JP2001264267A5 - - Google Patents
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- JP2001264267A5 JP2001264267A5 JP2000072849A JP2000072849A JP2001264267A5 JP 2001264267 A5 JP2001264267 A5 JP 2001264267A5 JP 2000072849 A JP2000072849 A JP 2000072849A JP 2000072849 A JP2000072849 A JP 2000072849A JP 2001264267 A5 JP2001264267 A5 JP 2001264267A5
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- JP
- Japan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000072849A JP4436523B2 (ja) | 2000-03-15 | 2000-03-15 | 基板検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000072849A JP4436523B2 (ja) | 2000-03-15 | 2000-03-15 | 基板検査装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001264267A JP2001264267A (ja) | 2001-09-26 |
JP2001264267A5 true JP2001264267A5 (ja) | 2007-05-10 |
JP4436523B2 JP4436523B2 (ja) | 2010-03-24 |
Family
ID=18591191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000072849A Expired - Fee Related JP4436523B2 (ja) | 2000-03-15 | 2000-03-15 | 基板検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4436523B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7471382B2 (en) * | 2004-10-04 | 2008-12-30 | Kla-Tencor Technologies Corporation | Surface inspection system with improved capabilities |
JP6142655B2 (ja) * | 2013-05-09 | 2017-06-07 | 株式会社島津製作所 | 外観検査装置及び外観検査方法 |
KR101592852B1 (ko) * | 2013-11-11 | 2016-02-12 | 서울여자대학교 산학협력단 | 산업용 컴퓨터 단층 촬영 볼륨데이터에서 이물질 자동 검출 시스템 및 그 검출 방법 |
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2000
- 2000-03-15 JP JP2000072849A patent/JP4436523B2/ja not_active Expired - Fee Related