JP4346765B2 - 基板搬送ロボット - Google Patents

基板搬送ロボット Download PDF

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Publication number
JP4346765B2
JP4346765B2 JP2000000026A JP2000000026A JP4346765B2 JP 4346765 B2 JP4346765 B2 JP 4346765B2 JP 2000000026 A JP2000000026 A JP 2000000026A JP 2000000026 A JP2000000026 A JP 2000000026A JP 4346765 B2 JP4346765 B2 JP 4346765B2
Authority
JP
Japan
Prior art keywords
substrate
fork
fork portion
protrusion
transfer robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000000026A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001189367A5 (enrdf_load_stackoverflow
JP2001189367A (ja
Inventor
邦明 黒川
英介 堀
正順 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2000000026A priority Critical patent/JP4346765B2/ja
Publication of JP2001189367A publication Critical patent/JP2001189367A/ja
Publication of JP2001189367A5 publication Critical patent/JP2001189367A5/ja
Application granted granted Critical
Publication of JP4346765B2 publication Critical patent/JP4346765B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2000000026A 2000-01-04 2000-01-04 基板搬送ロボット Expired - Fee Related JP4346765B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000000026A JP4346765B2 (ja) 2000-01-04 2000-01-04 基板搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000000026A JP4346765B2 (ja) 2000-01-04 2000-01-04 基板搬送ロボット

Publications (3)

Publication Number Publication Date
JP2001189367A JP2001189367A (ja) 2001-07-10
JP2001189367A5 JP2001189367A5 (enrdf_load_stackoverflow) 2007-01-18
JP4346765B2 true JP4346765B2 (ja) 2009-10-21

Family

ID=18529446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000000026A Expired - Fee Related JP4346765B2 (ja) 2000-01-04 2000-01-04 基板搬送ロボット

Country Status (1)

Country Link
JP (1) JP4346765B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021257488A1 (en) * 2020-06-14 2021-12-23 Fabworx Solutions, Inc. Robotic end effector equipped with replaceable wafer contact pads

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4495509B2 (ja) * 2004-04-30 2010-07-07 株式会社ダイヘン トランスファロボット
JP2006237256A (ja) * 2005-02-24 2006-09-07 Ulvac Japan Ltd 基板搬送ハンド
JP4731267B2 (ja) * 2005-09-29 2011-07-20 日本電産サンキョー株式会社 ロボットのハンドおよびこれを用いたワーク搬送ロボット
CN101284601B (zh) * 2007-04-11 2011-05-04 威光自动化科技股份有限公司 托盘内载基片的撷取装置
US20090003979A1 (en) * 2007-06-29 2009-01-01 Varian Semiconductor Equipment Associates, Inc. Techniques for handling substrates
US8276959B2 (en) * 2008-08-08 2012-10-02 Applied Materials, Inc. Magnetic pad for end-effectors
JP2011035103A (ja) * 2009-07-31 2011-02-17 Tokyo Electron Ltd 搬送装置及び処理システム
JP5527075B2 (ja) * 2010-02-12 2014-06-18 東京エレクトロン株式会社 搬送機構
WO2013073379A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
JP5959221B2 (ja) 2011-11-16 2016-08-02 日本電産サンキョー株式会社 産業用ロボット
KR101271220B1 (ko) 2012-12-07 2013-06-07 한국야스카와전기(주) 고온 작업용 글래스 이송장치
CN103434842B (zh) * 2013-09-04 2015-08-19 深圳市华星光电技术有限公司 机械手臂叉子以及机械手臂
CN104210844B (zh) * 2014-09-10 2016-11-02 深圳市华星光电技术有限公司 玻璃基板传递系统及其机械手
JP6799395B2 (ja) * 2016-06-30 2020-12-16 株式会社荏原製作所 基板ホルダ、電子デバイス製造装置において基板を搬送する搬送システム、および電子デバイス製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021257488A1 (en) * 2020-06-14 2021-12-23 Fabworx Solutions, Inc. Robotic end effector equipped with replaceable wafer contact pads

Also Published As

Publication number Publication date
JP2001189367A (ja) 2001-07-10

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