JP4434431B2 - 三次元形状測定装置 - Google Patents

三次元形状測定装置 Download PDF

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Publication number
JP4434431B2
JP4434431B2 JP2000141298A JP2000141298A JP4434431B2 JP 4434431 B2 JP4434431 B2 JP 4434431B2 JP 2000141298 A JP2000141298 A JP 2000141298A JP 2000141298 A JP2000141298 A JP 2000141298A JP 4434431 B2 JP4434431 B2 JP 4434431B2
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Japan
Prior art keywords
measurement
measured
measuring
shape
spherical
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JP2000141298A
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Japanese (ja)
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JP2001324309A (ja
JP2001324309A5 (enExample
Inventor
勝 大塚
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Canon Inc
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Canon Inc
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Priority to JP2000141298A priority Critical patent/JP4434431B2/ja
Publication of JP2001324309A publication Critical patent/JP2001324309A/ja
Publication of JP2001324309A5 publication Critical patent/JP2001324309A5/ja
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Publication of JP4434431B2 publication Critical patent/JP4434431B2/ja
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Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
JP2000141298A 2000-05-15 2000-05-15 三次元形状測定装置 Expired - Fee Related JP4434431B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000141298A JP4434431B2 (ja) 2000-05-15 2000-05-15 三次元形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000141298A JP4434431B2 (ja) 2000-05-15 2000-05-15 三次元形状測定装置

Publications (3)

Publication Number Publication Date
JP2001324309A JP2001324309A (ja) 2001-11-22
JP2001324309A5 JP2001324309A5 (enExample) 2007-07-05
JP4434431B2 true JP4434431B2 (ja) 2010-03-17

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JP2000141298A Expired - Fee Related JP4434431B2 (ja) 2000-05-15 2000-05-15 三次元形状測定装置

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JP (1) JP4434431B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4047096B2 (ja) * 2002-08-09 2008-02-13 キヤノン株式会社 表面形状測定装置および方法
JP4500729B2 (ja) * 2005-05-11 2010-07-14 キヤノン株式会社 表面形状測定装置
JP4767255B2 (ja) * 2005-08-05 2011-09-07 三鷹光器株式会社 レンズにおける表裏面の光軸偏芯量の測定方法
CN100465579C (zh) * 2006-12-19 2009-03-04 中国航空工业第一集团公司北京长城计量测试技术研究所 一种激光平面坐标标准装置
JP2008209244A (ja) * 2007-02-27 2008-09-11 Nagoya Institute Of Technology ３次元表面形状計測器による表面データからの立体形状の構築方法と板状物体の板厚計測法
TWI409518B (zh) * 2007-11-23 2013-09-21 Hon Hai Prec Ind Co Ltd 扭矩測試裝置及扭矩測試方法
JP5113030B2 (ja) * 2008-12-22 2013-01-09 株式会社成宗製作所 三次元形状計測方法及びその為の基準部材
JP2011117766A (ja) * 2009-12-01 2011-06-16 Canon Inc 干渉計測方法
CN103453849B (zh) * 2013-07-18 2016-01-20 黑龙江科技大学 多光学传感器协同的复杂曲面零件三维测量方法与系统
US10910786B2 (en) * 2018-07-23 2021-02-02 University Of Maryland, College Park Laser cavity optical alignment

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Publication number Publication date
JP2001324309A (ja) 2001-11-22

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