JP4564094B2 - 薄膜トランジスタパネル - Google Patents
薄膜トランジスタパネル Download PDFInfo
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- JP4564094B2 JP4564094B2 JP2009135412A JP2009135412A JP4564094B2 JP 4564094 B2 JP4564094 B2 JP 4564094B2 JP 2009135412 A JP2009135412 A JP 2009135412A JP 2009135412 A JP2009135412 A JP 2009135412A JP 4564094 B2 JP4564094 B2 JP 4564094B2
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- thin film
- film transistor
- carbon nanotube
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- electrode
- Prior art date
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- 239000010409 thin film Substances 0.000 title claims description 131
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 126
- 239000002041 carbon nanotube Substances 0.000 claims description 105
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 105
- 239000004065 semiconductor Substances 0.000 claims description 76
- 239000002238 carbon nanotube film Substances 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 32
- 238000002161 passivation Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 11
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 10
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000000969 carrier Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000002079 double walled nanotube Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000002109 single walled nanotube Substances 0.000 description 4
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
- H10K85/221—Carbon nanotubes
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Thin Film Transistor (AREA)
- Carbon And Carbon Compounds (AREA)
Description
図1と図2を参照すると、本発明の実施例1は、薄膜トランジスタパネル100を提供する。該薄膜トランジスタパネル100は、複数の薄膜トランジスタ110、複数のピクセル電極120、複数のソース電極リード線130、複数のゲート電極リード線140及び一つの絶縁基板150を含む。
図12及び図13を参照すると、本発明の実施例2は、薄膜トランジスタパネル200を提供する。該薄膜トランジスタパネル200は、複数の薄膜トランジスタ210、複数のピクセル電極220、複数のソース電極リード線230、複数のゲート電極リード線240及び一つの絶縁基板250を含む。該複数のソース電極リード線230と該複数のゲート電極リード線240は、交叉して前記絶縁基板250に設置されている。隣接する二つのソース電極リード線230と、隣接する二つのゲート電極リード線240とで、複数の格子を形成している。前記トランジスタ210及びピクセル電極220は、前記格子の内に設置される。前記トランジスタ210は、ゲート電極212、絶縁層213、半導体層214、ソース電極215、ドレイン電極216を含む。
110、210 薄膜トランジスタ
112、212 ゲート電極
113、213 絶縁層
114、214 半導体層
115、215 ソース電極
116、216 ドレイン電極
118、218 スルーホール
120、220 ピクセル電極
130、230 ソース電極リード線
140、240 ゲート電極リード線
150、250 絶縁基板
160、260 パッシベーション層
Claims (3)
- 絶縁基板と、複数のソース電極リード線と、複数のゲート電極リード線と、複数のピクセル電極と、複数の薄膜トランジスタと、を含む薄膜トランジスタパネルにおいて、
前記複数のソース電極リード線が互いに平行に設置され、
前記複数のゲート電極リード線が互いに平行に設置され、
前記複数のソース電極リード線及び前記複数のゲート電極リード線が交叉して、前記絶縁基板に複数の格子を形成し、
各々の前記格子の内に、一つの前記薄膜トランジスタ及び一つの前記ピクセル電極が設置され、
各々の前記薄膜トランジスタがソース電極と、前記ソース電極と分離して設置されるドレイン電極と、前記ソース電極及び前記ドレイン電極に電気的に接続される半導体層と、絶縁層と、前記絶縁層により前記半導体層と前記ソース電極及び前記ドレイン電極と絶縁状態で設置されるゲート電極と、を含み、
前記ソース電極が前記ソース電極リード線に電気的に接続され、
前記ドレイン電極が前記ピクセル電極に電気的に接続され、
前記ゲート電極が前記ゲート電極リード線に電気的に接続され、
前記半導体層がカーボンナノチューブ構造体を含み、
前記カーボンナノチューブ構造体が、半導体型カーボンナノチューブを含む少なくとも二枚の積層されたカーボンナノチューブフィルムを含み、
隣接するカーボンナノチューブフィルム間におけるカーボンナノチューブ同士の成す角度が0°〜90°であり、
各々のカーボンナノチューブフィルムが端と端で接続され、同じ方向に沿って配列された複数のカーボンナノチューブを含み、一部の前記カーボンナノチューブの両端がそれぞれ、前記ソース電極及び前記ドレイン電極に電気的に接続されることを特徴とする薄膜トランジスタパネル。 - 前記カーボンナノチューブフィルムが、カーボンナノチューブアレイから引き出すことによって形成されるものであることを特徴とする、請求項1に記載の薄膜トランジスタパネル。
- 前記薄膜トランジスタが、パッシベーション層を含み、該パッシベーション層が前記薄膜トランジスタを被覆し、かつスルーホールを有し、前記ピクセル電極が前記格子及び前記薄膜トランジスタを被覆し、前記スルーホールで前記ドレイン電極に電気的に接続されることを特徴とする、請求項1に記載の薄膜トランジスタパネル。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008100676396A CN101599495B (zh) | 2008-06-04 | 2008-06-04 | 薄膜晶体管面板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009295983A JP2009295983A (ja) | 2009-12-17 |
JP4564094B2 true JP4564094B2 (ja) | 2010-10-20 |
Family
ID=41399493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009135412A Active JP4564094B2 (ja) | 2008-06-04 | 2009-06-04 | 薄膜トランジスタパネル |
Country Status (3)
Country | Link |
---|---|
US (1) | US20090302324A1 (ja) |
JP (1) | JP4564094B2 (ja) |
CN (1) | CN101599495B (ja) |
Families Citing this family (9)
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KR101041144B1 (ko) * | 2009-08-13 | 2011-06-13 | 삼성모바일디스플레이주식회사 | 박막트랜지스터, 그의 제조방법 및 그를 포함하는 유기전계발광표시장치 |
CN101880035A (zh) | 2010-06-29 | 2010-11-10 | 清华大学 | 碳纳米管结构 |
CN102290304B (zh) * | 2011-08-07 | 2013-01-16 | 张研 | 一种带有聚焦栅极的碳纳米管场发射阵列 |
CN104112777B (zh) * | 2013-04-16 | 2017-12-19 | 清华大学 | 薄膜晶体管及其制备方法 |
EP2857866B1 (en) * | 2013-10-02 | 2019-06-19 | Rayence Co., Ltd. | X-ray sensor and method of manufacturing the same |
CN104111581A (zh) * | 2014-07-09 | 2014-10-22 | 京东方科技集团股份有限公司 | 掩膜板及其制造方法、薄膜晶体管的制造方法 |
US9379166B2 (en) * | 2014-11-04 | 2016-06-28 | Atom Nanoelectronics, Inc. | Active matrix light emitting diodes display module with carbon nanotubes control circuits and methods of fabrication |
US9891769B2 (en) * | 2014-11-25 | 2018-02-13 | Lg Innotek Co., Ltd. | Touch window |
CN106206743B (zh) * | 2015-05-04 | 2020-04-28 | 清华大学 | 薄膜晶体管及其制备方法、薄膜晶体管面板以及显示装置 |
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