JP4415223B2 - 照明光学装置および該照明光学装置を備えた露光装置 - Google Patents

照明光学装置および該照明光学装置を備えた露光装置 Download PDF

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Publication number
JP4415223B2
JP4415223B2 JP25563699A JP25563699A JP4415223B2 JP 4415223 B2 JP4415223 B2 JP 4415223B2 JP 25563699 A JP25563699 A JP 25563699A JP 25563699 A JP25563699 A JP 25563699A JP 4415223 B2 JP4415223 B2 JP 4415223B2
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JP
Japan
Prior art keywords
light beam
optical system
light
illumination
predetermined surface
Prior art date
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Expired - Fee Related
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JP25563699A
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English (en)
Japanese (ja)
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JP2001085293A (ja
JP2001085293A5 (enExample
Inventor
修 谷津
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Nikon Corp
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Nikon Corp
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Publication date
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Priority to JP25563699A priority Critical patent/JP4415223B2/ja
Priority to EP99125256A priority patent/EP1014196A3/en
Priority to KR1019990058776A priority patent/KR20000048227A/ko
Priority to US09/540,874 priority patent/US6563567B1/en
Publication of JP2001085293A publication Critical patent/JP2001085293A/ja
Priority to US10/377,700 priority patent/US20030160949A1/en
Priority to US10/378,867 priority patent/US20030156266A1/en
Priority to US10/378,816 priority patent/US20030156269A1/en
Publication of JP2001085293A5 publication Critical patent/JP2001085293A5/ja
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Publication of JP4415223B2 publication Critical patent/JP4415223B2/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP25563699A 1998-12-17 1999-09-09 照明光学装置および該照明光学装置を備えた露光装置 Expired - Fee Related JP4415223B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP25563699A JP4415223B2 (ja) 1999-09-09 1999-09-09 照明光学装置および該照明光学装置を備えた露光装置
EP99125256A EP1014196A3 (en) 1998-12-17 1999-12-17 Method and system of illumination for a projection optical apparatus
KR1019990058776A KR20000048227A (ko) 1998-12-17 1999-12-17 이미지 투사 장치를 이용한 표면 조명 방법 및 조명 광학시스템
US09/540,874 US6563567B1 (en) 1998-12-17 2000-03-31 Method and apparatus for illuminating a surface using a projection imaging apparatus
US10/377,700 US20030160949A1 (en) 1998-12-17 2003-03-04 Method and apparatus for illuminating a surface using a projection imaging apparatus
US10/378,867 US20030156266A1 (en) 1998-12-17 2003-03-05 Method and apparatus for illuminating a surface using a projection imaging apparatus
US10/378,816 US20030156269A1 (en) 1998-12-17 2003-03-05 Method and apparatus for illuminating a surface using a projection imaging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25563699A JP4415223B2 (ja) 1999-09-09 1999-09-09 照明光学装置および該照明光学装置を備えた露光装置

Publications (3)

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JP2001085293A JP2001085293A (ja) 2001-03-30
JP2001085293A5 JP2001085293A5 (enExample) 2008-02-28
JP4415223B2 true JP4415223B2 (ja) 2010-02-17

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JP25563699A Expired - Fee Related JP4415223B2 (ja) 1998-12-17 1999-09-09 照明光学装置および該照明光学装置を備えた露光装置

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JP (1) JP4415223B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW567406B (en) 2001-12-12 2003-12-21 Nikon Corp Diffraction optical device, refraction optical device, illuminating optical device, exposure system and exposure method
JP2006134932A (ja) * 2004-11-02 2006-05-25 Nikon Corp 可変スリット装置、照明光学装置、露光装置、及び露光方法
JP6120001B2 (ja) * 2011-10-24 2017-04-26 株式会社ニコン 照明光学系、露光装置、およびデバイス製造方法

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