JP4438440B2 - レジスト画像形成材、及びそのレジスト画像形成方法 - Google Patents

レジスト画像形成材、及びそのレジスト画像形成方法 Download PDF

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Publication number
JP4438440B2
JP4438440B2 JP2004035999A JP2004035999A JP4438440B2 JP 4438440 B2 JP4438440 B2 JP 4438440B2 JP 2004035999 A JP2004035999 A JP 2004035999A JP 2004035999 A JP2004035999 A JP 2004035999A JP 4438440 B2 JP4438440 B2 JP 4438440B2
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Japan
Prior art keywords
group
image forming
meth
resist image
photopolymerizable composition
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Expired - Lifetime
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JP2004035999A
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Japanese (ja)
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JP2005227528A (ja
JP2005227528A5 (enExample
Inventor
恵理子 利光
右二 瑞穂
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Mitsubishi Chemical Corp
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Nippon Synthetic Chemical Industry Co Ltd
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Priority to JP2004035999A priority Critical patent/JP4438440B2/ja
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Publication of JP2005227528A5 publication Critical patent/JP2005227528A5/ja
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  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)
JP2004035999A 2004-02-13 2004-02-13 レジスト画像形成材、及びそのレジスト画像形成方法 Expired - Lifetime JP4438440B2 (ja)

Priority Applications (1)

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JP2004035999A JP4438440B2 (ja) 2004-02-13 2004-02-13 レジスト画像形成材、及びそのレジスト画像形成方法

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JP2004035999A JP4438440B2 (ja) 2004-02-13 2004-02-13 レジスト画像形成材、及びそのレジスト画像形成方法

Publications (3)

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JP2005227528A JP2005227528A (ja) 2005-08-25
JP2005227528A5 JP2005227528A5 (enExample) 2007-03-15
JP4438440B2 true JP4438440B2 (ja) 2010-03-24

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JP2004035999A Expired - Lifetime JP4438440B2 (ja) 2004-02-13 2004-02-13 レジスト画像形成材、及びそのレジスト画像形成方法

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101059408B1 (ko) 2006-08-03 2011-08-29 아사히 가세이 일렉트로닉스 가부시끼가이샤 감광성 수지 조성물 및 적층체
JP5660774B2 (ja) * 2009-11-04 2015-01-28 住友化学株式会社 着色感光性樹脂組成物、塗膜、パターン及び表示装置
JP2016105117A (ja) * 2013-03-19 2016-06-09 日立化成株式会社 感光性樹脂組成物、感光性エレメント、レジストパターン付き基板の製造方法及びプリント配線板の製造方法
CN111663138B (zh) * 2020-07-08 2024-10-11 江苏和达电子科技有限公司 一种液晶面板含铜叠层薄膜蚀刻液及其应用
JP2023130248A (ja) * 2022-03-07 2023-09-20 旭化成株式会社 感光性エレメントの製造方法、およびレジストパターンの形成方法

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