JP4464188B2 - 半導体製造装置用防着治具の製造方法 - Google Patents
半導体製造装置用防着治具の製造方法 Download PDFInfo
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- JP4464188B2 JP4464188B2 JP2004132569A JP2004132569A JP4464188B2 JP 4464188 B2 JP4464188 B2 JP 4464188B2 JP 2004132569 A JP2004132569 A JP 2004132569A JP 2004132569 A JP2004132569 A JP 2004132569A JP 4464188 B2 JP4464188 B2 JP 4464188B2
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- jig
- film
- base material
- sprayed film
- sprayed
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- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000004065 semiconductor Substances 0.000 title claims description 10
- 230000002265 prevention Effects 0.000 title description 7
- 239000000463 material Substances 0.000 claims description 62
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 238000005507 spraying Methods 0.000 claims description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 238000007750 plasma spraying Methods 0.000 claims description 7
- 238000007788 roughening Methods 0.000 claims description 6
- 238000005488 sandblasting Methods 0.000 claims description 6
- 238000010285 flame spraying Methods 0.000 claims description 5
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 238000001465 metallisation Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 69
- 238000000151 deposition Methods 0.000 description 18
- 230000008021 deposition Effects 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 18
- 239000007921 spray Substances 0.000 description 13
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 230000035882 stress Effects 0.000 description 6
- 230000008646 thermal stress Effects 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 4
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- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 238000007751 thermal spraying Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
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- Coating By Spraying Or Casting (AREA)
Description
11 母材
11a 母材の表面
12 第1の溶射膜
12a 第1の溶射膜の表面
13 第2の溶射膜
13a 第2の溶射膜の表面
Claims (3)
- 金属製の防着治具の母材の表面を粗面にする工程と、粗面にした母材の表面に金属を溶射して複数の溶射膜を重ねて形成する工程と、を有し、前記複数の溶射膜の最も母材側の溶射膜が、プラズマ溶射による溶射膜であり、最も表面側の溶射膜がフレーム溶射による溶射膜であることを特徴とする半導体製造装置用防着治具の製造方法。
- 前記母材がステンレススチール、チタン、チタン合金のいずれかであることを特徴とする請求項1記載の半導体製造装置用防着治具の製造方法。
- 前記防着治具の母材の表面を粗面にする工程が、サンドブラスト処理であることを特徴とする請求項1又は2記載の半導体製造装置用防着治具の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004132569A JP4464188B2 (ja) | 2004-04-28 | 2004-04-28 | 半導体製造装置用防着治具の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004132569A JP4464188B2 (ja) | 2004-04-28 | 2004-04-28 | 半導体製造装置用防着治具の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005314732A JP2005314732A (ja) | 2005-11-10 |
JP4464188B2 true JP4464188B2 (ja) | 2010-05-19 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004132569A Expired - Lifetime JP4464188B2 (ja) | 2004-04-28 | 2004-04-28 | 半導体製造装置用防着治具の製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP4464188B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100878875B1 (ko) * | 2007-05-25 | 2009-01-15 | 주식회사뉴테크 | 실린더 슬리브의 외벽 코팅 방법 |
KR100878878B1 (ko) * | 2007-06-14 | 2009-01-15 | 주식회사뉴테크 | 용사기술을 이용한 엔진블록 라이너외벽 코팅 방법 |
JP6353320B2 (ja) * | 2014-08-25 | 2018-07-04 | ダイセルポリマー株式会社 | 複合成形体の製造方法 |
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2004
- 2004-04-28 JP JP2004132569A patent/JP4464188B2/ja not_active Expired - Lifetime
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JP2005314732A (ja) | 2005-11-10 |
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