JP4526797B2 - トンネル接合素子のトンネル障壁層を処理する方法 - Google Patents
トンネル接合素子のトンネル障壁層を処理する方法 Download PDFInfo
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- JP4526797B2 JP4526797B2 JP2003347960A JP2003347960A JP4526797B2 JP 4526797 B2 JP4526797 B2 JP 4526797B2 JP 2003347960 A JP2003347960 A JP 2003347960A JP 2003347960 A JP2003347960 A JP 2003347960A JP 4526797 B2 JP4526797 B2 JP 4526797B2
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- 230000004888 barrier function Effects 0.000 title claims description 165
- 238000000034 method Methods 0.000 title claims description 48
- 238000012545 processing Methods 0.000 title claims description 15
- 239000000463 material Substances 0.000 claims description 50
- 239000000376 reactant Substances 0.000 claims description 43
- 238000010438 heat treatment Methods 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- 239000012811 non-conductive material Substances 0.000 claims description 13
- 230000004913 activation Effects 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000011777 magnesium Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 2
- 230000007547 defect Effects 0.000 description 28
- 230000008569 process Effects 0.000 description 22
- 230000003647 oxidation Effects 0.000 description 19
- 238000007254 oxidation reaction Methods 0.000 description 19
- 230000005291 magnetic effect Effects 0.000 description 16
- 239000002243 precursor Substances 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 230000015556 catabolic process Effects 0.000 description 10
- 238000001994 activation Methods 0.000 description 9
- 230000005415 magnetization Effects 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- 125000004430 oxygen atom Chemical group O* 0.000 description 6
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 5
- 238000011109 contamination Methods 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000013077 target material Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 230000008439 repair process Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000013500 data storage Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000002211 ultraviolet spectrum Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
- H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F41/305—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling
- H01F41/307—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling insulating or semiconductive spacer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
Description
6 トンネル障壁層
8 上層
Claims (10)
- トンネル接合素子のトンネル障壁層を処理する方法であって、
予め形成されたトンネル障壁層上に紫外光透過性の上層を形成することと、
前記トンネル障壁層に該上層を通して紫外光を照射することを含み、該紫外光は、前記上層を透過して前記トンネル障壁層内にある反応物質に入射し、
前記紫外光が前記反応物質を活性化することにより、該反応物質が、前記トンネル障壁層の未反応の導電性材料に反応し該導電性材料を非導電性材料に変換する方法。 - 前記反応物質は、酸素、オゾンおよび窒素からなる群から選択される物質である請求項1に記載の方法。
- 前記トンネル障壁層のための前記材料は、アルミニウム、マグネシウム、ホウ素およびタンタルからなる群から選択される材料を含む請求項1または2に記載の方法。
- 前記照射することは、前記上層の形成中、および前記上層の形成後からなる群から選択される時点で行われる請求項1〜請求項3のいずれか一項に記載の方法。
- 前記紫外光は約200nmないし約400nmの波長を有する請求項1〜請求項4のいずれか一項に記載の方法。
- 前記照射中に前記トンネル障壁層を加熱することを含み、該加熱することによって前記トンネル障壁層の前記材料に対する前記反応物質の活性化速度が速められる請求項1〜請求項5のいずれか一項に記載の方法。
- 前記加熱は、前記上層の形成中に行われる請求項6に記載の方法。
- 前記照射後に前記トンネル障壁層を加熱することを含み、該加熱することによって前記トンネル障壁層の前記材料に対する前記反応物質の活性化速度が速められる請求項1〜請求項7のいずれか一項に記載の方法。
- 前記上層の形成前に前記トンネル障壁層を加熱することを含み、該加熱することによって前記トンネル障壁層の前記材料に対する前記反応物質の活性化速度が速められる請求項1〜請求項8のいずれか一項に記載の方法。
- 前記上層の形成中、および前記上層の形成後からなる群から選択される時点で前記加熱を再び行うことをさらに含む請求項6〜請求項9のいずれか一項に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/282,670 US6828260B2 (en) | 2002-10-29 | 2002-10-29 | Ultra-violet treatment of a tunnel barrier layer through an overlayer a tunnel junction device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004153258A JP2004153258A (ja) | 2004-05-27 |
JP4526797B2 true JP4526797B2 (ja) | 2010-08-18 |
Family
ID=32093479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003347960A Expired - Fee Related JP4526797B2 (ja) | 2002-10-29 | 2003-10-07 | トンネル接合素子のトンネル障壁層を処理する方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6828260B2 (ja) |
EP (1) | EP1416495B1 (ja) |
JP (1) | JP4526797B2 (ja) |
CN (1) | CN1501458A (ja) |
DE (1) | DE60317757T2 (ja) |
TW (1) | TW200406869A (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7252852B1 (en) * | 2003-12-12 | 2007-08-07 | International Business Machines Corporation | Mg-Zn oxide tunnel barriers and method of formation |
KR100867662B1 (ko) | 2004-03-12 | 2008-11-10 | 도쿠리쓰교세이호징 가가쿠 기주쓰 신코 기코 | 자기저항소자, 터널 장벽층 및 자기저항소자의 제조방법 |
JP4292128B2 (ja) * | 2004-09-07 | 2009-07-08 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法 |
US7678713B2 (en) * | 2005-08-04 | 2010-03-16 | Texas Instruments Incorporated | Energy beam treatment to improve packaging reliability |
JP2007095750A (ja) * | 2005-09-27 | 2007-04-12 | Canon Anelva Corp | 磁気抵抗効果素子 |
US7780820B2 (en) * | 2005-11-16 | 2010-08-24 | Headway Technologies, Inc. | Low resistance tunneling magnetoresistive sensor with natural oxidized double MgO barrier |
US7479394B2 (en) * | 2005-12-22 | 2009-01-20 | Magic Technologies, Inc. | MgO/NiFe MTJ for high performance MRAM application |
JP2007189039A (ja) * | 2006-01-13 | 2007-07-26 | Alps Electric Co Ltd | トンネル型磁気検出素子及びその製造方法 |
JP4782037B2 (ja) | 2006-03-03 | 2011-09-28 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法及び製造装置 |
US7888272B2 (en) * | 2006-12-12 | 2011-02-15 | Macronix International Co. Ltd. | Methods for manufacturing memory and logic devices using the same process without the need for additional masks |
US7918596B2 (en) * | 2007-04-20 | 2011-04-05 | Federal Signal Corporation | Warning light |
SG157992A1 (en) * | 2008-07-01 | 2010-01-29 | Showa Denko Hd Singapore Pte L | Improvements in and relating to mram |
US8227896B2 (en) * | 2009-12-11 | 2012-07-24 | International Business Machines Corporation | Resistive switching in nitrogen-doped MgO |
US10475986B1 (en) | 2018-04-19 | 2019-11-12 | Everspin Technologies, Inc. | Magnetoresistive stacks and methods therefor |
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2002
- 2002-10-29 US US10/282,670 patent/US6828260B2/en not_active Expired - Lifetime
-
2003
- 2003-05-01 TW TW092112032A patent/TW200406869A/zh unknown
- 2003-08-29 CN CNA031556361A patent/CN1501458A/zh active Pending
- 2003-10-07 JP JP2003347960A patent/JP4526797B2/ja not_active Expired - Fee Related
- 2003-10-13 DE DE60317757T patent/DE60317757T2/de not_active Expired - Lifetime
- 2003-10-13 EP EP03256453A patent/EP1416495B1/en not_active Expired - Lifetime
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Also Published As
Publication number | Publication date |
---|---|
EP1416495B1 (en) | 2007-11-28 |
US6828260B2 (en) | 2004-12-07 |
CN1501458A (zh) | 2004-06-02 |
EP1416495A1 (en) | 2004-05-06 |
DE60317757T2 (de) | 2008-10-30 |
JP2004153258A (ja) | 2004-05-27 |
DE60317757D1 (de) | 2008-01-10 |
US20040082201A1 (en) | 2004-04-29 |
TW200406869A (en) | 2004-05-01 |
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