JP4301201B2 - 圧電発振器 - Google Patents
圧電発振器 Download PDFInfo
- Publication number
- JP4301201B2 JP4301201B2 JP2005129910A JP2005129910A JP4301201B2 JP 4301201 B2 JP4301201 B2 JP 4301201B2 JP 2005129910 A JP2005129910 A JP 2005129910A JP 2005129910 A JP2005129910 A JP 2005129910A JP 4301201 B2 JP4301201 B2 JP 4301201B2
- Authority
- JP
- Japan
- Prior art keywords
- width
- piezoelectric
- arm
- vibrating
- reduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 claims description 15
- 238000005530 etching Methods 0.000 description 25
- 239000000758 substrate Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 7
- 235000014676 Phragmites communis Nutrition 0.000 description 6
- 238000005452 bending Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 230000005284 excitation Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000001039 wet etching Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 101000760620 Homo sapiens Cell adhesion molecule 1 Proteins 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 101000911772 Homo sapiens Hsc70-interacting protein Proteins 0.000 description 1
- 101001139126 Homo sapiens Krueppel-like factor 6 Proteins 0.000 description 1
- 101000710013 Homo sapiens Reversion-inducing cysteine-rich protein with Kazal motifs Proteins 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- BYDQGSVXQDOSJJ-UHFFFAOYSA-N [Ge].[Au] Chemical compound [Ge].[Au] BYDQGSVXQDOSJJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 108090000237 interleukin-24 Proteins 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005129910A JP4301201B2 (ja) | 2005-04-27 | 2005-04-27 | 圧電発振器 |
| DE602005020725T DE602005020725D1 (de) | 2004-09-24 | 2005-09-23 | Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement |
| KR1020050088722A KR100712758B1 (ko) | 2004-09-24 | 2005-09-23 | 압전 진동편 및 압전 디바이스 |
| EP05020811A EP1641118B1 (en) | 2004-09-24 | 2005-09-23 | Piezoelectric resonator element and piezoelectric device |
| US11/234,741 US7368861B2 (en) | 2004-09-24 | 2005-09-23 | Piezoelectric resonator element and piezoelectric device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005129910A JP4301201B2 (ja) | 2005-04-27 | 2005-04-27 | 圧電発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006311090A JP2006311090A (ja) | 2006-11-09 |
| JP2006311090A5 JP2006311090A5 (enExample) | 2008-03-13 |
| JP4301201B2 true JP4301201B2 (ja) | 2009-07-22 |
Family
ID=37477476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005129910A Expired - Fee Related JP4301201B2 (ja) | 2004-09-24 | 2005-04-27 | 圧電発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4301201B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7764145B2 (en) * | 2006-11-30 | 2010-07-27 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric resonator, method of manufacturing the same and electronic part using the same |
| JP5353486B2 (ja) * | 2009-06-30 | 2013-11-27 | セイコーエプソン株式会社 | 振動片および振動子 |
| JP5789913B2 (ja) * | 2010-02-05 | 2015-10-07 | セイコーエプソン株式会社 | 音叉型圧電振動片及び圧電デバイス |
| JP5789914B2 (ja) * | 2010-02-05 | 2015-10-07 | セイコーエプソン株式会社 | 音叉型圧電振動片及び圧電デバイス |
| JP5760413B2 (ja) * | 2010-12-08 | 2015-08-12 | セイコーエプソン株式会社 | 電子機器 |
| JP5671821B2 (ja) * | 2010-03-16 | 2015-02-18 | セイコーエプソン株式会社 | 振動片及びデバイス |
| JP2012129904A (ja) * | 2010-12-17 | 2012-07-05 | Seiko Epson Corp | 電子機器 |
| US8304968B2 (en) | 2010-03-17 | 2012-11-06 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| KR101532115B1 (ko) * | 2011-12-01 | 2015-06-29 | 삼성전기주식회사 | 압전 진동자 및 그 제조 방법 |
| JP6115205B2 (ja) * | 2013-03-13 | 2017-04-19 | セイコーエプソン株式会社 | 屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体 |
| JP2015149591A (ja) * | 2014-02-06 | 2015-08-20 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器、センサー、および移動体 |
| JP5696751B2 (ja) * | 2013-08-29 | 2015-04-08 | セイコーエプソン株式会社 | 振動片および振動子 |
| JP6375611B2 (ja) | 2013-11-16 | 2018-08-22 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
-
2005
- 2005-04-27 JP JP2005129910A patent/JP4301201B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006311090A (ja) | 2006-11-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4415389B2 (ja) | 圧電デバイス | |
| JP4301200B2 (ja) | 圧電振動片および圧電デバイス | |
| JP4442521B2 (ja) | 圧電振動片および圧電デバイス | |
| KR100712758B1 (ko) | 압전 진동편 및 압전 디바이스 | |
| JP5115092B2 (ja) | 圧電振動片、圧電デバイス、及び発振器 | |
| JP4609196B2 (ja) | 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置 | |
| JP2007258918A (ja) | 圧電デバイス | |
| JP2007258917A (ja) | 圧電デバイス | |
| JP2007096900A (ja) | 圧電振動片および圧電デバイス | |
| JP4301201B2 (ja) | 圧電発振器 | |
| JP4207873B2 (ja) | 圧電振動片および圧電デバイス | |
| JP2008048274A (ja) | 圧電振動片および圧電デバイス | |
| JP4548148B2 (ja) | 圧電振動片および圧電デバイス | |
| JP5500220B2 (ja) | 振動片、振動子、発振器、及びセンサー | |
| JP4784168B2 (ja) | 圧電振動片および圧電デバイス | |
| JP2008022413A (ja) | 圧電振動片および圧電デバイス | |
| JP2010246126A (ja) | 圧電振動片および圧電デバイス | |
| JP5045822B2 (ja) | 圧電振動片および圧電デバイス | |
| JP2008048275A (ja) | 圧電振動片および圧電デバイス | |
| JP4222288B2 (ja) | 圧電振動片および圧電デバイス |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20070507 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20070509 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070514 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080130 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080417 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080430 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080627 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081007 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081205 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090331 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120501 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090413 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130501 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140501 Year of fee payment: 5 |
|
| LAPS | Cancellation because of no payment of annual fees |