JPH11297633A5 - - Google Patents

Info

Publication number
JPH11297633A5
JPH11297633A5 JP1998105140A JP10514098A JPH11297633A5 JP H11297633 A5 JPH11297633 A5 JP H11297633A5 JP 1998105140 A JP1998105140 A JP 1998105140A JP 10514098 A JP10514098 A JP 10514098A JP H11297633 A5 JPH11297633 A5 JP H11297633A5
Authority
JP
Japan
Prior art keywords
heater
coating treatment
vertical
relocating
vertical coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998105140A
Other languages
English (en)
Japanese (ja)
Other versions
JP4327916B2 (ja
JPH11297633A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10514098A priority Critical patent/JP4327916B2/ja
Priority claimed from JP10514098A external-priority patent/JP4327916B2/ja
Publication of JPH11297633A publication Critical patent/JPH11297633A/ja
Publication of JPH11297633A5 publication Critical patent/JPH11297633A5/ja
Application granted granted Critical
Publication of JP4327916B2 publication Critical patent/JP4327916B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10514098A 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法 Expired - Lifetime JP4327916B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10514098A JP4327916B2 (ja) 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10514098A JP4327916B2 (ja) 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法

Publications (3)

Publication Number Publication Date
JPH11297633A JPH11297633A (ja) 1999-10-29
JPH11297633A5 true JPH11297633A5 (enExample) 2005-10-13
JP4327916B2 JP4327916B2 (ja) 2009-09-09

Family

ID=14399456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10514098A Expired - Lifetime JP4327916B2 (ja) 1998-04-15 1998-04-15 縦型皮膜処理装置におけるヒータの設備構造、および縦型皮膜処理装置の移設方法

Country Status (1)

Country Link
JP (1) JP4327916B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4814038B2 (ja) * 2006-09-25 2011-11-09 株式会社日立国際電気 基板処理装置および反応容器の着脱方法
KR102763911B1 (ko) * 2024-04-11 2025-02-10 (주) 예스티 히터 유닛의 탈착을 지원하는 지그 장치, 히터 유닛 탈착 시스템 및 히터 유닛의 탈착 가능한 고압 어닐링 장치

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