JP4498829B2 - カードホルダ - Google Patents

カードホルダ Download PDF

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Publication number
JP4498829B2
JP4498829B2 JP2004175475A JP2004175475A JP4498829B2 JP 4498829 B2 JP4498829 B2 JP 4498829B2 JP 2004175475 A JP2004175475 A JP 2004175475A JP 2004175475 A JP2004175475 A JP 2004175475A JP 4498829 B2 JP4498829 B2 JP 4498829B2
Authority
JP
Japan
Prior art keywords
outer peripheral
probe
support
probe card
card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004175475A
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English (en)
Japanese (ja)
Other versions
JP2005181284A (ja
JP2005181284A5 (enExample
Inventor
俊裕 米沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/695,792 external-priority patent/US6831455B2/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of JP2005181284A publication Critical patent/JP2005181284A/ja
Publication of JP2005181284A5 publication Critical patent/JP2005181284A5/ja
Application granted granted Critical
Publication of JP4498829B2 publication Critical patent/JP4498829B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2004175475A 2003-10-30 2004-06-14 カードホルダ Expired - Fee Related JP4498829B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/695,792 US6831455B2 (en) 2002-11-01 2003-10-30 Mechanism for fixing probe card

Publications (3)

Publication Number Publication Date
JP2005181284A JP2005181284A (ja) 2005-07-07
JP2005181284A5 JP2005181284A5 (enExample) 2006-04-13
JP4498829B2 true JP4498829B2 (ja) 2010-07-07

Family

ID=34794552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004175475A Expired - Fee Related JP4498829B2 (ja) 2003-10-30 2004-06-14 カードホルダ

Country Status (1)

Country Link
JP (1) JP4498829B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012178599A (ja) * 2012-05-14 2012-09-13 Tokyo Seimitsu Co Ltd プローバおよびプローバの温度制御方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4695447B2 (ja) * 2005-06-23 2011-06-08 株式会社日本マイクロニクス プローブ組立体およびこれを用いた電気的接続装置
DE102007057815A1 (de) * 2006-12-19 2008-06-26 Feinmetall Gmbh Kontaktiervorrichtung für eine Berührungskontaktierung eines elektrischen Prüflings sowie entsprechendes Verfahren
WO2008078939A1 (en) * 2006-12-27 2008-07-03 Secron Co., Ltd. Probe station, and testing method of wafer using the same
JP2008286657A (ja) * 2007-05-18 2008-11-27 Advantest Corp プローブカードおよびそれを備えた電子部品試験装置
JP6259590B2 (ja) * 2013-06-12 2018-01-10 株式会社日本マイクロニクス プローブカード及びその製造方法
TWI597503B (zh) * 2016-08-24 2017-09-01 美亞國際電子有限公司 探針卡

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0792479B2 (ja) * 1993-03-18 1995-10-09 東京エレクトロン株式会社 プローブ装置の平行度調整方法
JP2601408B2 (ja) * 1994-04-28 1997-04-16 日本電子材料株式会社 高温測定用プローブカード及びそれに用いられるマザーボード
JP3364401B2 (ja) * 1996-12-27 2003-01-08 東京エレクトロン株式会社 プローブカードクランプ機構及びプローブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012178599A (ja) * 2012-05-14 2012-09-13 Tokyo Seimitsu Co Ltd プローバおよびプローバの温度制御方法

Also Published As

Publication number Publication date
JP2005181284A (ja) 2005-07-07

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