JP4517953B2 - シリコン単結晶の製造方法 - Google Patents
シリコン単結晶の製造方法 Download PDFInfo
- Publication number
- JP4517953B2 JP4517953B2 JP2005181882A JP2005181882A JP4517953B2 JP 4517953 B2 JP4517953 B2 JP 4517953B2 JP 2005181882 A JP2005181882 A JP 2005181882A JP 2005181882 A JP2005181882 A JP 2005181882A JP 4517953 B2 JP4517953 B2 JP 4517953B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- quartz crucible
- silicon single
- crucible
- barium carbonate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013078 crystal Substances 0.000 title claims description 118
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 80
- 229910052710 silicon Inorganic materials 0.000 title claims description 80
- 239000010703 silicon Substances 0.000 title claims description 80
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 113
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 112
- 239000010453 quartz Substances 0.000 claims description 106
- 238000000034 method Methods 0.000 claims description 25
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 14
- 239000000155 melt Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 101
- 239000002994 raw material Substances 0.000 description 12
- 238000004031 devitrification Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000002411 adverse Effects 0.000 description 4
- 239000008710 crystal-8 Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000004299 exfoliation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003125 aqueous solvent Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 229910002026 crystalline silica Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
前記図1に示した構成を有するシリコン単結晶引上装置を用い、CZ法により多結晶シリコン原料の装入および単結晶の引上げを行い、シリコン単結晶の良品率および石英ルツボ内表面の状態(斑点状に生成した結晶相の剥離状況)を調査した。
前記図1に示した構成を有するシリコン単結晶引上装置を用いてCZ法により多結晶シリコン原料の装入および単結晶の引上げを実施するに際し、1個の石英ルツボを使用し複数本の単結晶を連続して育成するマルチ引上げを行い、炭酸バリウムを付着させた石英ルツボの耐久性を確認した。
前記図1に示した構成を有するシリコン単結晶引上装置を用いてCZ法により多結晶シリコン原料の装入および単結晶の引上げを実施するに際し、石英ルツボを帯電させ、炭酸バリウムを付着させた後、シリコン原料を装入してシリコン単結晶の引き上げを行うタイミングについて調査した。
2:カーボンルツボ
3:ルツボ軸
4:ヒーター
5:炭酸バリウム
6:断熱材
7:遮蔽部材
8:種結晶
9:引上げ軸
10:シリコン融液
11:シリコン単結晶
12:放電電極
13:投入ノズル
14:コーナー部
Claims (4)
- チョクラルスキー法により、石英ルツボ内で多結晶シリコンを溶融しこの融液から単結晶を引上げるシリコン単結晶の製造方法において、石英ルツボ内表面側を帯電させ、当該表面に炭酸バリウムを均一に付着させた石英ルツボを使用することを特徴とするシリコン単結晶の製造方法。
- 石英ルツボ内表面の炭酸バリウム付着量が10μg/cm2以下であることを特徴とする請求項1に記載のシリコン単結晶の製造方法。
- 単結晶の引上げを石英ルツボ内表面側を帯電させた後5時間以内に行うことを特徴とする請求項1または2に記載のシリコン単結晶の製造方法。
- 石英ルツボ内表面側を放電を利用して帯電させることを特徴とする請求項1〜3のいずれかに記載のシリコン単結晶の製造方法。
Priority Applications (1)
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JP2005181882A JP4517953B2 (ja) | 2005-06-22 | 2005-06-22 | シリコン単結晶の製造方法 |
Applications Claiming Priority (1)
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JP2005181882A JP4517953B2 (ja) | 2005-06-22 | 2005-06-22 | シリコン単結晶の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007001793A JP2007001793A (ja) | 2007-01-11 |
JP4517953B2 true JP4517953B2 (ja) | 2010-08-04 |
Family
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Family Applications (1)
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JP2005181882A Active JP4517953B2 (ja) | 2005-06-22 | 2005-06-22 | シリコン単結晶の製造方法 |
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JP (1) | JP4517953B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5509188B2 (ja) * | 2011-12-26 | 2014-06-04 | ジルトロニック アクチエンゲゼルシャフト | 単結晶シリコンの製造方法 |
JP5509189B2 (ja) | 2011-12-26 | 2014-06-04 | ジルトロニック アクチエンゲゼルシャフト | 単結晶シリコンの製造方法 |
JP6743753B2 (ja) | 2017-04-27 | 2020-08-19 | 株式会社Sumco | シリコン単結晶の引上げ方法 |
CN111936677B (zh) | 2018-02-23 | 2022-07-15 | 胜高股份有限公司 | 石英玻璃坩埚 |
CN115231811A (zh) * | 2021-04-22 | 2022-10-25 | 新沂市中鑫光电科技有限公司 | 一种石英坩埚均匀气泡复合层制备方法 |
JP2022180696A (ja) * | 2021-05-25 | 2022-12-07 | 株式会社Sumco | 石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0354362B2 (ja) * | 1983-12-20 | 1991-08-20 | ||
JPH0547746A (ja) * | 1991-08-20 | 1993-02-26 | Tadahiro Omi | 熱処理装置 |
JPH05238873A (ja) * | 1992-02-27 | 1993-09-17 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
JPH082932A (ja) * | 1994-06-20 | 1996-01-09 | Shinetsu Quartz Prod Co Ltd | 石英ガラスルツボとその製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5980629A (en) * | 1995-06-14 | 1999-11-09 | Memc Electronic Materials, Inc. | Methods for improving zero dislocation yield of single crystals |
-
2005
- 2005-06-22 JP JP2005181882A patent/JP4517953B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0354362B2 (ja) * | 1983-12-20 | 1991-08-20 | ||
JPH0547746A (ja) * | 1991-08-20 | 1993-02-26 | Tadahiro Omi | 熱処理装置 |
JPH05238873A (ja) * | 1992-02-27 | 1993-09-17 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
JPH082932A (ja) * | 1994-06-20 | 1996-01-09 | Shinetsu Quartz Prod Co Ltd | 石英ガラスルツボとその製造方法 |
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Publication number | Publication date |
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JP2007001793A (ja) | 2007-01-11 |
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