JP4389474B2 - 基板の組立方法 - Google Patents

基板の組立方法 Download PDF

Info

Publication number
JP4389474B2
JP4389474B2 JP2003143670A JP2003143670A JP4389474B2 JP 4389474 B2 JP4389474 B2 JP 4389474B2 JP 2003143670 A JP2003143670 A JP 2003143670A JP 2003143670 A JP2003143670 A JP 2003143670A JP 4389474 B2 JP4389474 B2 JP 4389474B2
Authority
JP
Japan
Prior art keywords
substrate
chamber
ring
stage
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003143670A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003302614A5 (enExample
JP2003302614A (ja
Inventor
聡 八幡
潔 今泉
正行 齊藤
幸宏 川隅
明 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Technologies Ltd
Priority to JP2003143670A priority Critical patent/JP4389474B2/ja
Publication of JP2003302614A publication Critical patent/JP2003302614A/ja
Publication of JP2003302614A5 publication Critical patent/JP2003302614A5/ja
Application granted granted Critical
Publication of JP4389474B2 publication Critical patent/JP4389474B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Liquid Crystal (AREA)
JP2003143670A 2003-05-21 2003-05-21 基板の組立方法 Expired - Fee Related JP4389474B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003143670A JP4389474B2 (ja) 2003-05-21 2003-05-21 基板の組立方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003143670A JP4389474B2 (ja) 2003-05-21 2003-05-21 基板の組立方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP17290399A Division JP3535044B2 (ja) 1999-03-30 1999-06-18 基板の組立て装置とその方法、及び液晶パネルの製造方法

Publications (3)

Publication Number Publication Date
JP2003302614A JP2003302614A (ja) 2003-10-24
JP2003302614A5 JP2003302614A5 (enExample) 2006-05-18
JP4389474B2 true JP4389474B2 (ja) 2009-12-24

Family

ID=29398361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003143670A Expired - Fee Related JP4389474B2 (ja) 2003-05-21 2003-05-21 基板の組立方法

Country Status (1)

Country Link
JP (1) JP4389474B2 (enExample)

Also Published As

Publication number Publication date
JP2003302614A (ja) 2003-10-24

Similar Documents

Publication Publication Date Title
JP3535044B2 (ja) 基板の組立て装置とその方法、及び液晶パネルの製造方法
JP3641709B2 (ja) 基板の組立方法とその装置
JP3707990B2 (ja) 基板組立装置
JP3486862B2 (ja) 基板の組立方法とその装置
JP3411023B2 (ja) 基板の組立装置
JP4244529B2 (ja) 液晶基板の組立方法及びその組立装置
JP3410983B2 (ja) 基板の組立方法およびその装置
JP3577545B2 (ja) 基板貼り合せ装置
KR100362721B1 (ko) 기판접합장치
JP3458145B2 (ja) 基板貼り合わせ方法及びその装置
KR100844968B1 (ko) 기판조립장치와 기판조립방법
JP3422291B2 (ja) 液晶基板の組立方法
JP2002311442A (ja) 液晶基板の組立方法及びその組立装置及び液晶供給装置
JP3906753B2 (ja) 基板組立て装置
JP2002318378A (ja) 液晶表示装置の組み立て方法とその装置
KR100720423B1 (ko) 액정표시소자용 기판 합착 장치 및 이를 이용한 평탄도보정 방법
KR100360833B1 (ko) 기판의 조립장치
JP4389474B2 (ja) 基板の組立方法
TWI222671B (en) Apparatus for fabricating bonded substrate
JP3535150B2 (ja) 基板の組立方法およびその装置
JP2002090703A (ja) 液晶用基板組立装置および方法
JP3773866B2 (ja) 基板の組立方法およびその装置
JP4224959B2 (ja) 液晶基板の組立装置
KR100728854B1 (ko) 접합 기판 제조 장치
JP3817461B2 (ja) 液晶基板の組立方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060328

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060328

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20060920

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20061013

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080516

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080527

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080717

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080801

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090630

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090825

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090915

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090928

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121016

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131016

Year of fee payment: 4

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees