mounting portion so that the first step is located inside the frame. A package for housing a semiconductor element, comprising:

A package for housing a semiconductor element according to claim 2, a semiconductor element mounted on and fixed to the mounting portion and electrically connected to the input / output terminal, and a lid joined to the upper surface of the frame A semiconductor device comprising: