JP4413035B2 - パターン形成体およびパターン形成方法 - Google Patents

パターン形成体およびパターン形成方法 Download PDF

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Publication number
JP4413035B2
JP4413035B2 JP2004044381A JP2004044381A JP4413035B2 JP 4413035 B2 JP4413035 B2 JP 4413035B2 JP 2004044381 A JP2004044381 A JP 2004044381A JP 2004044381 A JP2004044381 A JP 2004044381A JP 4413035 B2 JP4413035 B2 JP 4413035B2
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Japan
Prior art keywords
photocatalyst
pattern
layer
containing layer
forming body
Prior art date
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Expired - Fee Related
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JP2004044381A
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English (en)
Japanese (ja)
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JP2004199086A (ja
JP2004199086A5 (https=
Inventor
弘典 小林
弘徳 上山
眞一 彦坂
学 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
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Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2004044381A priority Critical patent/JP4413035B2/ja
Publication of JP2004199086A publication Critical patent/JP2004199086A/ja
Publication of JP2004199086A5 publication Critical patent/JP2004199086A5/ja
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Publication of JP4413035B2 publication Critical patent/JP4413035B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Printing Plates And Materials Therefor (AREA)
  • Optical Filters (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
JP2004044381A 1997-08-08 2004-02-20 パターン形成体およびパターン形成方法 Expired - Fee Related JP4413035B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004044381A JP4413035B2 (ja) 1997-08-08 2004-02-20 パターン形成体およびパターン形成方法

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP21484597 1997-08-08
JP30029597 1997-10-31
JP31304197 1997-11-14
JP8629398 1998-03-31
JP8595598 1998-03-31
JP2004044381A JP4413035B2 (ja) 1997-08-08 2004-02-20 パターン形成体およびパターン形成方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001395028A Division JP2002274077A (ja) 1997-08-08 2001-12-26 パターン形成体およびパターン形成方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009185762A Division JP4495777B2 (ja) 1997-08-08 2009-08-10 パターン形成体およびパターン形成方法

Publications (3)

Publication Number Publication Date
JP2004199086A JP2004199086A (ja) 2004-07-15
JP2004199086A5 JP2004199086A5 (https=) 2008-05-08
JP4413035B2 true JP4413035B2 (ja) 2010-02-10

Family

ID=32777344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004044381A Expired - Fee Related JP4413035B2 (ja) 1997-08-08 2004-02-20 パターン形成体およびパターン形成方法

Country Status (1)

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JP (1) JP4413035B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8124172B2 (en) * 2006-03-02 2012-02-28 E.I. Du Pont De Nemours And Company Process for making contained layers and devices made with same
EP1989818A4 (en) * 2006-03-02 2011-05-18 Du Pont PROCESS FOR MANUFACTURING INCLUDED LAYERS AND EQUIPMENT MADE THEREFOR
JP2008117965A (ja) * 2006-11-06 2008-05-22 Tokyo Electron Ltd リフロー方法、パターン形成方法およびｔｆｔの製造方法
KR20100094475A (ko) 2007-10-26 2010-08-26 이 아이 듀폰 디 네모아 앤드 캄파니 격납된 층을 제조하기 위한 방법 및 재료, 및 이를 사용하여 제조된 소자
KR100904251B1 (ko) * 2008-01-28 2009-06-25 한국생산기술연구원 폴리머 표면에 귀금속촉매의 선택적 흡착방법
JP5149083B2 (ja) 2008-06-16 2013-02-20 富士フイルム株式会社 パターン形成方法、並びに基板加工方法、モールド構造体の複製方法、及びモールド構造体
JP5363856B2 (ja) * 2009-03-30 2013-12-11 富士フイルム株式会社 パターン形成方法
US8592239B2 (en) 2009-07-27 2013-11-26 E I Du Pont De Nemours And Company Process and materials for making contained layers and devices made with same

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Publication number Publication date
JP2004199086A (ja) 2004-07-15

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