JP4353263B2 - 半導体装置の製造方法及び半導体装置 - Google Patents
半導体装置の製造方法及び半導体装置 Download PDFInfo
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Description
半導体チップの能動面に形成されたバンプを、前記配線基板の前記配線の端部に押し付けることにより、前記配線の端が前記ベース基板に接合した状態を維持しつつ、前記配線のうち前記バンプに当接している部分の周囲を、前記ベース基板から剥離させる工程と、
前記配線の端部に位置する前記メッキ金属を溶融させることにより、前記メッキ金属と前記バンプとで合金を形成して前記バンプと前記配線を接合し、かつ前記配線と前記ベース基板の間の空間に前記メッキ金属を浸透させる工程と、
前記配線と前記ベース基板の間の空間に浸透した前記メッキ金属の浸透面積、浸透幅、又は浸透長さが基準値以上の場合に、前記バンプと前記配線の接続が良好であると判断する工程とを具備する。
前記配線基板の前記基板上に形成され、前記配線の端部以外の領域を覆う保護層を具備している場合、前記配線のうち前記バンプに当接する部分から前記配線の先端までの距離は、40μm以上であり、前記配線の厚さは10μm以下であるのが好ましい。前記配線の端部に形成され、前記バンプが当接されるべき領域の近傍に位置する切欠部をさらに具備してもよい。前記配線が銅配線である場合、前記メッキ金属は例えばSnである。
前記配線基板に実装され、能動面にバンプを有する半導体チップと、
を具備し、
前記バンプは、前記配線に接合しており、
前記配線は、前記バンプと接合している部分の周囲に位置する切欠部を有する。
Claims (5)
- 表面がメッキ金属でメッキされた配線をベース基板上に有する配線基板を準備する工程と、
半導体チップの能動面に形成されたバンプを、前記配線基板の前記配線の端部に押し付けることにより、前記配線の端が前記ベース基板に接合した状態を維持しつつ、前記配線のうち前記バンプに当接している部分の周囲を、前記ベース基板から剥離させる工程と、
前記配線の端部に位置する前記メッキ金属を溶融させることにより、前記メッキ金属と前記バンプとで合金を形成して前記バンプと前記配線を接合し、かつ前記配線と前記ベース基板の間の空間に前記メッキ金属を浸透させる工程と、
前記配線と前記ベース基板の間の空間に浸透した前記メッキ金属の浸透面積、浸透幅、又は浸透長さが基準値以上の場合に、前記バンプと前記配線の接続が良好であると判断する工程と、
を具備し、
前記浸透面積、浸透幅、又は浸透長さは、光学顕微鏡を用いることにより非破壊で測定される半導体装置の製造方法。 - 前記ベース基板及び前記配線上に形成され、前記配線の端部以外の領域を覆う保護層を具備し、
前記配線のうち前記バンプに当接する部分から前記配線の先端までの距離は、40μm以上であり、
前記配線の厚さは10μm以下である請求項1に記載の半導体装置の製造方法。 - 前記配線の端部に形成され、前記バンプが当接されるべき領域の近傍に位置する切欠部をさらに具備する請求項1又は2に記載の半導体装置の製造方法。
- 前記配線は銅配線であり、前記メッキ金属はSnである請求項1〜3のいずれか一項に記載の半導体装置の製造方法。
- 表面がメッキ金属でメッキされた配線をベース基板上に有する配線基板と、
前記配線基板に実装され、能動面にバンプを有する半導体チップと、
を具備し、
前記バンプは、前記配線に接合しており、
前記配線は、前記バンプと接合している部分の周囲に位置する切欠部を有し、
前記配線と前記ベース基板の間の空間には、前記メッキ金属が浸透している半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007069190A JP4353263B2 (ja) | 2007-03-16 | 2007-03-16 | 半導体装置の製造方法及び半導体装置 |
US12/046,540 US7811922B2 (en) | 2007-03-16 | 2008-03-12 | Method for manufacturing semiconductor device |
US12/878,536 US8120165B2 (en) | 2007-03-16 | 2010-09-09 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007069190A JP4353263B2 (ja) | 2007-03-16 | 2007-03-16 | 半導体装置の製造方法及び半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2008235359A JP2008235359A (ja) | 2008-10-02 |
JP4353263B2 true JP4353263B2 (ja) | 2009-10-28 |
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JP2007069190A Expired - Fee Related JP4353263B2 (ja) | 2007-03-16 | 2007-03-16 | 半導体装置の製造方法及び半導体装置 |
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US20080224310A1 (en) | 2008-09-18 |
US7811922B2 (en) | 2010-10-12 |
US20110006420A1 (en) | 2011-01-13 |
US8120165B2 (en) | 2012-02-21 |
JP2008235359A (ja) | 2008-10-02 |
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