JP4325630B2 - 3次元集積化装置 - Google Patents
3次元集積化装置 Download PDFInfo
- Publication number
- JP4325630B2 JP4325630B2 JP2006069545A JP2006069545A JP4325630B2 JP 4325630 B2 JP4325630 B2 JP 4325630B2 JP 2006069545 A JP2006069545 A JP 2006069545A JP 2006069545 A JP2006069545 A JP 2006069545A JP 4325630 B2 JP4325630 B2 JP 4325630B2
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- Japan
- Prior art keywords
- integrated circuit
- opening
- circuit board
- openings
- microstrip line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 230000010354 integration Effects 0.000 title claims description 28
- 239000000758 substrate Substances 0.000 claims description 29
- 238000004891 communication Methods 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 230000006870 function Effects 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 11
- 230000000737 periodic effect Effects 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000008054 signal transmission Effects 0.000 claims description 6
- 230000035699 permeability Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/15—Auxiliary devices for switching or interrupting by semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/2005—Electromagnetic photonic bandgaps [EPB], or photonic bandgaps [PBG]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
- H01P3/08—Microstrips; Strip lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06527—Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Integrated Circuits (AREA)
- Structure Of Printed Boards (AREA)
- Near-Field Transmission Systems (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
(1)アンテナをチップ上に設ける手法(例えば、非特許文献1参照)、
(2)インダクターの電磁結合を用いる手法(例えば、非特許文献2参照)、
(3)対抗したパッドで構成されたキャパシター結合を用いる方法(例えば、非特許文献3参照)、
などが検討されている。
Claims (3)
- それぞれ1つ以上のグランドプレーンを有し、当該グランドプレーン上の所望の場所に1つ以上の開口部が設けられ、この開口部には上記グランドプレーンと対をなして形成されたマイクロストリップラインの端部が位置され、上記マイクロストリップラインに接続され上記開口部の周囲長λに略相当する周波数にて信号の送信及び/又は受信を行う送信部及び又は受信部が設けられた少なくとも2枚の集積回路基板を積層してなり、
各集積回路基板の各開口部は各グランドプレーンと垂直な方向において他の集積回路基板の開口部の少なくとも1つと重なっており、
上記各開口部には、それぞれ送信部が接続されたマイクロストリップラインと受信部が接続されたマイクロストリップラインの各一端が形成されており、上記各集積回路基板の1つが信号の送信側として機能するとき他の集積回路基板が受信側として機能し、上記各開口部の周囲長λ(媒質の比誘電率、比透磁率がそれぞれε、μの時λe=λ/√ε・μ)で共振する性質を持ち、上記各開口部の周囲長λに略相当するマイクロ波帯以上の周波数にて、上記各開口部を介して各集積回路基板間で信号を非接触で伝送する3次元集積化装置。 - 上記各集積回路基板のうちの少なくとも1つの集積回路基板には、通信波長と同等の周期構造を有するパターンが形成され、上記周期構造は、シリコン基板の底部に形成され、その導電部のパターンが上記シリコン基板自体のキャリア濃度変化によって作製されていることを特徴とする請求項1記載の3次元集積化装置。
- 上記各集積回路基板は、少なくとも1つ以上の電源ならびにグランド配線用の貫通ビアを有するシリコン基板からなり、上記貫通ビアに電気的に接続されたバンプを介して積層されていることを特徴とする請求項1記載の3次元集積化装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006069545A JP4325630B2 (ja) | 2006-03-14 | 2006-03-14 | 3次元集積化装置 |
US11/715,161 US8089107B2 (en) | 2006-03-14 | 2007-03-07 | Three-dimensional integrated device |
KR1020070024246A KR101350653B1 (ko) | 2006-03-14 | 2007-03-13 | 3차원 집적 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006069545A JP4325630B2 (ja) | 2006-03-14 | 2006-03-14 | 3次元集積化装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007251394A JP2007251394A (ja) | 2007-09-27 |
JP4325630B2 true JP4325630B2 (ja) | 2009-09-02 |
Family
ID=38516883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006069545A Expired - Fee Related JP4325630B2 (ja) | 2006-03-14 | 2006-03-14 | 3次元集積化装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8089107B2 (ja) |
JP (1) | JP4325630B2 (ja) |
KR (1) | KR101350653B1 (ja) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4676238B2 (ja) * | 2005-04-18 | 2011-04-27 | 株式会社日立製作所 | バックプレーンバス用メインボード、および、それを用いたルータシステム、ストレージシステム |
US8348967B2 (en) * | 2007-07-27 | 2013-01-08 | Ethicon Endo-Surgery, Inc. | Ultrasonic surgical instruments |
CA2701962C (en) * | 2007-10-05 | 2016-05-31 | Ethicon Endo-Surgery, Inc. | Ergonomic surgical instruments |
US8168891B1 (en) * | 2007-10-26 | 2012-05-01 | Force10 Networks, Inc. | Differential trace profile for printed circuit boards |
US10010339B2 (en) * | 2007-11-30 | 2018-07-03 | Ethicon Llc | Ultrasonic surgical blades |
US8415777B2 (en) * | 2008-02-29 | 2013-04-09 | Broadcom Corporation | Integrated circuit with millimeter wave and inductive coupling and methods for use therewith |
JP5050986B2 (ja) * | 2008-04-30 | 2012-10-17 | ソニー株式会社 | 通信システム |
JP4643691B2 (ja) * | 2008-07-31 | 2011-03-02 | 株式会社日立製作所 | 半導体集積回路装置 |
US9089360B2 (en) * | 2008-08-06 | 2015-07-28 | Ethicon Endo-Surgery, Inc. | Devices and techniques for cutting and coagulating tissue |
JP4977101B2 (ja) * | 2008-08-26 | 2012-07-18 | 株式会社東芝 | 積層型半導体装置 |
JP5526659B2 (ja) * | 2008-09-25 | 2014-06-18 | ソニー株式会社 | ミリ波誘電体内伝送装置 |
JP5216532B2 (ja) * | 2008-10-30 | 2013-06-19 | 株式会社日立製作所 | 半導体集積回路 |
US8344596B2 (en) | 2009-06-24 | 2013-01-01 | Ethicon Endo-Surgery, Inc. | Transducer arrangements for ultrasonic surgical instruments |
US8663220B2 (en) * | 2009-07-15 | 2014-03-04 | Ethicon Endo-Surgery, Inc. | Ultrasonic surgical instruments |
KR101007288B1 (ko) * | 2009-07-29 | 2011-01-13 | 삼성전기주식회사 | 인쇄회로기판 및 전자제품 |
JPWO2011058688A1 (ja) * | 2009-11-10 | 2013-03-28 | 日本電気株式会社 | 半導体装置及びノイズ抑制方法 |
KR101686582B1 (ko) * | 2009-12-22 | 2016-12-15 | 삼성전자주식회사 | 유도결합 통신수단을 구비한 전자소자 |
US8469981B2 (en) * | 2010-02-11 | 2013-06-25 | Ethicon Endo-Surgery, Inc. | Rotatable cutting implement arrangements for ultrasonic surgical instruments |
US8531064B2 (en) * | 2010-02-11 | 2013-09-10 | Ethicon Endo-Surgery, Inc. | Ultrasonically powered surgical instruments with rotating cutting implement |
WO2012051340A1 (en) * | 2010-10-12 | 2012-04-19 | Analog Devices, Inc. | Microphone package with embedded asic |
KR101152823B1 (ko) | 2010-12-30 | 2012-06-12 | 에스케이하이닉스 주식회사 | 반도체 칩 및 이를 갖는 적층 반도체 패키지 |
JP5644521B2 (ja) * | 2011-01-14 | 2014-12-24 | ソニー株式会社 | 信号伝送装置、及び、電子機器 |
US9679828B2 (en) | 2012-01-31 | 2017-06-13 | Amit Verma | System-on-chip electronic device with aperture fed nanofilm antenna |
EP2939307B1 (en) * | 2012-12-27 | 2018-10-03 | Korea Advanced Institute Of Science And Technology | Low power, high speed multi-channel chip-to-chip interface using dielectric waveguide |
US20180212306A1 (en) * | 2015-09-25 | 2018-07-26 | Intel Corporation | Antennas for platform level wireless interconnects |
JP7160012B2 (ja) * | 2019-10-03 | 2022-10-25 | 株式会社デンソー | 電子制御装置 |
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JPS6459845A (en) | 1987-08-31 | 1989-03-07 | Toshiba Corp | Semiconductor device |
US5701037A (en) | 1994-11-15 | 1997-12-23 | Siemens Aktiengesellschaft | Arrangement for inductive signal transmission between the chip layers of a vertically integrated circuit |
US5786979A (en) | 1995-12-18 | 1998-07-28 | Douglass; Barry G. | High density inter-chip connections by electromagnetic coupling |
FR2743199B1 (fr) | 1996-01-03 | 1998-02-27 | Europ Agence Spatiale | Antenne reseau plane hyperfrequence receptrice et/ou emettrice, et son application a la reception de satellites de television geostationnaires |
KR100207600B1 (ko) * | 1997-03-31 | 1999-07-15 | 윤종용 | 공진기 부착형 마이크로스트립 다이폴 안테나 어레이 |
JP3462062B2 (ja) | 1997-12-22 | 2003-11-05 | 京セラ株式会社 | 高周波用伝送線路の接続構造および配線基板 |
JP3965762B2 (ja) | 1998-03-13 | 2007-08-29 | 日立化成工業株式会社 | トリプレート線路層間接続器 |
JP2000058691A (ja) * | 1998-08-07 | 2000-02-25 | Sharp Corp | ミリ波半導体装置 |
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JP2001352206A (ja) * | 2000-06-07 | 2001-12-21 | Mitsubishi Electric Corp | 高周波回路装置 |
JP2002198742A (ja) | 2000-12-25 | 2002-07-12 | New Japan Radio Co Ltd | 逓倍器 |
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-
2006
- 2006-03-14 JP JP2006069545A patent/JP4325630B2/ja not_active Expired - Fee Related
-
2007
- 2007-03-07 US US11/715,161 patent/US8089107B2/en not_active Expired - Fee Related
- 2007-03-13 KR KR1020070024246A patent/KR101350653B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2007251394A (ja) | 2007-09-27 |
KR20070093838A (ko) | 2007-09-19 |
US20070215913A1 (en) | 2007-09-20 |
KR101350653B1 (ko) | 2014-01-10 |
US8089107B2 (en) | 2012-01-03 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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LAPS | Cancellation because of no payment of annual fees |