JP4389240B2 - 反射防止膜を作製する方法 - Google Patents

反射防止膜を作製する方法 Download PDF

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Publication number
JP4389240B2
JP4389240B2 JP2000557167A JP2000557167A JP4389240B2 JP 4389240 B2 JP4389240 B2 JP 4389240B2 JP 2000557167 A JP2000557167 A JP 2000557167A JP 2000557167 A JP2000557167 A JP 2000557167A JP 4389240 B2 JP4389240 B2 JP 4389240B2
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membrane
polymer
film
support
refractive index
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Expired - Fee Related
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JP2000557167A
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English (en)
Japanese (ja)
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JP2002519728A (ja
JP2002519728A5 (enExample
Inventor
ウルリッヒ スタイナー
ステファン ヴァルハイム
エリック シェファー
ステファン エッガート
ユールゲン ムリネック
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ユニヴェルシテート コンスタンツ
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Publication of JP2002519728A5 publication Critical patent/JP2002519728A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3405—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Composite Materials (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Optical Filters (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2000557167A 1998-06-30 1999-06-29 反射防止膜を作製する方法 Expired - Fee Related JP4389240B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19829172A DE19829172A1 (de) 1998-06-30 1998-06-30 Verfahren zur Herstellung von Antireflexschichten
DE19829172.8 1998-06-30
PCT/EP1999/004491 WO2000000854A1 (de) 1998-06-30 1999-06-29 Verfahren zur herstellung von antireflexschichten

Publications (3)

Publication Number Publication Date
JP2002519728A JP2002519728A (ja) 2002-07-02
JP2002519728A5 JP2002519728A5 (enExample) 2009-09-17
JP4389240B2 true JP4389240B2 (ja) 2009-12-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000557167A Expired - Fee Related JP4389240B2 (ja) 1998-06-30 1999-06-29 反射防止膜を作製する方法

Country Status (8)

Country Link
US (1) US6605229B2 (enExample)
EP (1) EP1092164B1 (enExample)
JP (1) JP4389240B2 (enExample)
AT (1) ATE235066T1 (enExample)
AU (1) AU4902399A (enExample)
DE (2) DE19829172A1 (enExample)
ES (1) ES2195588T3 (enExample)
WO (1) WO2000000854A1 (enExample)

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WO2003097547A1 (de) 2002-05-21 2003-11-27 Interfloat Corporation Verfahren und verwendung einer vorrichtung zur beschichtung von plattenförmigen substraten
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TWI288827B (en) * 2004-08-31 2007-10-21 Ind Tech Res Inst Three-dimensional nano-porous film and fabrication method thereof
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JP6398695B2 (ja) 2013-12-26 2018-10-03 Jsr株式会社 下地膜形成用組成物及び自己組織化リソグラフィープロセス
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JP6413888B2 (ja) 2015-03-30 2018-10-31 Jsr株式会社 パターン形成用組成物、パターン形成方法及びブロック共重合体
TW201700595A (zh) 2015-04-01 2017-01-01 Jsr股份有限公司 圖案形成用組成物及圖案形成方法
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US20170082783A1 (en) * 2015-06-25 2017-03-23 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Processing of superhydrophobic, infrared transmissive, anti-reflective nanostructured surfaces
JP6788198B2 (ja) 2016-02-08 2020-11-25 Jsr株式会社 コンタクトホールパターンの形成方法及び組成物
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JP6966709B2 (ja) 2016-07-07 2021-11-17 Jsr株式会社 パターン形成用組成物及びパターン形成方法
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Also Published As

Publication number Publication date
EP1092164A1 (de) 2001-04-18
US20010024684A1 (en) 2001-09-27
ATE235066T1 (de) 2003-04-15
ES2195588T3 (es) 2003-12-01
AU4902399A (en) 2000-01-17
JP2002519728A (ja) 2002-07-02
EP1092164B1 (de) 2003-03-19
WO2000000854A1 (de) 2000-01-06
DE59904643D1 (de) 2003-04-24
DE19829172A1 (de) 2000-01-05
US6605229B2 (en) 2003-08-12

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