JP4384518B2 - 熱処理装置の炉口構造 - Google Patents
熱処理装置の炉口構造 Download PDFInfo
- Publication number
- JP4384518B2 JP4384518B2 JP2004041567A JP2004041567A JP4384518B2 JP 4384518 B2 JP4384518 B2 JP 4384518B2 JP 2004041567 A JP2004041567 A JP 2004041567A JP 2004041567 A JP2004041567 A JP 2004041567A JP 4384518 B2 JP4384518 B2 JP 4384518B2
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- JP
- Japan
- Prior art keywords
- flange
- heat treatment
- holder
- furnace
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
前記熱処理容器の底部のフランジ部を上下から挟持するフランジ挟持部と、前記フランジ挟持部を上下から保持する金属製のホルダ部材と、前記フランジ部の底面と前記金属製ホルダ部材のうち下方のホルダ部材との間で全周囲のシーリングを行うシーリング部材と、前記ホルダ部材を固定する固定部材とを備え、
少なくとも前記フランジ挟持部を前記フランジ部周囲方向に沿って複数に等分割したことを特徴とする。
なお、上記実施形態では、フランジ挟持部300、301、305等をそれぞれ6つに分割しているが、熱処理装置の大きさにより適当な数に分割すればよい。
2−熱処理容器(石英プロセスチューブ)
20−フランジ部
30−炉口構造物
300、301、305−フランジ挟持部
302−ホルダリング
303−チューブホルダ
303a、303b、14a−冷却水流通路(ウォータージャケット)
Claims (4)
- 炉体内に底部が開口した炉口を備える熱処理容器を配置し、前記熱処理容器の炉口を熱処理容器ホルダに固定する熱処理装置の炉口構造において、
前記熱処理容器の底部のフランジ部を上下から挟持するフランジ挟持部と、前記フランジ挟持部を上下から保持する金属製のホルダ部材と、前記フランジ部の底面と前記金属製ホルダ部材のうち下方のホルダ部材との間で全周囲のシーリングを行うシーリング部材と、前記上下のホルダ部材を固定する固定部材とを備え、
少なくとも前記フランジ挟持部を前記フランジ部周囲方向に沿って複数に等分割したことを特徴とする熱処理装置の炉口構造。 - 前記フランジ挟持部の各分割片は所定のギャップを介して前記フランジ部周囲方向に沿って配設される請求項1記載の熱処理装置の炉口構造。
- 前記フランジ挟持部は耐熱樹脂製である請求項1又は2記載の熱処理装置の炉口構造。
- 前記ホルダ部材のうち上方のホルダ部材を前記フランジ部周囲方向に沿って複数に等分割した請求項1〜3のいずれかに記載の熱処理装置の炉口構造。
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JP2004041567A JP4384518B2 (ja) | 2004-02-18 | 2004-02-18 | 熱処理装置の炉口構造 |
Applications Claiming Priority (1)
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JP2004041567A JP4384518B2 (ja) | 2004-02-18 | 2004-02-18 | 熱処理装置の炉口構造 |
Publications (2)
Publication Number | Publication Date |
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JP2005235936A JP2005235936A (ja) | 2005-09-02 |
JP4384518B2 true JP4384518B2 (ja) | 2009-12-16 |
Family
ID=35018586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004041567A Expired - Fee Related JP4384518B2 (ja) | 2004-02-18 | 2004-02-18 | 熱処理装置の炉口構造 |
Country Status (1)
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JP (1) | JP4384518B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5239983B2 (ja) * | 2009-03-23 | 2013-07-17 | 株式会社リコー | 縦型ウエハ処理装置 |
JP5944281B2 (ja) * | 2012-09-10 | 2016-07-05 | 光洋サーモシステム株式会社 | 熱処理装置 |
JP6078407B2 (ja) * | 2013-04-05 | 2017-02-08 | 古河機械金属株式会社 | ベルジャ |
JP2015025623A (ja) | 2013-07-26 | 2015-02-05 | 光洋サーモシステム株式会社 | 熱処理装置用のチャンバ、および、熱処理装置 |
JP6148765B2 (ja) * | 2016-05-24 | 2017-06-14 | 光洋サーモシステム株式会社 | 熱処理装置 |
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2004
- 2004-02-18 JP JP2004041567A patent/JP4384518B2/ja not_active Expired - Fee Related
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JP2005235936A (ja) | 2005-09-02 |
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