JP4488608B2 - 静電気除去装置 - Google Patents
静電気除去装置 Download PDFInfo
- Publication number
- JP4488608B2 JP4488608B2 JP2000259146A JP2000259146A JP4488608B2 JP 4488608 B2 JP4488608 B2 JP 4488608B2 JP 2000259146 A JP2000259146 A JP 2000259146A JP 2000259146 A JP2000259146 A JP 2000259146A JP 4488608 B2 JP4488608 B2 JP 4488608B2
- Authority
- JP
- Japan
- Prior art keywords
- blower
- filter
- discharge electrode
- air
- static eliminator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003068 static effect Effects 0.000 title claims description 81
- 239000000428 dust Substances 0.000 claims description 37
- 230000008030 elimination Effects 0.000 claims description 15
- 238000003379 elimination reaction Methods 0.000 claims description 15
- 150000002500 ions Chemical class 0.000 claims description 12
- 230000005611 electricity Effects 0.000 claims description 11
- 230000003472 neutralizing effect Effects 0.000 claims description 2
- 239000013589 supplement Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000007664 blowing Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 238000006386 neutralization reaction Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Images
Landscapes
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000259146A JP4488608B2 (ja) | 2000-08-29 | 2000-08-29 | 静電気除去装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000259146A JP4488608B2 (ja) | 2000-08-29 | 2000-08-29 | 静電気除去装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002075589A JP2002075589A (ja) | 2002-03-15 |
| JP2002075589A5 JP2002075589A5 (enExample) | 2007-07-19 |
| JP4488608B2 true JP4488608B2 (ja) | 2010-06-23 |
Family
ID=18747356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000259146A Expired - Fee Related JP4488608B2 (ja) | 2000-08-29 | 2000-08-29 | 静電気除去装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4488608B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4715626B2 (ja) * | 2006-05-10 | 2011-07-06 | オムロン株式会社 | イオナイザ、イオナイザの取り付け方法およびクリーンルームシステム |
| JP2007305403A (ja) * | 2006-05-11 | 2007-11-22 | Omron Corp | コロナ放電型イオナイザ、ファンユニット、およびクリーンルームシステム |
| JP4556139B2 (ja) * | 2006-09-29 | 2010-10-06 | 株式会社日立プラントテクノロジー | 除電装置及び除電方法 |
| JP4894617B2 (ja) * | 2007-05-17 | 2012-03-14 | パナソニック株式会社 | ファンフィルタユニット一体型除電器 |
| JP4986191B2 (ja) * | 2010-06-04 | 2012-07-25 | 株式会社日立プラントテクノロジー | 除電装置及び除電方法 |
| CN111829030B (zh) * | 2020-06-23 | 2022-09-06 | 浙江沃普思智能科技有限公司 | 一种具有静电清除功能的集成灶 |
-
2000
- 2000-08-29 JP JP2000259146A patent/JP4488608B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002075589A (ja) | 2002-03-15 |
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