JP4525180B2 - Vacuum lamination apparatus and method for forming insulating layer using the same - Google Patents

Vacuum lamination apparatus and method for forming insulating layer using the same Download PDF

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JP4525180B2
JP4525180B2 JP2004159025A JP2004159025A JP4525180B2 JP 4525180 B2 JP4525180 B2 JP 4525180B2 JP 2004159025 A JP2004159025 A JP 2004159025A JP 2004159025 A JP2004159025 A JP 2004159025A JP 4525180 B2 JP4525180 B2 JP 4525180B2
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circuit board
film
printed circuit
insulating resin
layer
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JP2005340595A (en
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正晃 地野
憲治 河本
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Toppan Inc
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Description

本発明は、配線層と絶縁層とを交互に積み上げて作製する多層プリント配線板において、配線回路基板上に絶縁層を形成するための真空積層装置及びこれを用いた絶縁層の形成方法に関するものである。   The present invention relates to a vacuum lamination apparatus for forming an insulating layer on a printed circuit board in a multilayer printed wiring board manufactured by alternately stacking wiring layers and insulating layers, and a method for forming an insulating layer using the same. It is.

従来、多層プリント配線板の製造方法として、回路形成された内層回路基板上に絶縁樹脂層としてガラスクロス基材にエポキシ樹脂を含浸して半硬化させたプリプレグシートと銅箔を積層プレスし、スルーホールによって層間導通をとる方法が知られている。しかし、この方法ではプリプレグ中の含浸樹脂を熱により再流動させて一定圧力下で硬化させるため、均一に硬化成形させるためには1.0〜1.5時間は必要である。このように製造工程が長くかかる上に、多層積層プレス及びガラスクロスプリプレグのコスト等により高コストとなっている。加えて外層にスルーホールめっきが入るため導体層が厚くなりファインパターンの形成が困難になる。回路層間の厚さがガラスクロスにより制限され多層プリント配線板全体の極薄化も困難であった。   Conventionally, as a method for producing a multilayer printed wiring board, a prepreg sheet and a copper foil, which are semi-cured by impregnating an epoxy resin into a glass cloth base material as an insulating resin layer, are laminated and pressed on a circuit-formed inner circuit board. There is a known method for establishing interlayer conduction by holes. However, in this method, since the impregnated resin in the prepreg is reflowed by heat and cured under a constant pressure, 1.0 to 1.5 hours are required for uniform curing and molding. Thus, the manufacturing process takes a long time, and the cost is high due to the cost of the multilayer lamination press and the glass cloth prepreg. In addition, through-hole plating enters the outer layer, the conductor layer becomes thick and it becomes difficult to form a fine pattern. The thickness between circuit layers was limited by glass cloth, and it was difficult to make the entire multilayer printed wiring board extremely thin.

このような問題を解決する方法として、近年内層回路基板の配線層上に絶縁層と配線層を交互に積み上げていくビルドアップ方式の多層プリント配線板の製造技術が注目されている。回路形成された内層回路基板に絶縁樹脂フィルムをラミネートし、加熱硬化後、粗化剤により表面に凹凸の粗化面を形成した絶縁層上にめっきにより配線層を形成する多層プリント配線板の製造法が提案されている(例えば、特許文献1及び特許文献2参照。)。   In recent years, as a method for solving such a problem, a manufacturing technique of a build-up type multilayer printed wiring board in which an insulating layer and a wiring layer are alternately stacked on a wiring layer of an inner circuit board has attracted attention. Manufacture of multilayer printed wiring boards in which an insulating resin film is laminated on a circuit-formed inner layer circuit board, heat-cured, and then a wiring layer is formed by plating on the insulating layer having a rough surface on the surface with a roughening agent. A method has been proposed (see, for example, Patent Document 1 and Patent Document 2).

ビルドアップ方式による多層プリント配線板の製造方法では通常、内層回路基板に絶縁樹脂フィルムを加圧真空ラミネーターによりラミネートして絶縁層を形成する。最近は絶縁層上にファインパターンを形成する場合が多く、絶縁層の表面を平坦化する必要があることから、必要に応じて平面プレス処理を行う。このような装置では一般的に加圧真空ラミネーター部と平面プレス部が上下1対の搬送フィルムによって連結された一貫ラインとなっている。基板はオートカットラミネーターで表裏に絶縁樹脂フィルムを仮貼りされた状態で上下搬送フィルムに挟まれ、加圧真空ラミネート工程、平面プレス工程へと進み、冷却された後装置から排出される。
特開平09−296156号公報 特開平11−87927号公報
In a multilayer printed wiring board manufacturing method by a build-up method, an insulating resin film is usually laminated on an inner layer circuit board by a pressure vacuum laminator to form an insulating layer. Recently, a fine pattern is often formed on an insulating layer, and the surface of the insulating layer needs to be flattened. Therefore, planar pressing is performed as necessary. In such an apparatus, generally, a pressure vacuum laminator part and a flat press part are an integrated line connected by a pair of upper and lower transport films. The substrate is sandwiched between upper and lower transport films with an insulating resin film temporarily attached to the front and back by an auto-cut laminator, proceeds to a pressure vacuum laminating process and a flat pressing process, and is cooled and discharged from the apparatus.
Japanese Patent Laid-Open No. 09-296156 Japanese Patent Laid-Open No. 11-87927

しかしながら、上述の積層装置では加圧真空ラミネーターが真空引きを開始する際、急激な減圧の影響で上下搬送フィルムに挟まれた基板が正規の位置からずれ、この基板が次工程である平面プレスのワーク外へはみ出すことで基板の歩留まり或いは品質が低下することが起こる。また、絶縁樹脂フィルムは予め処理する基板サイズに応じてカットされ、順次1枚づつ仮貼りされてから積層されるため、積層後の支持ベースフィルムの剥離は自動化されず、ロットごとにオペレーターが手作業で行うことが一般的であり、生産性の低さと品質のばらつきが問題となっていた。   However, in the above laminating apparatus, when the pressure vacuum laminator starts evacuation, the substrate sandwiched between the upper and lower transport films is displaced from the normal position due to the effect of sudden pressure reduction, and this substrate is a flat press of the next process. Protruding out of the work may cause a decrease in substrate yield or quality. In addition, the insulating resin film is cut according to the size of the substrate to be processed in advance, and is laminated after being temporarily attached one after another, so that peeling of the support base film after lamination is not automated, and the operator has to manually handle each lot. It is common to work, and low productivity and variations in quality have been problems.

補足すれば、積層後の支持ベースフィルムは絶縁樹脂との接着が強く、粘着ロールを通
す等の簡単な方法では安定した剥離はできないばかりか、フィルムを自動剥離するオートピーラーは高価な上、現状では製造設備として採用できる信頼度の高いものが市販されておらず、積層後に支持ベースフィルムを効率的、かつ安定して剥離する方法がないことが問題となっている。
As a supplement, the support base film after lamination has strong adhesion to the insulating resin, and it is not only possible to perform stable peeling with a simple method such as passing an adhesive roll, but the auto peeler that automatically peels the film is expensive and the current situation However, a highly reliable product that can be used as a production facility is not commercially available, and there is a problem that there is no method for efficiently and stably peeling the support base film after lamination.

本発明は、上記問題点に鑑み考案されたもので、支持ベースフィルムに絶縁層が形成された絶縁樹脂フィルムを配線回路基板に積層し、支持ベースフィルムを剥離して配線回路基板上に絶縁層を形成する積層装置において、オートピーラー等の高価な設備を導入することなく、効率的かつ品質的に安定した支持ベースフィルムの剥離が可能な積層装置及びこれを用いた絶縁層の形成方法を提供することを目的とする。   The present invention has been devised in view of the above problems, and an insulating resin film having an insulating layer formed on a support base film is laminated on a wiring circuit board, and the supporting base film is peeled off to insulate the insulating layer on the wiring circuit board. In a laminating apparatus for forming a film, a laminating apparatus capable of efficiently and quality-stable peeling of a support base film without introducing expensive equipment such as an auto peeler and an insulating layer forming method using the laminating apparatus are provided. The purpose is to do.

本発明は、上記課題を達成するために、まず請求項1においては、少なくとも支持ベースフィルムに絶縁樹脂層が形成された絶縁樹脂フィルムの、前記絶縁樹脂層のある面を配線回路基板の面に対向するよう重ねて、前記配線回路基板の有効領域外の所定領域と前記絶縁樹脂層の端部を仮貼りしてから、前記絶縁樹脂フィルムを所定サイズにカットするオートカットラミネーターユニット10と、前記配線回路基板に仮貼りされた前記絶縁樹脂フィルムの前記支持ベースフィルム上に、ノズルアプリケーターにて接着層を形成するローダーユニット20と、仮貼りされた前記絶縁樹脂フィルム上に前記接着層が形成された状態の前記配線回路基板上に搬送フィルムを重ね合わせる搬送フィルム巻き出しユニット30と、前記絶縁樹脂層を前記配線回路基板の面に所定の温度で積層して絶縁層とする真空加圧ラミネーターユニット40と、前記配線回路基板の面に形成された前記絶縁層の平滑化を行う平面プレスユニット50と、前記絶縁層を前記配線回路基板の面に残した状態で、搬送フィルムと接着層と支持ベースフィルムとを配線回路基板から剥離する搬送フィルム巻き取りユニット60と、前記絶縁層が形成された配線回路基板を収納するアンローダーユニット70とを具備することを特徴とする真空積層装置としたものである。
In order to achieve the above object, according to the first aspect of the present invention, in claim 1, at least a surface of the insulating resin film in which the insulating resin layer is formed on the support base film is a surface of the printed circuit board . superposed so as to face the ends of the effective region outside the predetermined region and the insulating resin layer of the printed circuit board from the temporary attachment, the automatic cutting laminator unit 10 for cutting the insulating resin film in a predetermined size, wherein A loader unit 20 that forms an adhesive layer with a nozzle applicator on the support base film of the insulating resin film temporarily attached to the printed circuit board, and the adhesive layer is formed on the temporarily attached insulating resin film. wherein the wiring circuit unit 30 unrolled conveying film overlaying the conveying film on a substrate in the state, the insulating resin layer A vacuum pressure laminator unit 40 are laminated at a predetermined temperature on the surface of the line circuit board and the insulating layer, a planar press unit 50 for smoothing the insulating layer formed on a surface of the printed circuit board, wherein A transport film take-up unit 60 for peeling the transport film, the adhesive layer, and the support base film from the printed circuit board while leaving the insulating layer on the surface of the printed circuit board, and the printed circuit board on which the insulating layer is formed it is obtained by a vacuum lamination apparatus characterized by comprising a unloader unit 70 for housing.

また、請求項2においては、請求項1に記載の真空積層装置を用いて、配線回路基板上に絶縁層を形成することを特徴とする絶縁層の形成方法としたものである。   According to a second aspect of the present invention, there is provided a method for forming an insulating layer, characterized in that an insulating layer is formed on a printed circuit board using the vacuum lamination apparatus according to the first aspect.

本発明の真空積層装置を用いることにより、配線回路基板上に所定サイズにカットした絶縁樹脂フィルムを積層する際の配線回路基板の位置ズレを防止でき、かつオートピーラー等の高価な設備を導入することなく、通常の積層動作に付随した安価な方法で支持ベースフィルムの剥離をして、配線回路基板上に絶縁層を効率よく形成できる。
また、剥離された支持ベースフィルムは搬送フィルムとともに巻かれて回収されるため、占有スペースが小さく、廃棄作業の負担も軽減される。つまり、生産性と経済性に優れ、品質、歩留まり等で安定して絶縁層を形成できる。
By using the vacuum laminating apparatus of the present invention, it is possible to prevent misalignment of the wiring circuit board when laminating the insulating resin film cut to a predetermined size on the wiring circuit board, and to introduce expensive equipment such as an auto peeler. The insulating base layer can be efficiently formed on the printed circuit board by peeling off the supporting base film by an inexpensive method associated with a normal laminating operation.
Further, since the peeled support base film is wound and collected together with the transport film, the occupied space is small, and the burden of disposal work is reduced. That is, it is excellent in productivity and economy, and the insulating layer can be stably formed with quality, yield and the like.

図1は、本発明の真空積層装置の一実施例を示す模式構成図を示す。
本発明の真空積層装置は、後記する支持ベースフィルムに絶縁樹脂層が形成された絶縁樹脂フィルムの、前記絶縁樹脂層のある面を配線回路基板の面に対向するよう重ねて、前記配線回路基板の有効領域外の所定領域と前記絶縁樹脂層の端部を仮貼りしてから、前記絶縁樹脂フィルムを所定サイズにカットするオートカットラミネーターユニット10と、前記配線回路基板に仮貼りされた前記絶縁樹脂フィルムの前記支持ベースフィルム上に、ノズルアプリケーターにて接着層を形成する接着層形成ユニット20と、仮貼りされた前記絶縁樹脂フィルム上に前記接着層が形成された状態の前記配線回路基板上に搬送フィルムを重ね合わせる搬送フィルム巻き出しユニット30と、前記絶縁樹脂層を前記配線回路基板の面に所定の温度で積層して絶縁層とする真空加圧ラミネーターユニット40と、前記配線回路基板の面に形成された前記絶縁層の平滑化を行う平面プレスユニット50と、前記絶縁層を前記配線回路基板の面に残した状態で、搬送フィルムと接着層と支持ベースフィルムとを配線回路基板から剥離する搬送フィルム巻き取りユニット60と、前記絶縁層が形成された配線回路基板を収納するアンローダーユニット70とを具備したものである。特に、支持ベースフィルムに絶縁樹脂層が形成された樹脂フィルムを配線回路基板上に仮貼りして所定サイズにカットするオートカットラミネーターユニット10と、配線回路基板上に仮貼りされた樹脂フィルムの所定位置に、所定の幅でノズルアプリケーターにて接着層を形成できるローダーユニット20と、搬送フィルムと接着層と支持ベースフィルムとを配線回路基板から剥離する搬送フィルム巻き取りユニット60とを備えているのが特徴である。
FIG. 1 is a schematic configuration diagram showing an embodiment of a vacuum laminating apparatus of the present invention.
The vacuum laminating apparatus according to the present invention includes an insulating resin film in which an insulating resin layer is formed on a support base film, which will be described later, such that the surface having the insulating resin layer is overlapped with the surface of the printed circuit board, An auto-cut laminator unit 10 that temporarily cuts the insulating resin film into a predetermined size after temporarily sticking a predetermined region outside the effective region and an end of the insulating resin layer, and the insulating material temporarily attached to the wired circuit board An adhesive layer forming unit 20 for forming an adhesive layer with a nozzle applicator on the support base film of the resin film, and the printed circuit board in a state where the adhesive layer is formed on the temporarily-insulated insulating resin film conveying film and unit 30 unwinding conveying film superposed, the insulating resin layer is laminated at a predetermined temperature on the surface of the printed circuit board State a vacuum pressure laminator unit 40 to the insulating layer, a planar press unit 50 for smoothing the insulating layer formed on a surface of the printed circuit board, leaving the insulating layer on the surface of the printed circuit board in those equipped with conveying film winding unit 60 for peeling the to the transport film and the adhesive layer and the support base film from the printed circuit board, the unloader unit 70 for accommodating a printed circuit board on which the insulating layer is formed, the It is. In particular, an auto-cut laminator unit 10 that temporarily attaches a resin film having an insulating resin layer formed on a support base film onto a printed circuit board and cuts it to a predetermined size, and a predetermined resin film that is temporarily attached onto the printed circuit board. A loader unit 20 capable of forming an adhesive layer with a nozzle applicator with a predetermined width at a position, and a transport film winding unit 60 for peeling the transport film, the adhesive layer, and the support base film from the printed circuit board are provided. Is a feature.

本発明の真空積層装置は、支持ベースフィルムに絶縁樹脂層が形成された絶縁樹脂フィルムの絶縁樹脂層を予め配線層等が形成された配線回路基板上に転写して絶縁層を形成する積層装置である。
以下真空積層装置を構成する各ユニットについて説明する。
オートカットラミネーターユニット10は、後記する支持ベースフィルムに絶縁樹脂層が形成された絶縁樹脂フィルムを所定サイズにカットして配線回路基板上の所定位置に貼付する装置である。ソマール(株)製等の市販のドライフィルム用オートカットラミネーターを使用することができる。
The vacuum laminating apparatus of the present invention is a laminating apparatus for forming an insulating layer by transferring an insulating resin layer of an insulating resin film having an insulating resin layer formed on a support base film onto a printed circuit board on which a wiring layer or the like has been previously formed. It is.
Hereinafter, each unit constituting the vacuum laminating apparatus will be described.
The auto-cut laminator unit 10 is an apparatus that cuts an insulating resin film having an insulating resin layer formed on a support base film, which will be described later, into a predetermined size and affixes it at a predetermined position on a printed circuit board. Commercially available auto-cut laminators for dry film such as those manufactured by Somaru Corporation can be used.

まず、オートカットラミネーターユニット10で使用するための絶縁樹脂フィルムを別途作製する。PETフィルム等からなる支持ベースフィルム111の一方の面に樹脂溶液をロールコート等により塗布するか、樹脂フィルムを貼付する等の方法で絶縁樹脂層112を形成し、保護フィルムを介してロール状に巻取り、絶縁樹脂フィルム110の巻取りロール11を作製する(図2(a)及び(b)参照)。
具体的には、市販の絶縁樹脂フィルム(ABF−GX、味の素(株)製)が使用できる。
First, an insulating resin film for use in the auto-cut laminator unit 10 is separately prepared. The insulating resin layer 112 is formed by a method such as applying a resin solution on one surface of the support base film 111 made of a PET film or the like by roll coating or affixing a resin film, and rolls it through a protective film. The winding roll 11 of winding and the insulating resin film 110 is produced (refer Fig.2 (a) and (b)).
Specifically, a commercially available insulating resin film (ABF-GX, manufactured by Ajinomoto Co., Inc.) can be used.

次に、予め配線層等が形成された有効領域121を有する配線回路基板120(図3(a)及び(b)参照)がローラーコンベアー15によりオートカットラミネーターユニット10へ搬送される。
オートカットラミネーターユニット10では、前述の支持ベースフィルム111に絶縁樹脂層112が形成された絶縁樹脂フィルム110の巻取りロール11を装填し、保護フィルムが保護フィルム巻き取りロール13にて巻き取られた後、絶縁樹脂フィルム110の先端がエアー吸着ロール12に吸着される。
さらに、エアー吸着ロール12が回転して絶縁樹脂フィルム110の絶縁樹脂層112と配線回路基板120が接触する。その際、配線回路基板120の有効領域121外の所定部分に絶縁樹脂層112の端部を加熱、圧着して仮貼りする。次に、ローラーコンベアー15とエアー吸着ロール12が連動して配線回路基板120を送り、所定の位置で絶縁樹脂フィルム110をカットし、所定サイズにカットされた絶縁樹脂フィルム110が仮貼りされた配線回路基板120aを作製することができる(図4参照)。
Next, a printed circuit board 120 (see FIGS. 3A and 3B) having an effective area 121 on which a wiring layer or the like is formed in advance is conveyed to the auto-cut laminator unit 10 by the roller conveyor 15.
In the auto-cut laminator unit 10, the winding roll 11 of the insulating resin film 110 in which the insulating resin layer 112 is formed is loaded on the support base film 111, and the protective film is wound by the protective film winding roll 13. Thereafter, the tip of the insulating resin film 110 is adsorbed by the air adsorbing roll 12.
Further, the air suction roll 12 rotates and the insulating resin layer 112 of the insulating resin film 110 and the printed circuit board 120 come into contact with each other. At that time, the end of the insulating resin layer 112 is temporarily attached to a predetermined portion outside the effective area 121 of the printed circuit board 120 by heating and pressure bonding. Next, the roller conveyor 15 and the air suction roll 12 work together to send the wiring circuit board 120, cut the insulating resin film 110 at a predetermined position, and the wiring on which the insulating resin film 110 cut to a predetermined size is temporarily attached. The circuit board 120a can be manufactured (see FIG. 4).

ローダーユニット20は、所定サイズの絶縁樹脂フィルム110が仮貼りされた配線回路基板120の有効領域121外の支持ベースフィルム111の端部に、所定の幅でノズルアプリケーター21にて接着層113を形成し、配線回路基板120bを作製する(図5参照)。
接着層113は支持ベースフィルム111上どこに形成しても差支えないが、積層工程における絶縁樹脂厚への影響を考慮すると、支持ベースフィルムの全面に均一に形成するか、もしくは配線回路基板120の有効領域121外へ直線状に形成する方法があげられる。しかしながら、接着層を支持ベースフィルムの全面に均一に形成する方法はロールコーター等の高価なな設備が必要であり、接着剤を多量に使うことから製造コストが高くなり好ましくない。一方、配線回路基板120の有効領域121外へ直線状に接着層を形成する方法は、ノズルアプリケーターという比較的簡便な装置を用いると、積層工程で染み出し量の少ない高粘度の接着剤を使用できることから好ましい。
The loader unit 20 forms the adhesive layer 113 with the nozzle applicator 21 with a predetermined width on the end of the support base film 111 outside the effective area 121 of the printed circuit board 120 to which the insulating resin film 110 of a predetermined size is temporarily attached. Then, the printed circuit board 120b is manufactured (see FIG. 5).
The adhesive layer 113 may be formed anywhere on the support base film 111. However, in consideration of the influence on the insulating resin thickness in the laminating process, the adhesive layer 113 may be formed uniformly on the entire surface of the support base film, or the wiring circuit board 120 may be effectively used. A method of forming the straight line outside the region 121 can be given. However, the method of uniformly forming the adhesive layer on the entire surface of the supporting base film requires expensive equipment such as a roll coater and uses a large amount of adhesive, which is not preferable because of high production costs. On the other hand, the method of forming the adhesive layer linearly outside the effective area 121 of the printed circuit board 120 uses a high-viscosity adhesive with a small amount of seepage in the laminating process when a relatively simple device called a nozzle applicator is used. It is preferable because it is possible.

この方法によれば、搬送による配線回路基板の移動を利用して配線回路基板120の有効領域121外へ接着剤を直線状に塗布でき効率的である。また、ノズルアプリケーターは先端ノズルが小型なため塗布位置の変更について設計の自由度が高いことと、接着剤の吐出量を調整することで接着剤の広がり具合を調整し易いことから特に好ましい。本発明で用いられるノズルアプリケーターはITWダイナテック(株)、三晶(株)、ノードソン(株)製等が使用できる。取り付け位置については、図1に示すようにローラーコンベアー15の上下両端に固定する。   According to this method, the adhesive can be applied linearly outside the effective area 121 of the printed circuit board 120 by using the movement of the printed circuit board by conveyance, which is efficient. Further, the nozzle applicator is particularly preferable because the tip nozzle is small, so that the degree of freedom in design for changing the application position is high and the spread of the adhesive can be easily adjusted by adjusting the discharge amount of the adhesive. ITW Dynatech Co., Ltd., Sanki Co., Ltd., Nordson Co., Ltd., etc. can be used for the nozzle applicator used by this invention. About an attachment position, as shown in FIG. 1, it fixes to the upper and lower ends of the roller conveyor 15. As shown in FIG.

また、接着層形成に用いる接着剤は、接着層を形成した直後に固化し、表面にタックの残らないホットメルト型接着剤が好ましい。なかでも、溶融粘度の高いものは接着性、機械的特性に優れ、かつ積層過程での染み出し量が少ないので特に好ましい。ホットメルト型接着剤の軟化点については、低過ぎると積層過程で圧力を加えた場合、接着剤が広がり過ぎて基板外へ染み出し、上下の搬送フィルムが接着して搬送過程で支障をきたすことから、後記する積層温度(プレス温度)に対しマイナス30℃以上、プラス30℃未満の範囲であることが好ましい。   The adhesive used for forming the adhesive layer is preferably a hot-melt adhesive that solidifies immediately after forming the adhesive layer and does not leave a tack on the surface. Among them, those having a high melt viscosity are particularly preferable because they are excellent in adhesiveness and mechanical properties and have a small amount of seepage during the lamination process. Regarding the softening point of hot-melt adhesive, if pressure is applied in the lamination process if it is too low, the adhesive spreads too much and oozes out of the substrate, causing the upper and lower transport films to adhere and hinder the transport process. Therefore, it is preferably in the range of minus 30 ° C. or more and less than plus 30 ° C. with respect to the lamination temperature (pressing temperature) described later.

ホットメルト型接着剤としては、東洋ペトロライト(株)製 H−629A(軟化点120℃)、三洋化成工業(株)製 ナノスタックA(軟化点111℃)、住友スリーエム(株)製 ジェットメルトEC3760(軟化点81℃)、旭化学合成(株)製 アサヒメルト RK960(軟化点98℃)、ダイセル化学工業(株)製 リキメルト1354(軟化点100℃)、日立化成ポリマー(株)製 ハイボン9881H(軟化点85℃)等の軟包装材用ホットメルト型接着剤があげられる。   Hot melt adhesives include H-629A (softening point 120 ° C.) manufactured by Toyo Petrolite Co., Ltd., Nanostack A (softening point 111 ° C.) manufactured by Sanyo Chemical Industries, Ltd., Jet Melt manufactured by Sumitomo 3M Co., Ltd. EC3760 (softening point 81 ° C.), Asahi Chemical Synthesis Co., Ltd. Asahimelt RK960 (softening point 98 ° C.), Daicel Chemical Industries, Ltd. Liquimelt 1354 (softening point 100 ° C.), Hitachi Chemical Polymer Co., Ltd. Hibon 9881H Examples thereof include hot-melt adhesives for soft packaging materials such as (softening point 85 ° C.).

接着層113が形成された配線回路基板120bは、ローラーコンベアー15にて搬送フィルム巻き出しユニット30へ送り込まれ、搬送フィルム送り出しユニット30では、搬送フィルム送り出しロール31より送り出された搬送フィルム131はガイドローラー32にて配線回路基板120bの支持ベースフィルム111上の接着層113と重ね合わされ、搬送フィルム131でサンドイッチされた配線回路基板120cが作製される(図6参照)。   The printed circuit board 120b on which the adhesive layer 113 is formed is fed to the transport film unwinding unit 30 by the roller conveyor 15, and the transport film 131 fed from the transport film feeding roll 31 is a guide roller. At 32, the printed circuit board 120c is formed so as to be overlapped with the adhesive layer 113 on the support base film 111 of the printed circuit board 120b and sandwiched by the transport film 131 (see FIG. 6).

搬送フィルム131でサンドイッチされた配線回路基板120cは、ロールコンベアー15と連動したフィルム搬送系へ移動し、加圧真空ラミネーターユニット40、平面プレスユニット50へ送り込まれる。
真空加圧ラミネーターユニット40では支持ベースフィルム111上の絶縁樹脂層112が配線回路基板120に所定の温度で積層され、平面プレスユニット50では配線回路基板120の両面に形成された絶縁樹脂層112の平滑化処理が行われる。平面プレスユニット50より送り出された配線回路基板は数十秒間冷却ファンにより冷却され、絶縁樹脂層112が硬化し、搬送フィルム巻取りユニット60に送られる。
The printed circuit board 120c sandwiched by the transport film 131 moves to the film transport system interlocked with the roll conveyor 15, and is sent to the pressure vacuum laminator unit 40 and the flat press unit 50.
In the vacuum pressure laminator unit 40 , the insulating resin layer 112 on the support base film 111 is laminated on the wiring circuit board 120 at a predetermined temperature. In the flat press unit 50, the insulating resin layer 112 formed on both surfaces of the wiring circuit board 120. smoothing processing is Ru is carried out. The printed circuit board sent out from the flat press unit 50 is cooled by a cooling fan for several tens of seconds, the insulating resin layer 112 is cured, and is sent to the transport film winding unit 60.

搬送フィルム巻取りユニット60では、搬送フィルム131と接着層113と支持ベースフィルム111とを配線回路基板より剥離し(図7参照)、巻取りロール61に巻き取り、配線回路基板120の両面に絶縁層112aが形成された配線回路基板120d(図8参照)を得ることができ、絶縁層112aが形成された配線回路基板120dはローラーコンベアにより搬送され、アンローダーユニット70に収納される。   In the transport film winding unit 60, the transport film 131, the adhesive layer 113, and the support base film 111 are peeled off from the printed circuit board (see FIG. 7), wound on a winding roll 61, and insulated on both surfaces of the printed circuit board 120. A printed circuit board 120d (see FIG. 8) on which the layer 112a is formed can be obtained, and the printed circuit board 120d on which the insulating layer 112a is formed is conveyed by a roller conveyor and stored in the unloader unit 70.

上記したように、接着層113は支持ベースフィルム111と搬送フィルム131を接着し、搬送フィルム131で支持ベースフィルム111と配線回路基板を搬送するためのもので、搬送フィルム131と支持ベースフィルム111とを配線回路基板より剥離して、配線回路基板上に絶縁層112aを形成する際支持ベースフィルム111と絶縁樹脂層112の接着強度よりも搬送フィルム131と支持ベースフィルム111との接着強度が大きくなるようにすれば、接着層113の幅はなるべく狭くすることがコストの面から好ましい。   As described above, the adhesive layer 113 is for bonding the support base film 111 and the transport film 131 and transporting the support base film 111 and the printed circuit board with the transport film 131. When the insulating layer 112a is formed on the printed circuit board by peeling the substrate from the printed circuit board, the adhesive strength between the transport film 131 and the supporting base film 111 is greater than the adhesive strength between the supporting base film 111 and the insulating resin layer 112. By doing so, it is preferable from the viewpoint of cost that the width of the adhesive layer 113 be as small as possible.

本発明の真空積層装置を用いた絶縁層の形成方法によれば、配線回路基板上に所定サイズにカットした絶縁樹脂フィルムを積層する際の絶縁樹脂フィルムの位置ズレを防止でき、かつオートピーラー等の高価な設備を導入することなく、通常の積層動作に付随した安価な方法で支持ベースフィルムの剥離をして、配線回路基板上に絶縁層を効率よく形成で
きる。
また、剥離された支持ベースフィルムは搬送フィルムとともに巻かれて回収されるため、占有スペースが小さく、廃棄作業の負担も軽減される。つまり、生産性と経済性に優れ、品質、歩留まり等で安定して絶縁層を形成できる。
According to the method for forming an insulating layer using the vacuum laminating apparatus of the present invention, it is possible to prevent the positional deviation of the insulating resin film when laminating the insulating resin film cut into a predetermined size on the printed circuit board, and an auto peeler or the like. Without introducing expensive equipment, an insulating layer can be efficiently formed on the printed circuit board by peeling off the support base film by an inexpensive method associated with a normal laminating operation.
Further, since the peeled support base film is wound and collected together with the transport film, the occupied space is small, and the burden of disposal work is reduced. That is, it is excellent in productivity and economy, and the insulating layer can be stably formed with quality, yield and the like.

さらに、配線回路基板120dの絶縁層112a上に配線層、ビア形成及び上記絶縁層形成を所望回数繰り返すことにより、多層配線回路基板及びインターポーザ等を容易に得ることができる。   Furthermore, a multilayer wiring circuit board, an interposer, and the like can be easily obtained by repeating the formation of wiring layers, vias, and the above insulating layer on the insulating layer 112a of the printed circuit board 120d a desired number of times.

本発明の真空積層装置の一実施例を示す模式構成図である。It is a schematic block diagram which shows one Example of the vacuum lamination apparatus of this invention. (a)は、絶縁樹脂フィルムを巻き取った巻取りフィルムの一例を示す斜視図である。(b)は、(a)の斜視図をA−A’線で切断した絶縁樹脂フィルムの模式構成断面図である。(A) is a perspective view which shows an example of the winding film which wound up the insulating resin film. (B) is a schematic cross-sectional view of an insulating resin film obtained by cutting the perspective view of (a) along the line A-A ′. (a)は、配線回路基板の一例を示す模式平面図である。(b)は、(a)の模式平面図をB−B’線で切断した配線回路基板の模式構成断面図である。(A) is a schematic plan view which shows an example of a printed circuit board. (B) is a schematic cross-sectional view of a printed circuit board obtained by cutting the schematic plan view of (a) along the line B-B ′. 配線回路基板120の両面に絶縁樹脂フィルム110を積層した配線回路基板120aを示す模式構成断面図である。2 is a schematic cross-sectional view showing a printed circuit board 120a in which an insulating resin film 110 is laminated on both surfaces of the printed circuit board 120. FIG. 配線回路基板120aの支持ベースフィルム111上に接着層113を形成した配線回路基板20bを示す模式構成断面図である。It is a schematic structure sectional view showing wiring circuit board 20b which formed adhesive layer 113 on support base film 111 of wiring circuit board 120a. 配線回路基板120bの両面に搬送フィルム131を積層した配線回路基板120cを示す模式構成断面図である。It is a schematic structure sectional view showing wiring circuit board 120c which laminated conveyance film 131 on both sides of wiring circuit board 120b. 配線回路基板120cより搬送フィルム、接着層及び支持ベースフィルムを剥離している状態を示す説明図である。It is explanatory drawing which shows the state which has peeled the conveyance film, the contact bonding layer, and the support base film from the printed circuit board 120c. 配線回路基板120の両面にに絶縁層112aが形成された配線回路基板120dを示す模式構成断面図である。2 is a schematic cross-sectional view showing a printed circuit board 120d in which insulating layers 112a are formed on both surfaces of the printed circuit board 120. FIG.

符号の説明Explanation of symbols

10……オートカットラミネーターユニット
11……絶縁樹脂フィルムの巻取りロール
12……エアー吸着ロール
13……保護フィルム巻取りロール
20……ローダーユニット
21……ノズルアプリケーター
30……搬送フィルム送り出しユニット
31……搬送フィルム送り出しロール
32……ガイドロール
40……真空加圧ラミネーターユニット
41、51……プレス下板
42、52……プレス上板
50……平面プレスユニット
60……搬送フィルム巻取りユニット
61……搬送フィルム巻取りロール
62……ニップロール
63……搬送フィルム巻取りガイドローラー
70……アンローダーユニット
71……ベルトコンベア
110……絶縁樹脂フィルム
111……支持ベースフィルム
112……絶縁樹脂層
112a……絶縁層
113……接着層
120……配線回路基板
120a……絶縁樹脂フィルム仮貼り後の配線回路基板
120b……接着層形成後の配線回路基板
120c……搬送フィルム積層後の配線回路基板
120d……絶縁層形成後の配線回路基板
21……有効領域
31……搬送フィルム
DESCRIPTION OF SYMBOLS 10 ... Auto cut laminator unit 11 ... Insulation resin film winding roll 12 ... Air adsorption roll 13 ... Protective film winding roll 20 ... Loader unit 21 ... Nozzle applicator 30 ... Conveyance film sending unit 31 ... ... Conveyance film feed roll 32 ... Guide roll 40 ... Vacuum pressure laminator units 41, 51 ... Press lower plate 42, 52 ... Press upper plate 50 ... Flat press unit 60 ... Conveyance film winding unit 61 ... ... Conveyance film winding roll 62 ... Nip roll 63 ... Conveying film winding guide roller 70 ... Unloader unit 71 ... Belt conveyor 110 ... Insulating resin film 111 ... Support base film 112 ... Insulating resin layer 112a ... ... insulating layer 113 ... contact Layer 120... Wired circuit board 120 a... Wired circuit board 120 b after temporarily attaching the insulating resin film... Wired circuit board 120 c after forming the adhesive layer. Printed circuit board 21 ... Effective area 31 ... Conveying film

Claims (2)

少なくとも支持ベースフィルムに絶縁樹脂層が形成された絶縁樹脂フィルムの、前記絶縁樹脂層のある面を配線回路基板の面に対向するよう重ねて、前記配線回路基板の有効領域外の所定領域と前記絶縁樹脂層の端部を仮貼りしてから、前記絶縁樹脂フィルムを所定サイズにカットするオートカットラミネーターユニット(10)と、前記配線回路基板に仮貼りされた前記絶縁樹脂フィルムの前記支持ベースフィルム上に、ノズルアプリケーターにて接着層を形成するローダーユニット(20)と、仮貼りされた前記絶縁樹脂フィルム上に前記接着層が形成された状態の前記配線回路基板上に搬送フィルムを重ね合わせる搬送フィルム巻き出しユニット(30)と、前記絶縁樹脂層を前記配線回路基板の面に所定の温度で積層して絶縁層とする真空加圧ラミネーターユニット(40)と、前記配線回路基板の面に形成された前記絶縁層の平滑化を行う平面プレスユニット(50)と、前記絶縁層を前記配線回路基板の面に残した状態で、搬送フィルムと接着層と支持ベースフィルムとを配線回路基板から剥離する搬送フィルム巻き取りユニット(60)と、前記絶縁層が形成された配線回路基板を収納するアンローダーユニット(70)とを具備することを特徴とする真空積層装置。 At least an insulating resin film having an insulating resin layer formed on a support base film is overlapped so that the surface with the insulating resin layer faces the surface of the printed circuit board, and a predetermined area outside the effective area of the printed circuit board and the An auto-cut laminator unit (10) that cuts the insulating resin film into a predetermined size after temporarily attaching an end portion of the insulating resin layer, and the support base film of the insulating resin film temporarily attached to the wired circuit board above, a loader unit for forming an adhesive layer at the nozzle applicator (20), conveying of superimposing the transfer film onto the wiring circuit board in the state where the adhesive layer is formed on the insulating resin film that is temporarily attached a film unwinding unit (30), said insulating resin layer by laminating at a predetermined temperature on the surface of the printed circuit board to the insulating layer State a vacuum pressure laminator unit (40), wherein the wiring circuit plane pressing unit formed on a surface of the substrate performs the smoothing of the insulating layer (50), leaving the insulating layer on the surface of the printed circuit board in a conveying film and the adhesive layer transport film take-up unit and a support base film is peeled off from the printed circuit board (60), and unloader unit (70) for accommodating a printed circuit board on which the insulating layer is formed, A vacuum laminating apparatus comprising: 請求項1に記載の真空積層装置を用いて、配線回路基板上に絶縁層を形成することを特徴とする絶縁層の形成方法。
A method for forming an insulating layer, comprising: forming an insulating layer on a printed circuit board using the vacuum lamination apparatus according to claim 1.
JP2004159025A 2004-05-28 2004-05-28 Vacuum lamination apparatus and method for forming insulating layer using the same Expired - Fee Related JP4525180B2 (en)

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