JP2001264267A5 - - Google Patents

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Publication number
JP2001264267A5
JP2001264267A5 JP2000072849A JP2000072849A JP2001264267A5 JP 2001264267 A5 JP2001264267 A5 JP 2001264267A5 JP 2000072849 A JP2000072849 A JP 2000072849A JP 2000072849 A JP2000072849 A JP 2000072849A JP 2001264267 A5 JP2001264267 A5 JP 2001264267A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000072849A
Other languages
Japanese (ja)
Other versions
JP4436523B2 (ja
JP2001264267A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000072849A priority Critical patent/JP4436523B2/ja
Priority claimed from JP2000072849A external-priority patent/JP4436523B2/ja
Publication of JP2001264267A publication Critical patent/JP2001264267A/ja
Publication of JP2001264267A5 publication Critical patent/JP2001264267A5/ja
Application granted granted Critical
Publication of JP4436523B2 publication Critical patent/JP4436523B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000072849A 2000-03-15 2000-03-15 基板検査装置 Expired - Fee Related JP4436523B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000072849A JP4436523B2 (ja) 2000-03-15 2000-03-15 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000072849A JP4436523B2 (ja) 2000-03-15 2000-03-15 基板検査装置

Publications (3)

Publication Number Publication Date
JP2001264267A JP2001264267A (ja) 2001-09-26
JP2001264267A5 true JP2001264267A5 (enExample) 2007-05-10
JP4436523B2 JP4436523B2 (ja) 2010-03-24

Family

ID=18591191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000072849A Expired - Fee Related JP4436523B2 (ja) 2000-03-15 2000-03-15 基板検査装置

Country Status (1)

Country Link
JP (1) JP4436523B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7471382B2 (en) * 2004-10-04 2008-12-30 Kla-Tencor Technologies Corporation Surface inspection system with improved capabilities
JP6142655B2 (ja) * 2013-05-09 2017-06-07 株式会社島津製作所 外観検査装置及び外観検査方法
KR101592852B1 (ko) * 2013-11-11 2016-02-12 서울여자대학교 산학협력단 산업용 컴퓨터 단층 촬영 볼륨데이터에서 이물질 자동 검출 시스템 및 그 검출 방법

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