JP4415385B2 - 液体噴射ヘッドおよびその製造方法 - Google Patents

液体噴射ヘッドおよびその製造方法 Download PDF

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Publication number
JP4415385B2
JP4415385B2 JP2005043529A JP2005043529A JP4415385B2 JP 4415385 B2 JP4415385 B2 JP 4415385B2 JP 2005043529 A JP2005043529 A JP 2005043529A JP 2005043529 A JP2005043529 A JP 2005043529A JP 4415385 B2 JP4415385 B2 JP 4415385B2
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JP
Japan
Prior art keywords
flow path
storage chamber
plane
liquid
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005043529A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006224568A5 (enExample
JP2006224568A (ja
Inventor
宣昭 岡沢
伸彦 山内
澄夫 荒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2005043529A priority Critical patent/JP4415385B2/ja
Priority to US11/357,187 priority patent/US7494206B2/en
Publication of JP2006224568A publication Critical patent/JP2006224568A/ja
Publication of JP2006224568A5 publication Critical patent/JP2006224568A5/ja
Application granted granted Critical
Publication of JP4415385B2 publication Critical patent/JP4415385B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2005043529A 2005-02-21 2005-02-21 液体噴射ヘッドおよびその製造方法 Expired - Fee Related JP4415385B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005043529A JP4415385B2 (ja) 2005-02-21 2005-02-21 液体噴射ヘッドおよびその製造方法
US11/357,187 US7494206B2 (en) 2005-02-21 2006-02-21 Liquid ejection head and method of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005043529A JP4415385B2 (ja) 2005-02-21 2005-02-21 液体噴射ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2006224568A JP2006224568A (ja) 2006-08-31
JP2006224568A5 JP2006224568A5 (enExample) 2007-03-01
JP4415385B2 true JP4415385B2 (ja) 2010-02-17

Family

ID=36969719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005043529A Expired - Fee Related JP4415385B2 (ja) 2005-02-21 2005-02-21 液体噴射ヘッドおよびその製造方法

Country Status (2)

Country Link
US (1) US7494206B2 (enExample)
JP (1) JP4415385B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4968428B2 (ja) * 2005-10-05 2012-07-04 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP6333055B2 (ja) * 2014-05-13 2018-05-30 キヤノン株式会社 基板加工方法および液体吐出ヘッド用基板の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5455615A (en) * 1992-06-04 1995-10-03 Tektronix, Inc. Multiple-orifice drop-on-demand ink jet print head having improved purging and jetting performance
US5757400A (en) * 1996-02-01 1998-05-26 Spectra, Inc. High resolution matrix ink jet arrangement
JP3436299B2 (ja) 1998-08-21 2003-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP4570178B2 (ja) * 1998-11-26 2010-10-27 富士フイルム株式会社 インクジェットヘッドとその製造方法、印刷装置
JP2001113701A (ja) * 1999-08-06 2001-04-24 Ricoh Co Ltd 静電型インクジェットヘッドおよびその製造方法
JP4075317B2 (ja) * 2001-04-11 2008-04-16 富士ゼロックス株式会社 インクジェット記録ヘッド及びインクジェット記録装置
JP4159317B2 (ja) 2002-07-23 2008-10-01 株式会社リコー 液滴吐出ヘッドの製造方法、マイクロデバイス、インクジェットヘッド、インクカートリッジ並びにインクジェット記録装置、画像形成装置、液滴を吐出する装置
JP3772805B2 (ja) * 2002-03-04 2006-05-10 セイコーエプソン株式会社 液体噴射ヘッド、及び、それを備えた液体噴射装置
JP2004216747A (ja) 2003-01-16 2004-08-05 Hitachi Ltd インクジェットヘッドおよびその製造方法並びにインクジェット式記録装置
JP4069832B2 (ja) * 2003-08-14 2008-04-02 ブラザー工業株式会社 インクジェットヘッド

Also Published As

Publication number Publication date
US7494206B2 (en) 2009-02-24
JP2006224568A (ja) 2006-08-31
US20060201908A1 (en) 2006-09-14

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