JP4310352B2 - 発光デバイスおよび発光デバイスの製造方法 - Google Patents
発光デバイスおよび発光デバイスの製造方法 Download PDFInfo
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- JP4310352B2 JP4310352B2 JP2007149422A JP2007149422A JP4310352B2 JP 4310352 B2 JP4310352 B2 JP 4310352B2 JP 2007149422 A JP2007149422 A JP 2007149422A JP 2007149422 A JP2007149422 A JP 2007149422A JP 4310352 B2 JP4310352 B2 JP 4310352B2
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
- H01S5/0021—Degradation or life time measurements
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- H—ELECTRICITY
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- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
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- H01S5/02216—Butterfly-type, i.e. with electrode pins extending horizontally from the housings
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
- H01S5/0281—Coatings made of semiconductor materials
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
- H01S5/0282—Passivation layers or treatments
- H01S5/0283—Optically inactive coating on the facet, e.g. half-wave coating
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2009—Confining in the direction perpendicular to the layer structure by using electron barrier layers
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- H—ELECTRICITY
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/223—Buried stripe structure
- H01S5/2231—Buried stripe structure with inner confining structure only between the active layer and the upper electrode
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- Life Sciences & Earth Sciences (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Semiconductor Lasers (AREA)
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Description
図1に、本発明の発光デバイスの一例である半導体レーザデバイスの一例の模式的な斜視図を示す。図1に示す半導体レーザデバイスは、フレームパッケージと称されるパッケージによる気密封止を行なわない形態で半導体レーザチップ10が実装された構成となっている。ここで、半導体レーザチップ10はサブマウント121上に設置されており、サブマウント121はリードピン124を備えた放熱フィン123上に設置されている。また、放熱フィン123上には樹脂モールドされたフレームパッケージ122が半導体レーザチップ10の周囲において半導体レーザチップ10からの出射光が外部に取り出される箇所以外の箇所を取り囲むようにして形成されている。
また、第2の誘電体膜31の厚さは20nm以上であることが好ましく、50nm以上であることがより好ましい。第2の誘電体膜31の厚さが20nm以上である場合、特に50nm以上である場合には、半導体レーザデバイスの特性悪化の抑制効果が大きくなる傾向にある。
本実施の形態の発光デバイスは、実施の形態1と同様の構成の半導体レーザチップ10がキャンタイプの形態で実装されていることに特徴がある。図5に、実施の形態2の発光デバイスとしての半導体レーザデバイスの模式的な側面透視図を示す。
本実施の形態の発光デバイスは、実施の形態1と同様の構成の半導体レーザチップ10が実施の形態2と同様にキャンタイプの形態で実装されているが、実施の形態2とは異なり、光学ガラス窓が備えられておらず、光学ガラス窓の設置箇所が開口部となっており、半導体レーザチップ10が気密封止されていないことに特徴がある。図6に、実施の形態3の発光デバイスとしての半導体レーザデバイスの模式的な側面透視図を示す。
本実施の形態の発光デバイスは、実施の形態1と同様の構成の半導体レーザチップ10がHHL(High Heat Load)パッケージと呼ばれるタイプの形態で実装された構成となっている。HHLパッケージは、照明用途等に応用されるワットクラスの高出力の半導体レーザデバイスに用いられるものである。
Claims (7)
- 光出射部に保護膜が形成された窒化物III−V族化合物半導体を含む発光型半導体レーザチップが実装された発光デバイスであって、前記発光型半導体レーザチップは気密封止されておらず、
前記保護膜は、酸窒化アルミニウムからなる第1の誘電体膜と、窒化シリコンまたは酸窒化シリコンからなる第2の誘電体膜と、酸化物またはフッ化物からなる第3の誘電体膜と、を含み、前記第1の誘電体膜は前記第2の誘電体膜よりも前記光出射部側に位置し、前記第2の誘電体膜は前記第3の誘電体膜よりも前記光出射部側に位置しており、
前記発光型半導体レーザチップは、前記第1の誘電体膜が前記発光型半導体レーザチップの共振器端面と接することを特徴とする、発光デバイス。 - 前記発光型半導体レーザチップがフレームパッケージの形態で実装されていることを特徴とする、請求項1に記載の発光デバイス。
- 光出射部に保護膜が形成された窒化物III−V族化合物半導体を含む発光型半導体レーザチップが実装された発光デバイスであって、前記発光型半導体レーザチップは有機物を含む接着剤とともに気密封止されており、
前記保護膜は、酸窒化アルミニウムからなる第1の誘電体膜と、窒化シリコンまたは酸窒化シリコンからなる第2の誘電体膜と、酸化物またはフッ化物からなる第3の誘電体膜と、を含み、前記第1の誘電体膜は前記第2の誘電体膜よりも前記光出射部側に位置し、前記第2の誘電体膜は前記第3の誘電体膜よりも前記光出射部側に位置しており、
前記発光型半導体レーザチップは、前記第1の誘電体膜が前記発光型半導体レーザチップの共振器端面と接することを特徴とする、発光デバイス。 - 前記第3の誘電体膜が酸化物からなり、前記第3の誘電体膜はアルミニウム、シリコン、ハフニウム、タンタル、ジルコニウム、ニオブ、チタンおよびイットリウムからなる群から選択された少なくとも1種の酸化物からなることを特徴とする、請求項1から3のいずれかに記載の発光デバイス。
- 前記第3の誘電体膜がフッ化物からなり、前記第3の誘電体膜がマグネシウムおよびカルシウムからなる群から選択された少なくとも1種のフッ化物からなることを特徴とする、請求項1から3のいずれかに記載の発光デバイス。
- 光出射部に保護膜が形成された窒化物III−V族化合物半導体を含む発光型半導体レーザチップを実装した発光デバイスを製造する方法であって、
前記保護膜に含まれる酸窒化アルミニウムからなる第1の誘電体膜を、前記発光型半導体レーザチップの共振器端面と接して形成する工程と、
前記保護膜に含まれる窒化シリコンまたは酸窒化シリコンからなる第2の誘電体膜を形成する工程と、
前記保護膜に含まれる酸化物またはフッ化物からなる第3の誘電体膜を形成する工程と、
前記発光型半導体レーザチップを気密封止することなく実装する工程と、を含む、発光デバイスの製造方法。 - 光出射部に保護膜が形成された窒化物III−V族化合物半導体を含む発光型半導体レーザチップを実装した発光デバイスを製造する方法であって、
前記保護膜に含まれる酸窒化アルミニウムからなる第1の誘電体膜を、前記発光型半導体レーザチップの共振器端面と接して形成する工程と、
前記保護膜に含まれる窒化シリコンまたは酸窒化シリコンからなる第2の誘電体膜を形成する工程と、
前記保護膜に含まれる酸化物またはフッ化物からなる第3の誘電体膜を形成する工程と、
前記発光型半導体レーザチップを有機物を含む接着剤とともに気密封止して実装する工程と、を含む、発光デバイスの製造方法。
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