JP4398441B2 - 超小型電子機構の所望寸法を測定するのに用いられる計測ツールにおける障害を識別する方法、及びそのコンピュータプログラム - Google Patents

超小型電子機構の所望寸法を測定するのに用いられる計測ツールにおける障害を識別する方法、及びそのコンピュータプログラム Download PDF

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JP4398441B2
JP4398441B2 JP2006173043A JP2006173043A JP4398441B2 JP 4398441 B2 JP4398441 B2 JP 4398441B2 JP 2006173043 A JP2006173043 A JP 2006173043A JP 2006173043 A JP2006173043 A JP 2006173043A JP 4398441 B2 JP4398441 B2 JP 4398441B2
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Prior art keywords
recipe
errors
recipes
error
metrology tool
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JP2006173043A
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Japanese (ja)
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JP2007003528A (ja
JP2007003528A5 (enExample
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サラ・エー・カイ
エリック・ピー・ソルキィ
リン・シュウ
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International Business Machines Corp
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International Business Machines Corp
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32222—Fault, defect detection of origin of fault, defect of product
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • General Factory Administration (AREA)
JP2006173043A 2005-06-22 2006-06-22 超小型電子機構の所望寸法を測定するのに用いられる計測ツールにおける障害を識別する方法、及びそのコンピュータプログラム Expired - Fee Related JP4398441B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/160,404 US7065425B1 (en) 2005-06-22 2005-06-22 Metrology tool error log analysis methodology and system

Publications (3)

Publication Number Publication Date
JP2007003528A JP2007003528A (ja) 2007-01-11
JP2007003528A5 JP2007003528A5 (enExample) 2009-08-06
JP4398441B2 true JP4398441B2 (ja) 2010-01-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006173043A Expired - Fee Related JP4398441B2 (ja) 2005-06-22 2006-06-22 超小型電子機構の所望寸法を測定するのに用いられる計測ツールにおける障害を識別する方法、及びそのコンピュータプログラム

Country Status (4)

Country Link
US (2) US7065425B1 (enExample)
JP (1) JP4398441B2 (enExample)
CN (1) CN100523839C (enExample)
TW (1) TW200715160A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220034196A (ko) 2019-09-06 2022-03-17 주식회사 히타치하이테크 레시피 정보 제시 시스템, 레시피 에러 추정 시스템
KR20220135246A (ko) 2020-03-31 2022-10-06 주식회사 히타치하이테크 에러 요인의 추정 장치 및 추정 방법

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US7363098B2 (en) * 2005-12-19 2008-04-22 Tech Semiconductor Singapore Pte Ltd Method to identify machines causing excursion in semiconductor manufacturing
US7631286B2 (en) * 2005-12-30 2009-12-08 Wafertech Llc Automated metrology recipe generation
US7305320B2 (en) * 2006-02-15 2007-12-04 International Business Machines Corporation Metrology tool recipe validator using best known methods
CN101536002B (zh) 2006-11-03 2015-02-04 气体产品与化学公司 用于工艺监控的系统和方法
US7953511B1 (en) * 2007-09-21 2011-05-31 National Semiconductor Corporation System and method for reducing processing errors during wafer fabrication employing a 2D wafer scribe and monitoring system
JP5002395B2 (ja) * 2007-09-28 2012-08-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置の制御装置
WO2016117103A1 (ja) * 2015-01-23 2016-07-28 株式会社 日立ハイテクノロジーズ 半導体測定装置、或いは半導体検査装置に用いられるレシピ作成装置
JP6339956B2 (ja) * 2015-03-19 2018-06-06 アズビル株式会社 不具合要因特定支援装置および不具合要因特定支援方法
US10372114B2 (en) * 2016-10-21 2019-08-06 Kla-Tencor Corporation Quantifying and reducing total measurement uncertainty

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US5914879A (en) * 1997-03-04 1999-06-22 Advanced Micro Devices System and method for calculating cluster tool performance metrics using a weighted configuration matrix
US6470227B1 (en) 1997-12-02 2002-10-22 Murali D. Rangachari Method and apparatus for automating a microelectric manufacturing process
US6456894B1 (en) 1999-06-01 2002-09-24 Applied Materials, Inc. Semiconductor processing techniques
US6303395B1 (en) * 1999-06-01 2001-10-16 Applied Materials, Inc. Semiconductor processing techniques
US6671570B2 (en) 2000-10-17 2003-12-30 Brooks Automation, Inc. System and method for automated monitoring and assessment of fabrication facility
US6727106B1 (en) * 2001-07-12 2004-04-27 Advanced Micro Devices, Inc. System and software for statistical process control in semiconductor manufacturing and method thereof
US6842659B2 (en) 2001-08-24 2005-01-11 Applied Materials Inc. Method and apparatus for providing intra-tool monitoring and control
US6708075B2 (en) * 2001-11-16 2004-03-16 Advanced Micro Devices Method and apparatus for utilizing integrated metrology data as feed-forward data
DE10240115B4 (de) 2002-08-30 2004-10-28 Advanced Micro Devices, Inc., Sunnyvale Verfahren und System zum Handhaben von Substraten in einer Produktionslinie mit einer Cluster-Anlage und einer Messanlage
US7684887B2 (en) 2003-04-30 2010-03-23 Infineon Technologies Ag Advanced process control method and advanced process control system for acquiring production data in a chip production installation
US20050010319A1 (en) 2003-07-09 2005-01-13 Sukesh Patel System and method for validating and visualizing APC assisted semiconductor manufacturing processes
US20050052197A1 (en) 2003-07-14 2005-03-10 Cory Watkins Multi-tool manager
US7257454B2 (en) * 2003-11-21 2007-08-14 Taiwan Semiconductor Manufacturing Company, Ltd. Dynamically adjusting the distribution for dispatching lot between current and downstream tool by using expertise weighting mechanism
US6999848B2 (en) 2003-12-19 2006-02-14 Intel Corporation Process control apparatus, systems, and methods
TWI236044B (en) * 2004-05-12 2005-07-11 Powerchip Semiconductor Corp System and method for real-time dispatching batch in manufacturing process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220034196A (ko) 2019-09-06 2022-03-17 주식회사 히타치하이테크 레시피 정보 제시 시스템, 레시피 에러 추정 시스템
US12174245B2 (en) 2019-09-06 2024-12-24 Hitachi High-Tech Corporation Recipe information presentation system and recipe error inference system
KR20220135246A (ko) 2020-03-31 2022-10-06 주식회사 히타치하이테크 에러 요인의 추정 장치 및 추정 방법

Also Published As

Publication number Publication date
US20060293778A1 (en) 2006-12-28
JP2007003528A (ja) 2007-01-11
TW200715160A (en) 2007-04-16
CN1885049A (zh) 2006-12-27
US7187993B2 (en) 2007-03-06
CN100523839C (zh) 2009-08-05
US7065425B1 (en) 2006-06-20

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