JP4530135B2 - 排水分別方法及び装置 - Google Patents
排水分別方法及び装置 Download PDFInfo
- Publication number
- JP4530135B2 JP4530135B2 JP2004103009A JP2004103009A JP4530135B2 JP 4530135 B2 JP4530135 B2 JP 4530135B2 JP 2004103009 A JP2004103009 A JP 2004103009A JP 2004103009 A JP2004103009 A JP 2004103009A JP 4530135 B2 JP4530135 B2 JP 4530135B2
- Authority
- JP
- Japan
- Prior art keywords
- line
- water
- tank
- drainage
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002351 wastewater Substances 0.000 title claims description 58
- 238000000926 separation method Methods 0.000 title claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 104
- 238000005259 measurement Methods 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 16
- 238000011084 recovery Methods 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013442 quality metrics Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/18—Water
- G01N33/1826—Organic contamination in water
- G01N33/1846—Total carbon analysis
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/152—Water filtration
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Food Science & Technology (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Sampling And Sample Adjustment (AREA)
- Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
- Processing Of Solid Wastes (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004103009A JP4530135B2 (ja) | 2004-03-31 | 2004-03-31 | 排水分別方法及び装置 |
TW094110083A TW200531936A (en) | 2004-03-31 | 2005-03-30 | Method and device for fractionating waste water |
CN2005100562391A CN1677104B (zh) | 2004-03-31 | 2005-03-31 | 废水分类方法及装置 |
KR1020050027141A KR20060045373A (ko) | 2004-03-31 | 2005-03-31 | 배수분별방법 및 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004103009A JP4530135B2 (ja) | 2004-03-31 | 2004-03-31 | 排水分別方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005288213A JP2005288213A (ja) | 2005-10-20 |
JP4530135B2 true JP4530135B2 (ja) | 2010-08-25 |
Family
ID=35049740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004103009A Expired - Fee Related JP4530135B2 (ja) | 2004-03-31 | 2004-03-31 | 排水分別方法及び装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4530135B2 (zh) |
KR (1) | KR20060045373A (zh) |
CN (1) | CN1677104B (zh) |
TW (1) | TW200531936A (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5188208B2 (ja) * | 2008-02-29 | 2013-04-24 | 株式会社福田組 | 濁水処理システム |
CN101786675A (zh) * | 2010-03-09 | 2010-07-28 | 清华大学 | 一种多参数废水源头分离装置及方法 |
JP2014018743A (ja) * | 2012-07-19 | 2014-02-03 | Yachiyo Industry Co Ltd | 排水処理方法 |
CN103880240B (zh) * | 2014-01-15 | 2015-10-28 | 河海大学 | 一种以电导率为指标的印染废水清浊分质收集方法 |
CN106198911B (zh) * | 2016-07-03 | 2018-05-08 | 重庆欣时达生物技术有限公司 | 一种环保水质监测系统 |
CN106178614A (zh) * | 2016-08-26 | 2016-12-07 | 安徽盛运重工机械有限责任公司 | 用于飞灰固化的废水处理池 |
CN111623160B (zh) * | 2019-02-28 | 2022-06-24 | 鹏鼎控股(深圳)股份有限公司 | 智能排废装置、方法及存储设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07260725A (ja) * | 1994-03-22 | 1995-10-13 | Japan Organo Co Ltd | 有機体炭素測定装置、及び同装置を組込んだ超純水製造装置 |
JPH08173951A (ja) * | 1994-12-21 | 1996-07-09 | Mitsubishi Electric Corp | 洗浄装置からの排水の再利用のための方法及び装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1093620A (zh) * | 1993-11-03 | 1994-10-19 | 周念庵 | 垃圾分离分类生产活性炭的方法 |
JP3336952B2 (ja) * | 1998-05-13 | 2002-10-21 | 信越半導体株式会社 | ウエーハ洗浄装置における排水分別回収装置 |
-
2004
- 2004-03-31 JP JP2004103009A patent/JP4530135B2/ja not_active Expired - Fee Related
-
2005
- 2005-03-30 TW TW094110083A patent/TW200531936A/zh unknown
- 2005-03-31 KR KR1020050027141A patent/KR20060045373A/ko active Search and Examination
- 2005-03-31 CN CN2005100562391A patent/CN1677104B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07260725A (ja) * | 1994-03-22 | 1995-10-13 | Japan Organo Co Ltd | 有機体炭素測定装置、及び同装置を組込んだ超純水製造装置 |
JPH08173951A (ja) * | 1994-12-21 | 1996-07-09 | Mitsubishi Electric Corp | 洗浄装置からの排水の再利用のための方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1677104B (zh) | 2011-09-28 |
TWI351386B (zh) | 2011-11-01 |
CN1677104A (zh) | 2005-10-05 |
JP2005288213A (ja) | 2005-10-20 |
TW200531936A (en) | 2005-10-01 |
KR20060045373A (ko) | 2006-05-17 |
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