JP4327916B2 - 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法 - Google Patents

縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法 Download PDF

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Publication number
JP4327916B2
JP4327916B2 JP10514098A JP10514098A JP4327916B2 JP 4327916 B2 JP4327916 B2 JP 4327916B2 JP 10514098 A JP10514098 A JP 10514098A JP 10514098 A JP10514098 A JP 10514098A JP 4327916 B2 JP4327916 B2 JP 4327916B2
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Japan
Prior art keywords
heater
main body
film processing
apparatus main
processing apparatus
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Expired - Lifetime
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JP10514098A
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Japanese (ja)
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JPH11297633A5 (enExample
JPH11297633A (ja
Inventor
智 柿崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Priority to JP10514098A priority Critical patent/JP4327916B2/ja
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Publication of JPH11297633A5 publication Critical patent/JPH11297633A5/ja
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JP10514098A 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法 Expired - Lifetime JP4327916B2 (ja)

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JP10514098A JP4327916B2 (ja) 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法

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Application Number Priority Date Filing Date Title
JP10514098A JP4327916B2 (ja) 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法

Publications (3)

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JPH11297633A JPH11297633A (ja) 1999-10-29
JPH11297633A5 JPH11297633A5 (enExample) 2005-10-13
JP4327916B2 true JP4327916B2 (ja) 2009-09-09

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JP10514098A Expired - Lifetime JP4327916B2 (ja) 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4814038B2 (ja) * 2006-09-25 2011-11-09 株式会社日立国際電気 基板処理装置および反応容器の着脱方法
KR102763911B1 (ko) * 2024-04-11 2025-02-10 (주) 예스티 히터 유닛의 탈착을 지원하는 지그 장치, 히터 유닛 탈착 시스템 및 히터 유닛의 탈착 가능한 고압 어닐링 장치

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JPH11297633A (ja) 1999-10-29

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