JP4379902B2 - 光導波路デバイスの製造方法 - Google Patents

光導波路デバイスの製造方法 Download PDF

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Publication number
JP4379902B2
JP4379902B2 JP2000208580A JP2000208580A JP4379902B2 JP 4379902 B2 JP4379902 B2 JP 4379902B2 JP 2000208580 A JP2000208580 A JP 2000208580A JP 2000208580 A JP2000208580 A JP 2000208580A JP 4379902 B2 JP4379902 B2 JP 4379902B2
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Japan
Prior art keywords
optical waveguide
substrate
cutting
waveguide device
dicing
Prior art date
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Expired - Lifetime
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JP2000208580A
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English (en)
Japanese (ja)
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JP2002022993A5 (enrdf_load_html_response
JP2002022993A (ja
Inventor
宏 増田
信生 宮寺
亨 高橋
正利 山口
敏裕 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
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Publication date
Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd, Resonac Corp filed Critical Hitachi Chemical Co Ltd
Priority to JP2000208580A priority Critical patent/JP4379902B2/ja
Publication of JP2002022993A publication Critical patent/JP2002022993A/ja
Publication of JP2002022993A5 publication Critical patent/JP2002022993A5/ja
Application granted granted Critical
Publication of JP4379902B2 publication Critical patent/JP4379902B2/ja
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Expired - Lifetime legal-status Critical Current

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JP2000208580A 2000-07-10 2000-07-10 光導波路デバイスの製造方法 Expired - Lifetime JP4379902B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000208580A JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000208580A JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

Publications (3)

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JP2002022993A JP2002022993A (ja) 2002-01-23
JP2002022993A5 JP2002022993A5 (enrdf_load_html_response) 2007-04-26
JP4379902B2 true JP4379902B2 (ja) 2009-12-09

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ID=18705138

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JP2000208580A Expired - Lifetime JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

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JP (1) JP4379902B2 (enrdf_load_html_response)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2002367343A1 (en) * 2001-12-28 2003-07-24 Hitachi Chemical Co., Ltd. Polymer optical waveguide film
JP4440697B2 (ja) * 2004-04-22 2010-03-24 浜松ホトニクス株式会社 光導波路基板及びその製造方法
JP2006145902A (ja) * 2004-11-19 2006-06-08 Fujitsu Ltd 光伝送用チップおよびその製造方法
JP4780532B2 (ja) * 2005-11-18 2011-09-28 日立化成工業株式会社 光デバイス
JP4905176B2 (ja) * 2007-02-22 2012-03-28 Ｊｓｒ株式会社 フィルム状光導波路の製造方法
WO2019035466A1 (ja) * 2017-08-16 2019-02-21 Ａｇｃ株式会社 ポリマー光導波路

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JP2002022993A (ja) 2002-01-23

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