JP4436523B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP4436523B2
JP4436523B2 JP2000072849A JP2000072849A JP4436523B2 JP 4436523 B2 JP4436523 B2 JP 4436523B2 JP 2000072849 A JP2000072849 A JP 2000072849A JP 2000072849 A JP2000072849 A JP 2000072849A JP 4436523 B2 JP4436523 B2 JP 4436523B2
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Japan
Prior art keywords
image
defect
display
window
image area
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Expired - Fee Related
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JP2000072849A
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English (en)
Japanese (ja)
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JP2001264267A5 (enExample
JP2001264267A (ja
Inventor
武博 高橋
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Olympus Corp
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Olympus Corp
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Priority to JP2000072849A priority Critical patent/JP4436523B2/ja
Publication of JP2001264267A publication Critical patent/JP2001264267A/ja
Publication of JP2001264267A5 publication Critical patent/JP2001264267A5/ja
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Publication of JP4436523B2 publication Critical patent/JP4436523B2/ja
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2000072849A 2000-03-15 2000-03-15 基板検査装置 Expired - Fee Related JP4436523B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000072849A JP4436523B2 (ja) 2000-03-15 2000-03-15 基板検査装置

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Application Number Priority Date Filing Date Title
JP2000072849A JP4436523B2 (ja) 2000-03-15 2000-03-15 基板検査装置

Publications (3)

Publication Number Publication Date
JP2001264267A JP2001264267A (ja) 2001-09-26
JP2001264267A5 JP2001264267A5 (enExample) 2007-05-10
JP4436523B2 true JP4436523B2 (ja) 2010-03-24

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JP2000072849A Expired - Fee Related JP4436523B2 (ja) 2000-03-15 2000-03-15 基板検査装置

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JP (1) JP4436523B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7471382B2 (en) * 2004-10-04 2008-12-30 Kla-Tencor Technologies Corporation Surface inspection system with improved capabilities
JP6142655B2 (ja) * 2013-05-09 2017-06-07 株式会社島津製作所 外観検査装置及び外観検査方法
KR101592852B1 (ko) * 2013-11-11 2016-02-12 서울여자대학교 산학협력단 산업용 컴퓨터 단층 촬영 볼륨데이터에서 이물질 자동 검출 시스템 및 그 검출 방법

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JP2001264267A (ja) 2001-09-26

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