JP4513435B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP4513435B2
JP4513435B2 JP2004203778A JP2004203778A JP4513435B2 JP 4513435 B2 JP4513435 B2 JP 4513435B2 JP 2004203778 A JP2004203778 A JP 2004203778A JP 2004203778 A JP2004203778 A JP 2004203778A JP 4513435 B2 JP4513435 B2 JP 4513435B2
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JP
Japan
Prior art keywords
arm
drive
arm portion
pick
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004203778A
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English (en)
Japanese (ja)
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JP2005229087A (ja
JP2005229087A5 (enExample
Inventor
弘明 佐伯
繁 石沢
健弘 新藤
勤 廣木
弥 町山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Publication date
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Priority to JP2004203778A priority Critical patent/JP4513435B2/ja
Publication of JP2005229087A publication Critical patent/JP2005229087A/ja
Publication of JP2005229087A5 publication Critical patent/JP2005229087A5/ja
Application granted granted Critical
Publication of JP4513435B2 publication Critical patent/JP4513435B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2004203778A 2003-07-16 2004-07-09 搬送装置 Expired - Lifetime JP4513435B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004203778A JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003197689 2003-07-16
JP2004009506 2004-01-16
JP2004203778A JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010075041A Division JP5024411B2 (ja) 2003-07-16 2010-03-29 搬送装置

Publications (3)

Publication Number Publication Date
JP2005229087A JP2005229087A (ja) 2005-08-25
JP2005229087A5 JP2005229087A5 (enExample) 2007-01-18
JP4513435B2 true JP4513435B2 (ja) 2010-07-28

Family

ID=35003511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004203778A Expired - Lifetime JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Country Status (1)

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JP (1) JP4513435B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
KR101629734B1 (ko) * 2007-05-08 2016-06-13 브룩스 오토메이션 인코퍼레이티드 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
US9623555B2 (en) * 2010-11-10 2017-04-18 Brooks Automation, Inc. Dual arm robot
KR102392186B1 (ko) 2011-03-11 2022-04-28 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴
KR102465277B1 (ko) * 2013-01-18 2022-11-09 퍼시몬 테크놀로지스 코포레이션 로봇, 전자 장치 처리 시스템, 기판 이송 방법
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
JP6386704B2 (ja) * 2013-08-27 2018-09-05 川崎重工業株式会社 ワーク搬送装置
KR102567510B1 (ko) 2015-03-12 2023-08-17 퍼시몬 테크놀로지스 코포레이션 종속화된 엔드 이펙터 움직임을 가진 로봇
JP6838278B2 (ja) * 2016-03-28 2021-03-03 セイコーエプソン株式会社 ロボット
JP6809245B2 (ja) * 2017-01-20 2021-01-06 セイコーエプソン株式会社 ロボット
KR102662477B1 (ko) * 2019-04-05 2024-05-03 카와사키 주코교 카부시키 카이샤 액화 가스 탱크 및 액화 가스 운반선
JP7152614B2 (ja) * 2019-09-24 2022-10-12 株式会社Fuji 角度伝達誤差測定装置
CN117265515A (zh) * 2023-10-27 2023-12-22 盛吉盛半导体科技(无锡)有限公司 一种晶圆驱动定位装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10156770A (ja) * 1996-12-04 1998-06-16 Komatsu Ltd ハンドリング用ロボット
JP3863671B2 (ja) * 1998-07-25 2006-12-27 株式会社ダイヘン 搬送用ロボット装置
JP4628602B2 (ja) * 2001-04-05 2011-02-09 ナブテスコ株式会社 ロボットアーム

Also Published As

Publication number Publication date
JP2005229087A (ja) 2005-08-25

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