JP4363419B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP4363419B2 JP4363419B2 JP2006181370A JP2006181370A JP4363419B2 JP 4363419 B2 JP4363419 B2 JP 4363419B2 JP 2006181370 A JP2006181370 A JP 2006181370A JP 2006181370 A JP2006181370 A JP 2006181370A JP 4363419 B2 JP4363419 B2 JP 4363419B2
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- JP
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- Prior art keywords
- layer
- silicon
- etching
- semiconductor layer
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000004065 semiconductor Substances 0.000 title claims description 87
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000000758 substrate Substances 0.000 claims description 51
- 238000005530 etching Methods 0.000 claims description 48
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 32
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 19
- 238000002955 isolation Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000011800 void material Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 101
- 229910052710 silicon Inorganic materials 0.000 description 101
- 239000010703 silicon Substances 0.000 description 101
- 239000013078 crystal Substances 0.000 description 29
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 24
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 229910052814 silicon oxide Inorganic materials 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 229910052732 germanium Inorganic materials 0.000 description 7
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 239000002243 precursor Substances 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/78654—Monocrystalline silicon transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
Description
Claims (3)
- (a)素子分離領域部及び素子領域部を有する半導体基板上に、前記半導体基板よりもエッチングの選択比が大きい第1半導体層を形成する工程と、
(b)前記第1半導体層上に、前記第1半導体層よりもエッチングの選択比が小さい第2半導体層を形成する工程と、
(c)前記素子領域部上に形成された前記第1半導体層及び前記第2半導体層の一部をエッチングすることにより、前記半導体基板の表面を露出させる工程と、
(d)前記半導体基板上に酸化膜を堆積させる工程と、
(e)前記酸化膜をエッチングすることにより、支持体を形成し、前記半導体基板の前記支持体の周囲に凹部を形成する工程と、
(f)前記支持体をマスクとして、前記第1半導体層及び前記第2半導体層の端部を露出させる工程と、
(g)前記工程(f)の後に、前記第1半導体層をエッチングにより除去することにより、空隙を形成する工程と、
(h)前記空隙に絶縁膜を充填する工程と、
(i)前記半導体基板上に平坦化絶縁層を堆積させる工程と、
(j)前記平坦化絶縁層を化学機械研磨法により平坦化する工程と、
(k)前記平坦化絶縁層をフッ酸を含むエッチング液を用いてエッチングすることにより、前記第2半導体層を露出させる工程と、
(l)前記第2半導体層を含む所定の領域にトランジスタを形成する工程と、
を含み、
前記工程(c)の後に、前記第1半導体層及び前記第2半導体層の端面に、エッチング液に対して耐エッチング性の第1サイドウォールを形成する工程と、
前記工程(h)の後に、前記凹部にエッチング液に対して耐エッチング性の第2サイドウォールを形成する工程と、を有することを特徴とする半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法であって、
前記工程(e)において、前記凹部の底部は、前記素子分離領域部の底部より上方に位置するように形成することを特徴とする半導体装置の製造方法。 - 請求項1又は2に記載の半導体装置の製造方法であって、
前記第1サイドウォール及び前記第2サイドウォールは、窒化シリコン膜であることを特徴とする半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006181370A JP4363419B2 (ja) | 2006-06-30 | 2006-06-30 | 半導体装置の製造方法 |
US11/811,478 US20080045023A1 (en) | 2006-06-30 | 2007-06-11 | Method for manufacturing semiconductor device, and semiconductor device |
KR1020070059977A KR20080003239A (ko) | 2006-06-30 | 2007-06-19 | 반도체 장치의 제조 방법 및 반도체 장치 |
CNA2007101263165A CN101097856A (zh) | 2006-06-30 | 2007-06-29 | 半导体装置的制造方法及半导体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006181370A JP4363419B2 (ja) | 2006-06-30 | 2006-06-30 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008010732A JP2008010732A (ja) | 2008-01-17 |
JP4363419B2 true JP4363419B2 (ja) | 2009-11-11 |
Family
ID=39011552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006181370A Expired - Fee Related JP4363419B2 (ja) | 2006-06-30 | 2006-06-30 | 半導体装置の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20080045023A1 (ja) |
JP (1) | JP4363419B2 (ja) |
KR (1) | KR20080003239A (ja) |
CN (1) | CN101097856A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4792956B2 (ja) * | 2005-12-13 | 2011-10-12 | セイコーエプソン株式会社 | 半導体基板の製造方法及び半導体装置の製造方法 |
US7902075B2 (en) * | 2008-09-08 | 2011-03-08 | Semiconductor Components Industries, L.L.C. | Semiconductor trench structure having a sealing plug and method |
KR102208565B1 (ko) | 2010-01-20 | 2021-01-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
-
2006
- 2006-06-30 JP JP2006181370A patent/JP4363419B2/ja not_active Expired - Fee Related
-
2007
- 2007-06-11 US US11/811,478 patent/US20080045023A1/en not_active Abandoned
- 2007-06-19 KR KR1020070059977A patent/KR20080003239A/ko not_active Application Discontinuation
- 2007-06-29 CN CNA2007101263165A patent/CN101097856A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
US20080045023A1 (en) | 2008-02-21 |
KR20080003239A (ko) | 2008-01-07 |
JP2008010732A (ja) | 2008-01-17 |
CN101097856A (zh) | 2008-01-02 |
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