JP4424998B2 - 多孔質誘電体膜の洗浄中のダメージを低減する処理方法 - Google Patents
多孔質誘電体膜の洗浄中のダメージを低減する処理方法 Download PDFInfo
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- JP4424998B2 JP4424998B2 JP2003584818A JP2003584818A JP4424998B2 JP 4424998 B2 JP4424998 B2 JP 4424998B2 JP 2003584818 A JP2003584818 A JP 2003584818A JP 2003584818 A JP2003584818 A JP 2003584818A JP 4424998 B2 JP4424998 B2 JP 4424998B2
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- 238000000034 method Methods 0.000 title claims description 65
- 238000004140 cleaning Methods 0.000 title claims description 60
- 239000003989 dielectric material Substances 0.000 claims description 89
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 86
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 43
- 239000001569 carbon dioxide Substances 0.000 claims description 43
- 239000003795 chemical substances by application Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 9
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims description 8
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 claims description 4
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical group CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 239000005383 fluoride glass Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 claims description 3
- RJLKIAGOYBARJG-UHFFFAOYSA-N 1,3-dimethylpiperidin-2-one Chemical compound CC1CCCN(C)C1=O RJLKIAGOYBARJG-UHFFFAOYSA-N 0.000 claims description 2
- 150000007513 acids Chemical class 0.000 claims description 2
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 claims description 2
- 125000000962 organic group Chemical group 0.000 claims 2
- 229910000077 silane Inorganic materials 0.000 claims 2
- RPAJSBKBKSSMLJ-DFWYDOINSA-N (2s)-2-aminopentanedioic acid;hydrochloride Chemical class Cl.OC(=O)[C@@H](N)CCC(O)=O RPAJSBKBKSSMLJ-DFWYDOINSA-N 0.000 claims 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 1
- 239000006117 anti-reflective coating Substances 0.000 claims 1
- 230000003667 anti-reflective effect Effects 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 150000002222 fluorine compounds Chemical class 0.000 claims 1
- 150000007522 mineralic acids Chemical class 0.000 claims 1
- 150000007524 organic acids Chemical class 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 239000000243 solution Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 17
- 239000010410 layer Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 15
- 238000005530 etching Methods 0.000 description 11
- 238000002161 passivation Methods 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 125000005372 silanol group Chemical group 0.000 description 8
- 239000013043 chemical agent Substances 0.000 description 7
- 238000009472 formulation Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 208000036822 Small cell carcinoma of the ovary Diseases 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
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- 229910052760 oxygen Inorganic materials 0.000 description 4
- 210000002381 plasma Anatomy 0.000 description 4
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- 238000010129 solution processing Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000004380 ashing Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 150000001412 amines Chemical group 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000006184 cosolvent Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
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- 230000003116 impacting effect Effects 0.000 description 1
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- 238000011065 in-situ storage Methods 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000001367 organochlorosilanes Chemical class 0.000 description 1
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02343—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a liquid
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
- C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/423—Stripping or agents therefor using liquids only containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/02131—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being halogen doped silicon oxides, e.g. FSG
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- H—ELECTRICITY
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- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
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- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Description
Claims (27)
- 低k誘電材料表面を処理する方法であって、
a.該低k誘電材料表面に超臨界シリル化剤を与えて、不動態化された低k誘電材料表面を形成すること;
b.該低k誘電材料表面に該超臨界シリル化剤を与えた後、該超臨界シリル化剤を取り除くこと;
c.該不動態化された低k誘電材料表面に超臨界溶媒の溶液を与えること;及び
d.該不動態化された低k誘電材料表面に該超臨界溶媒の溶液を与えた後、該超臨界溶媒の溶液を取り除くこと;
を含んで成り、前記超臨界シリル化剤が、超臨界CO 2 と、有機基を含む或る量のシリル化剤とを含んで成る、低k誘電材料表面を処理する方法。 - 前記有機基が5個以下の炭素原子を含んで成る、請求項1に記載の方法。
- 前記超臨界溶媒の溶液が、超臨界CO2と、酸及びフッ化物の混合物とを含んで成る、請求項1に記載の方法。
- 前記酸が有機酸を含んで成る、請求項3に記載の方法。
- 前記酸が無機酸を含んで成る、請求項3に記載の方法。
- 前記超臨界シリル化剤が、構造(R1),(R2),(R3)SiNH(R4)を有するシランを含む、請求項1に記載の方法。
- 前記超臨界シリル化剤がキャリヤー溶媒をさらに含んで成る、請求項1に記載の方法。
- 前記キャリヤー溶媒が、N,N−ジメチルアセトアミド(DMAC)、γ−ブチロラクトン(BLO)、ジメチルスルホキシド(DMSO)、炭酸エチレン(EC)、N−メチルピロリドン(NMP)、ジメチルピペリドン、炭酸プロピレン及びアルコールから成る群より選択された、請求項7に記載の方法。
- 前記低k誘電材料表面が、25〜200℃の範囲の温度で維持される、請求項1に記載の方法。
- 前記低k誘電材料表面に超臨界シリル化剤を与えることが、該低k誘電材料表面全体に該超臨界シリル化剤を循環させることを含んで成る、請求項1に記載の方法。
- 前記低k誘電材料表面に超臨界溶媒の溶液を与えることが、該低k誘電材料表面全体に該超臨界溶媒の溶液を循環させることを含んで成る、請求項1に記載の方法。
- 前記超臨界シリル化剤が、700〜9,000psiの範囲の圧力で維持される、請求項1に記載の方法。
- 前記低k誘電材料表面に超臨界シリル化剤を与える前に、該低k誘電材料表面を乾燥させることをさらに含んで成る、請求項1に記載の方法。
- 前記低k誘電材料表面の乾燥が、該低k誘電材料表面に超臨界二酸化炭素を含む超臨界乾燥溶液を与えることを含んで成る、請求項13に記載の方法。
- 前記低k誘電材料表面が酸化ケイ素を含んで成る、請求項1に記載の方法。
- 前記低k誘電材料表面が、炭素をドープした酸化物(COD)、スピンオンガラス(SOG)及びフッ化シリコンガラス(FSG)から成る群より選択された材料を含んで成る、請求項1に記載の方法。
- 誘電体表面を処理する方法であって、
a.第1超臨界洗浄溶液を用いて該誘電体表面からエッチ後残留物を除去すること;
b.該誘電体表面を第2超臨界洗浄溶液中にあるシリル化剤で処理して、不動態化された誘電体表面を形成すること;及び
c.該不動態化された誘電体表面を第3超臨界洗浄溶液中にある溶媒で処理すること;
を含んで成る、誘電体表面を処理する方法。 - 前記エッチ後残留物がポリマーを含んで成る、請求項17に記載の方法。
- 前記ポリマーがフォトレジストポリマーである、請求項18に記載の方法。
- 前記フォトレジストポリマーが反射防止染料を含んで成る、請求項19に記載の方法。
- 前記誘電体表面が酸化ケイ素を含んで成る、請求項17に記載の方法。
- 前記誘電体表面が低k誘電材料を含んで成る、請求項17に記載の方法。
- 前記誘電体表面が、炭素をドープした酸化物(COD)、スピンオンガラス(SOG)及びフッ化シリコンガラス(FSG)から成る群より選択された材料を含んで成る、請求項17に記載の方法。
- 前記エッチ後残留物が反射防止コーティングを含んで成る、請求項17に記載の方法。
- 前記シリル化剤が有機ケイ素化合物を含んで成る、請求項17に記載の方法。
- 前記溶媒が、超臨界CO2と、酸及びフッ化物の混合物とを含んで成る、請求項17に記載の方法。
- 前記有機ケイ素化合物が、構造(R1),(R2),(R3)SiNH(R4)を有するシランである、請求項25に記載の方法。
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US37282202P | 2002-04-12 | 2002-04-12 | |
PCT/US2003/011012 WO2003087936A1 (en) | 2002-04-12 | 2003-04-11 | Method of treatment of porous dielectric films to reduce damage during cleaning |
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JP (1) | JP4424998B2 (ja) |
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US20050158664A1 (en) * | 2004-01-20 | 2005-07-21 | Joshua Tseng | Method of integrating post-etching cleaning process with deposition for semiconductor device |
JP4630077B2 (ja) | 2005-01-27 | 2011-02-09 | 日本電信電話株式会社 | レジストパターン形成方法 |
JP4555698B2 (ja) * | 2005-01-27 | 2010-10-06 | 日本電信電話株式会社 | レジストパターン形成方法 |
US7008853B1 (en) * | 2005-02-25 | 2006-03-07 | Infineon Technologies, Ag | Method and system for fabricating free-standing nanostructures |
WO2006113222A2 (en) * | 2005-04-15 | 2006-10-26 | Advanced Technology Materials, Inc. | Removal of high-dose ion-implanted photoresist using self-assembled monolayers in solvent systems |
JP5247999B2 (ja) * | 2005-09-29 | 2013-07-24 | 東京エレクトロン株式会社 | 基板処理方法およびコンピュータ読取可能な記憶媒体 |
US7658802B2 (en) * | 2005-11-22 | 2010-02-09 | Applied Materials, Inc. | Apparatus and a method for cleaning a dielectric film |
US7807219B2 (en) * | 2006-06-27 | 2010-10-05 | Lam Research Corporation | Repairing and restoring strength of etch-damaged low-k dielectric materials |
JP5173396B2 (ja) * | 2007-12-25 | 2013-04-03 | 大陽日酸株式会社 | 絶縁膜のダメージ回復処理方法 |
JP6151484B2 (ja) | 2012-06-11 | 2017-06-21 | 東京応化工業株式会社 | リソグラフィー用洗浄液及び配線形成方法 |
KR20200015279A (ko) | 2018-08-03 | 2020-02-12 | 삼성전자주식회사 | 나노결정질 그래핀의 형성방법 및 이를 포함하는 소자 |
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US5479727A (en) * | 1994-10-25 | 1996-01-02 | Air Products And Chemicals, Inc. | Moisture removal and passivation of surfaces |
US6500605B1 (en) * | 1997-05-27 | 2002-12-31 | Tokyo Electron Limited | Removal of photoresist and residue from substrate using supercritical carbon dioxide process |
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US6673521B2 (en) * | 2000-12-12 | 2004-01-06 | Lnternational Business Machines Corporation | Supercritical fluid(SCF) silylation process |
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CN101005024A (zh) | 2007-07-25 |
CN1646990A (zh) | 2005-07-27 |
CN101005024B (zh) | 2011-06-08 |
TW200308051A (en) | 2003-12-16 |
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JP2005522737A (ja) | 2005-07-28 |
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