JP2006311090A5 - - Google Patents

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Publication number
JP2006311090A5
JP2006311090A5 JP2005129910A JP2005129910A JP2006311090A5 JP 2006311090 A5 JP2006311090 A5 JP 2006311090A5 JP 2005129910 A JP2005129910 A JP 2005129910A JP 2005129910 A JP2005129910 A JP 2005129910A JP 2006311090 A5 JP2006311090 A5 JP 2006311090A5
Authority
JP
Japan
Prior art keywords
width
piezoelectric
base
vibrating
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005129910A
Other languages
English (en)
Japanese (ja)
Other versions
JP4301201B2 (ja
JP2006311090A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2005129910A external-priority patent/JP4301201B2/ja
Priority to JP2005129910A priority Critical patent/JP4301201B2/ja
Priority to DE602005020725T priority patent/DE602005020725D1/de
Priority to EP05020811A priority patent/EP1641118B1/en
Priority to KR1020050088722A priority patent/KR100712758B1/ko
Priority to US11/234,741 priority patent/US7368861B2/en
Publication of JP2006311090A publication Critical patent/JP2006311090A/ja
Publication of JP2006311090A5 publication Critical patent/JP2006311090A5/ja
Publication of JP4301201B2 publication Critical patent/JP4301201B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005129910A 2004-09-24 2005-04-27 圧電発振器 Expired - Fee Related JP4301201B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005129910A JP4301201B2 (ja) 2005-04-27 2005-04-27 圧電発振器
US11/234,741 US7368861B2 (en) 2004-09-24 2005-09-23 Piezoelectric resonator element and piezoelectric device
EP05020811A EP1641118B1 (en) 2004-09-24 2005-09-23 Piezoelectric resonator element and piezoelectric device
KR1020050088722A KR100712758B1 (ko) 2004-09-24 2005-09-23 압전 진동편 및 압전 디바이스
DE602005020725T DE602005020725D1 (de) 2004-09-24 2005-09-23 Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005129910A JP4301201B2 (ja) 2005-04-27 2005-04-27 圧電発振器

Publications (3)

Publication Number Publication Date
JP2006311090A JP2006311090A (ja) 2006-11-09
JP2006311090A5 true JP2006311090A5 (enExample) 2008-03-13
JP4301201B2 JP4301201B2 (ja) 2009-07-22

Family

ID=37477476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005129910A Expired - Fee Related JP4301201B2 (ja) 2004-09-24 2005-04-27 圧電発振器

Country Status (1)

Country Link
JP (1) JP4301201B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7764145B2 (en) * 2006-11-30 2010-07-27 Nihon Dempa Kogyo Co., Ltd. Piezoelectric resonator, method of manufacturing the same and electronic part using the same
JP5353486B2 (ja) * 2009-06-30 2013-11-27 セイコーエプソン株式会社 振動片および振動子
JP5789913B2 (ja) * 2010-02-05 2015-10-07 セイコーエプソン株式会社 音叉型圧電振動片及び圧電デバイス
JP5789914B2 (ja) * 2010-02-05 2015-10-07 セイコーエプソン株式会社 音叉型圧電振動片及び圧電デバイス
JP5671821B2 (ja) * 2010-03-16 2015-02-18 セイコーエプソン株式会社 振動片及びデバイス
JP5760413B2 (ja) * 2010-12-08 2015-08-12 セイコーエプソン株式会社 電子機器
JP2012129904A (ja) * 2010-12-17 2012-07-05 Seiko Epson Corp 電子機器
US8304968B2 (en) 2010-03-17 2012-11-06 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
KR101532115B1 (ko) * 2011-12-01 2015-06-29 삼성전기주식회사 압전 진동자 및 그 제조 방법
JP6115205B2 (ja) * 2013-03-13 2017-04-19 セイコーエプソン株式会社 屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体
JP2015149591A (ja) * 2014-02-06 2015-08-20 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器、センサー、および移動体
JP5696751B2 (ja) * 2013-08-29 2015-04-08 セイコーエプソン株式会社 振動片および振動子
JP6375611B2 (ja) * 2013-11-16 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体

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