JP4406952B2 - 振動アクチュエータ - Google Patents

振動アクチュエータ Download PDF

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Publication number
JP4406952B2
JP4406952B2 JP10125499A JP10125499A JP4406952B2 JP 4406952 B2 JP4406952 B2 JP 4406952B2 JP 10125499 A JP10125499 A JP 10125499A JP 10125499 A JP10125499 A JP 10125499A JP 4406952 B2 JP4406952 B2 JP 4406952B2
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JP
Japan
Prior art keywords
vibration
vibrator
voltage
elliptical motion
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10125499A
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English (en)
Japanese (ja)
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JP2000295876A (ja
JP2000295876A5 (enExample
Inventor
忠雄 高木
バンセビッチ ラムティス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
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Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10125499A priority Critical patent/JP4406952B2/ja
Publication of JP2000295876A publication Critical patent/JP2000295876A/ja
Publication of JP2000295876A5 publication Critical patent/JP2000295876A5/ja
Application granted granted Critical
Publication of JP4406952B2 publication Critical patent/JP4406952B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP10125499A 1999-04-08 1999-04-08 振動アクチュエータ Expired - Lifetime JP4406952B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10125499A JP4406952B2 (ja) 1999-04-08 1999-04-08 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10125499A JP4406952B2 (ja) 1999-04-08 1999-04-08 振動アクチュエータ

Publications (3)

Publication Number Publication Date
JP2000295876A JP2000295876A (ja) 2000-10-20
JP2000295876A5 JP2000295876A5 (enExample) 2006-06-15
JP4406952B2 true JP4406952B2 (ja) 2010-02-03

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ID=14295788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10125499A Expired - Lifetime JP4406952B2 (ja) 1999-04-08 1999-04-08 振動アクチュエータ

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JP (1) JP4406952B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8587181B2 (en) 2010-09-02 2013-11-19 Tamron Co., Ltd. Piezo-electric actuator drive circuit and piezo-electric actuator device furnished with same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1297062C (zh) 2001-03-27 2007-01-24 精工爱普生株式会社 压电致动器及其驱动电路
US20050082950A1 (en) * 2003-08-13 2005-04-21 Seiko Epson Corporation Piezoelectric actuator module, motor module and apparatus
WO2007083752A1 (ja) 2006-01-23 2007-07-26 Matsushita Electric Industrial Co., Ltd. 圧電素子及び超音波アクチュエータ
JP4564582B2 (ja) 2007-12-06 2010-10-20 パナソニック株式会社 超音波アクチュエータ
JP5179918B2 (ja) * 2008-03-27 2013-04-10 太平洋セメント株式会社 超音波モータ装置
JP2010124592A (ja) * 2008-11-19 2010-06-03 Konica Minolta Opto Inc 駆動装置及び撮像装置並びに携帯端末
DE102014225154B3 (de) * 2014-12-08 2016-03-03 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren und Vorrichtung zur Ansteuerung eines piezoelektrischen Motors
JP7103019B2 (ja) * 2018-07-25 2022-07-20 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8587181B2 (en) 2010-09-02 2013-11-19 Tamron Co., Ltd. Piezo-electric actuator drive circuit and piezo-electric actuator device furnished with same

Also Published As

Publication number Publication date
JP2000295876A (ja) 2000-10-20

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