JP4533821B2 - Mos型固体撮像装置 - Google Patents
Mos型固体撮像装置 Download PDFInfo
- Publication number
- JP4533821B2 JP4533821B2 JP2005235972A JP2005235972A JP4533821B2 JP 4533821 B2 JP4533821 B2 JP 4533821B2 JP 2005235972 A JP2005235972 A JP 2005235972A JP 2005235972 A JP2005235972 A JP 2005235972A JP 4533821 B2 JP4533821 B2 JP 4533821B2
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- gate
- boosting
- state imaging
- imaging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823456—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different shapes, lengths or dimensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
Description
図1は、本発明の実施の形態1における半導体装置の断面図である。図1に示す構成は、半導体装置に実装されている選択トランジスタ81と昇圧トランジスタ82と周辺ロジックトランジスタ83のみを、抜粋して記載したものである。
L3≦L1<L2
の関係となっていることを特徴とする。
図2は、本発明の実施の形態2における半導体装置の断面図である。図2に示す構成は、半導体装置に実装されている選択トランジスタ84と昇圧トランジスタ85と周辺ロジックトランジスタ86のみを、抜粋して記載したものである。
C1<C2=C3 もしくは、
C1=C3<C2
の関係が成り立つように、各チャネル領域の濃度を設定している。
82、85 昇圧トランジスタ
83、86 周辺ロジックトランジスタ
Claims (4)
- 画素領域と駆動回路領域と周辺回路領域とを備えたMOS型固体撮像装置において、
前記駆動回路領域に形成され、Nチャネル型MOSトランジスタで構成される選択トランジスタと、
前記駆動回路領域に形成され、ゲートが前記選択トランジスタのドレインに接続された昇圧トランジスタと、
前記駆動回路領域に形成され、前記昇圧トランジスタのゲートとソースとの間に接続された昇圧用容量と、
前記周辺回路領域に形成され、Nチャネル型MOSトランジスタで構成される周辺ロジックトランジスタとを備え、
前記昇圧トランジスタのゲート長を、前記選択トランジスタおよび前記周辺ロジックトランジスタのゲート長よりも長く、
前記選択トランジスタのチャネル濃度を、前記昇圧トランジスタのチャネル濃度よりも低く、
前記選択トランジスタと前記昇圧トランジスタと前記周辺ロジックトランジスタとがエンハンスメント型であることを特徴とする、MOS型固体撮像装置。 - 前記選択トランジスタのゲート長を、前記周辺ロジックトランジスタのゲート長よりも長くした、請求項1記載のMOS型固体撮像装置。
- 前記周辺ロジックトランジスタのチャネル濃度を、前記昇圧トランジスタのチャネル濃度と等しくした、請求項1記載のMOS型固体撮像装置。
- 前記周辺ロジックトランジスタのチャネル濃度を、前記選択トランジスタのチャネル濃度と等しくした、請求項1記載のMOS型固体撮像装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005235972A JP4533821B2 (ja) | 2005-08-16 | 2005-08-16 | Mos型固体撮像装置 |
US11/433,622 US7675327B2 (en) | 2005-08-16 | 2006-05-12 | Semiconductor device |
TW095117059A TW200723514A (en) | 2005-08-16 | 2006-05-15 | Semiconductor device |
EP06253327A EP1755159A3 (en) | 2005-08-16 | 2006-06-27 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005235972A JP4533821B2 (ja) | 2005-08-16 | 2005-08-16 | Mos型固体撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007053168A JP2007053168A (ja) | 2007-03-01 |
JP4533821B2 true JP4533821B2 (ja) | 2010-09-01 |
Family
ID=37478680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005235972A Expired - Fee Related JP4533821B2 (ja) | 2005-08-16 | 2005-08-16 | Mos型固体撮像装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7675327B2 (ja) |
EP (1) | EP1755159A3 (ja) |
JP (1) | JP4533821B2 (ja) |
TW (1) | TW200723514A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8248353B2 (en) * | 2007-08-20 | 2012-08-21 | Au Optronics Corporation | Method and device for reducing voltage stress at bootstrap point in electronic circuits |
JP6242211B2 (ja) * | 2013-12-26 | 2017-12-06 | キヤノン株式会社 | 撮像装置および撮像システム |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS532308B2 (ja) * | 1972-09-25 | 1978-01-26 | ||
US3986044A (en) * | 1975-09-12 | 1976-10-12 | Motorola, Inc. | Clocked IGFET voltage level sustaining circuit |
JPS53125753A (en) * | 1977-04-08 | 1978-11-02 | Nec Corp | Driving circuit |
JPS5774886A (en) * | 1980-10-29 | 1982-05-11 | Toshiba Corp | Semiconductor integrated circuit device |
JPS63139426A (ja) * | 1986-12-02 | 1988-06-11 | Mitsubishi Electric Corp | 半導体ブ−トストラツプ回路 |
JP3330746B2 (ja) * | 1994-09-09 | 2002-09-30 | 新日本製鐵株式会社 | ブートストラップ回路 |
JPH08203270A (ja) * | 1995-01-27 | 1996-08-09 | Matsushita Electron Corp | 半導体集積回路 |
KR100277911B1 (ko) * | 1996-06-10 | 2001-02-01 | 김영환 | 반도체소자 제조방법 |
JP3422921B2 (ja) | 1997-12-25 | 2003-07-07 | シャープ株式会社 | 半導体集積回路 |
FR2807847B1 (fr) * | 2000-04-12 | 2002-11-22 | St Microelectronics Sa | Regulateur lineaire a faible surtension en regime transitoire |
JP2002190576A (ja) * | 2000-12-19 | 2002-07-05 | Hitachi Ltd | 半導体装置およびその製造方法 |
KR100432652B1 (ko) | 2002-08-01 | 2004-05-22 | 삼성에스디아이 주식회사 | 레벨 시프터 및 평판 표시 장치 |
WO2004025732A1 (ja) * | 2002-09-12 | 2004-03-25 | Matsushita Electric Industrial Co., Ltd. | 固体撮像装置およびその製造方法 |
WO2004059843A1 (ja) * | 2002-12-25 | 2004-07-15 | Semiconductor Energy Laboratory Co., Ltd. | 補正回路を備えたデジタル回路及びそれを有する電子機器 |
JP4387684B2 (ja) * | 2003-04-04 | 2009-12-16 | パナソニック株式会社 | 固体撮像装置、その駆動方法及びカメラ |
JP2005268621A (ja) * | 2004-03-19 | 2005-09-29 | Toshiba Corp | 半導体集積回路装置 |
JP2005339658A (ja) * | 2004-05-26 | 2005-12-08 | Toshiba Corp | 昇圧回路 |
-
2005
- 2005-08-16 JP JP2005235972A patent/JP4533821B2/ja not_active Expired - Fee Related
-
2006
- 2006-05-12 US US11/433,622 patent/US7675327B2/en not_active Expired - Fee Related
- 2006-05-15 TW TW095117059A patent/TW200723514A/zh unknown
- 2006-06-27 EP EP06253327A patent/EP1755159A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2007053168A (ja) | 2007-03-01 |
TW200723514A (en) | 2007-06-16 |
US7675327B2 (en) | 2010-03-09 |
EP1755159A2 (en) | 2007-02-21 |
EP1755159A3 (en) | 2008-02-20 |
US20070040583A1 (en) | 2007-02-22 |
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