JP4558981B2 - トランスファロボット - Google Patents

トランスファロボット Download PDF

Info

Publication number
JP4558981B2
JP4558981B2 JP2001169995A JP2001169995A JP4558981B2 JP 4558981 B2 JP4558981 B2 JP 4558981B2 JP 2001169995 A JP2001169995 A JP 2001169995A JP 2001169995 A JP2001169995 A JP 2001169995A JP 4558981 B2 JP4558981 B2 JP 4558981B2
Authority
JP
Japan
Prior art keywords
arm
hand member
transfer robot
connecting portion
hand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001169995A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002210684A5 (https=
JP2002210684A (ja
Inventor
龍介 坪田
耕太 星島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2001169995A priority Critical patent/JP4558981B2/ja
Priority to US10/012,737 priority patent/US6655901B2/en
Publication of JP2002210684A publication Critical patent/JP2002210684A/ja
Publication of JP2002210684A5 publication Critical patent/JP2002210684A5/ja
Application granted granted Critical
Publication of JP4558981B2 publication Critical patent/JP4558981B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2001169995A 2000-11-14 2001-06-05 トランスファロボット Expired - Lifetime JP4558981B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001169995A JP4558981B2 (ja) 2000-11-14 2001-06-05 トランスファロボット
US10/012,737 US6655901B2 (en) 2000-11-14 2001-11-05 Three-dimensionally movable transfer robot

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000346674 2000-11-14
JP2000-346674 2000-11-14
JP2001169995A JP4558981B2 (ja) 2000-11-14 2001-06-05 トランスファロボット

Publications (3)

Publication Number Publication Date
JP2002210684A JP2002210684A (ja) 2002-07-30
JP2002210684A5 JP2002210684A5 (https=) 2008-06-19
JP4558981B2 true JP4558981B2 (ja) 2010-10-06

Family

ID=26603941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001169995A Expired - Lifetime JP4558981B2 (ja) 2000-11-14 2001-06-05 トランスファロボット

Country Status (2)

Country Link
US (1) US6655901B2 (https=)
JP (1) JP4558981B2 (https=)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
JP4391744B2 (ja) * 2002-12-27 2009-12-24 東京エレクトロン株式会社 移動式プローブカード搬送装置、プローブ装置及びプローブ装置へのプローブカードの搬送方法
JP4222068B2 (ja) * 2003-03-10 2009-02-12 東京エレクトロン株式会社 被処理体の搬送装置
CN100454084C (zh) * 2003-12-20 2009-01-21 鸿富锦精密工业（深圳）有限公司 面板翻转机构
US7345736B2 (en) * 2004-06-21 2008-03-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4579606B2 (ja) * 2004-07-20 2010-11-10 川崎重工業株式会社 ロボット
JP4579605B2 (ja) * 2004-07-20 2010-11-10 川崎重工業株式会社 搬送ロボットのアーム構造
DE112005002074T5 (de) 2004-08-25 2007-07-05 Kabushiki Kaisha Yaskawa Denki Gelenkroboter
JP4719010B2 (ja) * 2005-01-21 2011-07-06 日本電産サンキョー株式会社 産業用ロボット
US7771151B2 (en) * 2005-05-16 2010-08-10 Muratec Automation Co., Ltd. Interface between conveyor and semiconductor process tool load port
TWD114851S1 (zh) * 2005-06-29 2007-01-01 東京威力科創股份有限公司 被處理基板搬運用機械臂
US7644558B1 (en) * 2006-10-26 2010-01-12 Fallas David M Robotic case packing system
JP4737123B2 (ja) * 2007-03-19 2011-07-27 トヨタ自動車株式会社 移送ロボット
JP2008254138A (ja) * 2007-04-06 2008-10-23 Yaskawa Electric Corp 多関節ロボット
JP5146641B2 (ja) * 2007-06-06 2013-02-20 株式会社安川電機 基板搬送ロボットおよび基板搬送ロボットの制御方法
JP4466785B2 (ja) 2007-09-13 2010-05-26 株式会社安川電機 移送ロボットおよび移送ロボットの制御方法
US7967549B2 (en) * 2008-05-15 2011-06-28 The Boeing Company Robotic system including foldable robotic arm
US20100172725A1 (en) * 2009-01-07 2010-07-08 Gm Global Technology Operations, Inc. Receiving and Presenting Parts to an Operating Station
TR200909397A2 (tr) * 2009-12-14 2011-07-21 Vargin Gök Gökhan Çoklu eksene haiz bir robot.
JP5464998B2 (ja) * 2009-12-24 2014-04-09 株式会社Ｉｈｉエアロスペース ロボットアームの干渉回避方法
US8768513B2 (en) 2011-08-08 2014-07-01 Applied Materials, Inc. Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
JP5447451B2 (ja) * 2011-08-08 2014-03-19 株式会社安川電機 ロボット
US8814239B2 (en) * 2012-02-15 2014-08-26 Varian Semiconductor Equipment Associates, Inc. Techniques for handling media arrays
CN104380452B (zh) * 2012-04-12 2016-10-19 应用材料公司 具有独立能旋转机身中段的机械手系统、设备及方法
US20130309048A1 (en) * 2012-05-16 2013-11-21 Lam Research Ag Apparatus and method for transporting wafer-shaped articles
US8997438B1 (en) 2012-09-18 2015-04-07 David M. Fallas Case packing system having robotic pick and place mechanism and dual dump bins
CN105810619B (zh) * 2014-12-29 2018-12-28 海宁正泰新能源科技有限公司 电池片旋转搬运机构
CN107635730A (zh) 2015-06-30 2018-01-26 株式会社安川电机 机器人系统
FR3063666B1 (fr) * 2017-03-08 2021-05-07 Neoditech Dispositif pour la manipulation et/ou le positionnement d'objet
CN110447095B (zh) * 2017-03-15 2024-04-26 朗姆研究公司 采用线性真空传送模块减少占用面积平台架构
CN107020464A (zh) * 2017-04-12 2017-08-08 无锡奥特维科技股份有限公司 一种电池片搬运方法及串焊机
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
JP7037379B2 (ja) * 2018-02-06 2022-03-16 ローツェ株式会社 薄板状基板保持装置、及び保持装置を備える搬送ロボット
JP1612912S (https=) * 2018-03-29 2018-09-03
JP1612908S (https=) * 2018-03-29 2018-09-03
JP1612766S (https=) * 2018-03-29 2018-09-03
USD892881S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
JP1619125S (https=) * 2018-03-29 2018-11-26
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
US11192239B2 (en) 2018-10-05 2021-12-07 Brooks Automation, Inc. Substrate processing apparatus
JP1650339S (https=) * 2019-03-27 2020-01-20
JP1644505S (https=) * 2019-03-27 2019-10-28
JP1644507S (https=) * 2019-03-27 2019-10-28
JP1644506S (https=) * 2019-03-27 2019-10-28
JP2020074440A (ja) * 2020-01-17 2020-05-14 川崎重工業株式会社 基板搬送ロボット
USD1019725S1 (en) * 2020-10-14 2024-03-26 Daihen Corporation Industrial robot
JP2024151270A (ja) * 2023-04-11 2024-10-24 株式会社不二越 垂直多関節ロボット
USD997223S1 (en) * 2023-06-07 2023-08-29 Primate Robot Hong Kong Co., Limited Robot

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62251901A (ja) * 1986-04-25 1987-11-02 Fanuc Ltd 多軸ロボツトの経路制御装置
JPH079371B2 (ja) * 1986-11-28 1995-02-01 日立建機株式会社 プロ−ブ姿勢制御装置
JPS63135811A (ja) * 1986-11-28 1988-06-08 Hitachi Constr Mach Co Ltd プロ−ブ姿勢制御装置
JPS63135814A (ja) * 1986-11-28 1988-06-08 Hitachi Constr Mach Co Ltd プロ−ブ姿勢制御装置
JPH0379284A (ja) * 1989-08-18 1991-04-04 Nissan Motor Co Ltd 産業用ロボットの制御方法
JPH0647689A (ja) * 1992-07-30 1994-02-22 Kobe Steel Ltd 多関節形ロボットの制御方法
JPH0982780A (ja) * 1995-09-18 1997-03-28 Kokusai Electric Co Ltd 基板搬送装置
US5789890A (en) * 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JPH11333780A (ja) * 1998-05-22 1999-12-07 Mitsubishi Electric Corp マニピュレータの制御装置
US6297611B1 (en) * 2000-07-06 2001-10-02 Genmark Automation Robot having independent end effector linkage motion

Also Published As

Publication number Publication date
US6655901B2 (en) 2003-12-02
US20020057955A1 (en) 2002-05-16
JP2002210684A (ja) 2002-07-30

Similar Documents

Publication Publication Date Title
JP4558981B2 (ja) トランスファロボット
US8919358B2 (en) Substrate processing apparatus
JP5199117B2 (ja) ワーク搬送システム
JP4980978B2 (ja) 基板処理装置
JP6276317B2 (ja) ハンドユニットおよび移載方法
JP4999487B2 (ja) 基板処理装置
CN109414821A (zh) 包括间隔上臂与交错腕部的双机器人以及包括该双机器人的系统和方法
JP2010287902A (ja) 異なる保持エンドエフェクタを有する基板搬送装置
TWI544993B (zh) 具有可變機械手的四臂搬運機器人
JP2005177976A (ja) ロボットアーム装置
CN101459100B (zh) 紧凑式晶圆自动传输装置
JP2008087151A (ja) 電子部品ピッカー及びこれを備えたハンドラー用ヘッドアセンブリー
JP2004106167A (ja) 基板搬送ロボット
JP2019209458A (ja) エンドエフェクタ及び装置
CN101465309A (zh) 平移翻转式晶圆自动传输装置
JP2005150575A (ja) ダブルアーム型ロボット
JP4199432B2 (ja) ロボット装置及び処理装置
CN201374322Y (zh) 平移翻转式晶圆自动传输装置
JP2010062293A (ja) 電子部品実装装置
CN201345357Y (zh) 旋转式晶圆自动传输装置
JP2000243809A (ja) 多関節ロボット装置
KR102912246B1 (ko) 반도체 웨이퍼 이송용 다축 진공로봇의 구동장치
JP2012069992A (ja) 基板処理装置
KR20240170461A (ko) 산업용 로봇
CN121075979A (zh) 晶环供料装置及方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080502

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080502

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20091216

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091222

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100222

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100720

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100722

R150 Certificate of patent or registration of utility model

Ref document number: 4558981

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130730

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term