JP4515486B2 - 半導体素子テスト用ハンドラ - Google Patents
半導体素子テスト用ハンドラ Download PDFInfo
- Publication number
- JP4515486B2 JP4515486B2 JP2007127241A JP2007127241A JP4515486B2 JP 4515486 B2 JP4515486 B2 JP 4515486B2 JP 2007127241 A JP2007127241 A JP 2007127241A JP 2007127241 A JP2007127241 A JP 2007127241A JP 4515486 B2 JP4515486 B2 JP 4515486B2
- Authority
- JP
- Japan
- Prior art keywords
- tray
- transfer
- semiconductor device
- chamber
- device test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (12)
- 半導体素子が装着されるトレイと、
前記トレイの下縁部と上縁部とをそれぞれ支持する複数の移送バーを備える移送部材と、
前記移送バーを回転させる駆動ユニットと、
を備え、
前記トレイは、前記移送バーを回転させることによって、垂直に立てられたまま、移送され、
前記複数の移送バーは、前記トレイの下縁部を支持する2つの移送バーと、前記トレイの上縁部を支持する1つの移送バーと、で構成される、
ことを特徴とする、半導体素子テスト用ハンドラ。 - 前記移送バーは、それぞれの外周面に沿って形成される螺旋形軌跡のスクリュー溝を備えることを特徴とする、請求項1に記載の半導体素子テスト用ハンドラ。
- 前記トレイの前記下縁部と前記上縁部とは、前記スクリュー溝と結合する突起をさらに備えることを特徴とする、請求項2に記載の半導体素子テスト用ハンドラ。
- 前記駆動ユニットは、モーターと、前記モーターの回転力を前記移送バーに伝達するための動力伝達装置と、を備えることを特徴とする、請求項1に記載の半導体素子テスト用ハンドラ。
- 前記動力伝達装置は、前記モーターの軸に結合された駆動プーリと、前記各移送バーと結合される複数の従動プーリと、前記駆動プーリの回転力を前記従動プーリに伝達するための動力伝達部材と、を備えることを特徴とする、請求項4に記載の半導体素子テスト用ハンドラ。
- 前記動力伝達装置は、前記動力伝達部材に張力を印加させるために前記駆動プーリと従動プーリとの間に設置されるアイドルプーリをさらに備えることを特徴とする、請求項5に記載の半導体素子テスト用ハンドラ。
- 前記モーターは、正回転及び逆回転が可能であることを特徴とする、請求項4に記載の半導体素子テスト用ハンドラ。
- 前記トレイの移動時に、前記トレイの側面を支持して前記トレイの移動を導くガイド器をさらに備えることを特徴とする、請求項1に記載の半導体素子テスト用ハンドラ。
- 前記移送部材は、前記移送バーの両端を支持するためのブシングをさらに備えることを特徴とする、請求項1に記載の半導体素子テスト用ハンドラ。
- 前記トレイが移動する空間を提供するチャンバをさらに備え、前記駆動ユニットは前記チャンバ外部に設置されることを特徴とする、請求項1に記載の半導体素子テスト用ハンドラ。
- 前記トレイが前記チャンバ内部に供給される時に前記トレイを支持する前端安置部材と、前記トレイが前記チャンバ外部に搬出される時に前記トレイを支持する後端安置部材と、をさらに備えることを特徴とする、請求項10に記載の半導体素子テスト用ハンドラ。
- チャンバと、
前記チャンバの前端から後端に延長されて設置される複数の移送バーと、
前記移送バーの外周面に形成される螺旋状の溝と、
トレイの下縁部と上縁部とは、それぞれ、前記螺旋状の溝に垂直に立てられたまま挿入されて、前記移送バーの回転運動によって、垂直に立てられたまま、移動するトレイと、
前記トレイの側面を支持し、該トレイの移動中に前記トレイの移動を導くガイドバーと、
前記移送バーを回動させるための駆動ユニットと、
を備え、
前記複数の移送バーは、前記トレイの下縁部を支持する2つの移送バーと、前記トレイの上縁部を支持する1つの移送バーと、で構成される、
ことを特徴とする半導体素子テスト用ハンドラ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060046516A KR100792732B1 (ko) | 2006-05-24 | 2006-05-24 | 반도체 소자 테스트 핸들러의 테스트 트레이 이송장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007316065A JP2007316065A (ja) | 2007-12-06 |
JP4515486B2 true JP4515486B2 (ja) | 2010-07-28 |
Family
ID=38622443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007127241A Expired - Fee Related JP4515486B2 (ja) | 2006-05-24 | 2007-05-11 | 半導体素子テスト用ハンドラ |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080001145A1 (ja) |
JP (1) | JP4515486B2 (ja) |
KR (1) | KR100792732B1 (ja) |
CN (1) | CN100541752C (ja) |
DE (1) | DE102007019895A1 (ja) |
TW (1) | TWI340832B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT202200012539A1 (it) * | 2022-06-14 | 2023-12-14 | Costruzioni Mecc E Tecnologiche S R L | Apparato di caricamento ed accumulo di pezzi semilavorati piastriformi, in particolare lenti |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100941674B1 (ko) | 2008-01-29 | 2010-02-12 | (주)테크윙 | 전자부품 검사 지원을 위한 핸들러용 캐리어보드이송시스템 및 전자부품 검사 지원을 위한 핸들러의 챔버내에서의 캐리어보드 이송방법 |
CN103231897A (zh) * | 2012-08-30 | 2013-08-07 | 石松泉 | 假指甲树的螺纹式自动进料装置 |
CN107042197B (zh) * | 2013-02-25 | 2018-11-09 | 泰克元有限公司 | 用于测试处理机的振动装置 |
KR20180092355A (ko) * | 2017-02-09 | 2018-08-20 | (주)테크윙 | 테스트핸들러용 테스트트레이 이송장치 및 테스트핸들러에서의 테스트트레이 이송방법 |
KR101947168B1 (ko) * | 2017-04-29 | 2019-02-12 | (주)아테코 | 트레이 직립 이송 장치 |
CN108226757B (zh) * | 2018-02-12 | 2020-12-18 | 巢湖威能光电科技有限公司 | 一种集成电路板通电测试装置 |
KR102305417B1 (ko) * | 2019-04-15 | 2021-09-29 | 주식회사 아테코 | 트레이 이송 장치 및 이를 포함하는 전자부품 테스트 핸들러 |
CN111239586B (zh) * | 2020-01-20 | 2021-04-20 | 西安交通大学 | 一种环境可控的微型测试系统 |
Citations (3)
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JPH04286519A (ja) * | 1991-03-15 | 1992-10-12 | Taiyo Yuden Co Ltd | 矩形板搬送装置 |
JPH07198779A (ja) * | 1993-12-28 | 1995-08-01 | Advantest Corp | Icロード・アンロード方法 |
JP2000210598A (ja) * | 1999-01-20 | 2000-08-02 | Yasuhiko Ishii | 搬送装置及びこれを用いた静電粉体塗装装置 |
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JPH06305535A (ja) * | 1993-04-21 | 1994-11-01 | Mitsubishi Materials Corp | 製缶工程における倒缶等の分別装置 |
KR100269050B1 (ko) * | 1998-07-15 | 2000-12-01 | 장흥순 | 반도체 소자 검사장비용 처리챔버내에서의 테스트트레이 이송장치 |
FR2823120B1 (fr) * | 2001-04-09 | 2003-06-20 | Patrice Camu | Unite de sterilisation |
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-
2006
- 2006-05-24 KR KR1020060046516A patent/KR100792732B1/ko active IP Right Grant
-
2007
- 2007-04-27 DE DE102007019895A patent/DE102007019895A1/de not_active Withdrawn
- 2007-05-11 JP JP2007127241A patent/JP4515486B2/ja not_active Expired - Fee Related
- 2007-05-18 US US11/802,041 patent/US20080001145A1/en not_active Abandoned
- 2007-05-18 TW TW096117757A patent/TWI340832B/zh not_active IP Right Cessation
- 2007-05-23 CN CNB2007101072810A patent/CN100541752C/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04286519A (ja) * | 1991-03-15 | 1992-10-12 | Taiyo Yuden Co Ltd | 矩形板搬送装置 |
JPH07198779A (ja) * | 1993-12-28 | 1995-08-01 | Advantest Corp | Icロード・アンロード方法 |
JP2000210598A (ja) * | 1999-01-20 | 2000-08-02 | Yasuhiko Ishii | 搬送装置及びこれを用いた静電粉体塗装装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT202200012539A1 (it) * | 2022-06-14 | 2023-12-14 | Costruzioni Mecc E Tecnologiche S R L | Apparato di caricamento ed accumulo di pezzi semilavorati piastriformi, in particolare lenti |
EP4292958A1 (en) * | 2022-06-14 | 2023-12-20 | Costruzioni Meccaniche E Tecnologiche S.R.L. | Apparatus for loading and accumulating semi-finished plate-like pieces, in particular lenses |
Also Published As
Publication number | Publication date |
---|---|
TWI340832B (en) | 2011-04-21 |
DE102007019895A1 (de) | 2007-11-29 |
TW200807001A (en) | 2008-02-01 |
CN100541752C (zh) | 2009-09-16 |
CN101079389A (zh) | 2007-11-28 |
KR20070112942A (ko) | 2007-11-28 |
JP2007316065A (ja) | 2007-12-06 |
US20080001145A1 (en) | 2008-01-03 |
KR100792732B1 (ko) | 2008-01-11 |
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